CN216846590U

CN216846590U - Thermocouple

Info

Publication number: CN216846590U
Application number: CN202123391482.2U
Authority: CN
Inventors: 余明; 李房斌; 徐成
Original assignee: Guangdong Vital Micro Electronics Technology Co Ltd
Current assignee: Guangdong Vital Micro Electronics Technology Co Ltd
Priority date: 2021-12-30
Filing date: 2021-12-30
Publication date: 2022-06-28
Anticipated expiration: 2031-12-30

Abstract

The utility model relates to a thermocouple temperature measurement technical field discloses a thermocouple, including the diplopore ceramic core that the heat supply idous silk runs through, diplopore ceramic core temperature measurement end sets up in the corundum pipe, the other end sets up in the water-cooling pipe cover, and water-cooling pipe cover end is equipped with the hole that sealing device seals water-cooling pipe cover and supplies the corundum pipe to place, is equipped with the through-hole that the heat supply idous silk passed on the sealing device. The tail end of the water cooling pipe sleeve is provided with the sealing device, a gasket component in the sealing device preferably adopts a combination of a silica gel gasket and a flat gasket, the thermocouple wire penetrates through the silica gel gasket and still enables the tail end of the water cooling pipe sleeve to achieve an excellent sealing effect in a screwing state of a screwing nut, and when the temperature of the high-temperature vacuum furnace is monitored, the vacuum in the vacuum furnace cannot be influenced by a thermocouple even if a corundum pipe at a temperature measuring end of the thermocouple is damaged to be in an open state.

Description

Thermocouple

Technical Field

The utility model relates to a thermocouple temperature measurement technical field specifically, relates to a thermocouple.

Background

In modern industrial production, thermocouples for temperature measurement are frequently used in large quantities, and due to the fact that the working temperature of the thermocouples is high, the problem that the temperature measurement ends of the thermocouples are fused frequently occurs in the temperature measurement process, and the shutdown of the whole process production even caused by abnormal working of the thermocouples can occur.

Because the thermocouple is of an integral structure, in some high-temperature vacuum equipment, the integral air leakage rate of the equipment can be influenced after the ceramic pipe sleeve at the front end of the thermocouple is damaged, and the equipment has to be stopped; when a problem occurs in the structure of the longer thermocouple part, the whole thermocouple is usually replaced, and most of the thermocouple is sent back to a manufacturer for repair, so that great resource waste is caused, and the product cost and the product period are increased. In some special working conditions, such as a chemical vapor deposition process, the damage of the thermocouple for measuring temperature leads to air leakage, which directly leads to the scrapping of products produced periodically, and the process of replacing the whole thermocouple is more complicated, which causes great waste.

Disclosure of Invention

The to-be-solved technical problem of the utility model lies in overcoming prior art's defect, provides one kind and prevents gas leakage under the thermocouple damaged condition, effectively practices thrift thermocouple cost of maintenance's thermocouple.

The utility model discloses the purpose is realized through following technical scheme:

a thermocouple comprises a double-hole ceramic core through which a heat supply thermocouple wire penetrates, wherein the temperature measuring end of the double-hole ceramic core is arranged in a corundum tube, the other end of the double-hole ceramic core is arranged in a water-cooling tube sleeve, the tail end of the water-cooling tube sleeve is provided with a sealing device for sealing a hole, through which the double-hole ceramic core is placed, of the water-cooling tube sleeve, and the sealing device is provided with a through hole through which the heat supply thermocouple wire penetrates.

Furthermore, an inner hole is formed at the tail end of the water-cooling pipe sleeve, and the sealing device is installed in a matched mode with the inner hole.

Furthermore, the sealing device comprises a tightening nut and at least one group of gasket components, the gasket components are located between the tightening nut and the double-hole ceramic core, and threads matched with the tightening nut are arranged on the hole wall of the inner hole.

And furthermore, the gasket component is formed by sequentially stacking a silica gel gasket and a flat gasket.

Still further, the silica gel gasket is the latex gasket, and thickness is 1 ~ 2 mm.

Still further, the flat gasket is a polytetrafluoroethylene gasket or a stainless steel gasket.

Still further, the flat gasket thickness is 1 ~ 2 mm.

Furthermore, the end of the corundum tube at the temperature measuring end of the thermocouple adopts an arc sealing structure.

Furthermore, the device also comprises an O-shaped sealing ring and a screwing pipe sleeve nut, wherein the O-shaped sealing ring is arranged on the periphery of the water-cooling pipe sleeve and is connected with a temperature measuring flange of the equipment to be measured in a matched manner.

Compared with the prior art, the utility model discloses following beneficial effect has:

1) the tail end of the water-cooling pipe sleeve is provided with the sealing device, a gasket component in the sealing device is preferably combined by a silica gel gasket and a flat gasket, and the thermocouple wire can still enable the tail end of the water-cooling pipe sleeve to achieve an excellent sealing effect in a screwing state of screwing the nut through the silica gel gasket, so that the vacuum of a temperature-measured device such as a vacuum furnace can not be influenced by a thermocouple even if the corundum pipe at the temperature measuring end of the thermocouple is damaged to be in an open state;

2) the sealing device is simple in structure, the materials are cheap and easy to obtain, the working performance of the thermocouple can be changed, and compared with the current situation that most thermocouples in the market can only be returned to a factory for maintenance after being damaged, the thermocouple greatly reduces the maintenance cost and can obviously improve the production stability of equipment.

