CN216856198U - Sealed box chamber and atmosphere control system - Google Patents
Sealed box chamber and atmosphere control system Download PDFInfo
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- CN216856198U CN216856198U CN202122544855.9U CN202122544855U CN216856198U CN 216856198 U CN216856198 U CN 216856198U CN 202122544855 U CN202122544855 U CN 202122544855U CN 216856198 U CN216856198 U CN 216856198U
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Abstract
The utility model belongs to the technical field of atmosphere control equipment, and particularly relates to a sealed box chamber and an atmosphere control system, wherein the sealed box chamber comprises a box body, an adsorption column and a circulating fan, and the box body is used for providing an installation space; the adsorption column is arranged in the box body and comprises a cylinder body and an adsorber, the central cavity of the cylinder body is a gas channel, and the adsorber is arranged in the gas channel; the circulating fan is arranged in the box body, and the air port of the circulating fan is connected with the gas channel of the adsorption column. Through the arrangement, the circulating fan and the absorber are arranged in the box body, so that leakage caused by the circulating fan, the absorber and the connecting structure of the absorber can be reduced, and the sealing performance is good.
Description
Technical Field
The utility model belongs to the technical field of atmosphere control equipment, and particularly relates to a sealed box chamber and an atmosphere control system.
Background
The sealed box chamber (or glove box) is a sealed box body which is filled with inert gas or dry air and provides a water-free and oxygen-free or water-free working environment, and is widely applied to the fields of semiconductors, nuclear research, new energy, medicines, chemistry and chemical industry, new material development and the like. The content of impurity gases in the internal atmosphere of a conventional sealed box chamber is mainly controlled in a circulating purification mode, that is, as shown in fig. 1, the sealed box chamber 1 is connected with a gas circulating purification unit internally provided with a fan 3 and a purification column 2 through a pipeline, the gas in the sealed box chamber 1 is driven by the fan 3, absorbs water and oxygen through the purification column 2, is cooled by a heat exchanger and then returns to the sealed chamber, and the circulating purification is repeated in cycles and continuously, so that the requirements of low water and low oxygen in the internal atmosphere of the sealed box chamber 1 are met and maintained.
The purifying column in the structure is positioned outside the sealing chamber, belongs to an external purifying column and has the following problems: 1. the whole system has high requirement on the sealing performance of the fan, and the fan with low sealing performance can become a leakage point of an equipment system; 2. the whole system is complex in design, and the risk of leakage is increased; 3. the replacement of the purification material is inconvenient and requires professional operation.
Therefore, in view of the above disadvantages, it is desirable to provide a sealed chamber and an atmosphere control system.
SUMMERY OF THE UTILITY MODEL
The utility model aims to provide a sealed box chamber and an atmosphere control system, which aim to solve the problem of high structural sealing requirement in the prior art.
The utility model provides a sealed box chamber, comprising: a case for providing an installation space; the adsorption column is arranged in the box body and comprises a cylinder body and an adsorber, a central cavity of the cylinder body is a gas channel, and the adsorber is arranged in the gas channel; and the circulating fan is arranged in the box body, and the air port of the circulating fan is connected with the gas channel of the adsorption column.
The tank chamber is sealed as described above, and more preferably, the adsorber is one or more of an oxygen adsorber, a moisture adsorber, an organic solvent adsorber, and an impurity adsorber.
In the above-described sealed chamber, it is more preferable that the adsorption column is provided in plurality, and the plurality of adsorption columns are connected in series, in parallel, or in series-parallel.
In the case where the plurality of adsorption columns are connected in series or in series-parallel, the circulation fan is preferably provided between two adjacent adsorption columns connected in series.
As described above, the chamber is sealed, and it is further preferable that the air inlet of the circulation fan is connected to the gas passage of the adsorption column.
In the above-described sealed cabinet, it is further preferable that an air outlet of the circulation fan is connected to the gas passage of the adsorption column.
In the above-described sealed chamber, it is further preferable that the adsorption column further includes a filter provided in the gas passage.
The sealed chamber as described above further preferably further comprises a probe disposed in the box body and adapted to detect one or more of water content, oxygen content, and solvent content in the box body.
As described above, the sealed cabinet is more preferably configured such that the circulation fan is a variable frequency circulation fan.
