CN216882774U

CN216882774U - Clamping tool for noble metal sputtering target processing

Info

Publication number: CN216882774U
Application number: CN202123360492.XU
Authority: CN
Inventors: 孙洪梅; 陈方波
Original assignee: Shanghai Zhenka New Material Technology Co ltd
Current assignee: Shanghai Zhenka New Material Technology Co ltd
Priority date: 2021-12-27
Filing date: 2021-12-27
Publication date: 2022-07-05
Anticipated expiration: 2031-12-27

Abstract

The utility model discloses a clamping tool for processing a precious metal sputtering target, which comprises an installation table, wherein a first fixed seat is movably installed on the left side of the upper end of the installation table, a groove is fixedly formed in the rear side of the upper end of the first fixed seat, a lead screw is movably installed in the groove, a nut is installed at the outer end of the lead screw in a threaded mode, a first clamp is fixedly installed at the upper end of the nut, a second clamp is fixedly installed on the front side of the upper end of the first fixed seat, a first spring is fixedly installed at the rear end of the second clamp, and the first clamp and the second clamp are movably connected through the first spring. This processing of noble metal sputtering target is with pressing from both sides tight frock through installation electric putter and lead screw nut, both can press from both sides tightly fixedly to the target of different length, also can press from both sides tightly fixedly to the target of different width to through installation fine-tuning, can finely tune the interval between second fixing base and the first fixing base, in order to let between anchor clamps and the target inseparabler.

Description

Clamping tool for noble metal sputtering target processing

Technical Field

The utility model relates to the technical field of precious metal targets, in particular to a clamping tool for machining a precious metal sputtering target.

Background

A sputtering target for noble metals and alloys thereof for wiring and thin films of semiconductor devices, recording medium display devices, and the like, which are manufactured by refining, melt forging, rolling, or powder metallurgy.

A general precious metal sputtering target is usually placed directly on a worktable due to too large mass during processing, so that the target is deviated due to vibration, and a corner collapse is generated due to deviation during processing, thereby damaging the target.

SUMMERY OF THE UTILITY MODEL

The utility model aims to provide a clamping tool for processing a noble metal sputtering target material, which aims to solve the problems that the general noble metal sputtering target material is usually directly placed on an operation table because of too large mass during processing, so that the target material is deviated due to vibration, and a corner breakage is generated due to deviation during processing, so that the target material is damaged.

In order to achieve the purpose, the utility model provides the following technical scheme: a clamping tool for machining a precious metal sputtering target comprises an installation table, wherein a first fixed seat is movably installed on the left side of the upper end of the installation table, a groove is fixedly formed in the rear side of the upper end of the first fixed seat, a lead screw is movably installed in the groove, a screw is installed at the outer end of the lead screw in a threaded manner, a first clamp is fixedly installed at the upper end of the screw, a second clamp is fixedly installed on the front side of the upper end of the first fixed seat, a first spring is fixedly installed at the rear end of the second clamp, the first clamp and the second clamp are movably connected through the first spring, a second fixed seat is movably installed on the right side of the upper end of the installation table, slide rods are fixedly installed on the front side and the rear side of the right end of the first fixed seat, an installation plate is fixedly installed at the left end of each slide rod, an electric push rod is fixedly installed at the left end of the installation plate, and the right end of the electric push rod is fixedly connected with the first fixed seat, and the right end of the second fixed seat is fixedly provided with a fine adjustment mechanism.

Preferably, a support column is fixedly mounted at the right end of the fine adjustment mechanism, telescopic rods are fixedly mounted on the front side and the rear side of the left end of the support column, and the electric push rod can push the first fixing seat to move left and right along the slide rod by mounting the electric push rod, so that the distance between the two fixing seats is adjusted, and targets with different lengths are clamped and fixed.

Preferably, the right end of the second fixing seat is fixedly provided with a supporting plate, the upper end of the supporting plate is movably provided with a cam, the rotating handle is rotated by installing a lead screw and a nut, the lead screw is driven to rotate in the groove, and the nut is in threaded connection with the lead screw, so that the lead screw is driven to rotate to drive the nut to move back and forth along the lead screw, the first clamp is driven to move back and forth along the lead screw, and finally the distance between the first clamp and the second clamp is adjusted to clamp and fix the targets with different widths.

