CN216891205U

CN216891205U - Self-adaptive CVD diamond growth carrying table

Info

Publication number: CN216891205U
Application number: CN202123208569.1U
Authority: CN
Inventors: 刘宏明; 林琳
Original assignee: Huzhou Zhongxin Semiconductor Technology Co ltd
Current assignee: Huzhou Zhongxin Semiconductor Technology Co ltd
Priority date: 2021-12-20
Filing date: 2021-12-20
Publication date: 2022-07-05
Anticipated expiration: 2031-12-20

Abstract

The utility model discloses a self-adaptive CVD diamond growth carrying platform which comprises a reaction cavity, wherein an air inlet pipeline is arranged at the upper end of the reaction cavity, a feed inlet is formed in the right side of the lower end of the reaction cavity, a discharge tray is arranged on the inner side of the reaction cavity, the lower end of the discharge tray is fixedly connected with a support rod, and the lower end of the support rod is fixedly connected with a lifting device.

Description

Self-adaptive CVD diamond growth carrying table

Technical Field

The utility model relates to the technical field of CVD diamond production, in particular to a self-adaptive CVD diamond growth carrying table.

Background

CVD (Chemical Vapor Deposition) diamond. The mixture of carbon-containing gas (such as methane) and hydrogen is excited and decomposed at high temperature and under the pressure lower than the standard atmospheric pressure to form plasma carbon atoms, and the plasma carbon atoms are deposited and interactively grow into polycrystalline diamond (or deposit and grow diamond single crystal or quasi-single crystal under the condition of controlling deposition and growth) on a substrate.

SUMMERY OF THE UTILITY MODEL

The utility model aims to provide a self-adaptive CVD diamond growth carrying platform to solve the problems in the background technology.

In order to achieve the purpose, the utility model is realized by the following technical scheme:

the utility model provides a self-adaptation CVD diamond growth microscope carrier, includes the reaction cavity, and the reaction cavity upper end is equipped with the admission line, and reaction cavity lower extreme right side is equipped with the feed inlet, and the inboard is equipped with the blowing tray, blowing tray lower extreme fixed connection bracing piece, bracing piece lower extreme fixed connection elevating gear.

Preferably, the lowest end of the lifting device is provided with a base, the left side of the upper end of the base is fixedly connected with a stepping motor, the right side of the upper end of the base is provided with a circular hole, a circle of fixed screw pieces are arranged outside the circular hole, a fixed rod is fixedly connected with the center position in the circular hole, the upper end of the fixed rod is provided with a chassis, the chassis is circular, an electric lifting rod is arranged on a diagonal line of the left side and the right side, a protective shell is arranged at the center position, a lifting disc is arranged at the upper end of the protective shell, and a supporting rod is arranged at the center position of the lifting disc.

Preferably, the height of the fixing rod is the same as the height of the supporting rod from the lifting disc.

Preferably, the protective shell is made of PVC, and the surface of the protective shell is provided with uniform wrinkles to stretch and compress.

Preferably, a circle of convex positioning ring is arranged on the outer side of the upper end of the discharging tray, the lower end of the reaction cavity is annular, the middle of the reaction cavity is hollowed, the rest parts of the reaction cavity are solid, and the diameter of the hollowed middle part is the same as that of the discharging tray.

Preferably, the whole reaction cavity is cylindrical, all devices connected with the reaction cavity are provided with sealing glue, the air inlet pipelines are arranged on the left side and the right side of the upper end of the reaction cavity in symmetry, and the reaction cavity is provided with two symmetrical observation windows close to the upper outer side.

Compared with the prior art, the utility model has the beneficial effects that:

1. the leakproofness of reaction chamber in this self-adaptation CVD diamond growth microscope carrier is done fabulous, prevents to lead to the inside possibility that has the gas leakage of reaction chamber because of the self-adaptation of blowing tray, and the admission line utilizes bilateral symmetry to carry out the pipeline and admits air for gas distribution is more even, and the reaction is rapider.

2. The reaction cavity body is provided with the observation window and the feed inlet in the self-adaptive CVD diamond growth carrying platform, the observation window enables a worker to visually observe a specific process of crystal precipitation, manual intervention altitude change can be performed on the discharging tray, and the feed inlet enables the worker to conveniently place crystal seeds and take out the crystal seeds, so that the operation is fast and safe.

