CN216891177U

CN216891177U - Rotary shielding cover and film coating equipment

Info

Publication number: CN216891177U
Application number: CN202122806077.6U
Authority: CN
Inventors: 晏海燕; 虞文韬; 薛涛; 谢振岗
Original assignee: Vitalink Industry Shenzhen Co ltd
Current assignee: Vitalink Industry Shenzhen Co ltd
Priority date: 2021-11-16
Filing date: 2021-11-16
Publication date: 2022-07-05
Anticipated expiration: 2031-11-16

Abstract

The utility model relates to a rotary shielding cover and coating equipment. The rotary shielding cover is mounted on the coating equipment and shields a target material. The rotary shielding cover comprises a rotating seat, a fixed plate, a shielding plate and a driving mechanism, wherein the fixed plate is an arc-shaped plate, the fixed plate covers the target material, and a gap is formed between the fixed plate and the target material; one end of the shielding plate is fixed to the rotating seat, the shielding plate is an arc-shaped plate, the shielding plate covers the target material, a gap is formed between the shielding plate and the target material, and the shielding plate and the fixed plate are coaxial; the driving mechanism is in transmission connection with the rotating seat and can drive the shielding plate to rotate in the circumferential direction of the shielding plate; and when the shielding plate rotates to the side away from the fixed plate, the shielding plate and the fixed plate wrap the target material, and the target material can be cleaned. The rotary shielding cover can conduct target cleaning treatment on the target material in the working state of the coating equipment, and the coating efficiency of products is remarkably improved.

Description

Rotary shielding cover and film coating equipment

Technical Field

The utility model relates to the technical field of sputtering coating, in particular to a rotary shielding cover and coating equipment.

Background

With the increasing demand for various new functional films, the magnetron sputtering coating technology has the advantages of high speed, low temperature, low damage, easy obtaining of high deposition rate and the like, and is widely applied to manufacturing various functional films, such as films with the functions of absorption, projection, reflection, refraction, polarization and the like. In order to meet different requirements of product performance, a product is often coated with films made of different materials, and different targets have the phenomena of glow winding plating and the like in the process of sputtering the surface of the product, so that the risk of cross contamination exists, and the coating quality of the product is seriously influenced. Therefore, before the sputtering coating is performed on the surface of the product, the surface of the target needs to be cleaned.

In the prior art, the target is usually washed in an empty furnace, that is, the surface of the product is coated continuously after the target is washed, but the target washing treatment needs to be carried out in a shutdown state of coating equipment, so that a large amount of time is consumed, and the coating efficiency of the product is seriously influenced.

SUMMERY OF THE UTILITY MODEL

Therefore, it is necessary to provide a rotary shielding cover and a coating apparatus for solving the problem in the prior art that the target washing treatment needs to be performed in a shutdown state of the coating apparatus, which seriously affects the coating efficiency of the product.

The utility model provides a rotatory shield cover, installs on filming equipment, shelters from target, including rotating seat, fixed plate, shielding plate and actuating mechanism, wherein:

the fixed plate is an arc-shaped plate, the fixed plate is covered on the target material, and a gap is formed between the fixed plate and the target material;

one end of the shielding plate is fixed on the rotating seat, the shielding plate is an arc-shaped plate, the shielding plate is covered on the target material, a gap is reserved between the shielding plate and the target material, and the shielding plate is coaxial with the fixed plate;

the driving mechanism is in transmission connection with the rotating seat and can drive the shielding plate to rotate along the circumferential direction of the shielding plate.

The rotary shielding cover is arranged on the film coating equipment, the driving mechanism is in transmission connection with the rotating seat, and the driving mechanism drives the rotating seat to rotate, so that the shielding plate can be driven to rotate along the circumferential direction of the shielding plate; when the shielding plate rotates to one side far away from the fixed plate, the shielding plate and the fixed plate wrap the target material, and the target material can be cleaned; when the shielding plate rotates to one side close to the fixed plate, the side face of the target material far away from the fixed plate is exposed, and the target material can perform sputtering coating on the surface of a product. The rotary shielding cover can carry out target washing treatment on the target under the working state of the coating equipment, and the coating efficiency of the product is obviously improved.