Preferably, the handle is fixedly mounted at the lower end of the cam, penetrates through the supporting plate and extends to the lower end of the supporting plate, and the second clamp is fixedly mounted, so that the position of the second clamp is unchanged relative to the first fixing seat and the second fixing seat, the first clamp moves back and forth, and the first clamp and the second clamp are connected through the first spring, so that the clamps are not easy to deviate, and the device is more stable.

Preferably, the front end fixed mounting of first fixing base has first spliced pole, the front end fixed mounting of second fixing base has the second spliced pole, through installation fine-tuning, can finely tune the interval between second fixing base and the first fixing base to let between anchor clamps and the target inseparabler.

Preferably, the front end fixed mounting of first spliced pole has the second spring, first spliced pole passes through second spring swing joint with the second spliced pole, through the installation cam, and twist grip can drive the cam and rotate in the upper end of backup pad for two overhangs of cam contact with second fixing base and support column respectively.

Preferably, the slide bar runs through the first fixing seat and extends to the left side of the first fixing seat, the right end of the slide bar extends to the inside of the second fixing seat, and the distance between the support column and the second fixing seat is smaller than the distance between the two protruding ends of the cam under a common condition, so that the cam can drive the telescopic rod to move leftwards and drive the second fixing seat to slightly move leftwards.

Preferably, the first fixing seat and the second fixing seat are of the same structure, the rear end of the screw rod is fixedly provided with a rotating handle, the slide rod extends into the second fixing seat, and the tail end of the slide rod is provided with a limiting device, so that the second fixing seat can move leftwards along the slide rod, the movement range is smaller, the second fixing seat cannot deviate from a track, and the device and the target are fixed more tightly through fine adjustment.

Compared with the prior art, the utility model has the beneficial effects that:

1. according to the clamping tool for processing the noble metal sputtering target, the electric push rod is arranged, so that the electric push rod can push the first fixing seat to move left and right along the sliding rod, the distance between the two fixing seats is adjusted, targets with different lengths are clamped and fixed, the fixing seats are not prone to deviating from the set positions, and the stability is high;

2. according to the clamping tool for processing the noble metal sputtering target, the distance between the first clamp and the second clamp can be finally adjusted by installing the lead screw and the nut, so that targets with different widths can be clamped and fixed;

3. this processing of noble metal sputtering target is with pressing from both sides tight frock through installation fine setting mechanism, can finely tune the interval between second fixing base and the first fixing base to let between anchor clamps and the target inseparabler.

Drawings

FIG. 1 is a schematic perspective view of the present invention;

FIG. 2 is a schematic perspective view of a first fixture according to the present invention;

FIG. 3 is a perspective view of the electric putter of the present invention;

FIG. 4 is a schematic view of a first fixing base according to the present invention;

FIG. 5 is a schematic perspective view of a fine adjustment structure according to the present invention;

fig. 6 is a schematic perspective view of a first spring according to the present invention.

In the figure: 1. an installation table; 2. a first fixed seat; 3. a groove; 4. a lead screw; 5. a nut; 6. a first clamp; 7. a second clamp; 8. a first spring; 9. a second fixed seat; 10. a slide bar; 11. mounting a plate; 12. an electric push rod; 13. a fine adjustment mechanism; 14. a support pillar; 15. a telescopic rod; 16. a support plate; 17. a cam; 18. a handle; 19. a first connecting column; 20. a second connecting column; 21. a second spring; 22. the handle is rotated.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

Referring to fig. 1-6, the present invention provides a technical solution: a clamping tool for processing a precious metal sputtering target comprises an installation platform 1, wherein a first fixed seat 2 is movably installed on the left side of the upper end of the installation platform 1, a groove 3 is fixedly arranged on the rear side of the upper end of the first fixed seat 2, a lead screw 4 is movably installed inside the groove 3, a screw nut 5 is installed at the outer end of the lead screw 4 in a threaded manner, a first clamp 6 is fixedly installed at the upper end of the screw nut 5, a second clamp 7 is fixedly installed on the front side of the upper end of the first fixed seat 2, a first spring 8 is fixedly installed at the rear end of the second clamp 7, the first clamp 6 is movably connected with the second clamp 7 through the first spring 8, a second fixed seat 9 is movably installed on the right side of the upper end of the installation platform 1, slide bars 10 are fixedly installed on the front side and the rear side of the right end of the first fixed seat 2, an installation plate 11 is fixedly installed at the left end of the slide bar 10, an electric push rod 12 is fixedly installed at the left end of the installation plate 11, and is fixedly connected with the first fixed seat 2, the right end of the second fixed seat 9 is fixedly provided with a fine adjustment mechanism 13.

