CN216851576U

CN216851576U - Motor for spin-drying silicon wafer

Info

Publication number: CN216851576U
Application number: CN202220359599.8U
Authority: CN
Inventors: 谢辉平
Original assignee: Wuxi Youlian Chuangxin Electromechanical Equipment Co ltd
Current assignee: Wuxi Youlian Chuangxin Electromechanical Equipment Co ltd
Priority date: 2022-02-22
Filing date: 2022-02-22
Publication date: 2022-06-28
Anticipated expiration: 2032-02-22

Abstract

The utility model discloses a silicon chip dries and uses motor, including the motor housing body, the front end of the motor housing body is provided with the front end housing, is detachable structure between front end housing and the motor housing body, and the rear end of the motor housing body is provided with the rear end cap, is detachable structure between rear end cap and the motor housing body, the front end surface mounting of front end housing has water inlet tank pipe, and the front end surface mounting of rear end cap has a water outlet tank pipe, is provided with the water-cooling tank between sealed inner shell and the motor housing body, and the inside of water-cooling tank is equipped with cooling water circulating pipeline, and cooling water circulating pipeline is linked together with water inlet tank pipe and water outlet tank pipe respectively, sealed waterproof circle is installed to sealed inner shell front end. The utility model discloses a carry out portable seal installation to motor housing body fixed, possess the convenient advantage of equipment dismantlement, built-in water cooling mechanism simultaneously gives the motor heat dissipation through the circulating water, and the heat-sinking capability of the very big improvement motor of ability can be maintained at great power for a long time, and then improves the operating efficiency that spin-dries.

Description

Motor for spin-drying silicon wafer

Technical Field

The utility model relates to the technical field of motors, specifically be a silicon chip dries and uses motor.

Background

The motor is an electromagnetic device for realizing electric energy conversion or transmission according to an electromagnetic induction law. The motor is represented by a letter M (old standard is represented by a letter D) in a circuit, the motor mainly plays a role of generating driving torque and serving as a power source of electrical appliances or various machines, the generator is represented by a letter G in a circuit, and the generator mainly plays a role of converting mechanical energy into electric energy.

The existing silicon wafer drying motor set is inconvenient to assemble and disassemble, the drying efficiency is low due to the fact that the motor cannot maintain large power and rotating speed due to internal overheating of the motor, and therefore the market needs to develop a novel silicon wafer drying motor to solve the problems.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a silicon chip dries and uses motor to current silicon chip dries and uses motor unit to install and remove inconvenient among the solution above-mentioned background art, because the inside overheated great power and the rotational speed of can't be maintained to the motor that leads to the lower problem of operating efficiency that spin-dries of leading to of motor.

In order to achieve the above object, the utility model provides a following technical scheme: the utility model provides a silicon chip dries and uses motor, includes the motor housing body, the front end of the motor housing body is provided with the front end housing, is detachable structure between front end housing and the motor housing body, and the rear end of the motor housing body is provided with the rear end cap, is detachable structure between rear end cap and the motor housing body, the front end surface mounting of front end housing has into the basin pipe, and the front end surface mounting of rear end cap has out the basin pipe, the internally mounted of the motor housing body has sealed inner shell, is provided with the water-cooling tank between sealed inner shell and the motor housing body, and the inside of water-cooling tank is provided with the cooling water circulating line, and the cooling water circulating line is linked together with into basin pipe and play basin pipe respectively, sealed waterproof circle is installed to sealed inner shell front end.

Preferably, the outer side surface of the motor outer shell is provided with a fixing groove pipe, and a locking shaft pin is arranged inside the fixing groove pipe.

Preferably, the outer side surface of the front end cover is provided with a first fixed fixture block, and the outer side surface of the rear end cover is provided with a second fixed fixture block.

Preferably, the first fixing fixture block and the second fixing fixture block are both provided with fixing slotted holes, the first fixing fixture block and the second fixing fixture block are both correspondingly connected with the fixing slotted pipes through locking shaft pins, and locking nuts are arranged at the upper ends and the lower ends of the locking shaft pins.

Preferably, the inside of the water inlet tank pipe and the inside of the water outlet tank pipe are both provided with a switch valve.