Drawings

Fig. 1 is a sectional view showing the structure of a thermocouple described in example 1.

Detailed Description

The invention will be further described with reference to specific embodiments, wherein the drawings are designed solely for the purpose of illustration and not as a definition of the limits of the patent; for a better understanding of the embodiments of the present invention, some parts of the drawings may be omitted, enlarged or reduced, and do not represent the size of an actual product; it will be understood by those skilled in the art that certain well-known structures in the drawings and descriptions thereof may be omitted.

Example 1

The thermocouple applied to the high-temperature vacuum furnace shown in fig. 1 comprises a double-hole ceramic core 1 through which a thermocouple wire A and a thermocouple wire B penetrate, and ensures that the two thermocouple wires are not in contact with each other except the top; the temperature measuring end of the double-hole ceramic core 1 is arranged in the corundum tube 2, the other end of the double-hole ceramic core is arranged in the water-cooling tube sleeve 3, the corundum tube 2 plays a role of a thermocouple protective sleeve, the water-cooling tube sleeve 3 is provided with a water-cooling inlet 31 and a water-cooling outlet 32 for introducing cooling water and playing a role of cooling, the tail end of the water-cooling tube sleeve 3 is provided with a sealing device 4 for sealing a hole for placing the double-hole ceramic core in the water-cooling tube sleeve 3, and the sealing device is provided with a through hole for a heat supply thermocouple wire to pass through. The connecting part of the corundum tube 2 and the water cooling tube sleeve 3 is provided with a stainless steel clamping block 51 and a stainless steel clamping sleeve 52, the end part of the stainless steel clamping sleeve 52 at the connecting part is in threaded connection with the water cooling tube sleeve 3, the stainless steel clamping block 51 is attached to the periphery of the corundum tube 2, meanwhile, a positioning nut 53 is screwed on the stainless steel clamping sleeve 52 and is abutted against the stainless steel clamping block 51 so as to adjust the tightness degree of the stainless steel clamping block 51, and the end part of the positioning nut 53 is a conical end part.

The material of the double-hole ceramic core 1 is preferably corundum ceramic, the outer diameter of the double-hole ceramic core in the embodiment is 4mm, the diameter of a hole through which the heating couple wire passes is 1mm, and the wall thickness of the double-hole ceramic core is 0.8 mm; the thermocouple wire diameter was 0.5 mm. The outside diameter of the corundum tube is 8mm, the inside diameter is 5mm, and the wall thickness is 1.5 mm.

In order to improve the sealing effect, an inner hole is generally arranged at the tail end of the water-cooling pipe sleeve 3, and the sealing device 4 is installed in a matching way with the inner hole. Specifically, the sealing device 4 includes a tightening nut 41 and at least one set of washer assemblies located between the tightening nut 41 and the two-hole ceramic core 1, and the hole wall of the inner hole is provided with a thread adapted to the tightening nut 41. The gasket assembly is formed by sequentially stacking a silica gel gasket 42 and a flat gasket 43, the silica gel gasket 42 and the flat gasket 43 are provided with screw holes at corresponding positions for the heat couple to pass through, and the center of the screwed nut is provided with an inner hole for the heat couple to pass through (the screw holes and the inner hole are the through holes on the sealing device). The silica gel gasket 42 can be a transparent latex gasket, the outer diameter is determined according to the size of the inner hole of the water-cooling pipe sleeve, and the thickness is 1-2 mm. The flat gasket 43 is preferably a polytetrafluoroethylene gasket or a stainless steel gasket, and has an outer diameter of 16mm, an inner diameter of 4mm and a thickness of 1-2 mm.

The end part of the corundum tube 2 at the temperature measuring end of the thermocouple adopts an arc sealing structure 21.

When the thermocouple is stretched into a high-temperature vacuum furnace for temperature measurement, a temperature measurement flange 6 is arranged at the position of the vacuum furnace where the thermocouple is placed, an O-shaped sealing ring 7 is arranged at the matched joint of the periphery of the water-cooling pipe sleeve 3 and the temperature measurement flange 6 of the thermocouple, and a screwed pipe sleeve nut 8 is further arranged on the periphery of the water-cooling pipe sleeve 3 and is in threaded connection with the temperature measurement flange 6.