Furthermore, a supporting column 14 is fixedly mounted at the right end of the fine adjustment mechanism 13, telescopic rods 15 are fixedly mounted on the front side and the rear side of the left end of the supporting column 14, and the electric push rod 12 is mounted to push the first fixing seat 2 to move left and right along the sliding rod 10, so that the distance between the two fixing seats is adjusted to clamp and fix the targets with different lengths.

Further, the right end fixed mounting of second fixing base 9 has backup pad 16, the upper end movable mounting of backup pad 16 has cam 17, through installation lead screw 4 and screw 5, rotate rotation handle 22, drive lead screw 4 and rotate in recess 3 is inside, because screw 5 and lead screw 4 threaded connection, therefore the rotation of lead screw 4 can drive screw 5 along lead screw 4 back-and-forth movement, drive first anchor clamps 6 along lead screw 4 back-and-forth movement from this, finally adjust the interval between first anchor clamps 6 and the second anchor clamps 7, with the target to different widths press from both sides tightly fixedly.

Further, the handle 18 is fixedly installed at the lower end of the cam 17, the handle 18 penetrates through the supporting plate 16 and extends to the lower end of the supporting plate 16, the second clamp 7 is fixedly installed, so that the position of the second clamp is unchanged relative to the first fixing seat 2 and the second fixing seat 9, the first clamp 6 moves back and forth, and the first clamp and the second fixing seat are connected through the first spring 8, so that the clamps are not easy to deviate, and the device is more stable.

Further, the front end fixed mounting of first fixing base 2 has first spliced pole 19, and the front end fixed mounting of second fixing base 9 has second spliced pole 20, through installation fine-tuning 13, can finely tune the interval between second fixing base 9 and first fixing base 2 to let between anchor clamps and the target inseparabler.

Furthermore, the front end of the first connecting column 19 is fixedly provided with a second spring 21, the first connecting column 19 and the second connecting column 20 are movably connected through the second spring 21, and the cam 17 can be driven to rotate at the upper end of the supporting plate 16 by installing the cam 17 and rotating the handle 18, so that two protruding ends of the cam 17 are respectively contacted with the second fixing seat 9 and the supporting column 14.

Further, the slide bar 10 runs through the first fixing seat 2 and extends to the left side of the first fixing seat 2, the right end of the slide bar 10 extends to the inside of the second fixing seat 9, and the distance between the support column 14 and the second fixing seat 9 is smaller than the distance between the two protruding ends of the cam 17 under a common condition, so that the cam 17 can drive the telescopic rod 15 to move leftwards and drive the second fixing seat 9 to slightly move leftwards.

Furthermore, the first fixing seat 2 and the second fixing seat 9 are of the same structure, the rotating handle 22 is fixedly mounted at the rear end of the lead screw 4, the slide rod 10 extends into the second fixing seat 9, and the limiting device is mounted at the tail end of the slide rod, so that the second fixing seat 9 can move leftwards along the slide rod 10, the movement range is small, the track cannot deviate, and the device and the target are fixed more tightly through fine adjustment.

The working principle is as follows: the utility model relates to a clamping tool for processing a noble metal sputtering target, which is characterized in that when in use, the target is placed at the upper end of an installation table 1, an electric push rod 12 is installed, the electric push rod 12 can push a first fixed seat 2 to move left and right along a slide rod 10, so that the distance between the two fixed seats is adjusted, the targets with different lengths are clamped and fixed, a lead screw 4 and a nut 5 are installed, a rotating handle 22 is rotated to drive the lead screw 4 to rotate in a groove 3, the nut 5 is in threaded connection with the lead screw 4 due to the rotation of the lead screw 4 to drive the nut 5 to move back and forth along the lead screw 4, so that a first clamp 6 is driven to move back and forth along the lead screw 4, the distance between the first clamp 6 and a second clamp 7 is finally adjusted, so that the targets with different widths are clamped and fixed, and the second clamp 7 is fixedly installed, so that the position of the second clamp is unchanged relative to the first fixed seat 2 and the second fixed seat 9, the first clamp 6 moves back and forth and is connected with the first fixed seat 2 through a first spring 8, so that the clamp is not easy to deviate, the device is more stable, the distance between the second fixed seat 9 and the first fixed seat 2 can be finely adjusted through installing a fine adjustment mechanism 13, so that the clamp and a target material are more compact, the cam 17 can be driven to rotate at the upper end of a supporting plate 16 through installing the cam 17 and rotating a handle 18, two protruding ends of the cam 17 are respectively contacted with the second fixed seat 9 and a supporting column 14, because the distance between the supporting column 14 and the second fixed seat 9 is smaller than the distance between the two protruding ends of the cam 17 under the common condition, the cam 17 can drive a telescopic rod 15 to move leftwards and drive the second fixed seat 9 to slightly move leftwards, because the slide rod 10 extends into the second fixed seat 9, and the tail end of the slide rod is provided with a limiting device, therefore, the second fixed seat 9 will move leftwards along the sliding rod 10, but the moving range is smaller, and the second fixed seat will not deviate from the track, and the fine adjustment makes the fixation between the device and the target material more compact.