3. The discharging tray in the self-adaptive CVD diamond growth microscope stage can be moved up and down, so that the self-adaptive height of the discharging tray can be realized, and the discharging tray can be subjected to micro height adjustment during manual observation and temperature measurement.

4. This self-adaptation CVD diamond growth microscope carrier utilizes the dead lever among the elevating gear to come the biggest distance that accurate fixed elevating gear can descend, and the mode is too big to the wearing and tearing of blowing tray to reaction chamber inside apart from descending, thereby prevents that the volume in the reaction chamber from changing and arousing inside a series of changes.

5. This self-adaptation CVD diamond growth microscope carrier is equipped with the round position circle in the blowing tray outside, prevents to descend the in-process blowing tray to break away from a reaction chamber to the leakproofness of structure in the destruction reaction chamber prevents the production of impurity.

Drawings

FIG. 1 is a schematic view of the overall structure of the present invention;

FIG. 2 is a schematic view of the lifting device of the present invention;

FIG. 3 is a schematic view of the viewing window of FIG. 1 according to the present invention;

reaction cavity 1, air inlet pipe 2, feed inlet 3, blowing tray 4, bracing piece 5, elevating gear 6, base 7, step motor 8, circular hole 9, fixed screw piece 10, dead lever 11, chassis 12, electric lift pole 13, protecting sheathing 14, position circle 16, observation window 17

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

Example (b): referring to the schematic illustrations of figures 1-3,

a self-adaptive CVD diamond growth carrying platform comprises a reaction cavity 1, wherein an air inlet pipeline 2 is arranged at the upper end of the reaction cavity 1, a feed inlet 3 is arranged on the right side of the lower end of the reaction cavity 1, a discharge tray 4 is arranged on the inner side of the reaction cavity, the lower end of the discharge tray 4 is fixedly connected with a support rod 5, and the lower end of the support rod 5 is fixedly connected with a lifting device 6;

the lowest end of the lifting device 6 is provided with a base 7, the left side of the upper end of the base 7 is fixedly connected with a stepping motor 8, the right side of the upper end is provided with a round hole 9, a circle of fixing screw sheet 10 is arranged outside the round hole 9, a fixed rod 11 is fixedly connected with the central position in the circular hole 9, the upper end of the fixed rod 11 is provided with a chassis 12, the chassis 12 is circular, the left diagonal line and the right diagonal line are provided with electric lifting rods 13, the central position is provided with a protective shell 14, the upper end of the protective shell 14 is provided with a lifting disc, the central position of the lifting disc is provided with a support rod 5, the protective shell 14 on the lifting device 6 can protect the upper end of the fixed rod 11 from being interfered by impurity factors such as dust and the like, and the height of the fixed rod 11 is prevented from changing, therefore, the height of the discharging tray is influenced, the electric lifting rods 13 on the two sides drive the lifting tray to lift, so that the discharging tray 4 is lifted, the structure is compact, and the self-adaption of the discharging tray 4 is realized;

the height between the fixed rod 11 and the lifting disc is the same as that of the support rod 5, so that the descending position and the ascending position of the material placing tray 4 can be fixed, the sealing performance of the whole structure of the reaction cavity 1 cannot be damaged due to the ascending and descending actions, and the abrasion of the material placing tray 4 on the inner wall of the reaction cavity due to the overlarge descending distance in the reaction cavity 1 cannot be generated, so that the structural stability and the sealing performance of the whole device are influenced;

the protection shell 14 is made of PVC, uniform wrinkles are formed on the surface of the protection shell 14 and can be stretched and compressed, the PVC shell has good ductility and can meet the requirements for compression and stretching in the lifting process, the fixing rod 11 in the protection shell can be protected, and the influence of dust and large-particle impurities on the fixing rod in the installation process is prevented, so that the lifting of the discharge tray 4 is influenced;

a circle of convex positioning ring 16 is arranged on the outer side of the upper end of the discharging tray 4, the lower end of the reaction cavity 1 is annular, the middle of the reaction cavity is hollowed, the rest parts of the reaction cavity are solid, the diameter of the hollowed middle part is the same as that of the discharging tray 4, the discharging tray 4 is positioned in the reaction cavity 1, and the positioning ring 16 is arranged on the discharging tray 4 to prevent the discharging tray 4 from being separated from the reaction cavity 1, so that the sealing performance of the reaction cavity 1 is weakened, and the reaction efficiency and the diamond precipitation material are influenced;

whole reaction cavity 1 is cylindrical, and all are equipped with sealed glue on the device of being connected with reaction cavity, and admission line 2 sets up both sides about reaction cavity 1 upper end symmetry, and reaction cavity 1 leans on the outside to be equipped with two observation windows 17 of symmetry, and admission line 2 sets up in reaction cavity 1's upper end left and right sides for gas gets into can the mixing distribution comparatively even, sets up observation window 17 can audio-visual observation to the position size and the process that the crystal appeared.