In one embodiment, the driving mechanism comprises a driving motor, a worm wheel and a worm meshed with the worm wheel, the worm wheel is in transmission connection with the rotating seat, and the worm is in transmission connection with an output shaft of the driving motor.

In one embodiment, the driving mechanism further comprises a magnetic fluid, and the magnetic fluid is sleeved on the output shaft of the driving motor and is in transmission connection with the worm.

In one embodiment, the target material positioning device further comprises a limiting mechanism, the limiting mechanism is arranged between the fixing plate and the shielding plate, gaps are reserved between the limiting mechanism and the fixing plate and between the limiting mechanism and the shielding plate, and the limiting mechanism is fixed at one end, far away from the rotating seat, of the target material.

In one embodiment, the limiting mechanism includes a limiting rod and a limiting ring, the limiting rod has a thread, the target material is provided with a screw hole capable of screwing the limiting rod, the limiting ring is fixed at one end of the target material far away from the rotating seat through the limiting rod, and the limiting ring is located between the fixing plate and the shielding plate.

In one embodiment, the spacing ring is made of one of polytetrafluoroethylene and polyether-ether-ketone.

In one embodiment, a plurality of reinforcing ribs are arranged on the shielding plate, and the plurality of reinforcing ribs are distributed on the arc-shaped surface of the shielding plate at intervals.

In one embodiment, the coating device further comprises a support, wherein the support is arranged on the driving mechanism and is fixed on the coating equipment.

In one embodiment, a bearing is arranged at the connecting position of the driving mechanism and the bracket.

A coating equipment comprises a main body and a plurality of rotary shielding cases according to any one of the technical schemes, wherein the rotary shielding cases are arranged on the main body.

According to the coating equipment, the rotary shielding cover is arranged on the main body, and when the shielding plate rotates to one side far away from the fixed plate, the shielding plate and the fixed plate wrap the target material, so that the target material can be cleaned; when the shielding plate rotates to one side close to the fixed plate, the side face of the target material far away from the fixed plate is exposed, and the target material can perform sputtering coating on the surface of a product. The coating equipment can carry out target washing treatment on the target material under the working state, and the coating efficiency of the product is obviously improved.

Drawings

FIG. 1 is a schematic structural view of a rotary shield according to the present invention;

FIG. 2 is a schematic structural diagram of a driving mechanism provided in the present invention;

FIG. 3 is a schematic view of the shutter moving to a side away from the fixing plate according to the present invention;

fig. 4 is a schematic structural view illustrating the shielding plate of the present invention moving to a side close to the fixing plate.

Reference numerals:

100. rotating the shield case;

110. a target material; 120. a rotating seat; 130. a fixing plate; 140. a shielding plate; 150. a drive mechanism; 151. a drive motor; 152. a worm gear; 153. a worm; 154. a magnetic fluid; 160. a limiting mechanism; 161. a limiting rod; 162. a limiting ring; 170. and (4) a bracket.

Detailed Description

In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in detail below. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. This invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein.

In the description of the present invention, it is to be understood that the terms "central," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," "circumferential," and the like are used in the orientations and positional relationships indicated in the drawings for convenience in describing the utility model and to simplify the description, and are not intended to indicate or imply that the referenced device or element must have a particular orientation, be constructed and operated in a particular orientation, and are not to be considered limiting of the utility model.

Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In the description of the present invention, "a plurality" means at least two, e.g., two, three, etc., unless specifically limited otherwise.

In the present invention, unless otherwise expressly stated or limited, the terms "mounted," "connected," "secured," and the like are to be construed broadly and can, for example, be fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; they may be directly connected or indirectly connected through intervening media, or they may be connected internally or in any other suitable relationship, unless expressly stated otherwise. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.

In the present invention, unless otherwise expressly stated or limited, the first feature "on" or "under" the second feature may be directly contacting the first and second features or indirectly contacting the first and second features through an intermediate. Also, a first feature "on," "over," and "above" a second feature may be directly or diagonally above the second feature, or may simply indicate that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature may be directly under or obliquely under the first feature, or may simply mean that the first feature is at a lesser elevation than the second feature.

It will be understood that when an element is referred to as being "secured to" or "disposed on" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and the like as used herein are for illustrative purposes only and do not denote a unique embodiment.