The thermocouple installation process of this application is as follows:

1) after the butt joint of the tops of the thermocouple wire A and the thermocouple wire B is welded, the thermocouple wire A and the thermocouple wire B correspondingly penetrate through the double-hole ceramic core, and the integrity of the two thermocouple wires is guaranteed;

2) one end of the double-hole ceramic core with the thermocouple wires inserted is inserted into the corundum tube, the other end of the double-hole ceramic core is inserted into the water-cooling tube sleeve, the stainless steel clamping sleeve is screwed on the water-cooling tube sleeve through threads, the position of the corundum tube is well determined, the stainless steel clamping block is placed into a gap between the stainless steel clamping sleeve and the corundum tube, and the position of the corundum tube is fixed by adjusting the position of the positioning nut;

3) the tail ends of the thermocouple wire A and the thermocouple wire B penetrate through a silica gel gasket with a wire hole, the silica gel gasket, the flat gasket, the silica gel gasket and the flat gasket are sequentially placed in the inner hole of the tail end of the water-cooling pipe sleeve, and a screwing nut is screwed in to extrude the flat gasket and the silica gel gasket, so that the sealing performance of the thermocouple wire and the corundum pipe is good. The thermocouple wire from the tail end of the water-cooling pipe sleeve can be connected with a quick connection element;

4) an O-shaped sealing ring is sleeved on the outer part of the assembled water-cooling pipe sleeve, sealing silicone grease is coated on the outer part of the O-shaped sealing ring, a temperature measuring flange fixed by using a fixing bolt is inserted, a pipe sleeve nut is screwed, and a double O-shaped sealing ring is fixed by the pipe sleeve nut and is in planar contact with the temperature measuring flange, so that the sealing performance between the water-cooling pipe sleeve and the vacuum furnace and between the water-cooling pipe sleeve and the temperature measuring flange is ensured; cooling water circularly flows in the interlayer of the water-cooling pipe sleeve through the water-cooling inlet and the water-cooling outlet, so that the cooling protection effect is achieved;

the O-shaped sealing ring is preferably made of fluororubber or nitrile, and high-temperature-resistant vacuum silicone grease can be used as the sealing silicone grease.

A set of comparative experiments are carried out at present to verify the sealing effect of the thermocouple of the application:

experiment 1: an integral thermocouple with a damaged ceramic sleeve is arranged on a vapor deposition path and is subjected to vacuum extraction, the pressure in the vapor deposition furnace is reduced to 8000Pa, the pressure in the furnace is difficult to continuously reduce, and obvious air leakage sound can be heard around the thermocouple. When the vacuum pump is stopped, the pressure in the furnace rises rapidly.

Experiment 2: the thermocouple of the embodiment is installed on a vacuum furnace according to the installation process, the corundum tube of the thermocouple is replaced by a tube with an open top, the thermocouple is installed on vapor deposition circuit equipment, and vacuumizing operation is carried out, so that the vacuum of the equipment is not influenced by the corundum tube at the front end of the thermocouple. The vacuum pressure may be drawn to below 10 Pa. The vacuum pump operation was stopped and the pressure in the furnace was slowly increased.

Experiments prove that the thermocouple can achieve the sealing effect only by using the gasket assembly and the tightening nut in the tightening state, the corresponding gasket material is easy to obtain, the gasket is simple to manufacture, and compared with the situation that most thermocouples on the market can only be repaired and repaired after being damaged, the thermocouple sealing device can effectively reduce the maintenance cost and improve the production stability of equipment.

It should be understood that the above-mentioned embodiments are only examples for clearly illustrating the technical solutions of the present invention, and are not intended to limit the embodiments of the present invention. Other variations and modifications will be apparent to persons skilled in the art in light of the above description. And are neither required nor exhaustive of all embodiments. Any modification, equivalent replacement, and improvement made within the spirit and principle of the present invention should be included in the protection scope of the claims of the present invention.

Claims

1. A thermocouple is characterized by comprising a double-hole ceramic core through which a heat supply thermocouple wire penetrates, wherein the temperature measuring end of the double-hole ceramic core is arranged in a corundum tube, the other end of the double-hole ceramic core is arranged in a water-cooling tube sleeve, the tail end of the water-cooling tube sleeve is provided with a sealing device for sealing a hole for the double-hole ceramic core to be placed in, and the sealing device is provided with a through hole through which the heat supply thermocouple wire penetrates.

2. The thermocouple of claim 1, wherein the water-cooled jacket terminates in an internal bore, and the sealing means is mounted in cooperation with the internal bore.

3. The thermocouple of claim 2, wherein the sealing means comprises a tightening nut and at least one set of shim packs positioned between the tightening nut and the two-hole ceramic core, the inner hole having a wall with threads adapted to the tightening nut.

4. The thermocouple according to claim 3, wherein the gasket assembly is formed by stacking a silicone gasket and a flat gasket in sequence.

5. The thermocouple according to claim 4, wherein the silicone gasket is a latex gasket.

6. The thermocouple according to claim 5, wherein the thickness of the silica gel pad is 1-2 mm.

7. The thermocouple of claim 4, wherein said flat gasket is a polytetrafluoroethylene gasket or a stainless steel gasket.

8. The thermocouple according to claim 7, wherein the flat gasket has a thickness of 1 to 2 mm.

9. The thermocouple according to claim 1, wherein the end of the corundum tube at the temperature measuring end of the thermocouple adopts an arc sealing structure.

10. The thermocouple according to claim 1, wherein the thermocouple further comprises an O-ring and a tightening sleeve nut which are arranged on the periphery of the water-cooling sleeve and are in fit connection with a temperature measuring flange of a device to be measured.