Preferably, a transmission shaft is installed inside the sealed inner shell, and a bearing piece is installed on the surface of the transmission shaft.

Compared with the prior art, the beneficial effects of the utility model are that:

(1) the sealed inner shell is arranged inside the motor outer shell, the water cooling tank is arranged between the sealed inner shell and the motor outer shell, the cooling water circulation pipeline is arranged inside the water cooling tank, the cooling water circulation pipeline is respectively communicated with the water inlet tank pipe and the water outlet tank pipe, cooling water flows into the cooling water circulation pipeline through the water inlet tank pipe through the built-in water cooling mechanism in the motor shell, heat generated inside the motor can be absorbed, water flow after heat absorption is discharged through the water outlet tank pipe, heat of the motor is dissipated through cooling circulating water, the heat dissipation capacity of the motor can be greatly improved, large power can be maintained for a long time, and further the spin-drying operation efficiency is improved;

(2) the outside surface of front end housing is provided with first fixed fixture block, and the outside surface of rear end cap is provided with the fixed fixture block of second, and the inside of the fixed fixture block of first fixed fixture block and second all is provided with fixed slotted hole, and the fixed fixture block of first fixed fixture block and second all corresponds with fixed slotted pipe through the locking pivot and is connected, and is fixed through carrying out the portable equipment between motor housing body and two end covers, and the maintenance is dismantled to motor element inside to the convenience, possesses the installation and dismantles convenient advantage.

Drawings

Fig. 1 is a schematic structural view of the present invention;

fig. 2 is a schematic diagram of the rear end structure of the present invention;

fig. 3 is a schematic view of the internal installation structure of the present invention.

In the figure: 1. a motor outer housing; 2. fixing the slot tube; 3. a first fixed fixture block; 4. locking the shaft pin; 5. a front end cover; 6. a drive shaft; 7. a water inlet tank pipe; 8. a water outlet tank pipe; 9. a rear end cap; 10. sealing a waterproof ring; 11. a cooling water circulation pipe; 12. fixing the slotted hole; 13. sealing the inner shell; 14. a water cooling tank; 15. a bearing member; 16. and a second fixed clamping block.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments.

Referring to fig. 1-3, the present invention provides an embodiment: the utility model provides a silicon chip dries and uses motor, including motor outer casing 1, motor outer casing 1's front end is provided with front end housing 5, be detachable structure between front end housing 5 and the motor outer casing 1, motor outer casing 1's rear end is provided with rear end housing 9, be detachable structure between rear end housing 9 and the motor outer casing 1, front end surface mounting of front end housing 5 has water inlet tank pipe 7, rear end surface mounting of rear end housing 9 has water outlet tank pipe 8, motor outer casing 1's internally mounted has sealed inner shell 13, be provided with water-cooling tank 14 between sealed inner shell 13 and the motor outer casing 1, water-cooling tank 14's inside is provided with cooling water circulating pipe 11, cooling water circulating pipe 11 is linked together with water inlet tank pipe 7 and water outlet tank pipe 8 respectively, sealed inner shell 13 front end is installed sealed waterproof ring 10.

Further, the outer side surface of the motor outer shell 1 is provided with a fixing groove tube 2, and a locking shaft pin 4 is installed inside the fixing groove tube 2.

Further, the outer side surface of the front end cover 5 is provided with a first fixed fixture 3, and the outer side surface of the rear end cover 9 is provided with a second fixed fixture 16.

Further, the first fixing block 3 and the second fixing block 16 are both provided with fixing slot holes 12, the first fixing block 3 and the second fixing block 16 are both correspondingly connected with the fixing slot tube 2 through a locking shaft pin 4, and locking nuts are arranged at the upper end and the lower end of the locking shaft pin 4.

Further, the inside of intake trough pipe 7 and the basin pipe 8 of going out all is provided with ooff valve.

Further, the transmission shaft 6 is installed inside the inner seal housing 13, and the bearing member 15 is installed on the surface of the transmission shaft 6.