The technical scheme provided by the embodiment of the utility model is described below by combining the accompanying drawings.

As shown in fig. 1 and 2, the present invention provides a rotary shield 100, the rotary shield 100 is mounted on a coating apparatus (not shown), the rotary shield 100 is used for shielding a target 110, and the rotary shield 100 includes a rotating base 120, a fixing plate 130, a shielding plate 140 and a driving mechanism 150.

The fixing plate 130 is an arc-shaped plate, and specifically, the fixing plate 130 may be integrally formed by casting, extruding, molding, and the like, so as to simplify the forming process of the fixing plate 130 and reduce the manufacturing cost of the fixing plate 130. The fixing plate 130 is covered on the side surface of the target 110, and a gap is formed between the fixing plate 130 and the target 110. The gap between the fixing plate 130 and the target 110 may be set according to specific process requirements, and the present invention is not limited thereto.

One end of the shielding plate 140 is fixed on the rotating base 120 by screwing, welding, etc., the shielding plate 140 is an arc-shaped plate, and specifically, the shielding plate 140 can be integrally formed by casting, extruding, molding, etc., so as to simplify the forming process of the shielding plate 140 and reduce the manufacturing cost of the shielding plate 140. The shielding plate 140 covers the side surface of the target 110, and a gap is formed between the shielding plate 140 and the target 110, and the shielding plate 140 is coaxial with the fixing plate 130. The gap between the shielding plate 140 and the target 110 can be set according to specific process requirements, and the diameters of the shielding plate 140 and the fixing plate 130 are not the same, that is, there is a gap between the shielding plate 140 and the fixing plate 130.

The driving mechanism 150 is in transmission connection with the rotating seat 120, and the driving mechanism 150 can drive the rotating seat 120 to rotate, so as to drive the shielding plate 140 to rotate along the circumferential direction. As shown in fig. 3, when the shielding plate 140 rotates to a side away from the fixing plate 130, the shielding plate 140 and the fixing plate 130 wrap the target 110, so that the target 110 can be cleaned; as shown in fig. 4, when the shielding plate 140 rotates to a side close to the fixing plate 130, the side of the target 110 away from the fixing plate 130 is exposed, and the target 110 can sputter coat the surface of the product.

The rotary shielding case 100 can perform target washing treatment on the target 110 in the working state of the coating equipment, and the coating efficiency of the product is remarkably improved.

In order to drive the shielding plate 140 to rotate in the circumferential direction, in a preferred embodiment, as shown in fig. 1 and 2, the driving mechanism 150 includes a driving motor 151, a worm wheel 152 and a worm 153, and the worm wheel 152 and the worm 153 are engaged with each other. The worm wheel 152 is in transmission connection with the rotating base 120, and specifically, the worm wheel 152 is sleeved on the rotating base 120. The worm 153 is in transmission connection with an output shaft of the driving motor 151. When the driving motor 151 outputs power to the output shaft, the output shaft drives the worm 153 to move, and because the worm 153 is meshed with the worm wheel 152, the worm wheel 152 can also rotate, the worm 153 drives the rotating seat 120 to rotate, and further drives the shielding plate 140 to rotate in the circumferential direction, so that the shielding plate 140 shields the target 110, and the target 110 can be cleaned.

The rotation of the shielding plate 140 in the circumferential direction is not limited to the driving of a motor, and may be other components capable of outputting power, such as an air cylinder.

In order to ensure the hermetic sealing of the target 110 during the sputtering coating process of the product, specifically, as shown in fig. 1 and fig. 2, the driving mechanism 150 further includes a magnetic fluid 154, the magnetic fluid 154 is sleeved on the output shaft of the driving motor 151, and the magnetic fluid 154 is in transmission connection with the worm 153. The magnetic fluid 154 is disposed on the cavity wall of the coating apparatus to ensure the hermetic sealing of the target 110 during the sputtering coating process of the product, and the magnetic fluid 154 can transmit the power output by the driving motor 151 to the worm 153, so as to drive the shielding plate 140 to rotate in the circumferential direction, so as to shield the target 110 by the shielding plate 140, and clean the target 110.