Finally, it should be noted that the above-mentioned contents are only used for illustrating the technical solutions of the present invention, and not for limiting the protection scope of the present invention, and that the simple modifications or equivalent substitutions of the technical solutions of the present invention by those of ordinary skill in the art can be made without departing from the spirit and scope of the technical solutions of the present invention.

Claims

1. The utility model provides a processing of noble metal sputtering target is with pressing from both sides tight frock, includes mount table (1), its characterized in that: the mounting table is characterized in that a first fixing seat (2) is movably mounted on the left side of the upper end of the mounting table (1), a groove (3) is fixedly arranged on the rear side of the upper end of the first fixing seat (2), a lead screw (4) is movably mounted in the groove (3), a screw (5) is mounted on the outer end of the lead screw (4) in a threaded manner, a first clamp (6) is fixedly mounted on the upper end of the screw (5), a second clamp (7) is fixedly mounted on the front side of the upper end of the first fixing seat (2), a first spring (8) is fixedly mounted on the rear end of the second clamp (7), the first clamp (6) is movably connected with the second clamp (7) through a first spring (8), a second fixing seat (9) is movably mounted on the right side of the upper end of the mounting table (1), and sliding rods (10) are fixedly mounted on the front side and the rear side of the right end of the first fixing seat (2), the left end fixed mounting of slide bar (10) has mounting panel (11), the left end fixed mounting of mounting panel (11) has electric putter (12), the right-hand member and first fixing base (2) fixed connection of electric putter (12), the right-hand member fixed mounting of second fixing base (9) has fine-tuning (13).

2. The clamping tool for processing the noble metal sputtering target material according to claim 1, characterized in that: the right end fixed mounting of fine-tuning (13) has support column (14), both sides fixed mounting has telescopic link (15) around support column (14) left end.

3. The clamping tool for processing the noble metal sputtering target material according to claim 1, characterized in that: the right end of the second fixing seat (9) is fixedly provided with a supporting plate (16), and the upper end of the supporting plate (16) is movably provided with a cam (17).

4. The clamping tool for processing the noble metal sputtering target material according to claim 3, wherein the clamping tool comprises: the lower end of the cam (17) is fixedly provided with a handle (18), and the handle (18) penetrates through the support plate (16) and extends to the lower end of the support plate (16).

5. The clamping tool for processing the noble metal sputtering target material according to claim 1, wherein the clamping tool comprises: the front end fixed mounting of first fixing base (2) has first spliced pole (19), the front end fixed mounting of second fixing base (9) has second spliced pole (20).

6. The clamping tool for processing the noble metal sputtering target material according to claim 5, wherein the clamping tool comprises: the front end fixed mounting of first spliced pole (19) has second spring (21), first spliced pole (19) and second spliced pole (20) are through second spring (21) swing joint.

7. The clamping tool for processing the noble metal sputtering target material according to claim 1, wherein the clamping tool comprises: the slide bar (10) runs through the first fixing seat (2) and extends to the left side of the first fixing seat (2), and the right end of the slide bar (10) extends to the inside of the second fixing seat (9).

8. The clamping tool for processing the noble metal sputtering target material according to claim 1, characterized in that: the first fixing seat (2) and the second fixing seat (9) are of the same structure, and a rotating handle (22) is fixedly mounted at the rear end of the lead screw (4).