The utility model also discloses an atmosphere control system which comprises any one of the sealed box chambers.
Compared with the prior art, the utility model has the following advantages:
the utility model belongs to the technical field of atmosphere control equipment, and particularly relates to a sealed box chamber and an atmosphere control system, wherein the sealed box chamber comprises a box body, an adsorption column and a circulating fan, and the box body is used for providing an installation space; the adsorption column is arranged in the box body and comprises a cylinder body and an adsorber, a central cavity of the cylinder body is a gas channel, and the adsorber is arranged in the gas channel; the circulating fan is arranged in the box body, and the air port of the circulating fan is connected with the gas channel of the adsorption column. Through the arrangement, the sealed box chamber has the following advantages: 1) the circulating fan and the absorber are arranged in the box body, so that the leakage problem caused by the circulating fan, the absorber and the connecting structure of the absorber is avoided, and the sealing performance is good; 2) the circulating fan and the absorber are arranged in the box body, so that additional space of an external purifier is not needed, and space is saved.
According to the utility model, through arranging the plurality of adsorption columns, multi-stage adsorption filtration is realized, the adsorption effect is enhanced, and meanwhile, when the adsorption columns are connected in series, the front-stage adsorption column can also protect the rear-stage adsorption column, so that the service life of the rear-stage adsorption column is prolonged. In addition, multistage adsorption columns can be combined flexibly, and multiple practical effects are achieved.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and other drawings can be obtained by those skilled in the art without creative efforts.
FIG. 1 is a schematic view of a prior art decontamination scheme for a sealed enclosure;
fig. 2 is a schematic structural view of the sealed cabinet of the present invention.
Description of reference numerals:
1-sealed box chamber, 2-purifying column, 3-fan, 4-box body, 5-adsorption column and 6-circulating fan.
Detailed Description
The technical solutions of the present invention will be described clearly and completely with reference to the accompanying drawings, and it should be understood that the described embodiments are some, but not all embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the terms in the present invention can be understood in a specific case to those skilled in the art.
As shown in fig. 2, the sealed cabinet provided in this embodiment includes a cabinet 4, an adsorption column 5, and a circulation fan 6.
In particular, the housing 4 is provided with a sealed chamber for providing an installation space on the one hand and for filling with an inert gas or dry air to provide a water-free and oxygen-free or water-free working environment on the other hand.
The adsorption column 5 is arranged in the box body 4 and comprises a cylinder body and an adsorber; the central cavity of the cylinder body is a gas channel for gas circulation; the adsorber is arranged in the gas channel and is used for adsorbing the circulating gas. Specifically, the adsorber may be one or more of an oxygen adsorber, a moisture adsorber, an organic solvent adsorber, and an impurity adsorber, that is, the adsorber in the adsorption column 5 may be any one of an oxygen adsorber, a moisture adsorber, an organic solvent adsorber, and an impurity adsorber for adsorbing corresponding impurities, and the adsorber in the adsorption column 5 may also be formed by combining any two or more of an oxygen adsorber, a moisture adsorber, an organic solvent adsorber, and an impurity adsorber for adsorbing multiple corresponding impurities simultaneously, and may be selected as needed during application, which is not limited in this embodiment. In addition, in order to avoid the material in the adsorber to enter into box 4, still be equipped with the filter in adsorption column 5, the filter is located in the gas passage, specifically, locate between the gas outlet of adsorber and gas passage for the gas after the filtration adsorbs, avoid the adsorption material that mix with in the gas to enter into box 4.
The same box 4 can simultaneously comprise a plurality of adsorption columns 5, the plurality of adsorption columns 5 can be connected in series, in parallel or in series and parallel, and the functions of the adsorbers in the plurality of adsorption columns 5 adopting the connection mode can be the same or different, and can be selected according to the needs during application, and the embodiment is not limited specifically.