In order to ensure the coaxiality between the fixing plate 130 and the shielding plate 140, in a preferred embodiment, as shown in fig. 1, the rotary shielding case 100 further includes a limiting mechanism 160, the limiting mechanism 160 is disposed between the fixing plate 130 and the shielding plate 140, gaps exist between the limiting mechanism 160 and the fixing plate 130 and between the limiting mechanism 160 and the shielding plate 140, and the limiting mechanism 160 is fixed to one end of the target 110, which is far away from the transmission base, through a screwing manner, a riveting manner, a welding manner, and the like. The gaps between the limiting mechanism 160 and the fixing plate 130 and between the limiting mechanism and the shielding plate 140 may be specifically set according to the process requirements, and the utility model is not limited thereto.

Specifically, the limiting mechanism 160 includes a limiting rod 161 and a limiting ring 162, one end of the limiting rod 161 has a screw thread, the target 110 is provided with a screw hole capable of screwing the limiting rod 161, the limiting rod 161 can fix the limiting ring 162 on one end of the target 110 far away from the rotating base 120 through the mutual matching of the screw thread and the screw hole, and the limiting ring 162 is located between the fixing plate 130 and the shielding plate 140. Because when sputter coating is carried out to the product, need have certain temperature in the coating equipment cavity, the one end that shielding plate 140 is not fixed easily produces deformation under the high temperature condition, one end that shielding plate 140 is not fixed is laminated on spacing ring 162, the slope of shielding plate 140 can be avoided to spacing ring 162, guarantee the axiality between fixed plate 130 and the shielding plate 140, on the one hand, can improve shielding plate 140's life, on the other hand, can guarantee shielding plate 140 to the sheltering from of target 110, make things convenient for operating personnel to the washing target processing of target 110.

It should be noted that, by changing the amount of rotation of the limiting rod 161 into the target 110, the height of the limiting ring 162 in the axial direction of the target 110 is changed, so as to satisfy the rotation of the shielding plates 140 of different models. In the axial direction of the target 110, when the overlapping length of the shielding plate 140 and the limiting ring 162 is too long, the rotation of the shielding plate 140 is affected, even the shielding plate 140 is stuck, and the shielding plate 140 cannot rotate, that is, the shielding plate 140 cannot shield the shielding plate 140; when the overlapping length of the shielding plate 140 and the limiting ring 162 is too short, the shielding plate 140 is deformed, and the shielding plate 140 cannot be attached to the limiting ring 162, so that the coaxiality between the fixing plate 130 and the shielding plate 140 cannot be ensured.

In addition, the spacing ring 162 is made of one of Polytetrafluoroethylene (PTFE) and Polyetheretherketone (PEEK). When the shielding plate 140 rotates, friction is generated between the shielding plate 140 and the limiting ring 162, impurities such as friction scraps cannot be generated in the friction process of the limiting ring 162 and the shielding plate 140, the vacuum environment in the chamber of the coating equipment can be protected, the phenomena such as scratching and scratching of the shielding plate 140 cannot be generated by the limiting ring 162, and the service life of the shielding plate 140 is prolonged. Of course, the specific material of the spacing ring 162 is not limited to the above-mentioned teflon or polyetheretherketone, but may also be other materials that do not generate friction debris during the friction process with the spacing ring 162, and do not generate scratching, scraping, and the like phenomena on the shielding plate 140, and the specific material of the spacing ring 162 is not limited in the present invention.

In order to enhance the strength of the shielding plate 140, in a preferred embodiment, as shown in fig. 1, a plurality of reinforcing ribs (not shown) are disposed on the shielding plate 140, and the plurality of reinforcing ribs are spaced on the arc-shaped surface of the shielding plate 140. Specifically, the plurality of reinforcing ribs may be integrally formed with the shielding plate 140 by casting, extruding, molding, or the like, so as to simplify the forming process of the shielding plate 140 and save the manufacturing cost of the shielding plate 140. The shielding plate 140 is provided with a plurality of reinforcing ribs to improve the strength of the shielding plate 140, prevent the shielding plate 140 from deforming under high temperature conditions, and ensure the coaxiality between the fixing plate 130 and the shielding plate 140, so that the target 110 can be cleaned when the shielding plate 140 shields the target 110.