The working principle is as follows: when in use, the front end of the motor outer shell 1 is provided with a front end cover 5, a detachable structure is arranged between the front end cover 5 and the motor outer shell 1, the rear end of the motor outer shell 1 is provided with a rear end cover 9, a detachable structure is arranged between the rear end cover 9 and the motor outer shell 1, the outer surface of the front end cover 5 is provided with a first fixed fixture block 3, the outer surface of the rear end cover 9 is provided with a second fixed fixture block 16, the inner parts of the first fixed fixture block 3 and the second fixed fixture block 16 are both provided with fixed slot holes 12, the first fixed fixture block 3 and the second fixed fixture block 16 are both correspondingly connected with a fixed slot tube 2 through a locking shaft pin 4, the inner part of the motor assembly is conveniently disassembled and maintained by conveniently assembling and fixing the motor outer shell 1 and the two end covers, the motor assembly has the advantage of convenient assembly and disassembly, a sealed inner shell 13 is arranged inside the motor outer shell 1, a water cooling slot 14 is arranged between the sealed inner shell 13 and the motor outer shell 1, the inside of water-cooling tank 14 is provided with cooling water circulating line 11, cooling water circulating line 11 is linked together with intake pipe 7 and delivery pipe 8 respectively, through at the motor shell body 1 built-in water cooling mechanism, cooling water flows into cooling water circulating line 11 through intake pipe 7, can absorb the heat that the motor is inside to be produced, rivers discharge after will absorbing the heat through delivery pipe 8, give the motor heat dissipation through the cooling circulation water, the heat-sinking capability of very big improvement motor, can maintain great power for a long time, and then improve the operating efficiency that spin-dries.

It is obvious to a person skilled in the art that the invention is not restricted to details of the above-described exemplary embodiments, but that it can be implemented in other specific forms without departing from the spirit or essential characteristics of the invention. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.

Claims

1. A motor for drying silicon wafers comprises a motor outer shell (1) and is characterized in that a front end cover (5) is arranged at the front end of the motor outer shell (1), a detachable structure is arranged between the front end cover (5) and the motor outer shell (1), a rear end cover (9) is arranged at the rear end of the motor outer shell (1), a detachable structure is arranged between the rear end cover (9) and the motor outer shell (1), a water inlet groove pipe (7) is arranged on the surface of the front end cover (5), a water outlet groove pipe (8) is arranged on the surface of the front end of the rear end cover (9), a sealing inner shell (13) is arranged inside the motor outer shell (1), a water cooling groove (14) is arranged between the sealing inner shell (13) and the motor outer shell (1), a cooling water circulating pipeline (11) is arranged inside the water cooling groove (14), and the cooling water circulating pipeline (11) is respectively communicated with the water inlet groove pipe (7) and the water outlet groove pipe (8), the front end of the sealed inner shell (13) is provided with a sealed waterproof ring (10).

2. The motor for spin-drying silicon wafers as claimed in claim 1, wherein: the motor shell is characterized in that a fixing groove pipe (2) is arranged on the outer side surface of the motor shell body (1), and a locking shaft pin (4) is arranged inside the fixing groove pipe (2).

3. The motor for spin-drying the silicon wafer as claimed in claim 1, wherein: the outer side surface of the front end cover (5) is provided with a first fixed clamping block (3), and the outer side surface of the rear end cover (9) is provided with a second fixed clamping block (16).

4. The motor for spin-drying silicon wafers as claimed in claim 3, wherein: the fixing device is characterized in that fixing slotted holes (12) are formed in the first fixing fixture block (3) and the second fixing fixture block (16), the first fixing fixture block (3) and the second fixing fixture block (16) are correspondingly connected with the fixing slotted pipes (2) through locking shaft pins (4), and locking nuts are arranged at the upper end and the lower end of each locking shaft pin (4).

5. The motor for spin-drying the silicon wafer as claimed in claim 1, wherein: and switch valves are arranged in the water inlet tank pipe (7) and the water outlet tank pipe (8).

6. The motor for spin-drying the silicon wafer as claimed in claim 1, wherein: a transmission shaft (6) is installed inside the sealed inner shell (13), and a bearing piece (15) is installed on the surface of the transmission shaft (6).