The circulating fan 6 is arranged in the box body 4, and the air port of the circulating fan 6 is connected with the gas channel of the adsorption column 5 and used for driving gas to circulate in the adsorption column 5 and the box body 4. The installation modes of the circulating fan 6 and the adsorption column 5 are various, specifically, the circulating fan 6 can be installed at the tail end of the adsorption column 5, namely, an air inlet of the circulating fan 6 is connected with a gas channel of the adsorption column 5; the circulating fan 6 can also be arranged at the front end of the adsorption column 5, namely, an air outlet of the circulating fan 6 is connected with the gas channel of the adsorption column 5; when the plurality of adsorption columns 5 are connected in series or in series-parallel, the circulating fan 6 can also be arranged between two adjacent adsorption columns 5 connected in series; when the plurality of adsorption columns 5 are connected in parallel or in series-parallel, the circulating fan 6 may be connected to the plurality of adsorption columns 5 connected in parallel at the same time.
In the above structure, the flow direction of the circulating gas flow in the adsorption column 5 may be from top to bottom, from bottom to top, or in other flow directions; the circulating fan 6 and the adsorption column 5 may be disposed vertically, may be disposed horizontally, or may be disposed at any other position, and this embodiment is not particularly limited.
Further, the sealed chamber further comprises a probe, wherein the probe is arranged in the box body 4 and is suitable for detecting one or more of water content, oxygen content and solvent content in the box body 4. Specifically, the type of the probe can be matched with the function of the adsorber, for example, when the adsorber is an oxygen adsorber, the probe is an oxygen content probe, and is suitable for detecting the content change condition of the corresponding medium in the sealed box chamber in real time, so as to assist in judging the working condition of the adsorber, so that the adsorber can be replaced in time when the adsorber fails, and the function of the sealed box chamber is prevented from being influenced. In addition, the probe can not be matched with the function of the adsorber, and at the moment, the probe is used for monitoring the change of the corresponding medium in real time so as to assist in judging the reaction condition in the sealed box chamber.
Further, in order to control the adsorption speed, the circulation fan 6 in this embodiment is a variable frequency circulation fan 6.
Further, the present embodiment also discloses an atmosphere control system comprising the sealed cabinet as described above.
Finally, it should be noted that: the above embodiments are only used to illustrate the technical solution of the present invention, and not to limit the same; while the utility model has been described in detail and with reference to the foregoing embodiments, it will be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some or all of the technical features may be equivalently replaced; and these modifications or substitutions do not depart from the spirit of the corresponding technical solutions of the embodiments of the present invention.
Claims (10)
1. A sealed cabinet, comprising:
a case for providing an installation space;
the adsorption column is arranged in the box body and comprises a cylinder body and an adsorber, a central cavity of the cylinder body is a gas channel, and the adsorber is arranged in the gas channel;
and the circulating fan is arranged in the box body, and the air port of the circulating fan is connected with the gas channel of the adsorption column.
2. The sealed chamber of claim 1, wherein the adsorber is one or more of an oxygen adsorber, a moisture adsorber, an organic solvent adsorber, and an impurity adsorber.
3. The sealed cabinet of claim 1, wherein the adsorption column is plural, and the plural adsorption columns are connected in series, in parallel, or in series-parallel.
4. The sealed cabinet according to claim 3, wherein when a plurality of the adsorption columns are connected in series or in series-parallel, the circulating fan is provided between two adjacent adsorption columns connected in series.
5. The sealed cabinet of claim 1, wherein the air inlet of the circulating fan is connected to the gas passage of the adsorption column.
6. The sealed box chamber of claim 1, wherein the air outlet of the circulating fan is connected with the gas passage of the adsorption column.
7. The sealed cabinet of claim 1, wherein a filter is disposed in the adsorption column, and the filter is disposed in the gas passage.
8. The sealed cabinet of claim 1, further comprising a probe disposed within the box and adapted to detect one or more of water content, oxygen content, and solvent content within the box.
9. The sealed cabinet of claim 1, wherein the circulator blower is a variable frequency circulator blower.
10. An atmosphere control system comprising a sealed enclosure according to any one of claims 1 to 9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122544855.9U CN216856198U (en) | 2021-10-21 | 2021-10-21 | Sealed box chamber and atmosphere control system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122544855.9U CN216856198U (en) | 2021-10-21 | 2021-10-21 | Sealed box chamber and atmosphere control system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN216856198U true CN216856198U (en) | 2022-07-01 |
Family
ID=82122092
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202122544855.9U Active CN216856198U (en) | 2021-10-21 | 2021-10-21 | Sealed box chamber and atmosphere control system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN216856198U (en) |
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2021
- 2021-10-21 CN CN202122544855.9U patent/CN216856198U/en active Active
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