In order to mount the driving mechanism 150 on the film coating apparatus, in a preferred embodiment, as shown in fig. 1 and fig. 2, the rotary shielding cover 100 further includes a bracket 170, the bracket 170 is disposed on the driving mechanism 150, specifically, the bracket 170 is sleeved on two ends of the worm 153, and the bracket 170 is fixed on the film coating apparatus by screwing, riveting, welding, and the like, so as to fix the driving mechanism 150 on the film coating apparatus.

In addition, a bearing (not shown) is disposed at a connection position of the driving mechanism 150 and the bracket 170, and specifically, a bearing is disposed at a sleeving position of the worm 153 and the bracket 170 to ensure movement of the worm 153 in the bracket 170, and the bearing can prevent excessive wear between the worm 153 and the bracket 170 during movement of the worm 153, and prolong service lives of the worm 153 and the bracket 170.

In addition, as shown in fig. 1 and fig. 2, the present invention further provides a film plating apparatus, which includes a main body and a plurality of rotary shielding cases 100 according to any one of the above technical solutions, wherein the rotary shielding cases 100 are mounted on the main body by screwing, welding, riveting, etc.

In the coating apparatus, the rotary shielding cover 100 is mounted on the main body, and when the shielding plate 140 rotates to a side far away from the fixing plate 130, the shielding plate 140 and the fixing plate 130 wrap the target 110, so that the target 110 can be cleaned; when the shielding plate 140 rotates to a side close to the fixing plate 130, the side of the target 110 away from the fixing plate 130 is exposed, and the target 110 can sputter coat the surface of the product. The coating equipment can carry out target washing treatment on the target 110 in a working state, and the coating efficiency of the product is obviously improved.

The technical features of the embodiments described above may be arbitrarily combined, and for the sake of brevity, all possible combinations of the technical features in the embodiments described above are not described, but should be considered as being within the scope of the present specification as long as there is no contradiction between the combinations of the technical features.

The above-mentioned embodiments only express several embodiments of the present invention, and the description thereof is more specific and detailed, but not construed as limiting the scope of the utility model. It should be noted that, for a person skilled in the art, several variations and modifications can be made without departing from the inventive concept, which falls within the scope of the present invention. Therefore, the protection scope of the present patent shall be subject to the appended claims.

Claims

1. The utility model provides a rotatory shield cover installs on filming equipment, shelters from target, its characterized in that, including rotating seat, fixed plate, shielding plate and actuating mechanism, wherein:

2. The rotary shielding case according to claim 1, wherein the driving mechanism comprises a driving motor, a worm wheel and a worm engaged with the worm wheel, the worm wheel is in transmission connection with the rotating base, and the worm is in transmission connection with an output shaft of the driving motor.

3. The rotary shielding case according to claim 2, wherein the driving mechanism further comprises a magnetic fluid, and the magnetic fluid is sleeved on the output shaft of the driving motor and is in transmission connection with the worm.

4. The rotary shielding case according to claim 1, further comprising a limiting mechanism, wherein the limiting mechanism is disposed between the fixing plate and the shielding plate, and a gap exists between the limiting mechanism and the fixing plate and between the limiting mechanism and the shielding plate, and the limiting mechanism is fixed to an end of the target material away from the rotating base.

5. The rotary shielding case according to claim 4, wherein the limiting mechanism comprises a limiting rod and a limiting ring, the limiting rod has a thread, the target material is provided with a screw hole for screwing the limiting rod, the limiting ring is fixed on one end of the target material far away from the rotating seat through the limiting rod, and the limiting ring is located between the fixing plate and the shielding plate.

6. The rotary shielding cage of claim 5, wherein the retaining ring is made of one of polytetrafluoroethylene and polyetheretherketone.

7. The rotary shielding case according to claim 1, wherein the shielding plate is provided with a plurality of reinforcing ribs, and the plurality of reinforcing ribs are distributed on the arc-shaped surface of the shielding plate at intervals.

8. The rotary mask of claim 1 further comprising a bracket disposed on the drive mechanism and affixed to the coating device.

9. The rotating shielding cage of claim 8, wherein a bearing is disposed at a connection location of the drive mechanism to the bracket.

10. A plating apparatus comprising a main body and a plurality of rotary masks according to any one of claims 1 to 9, said rotary masks being mounted on said main body.