The working principle is as follows: reaction gas enters the reaction cavity 1 from the gas inlet pipeline 2, crystal seeds entering from a feed inlet are placed on the material placing tray 4, crystals are continuously separated out in the reaction process, the separation efficiency of the crystal seeds is influenced by approaching to a plasma ball generated by an internal reaction, the height of the crystal seeds on the material placing tray 4 and the height of the internal plasma ball are in a constant value at this time by using the lifting device 6, the stability and the efficiency of the crystal separation are ensured, the lifting device 6 utilizes the stepping motor 8 to provide power to lift the electric lifting rod 13 so as to drive the lifting tray to lift, the material placing tray 4 is fixedly connected with the support rod 5, the support rod 5 is fixedly connected with the lifting tray, the lifting of the material placing tray 4 is realized, the base 7 can be stable and stable by using the fixed screw sheet 10, the fixed rod 11 is arranged in the circular hole 9, dead lever 11 is apart from the highly uniform of lifting disk and bracing piece 5, be equipped with protecting sheathing 14 at dead lever 11 overcoat, prevent that the location protection efficiency of dead lever 11 from receiving external factors's influence, position circle 16 not only protects blowing tray 4 can not break away from a reaction cavity 1, ensure that reaction cavity 1 is in the vacuous state, thereby dead lever 11 can protect blowing tray 4 decline in-process and reaction cavity 1's collision production wearing and tearing, whole device simple structure, the leakproofness is strong.

It will be evident to those skilled in the art that the utility model is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential attributes thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the utility model being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.

Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.

Claims

1. The self-adaptive CVD diamond growth carrying platform is characterized by comprising a reaction cavity (1), wherein an air inlet pipeline (2) is arranged at the upper end of the reaction cavity (1), a feeding hole (3) is formed in the right side of the lower end of the reaction cavity (1), a discharging tray (4) is arranged on the inner side of the reaction cavity, the lower end of the discharging tray (4) is fixedly connected with a supporting rod (5), and the lower end of the supporting rod (5) is fixedly connected with a lifting device (6).

2. The self-adaptive CVD diamond growth carrying platform as claimed in claim 1, wherein the lowest end of the lifting device (6) is provided with a base (7), the left side of the upper end of the base (7) is fixedly connected with a stepping motor (8), the right side of the upper end is provided with a circular hole (9), a circle of fixing screw sheets (10) are arranged outside the circular hole (9), a fixing rod (11) is fixedly connected to the central position in the circular hole (9), the upper end of the fixing rod (11) is provided with a base plate (12), the base plate (12) is circular, electric lifting rods (13) are arranged on the left diagonal line and the right diagonal line, a protective shell (14) is arranged at the central position, a lifting disc is arranged at the upper end of the protective shell (14), and a supporting rod (5) is arranged at the central position of the lifting disc.

3. An adaptive CVD diamond growth stage according to claim 2, wherein the height of the fixed rods (11) is the same as the height of the support rods (5) from the height of the lifting plate.

4. A self-adaptive CVD diamond growth stage according to claim 2, wherein the protective enclosure (14) is made of PVC and the surface of the protective enclosure (14) is uniformly corrugated to allow stretching and compression.

5. The self-adaptive CVD diamond growth carrier platform as claimed in claim 1, wherein a ring of convex positioning ring (16) is arranged on the outer side of the upper end of the discharging tray (4), the lower end of the reaction cavity (1) is annular, the middle of the reaction cavity is hollowed, the rest of the reaction cavity is solid, and the diameter of the hollowed middle part is the same as that of the discharging tray (4).

6. The self-adaptive CVD diamond growth carrier platform as claimed in claim 1, wherein the reaction chamber (1) is cylindrical, all devices connected with the reaction chamber are provided with sealant, the gas inlet pipes (2) are arranged at the left and right sides of the upper end of the reaction chamber (1) symmetrically, and two symmetrical observation windows (17) are arranged at the upper outer side of the reaction chamber (1).