CN216835245U

CN216835245U - Nitrogen containing box for wafers

Info

Publication number: CN216835245U
Application number: CN202123251007.5U
Authority: CN
Inventors: 阙进林; 李永祥
Original assignee: Suzhou Yaxinhua Electronic Technology Co ltd
Current assignee: Suzhou Yaxinhua Electronic Technology Co ltd
Priority date: 2021-12-22
Filing date: 2021-12-22
Publication date: 2022-06-28
Anticipated expiration: 2031-12-22

Abstract

The utility model discloses a nitrogen gas of wafer holds case, the power distribution box comprises a box body, transversely be provided with the layer board between the inside both sides of box, nitrogen generator is installed to one side of box, fixedly connected with pipe between nitrogen generator's the top and the top of box one side, the top of layer board is provided with the material structure of being convenient for take. This nitrogen gas of wafer holds case is through being provided with the material frame plate, the inside groove, change roller and rubber belt, during the use, imbed the support after packing the wafer one by one, and put the support on the material frame plate, three groups of rubber belts on the material frame plate have divided three and have put the region, when the wafer group on the corresponding rubber belt of needs take, only need to grasp the support and outwards drag, it is rotatory to change the roller, the rubber belt outwards rolls, the strength of spending when having reduced the user and taking, the function of the material of being convenient for to take has been realized, the solution is the problem that the device does not possess the function of the material of being convenient for to take.

Description

Nitrogen containing box for wafers

Technical Field

The utility model relates to a nitrogen gas holds case technical field, specifically is a nitrogen gas of wafer piece holds case.

Background

The original material of the wafer is silicon, high-purity polysilicon is dissolved and then doped with silicon crystal seed crystals, and then is slowly pulled out to form cylindrical monocrystalline silicon, a silicon crystal bar is ground, polished and sliced to form a silicon wafer, namely the wafer, which is used as a semiconductor material, the storage and placement of the silicon wafer are required to be in a nitrogen containing box to realize oxidation resistance and moisture resistance, most of nitrogen containing boxes for common wafers on the market are simple in structure, functional defects exist in the using process and need to be improved, if the wafer is placed too deeply, the box body is small in space and difficult to lift materials upwards, the materials are difficult to take out and do not have the function of conveniently taking the materials, secondly, because the nitrogen containing box is of an all-metal structure, static electricity is easily generated in a dry environment, strong static electricity has a certain probability of damaging the surface of the wafer, and causes great loss, do not possess the function of in time leading destaticizing, in addition, the nitrogen gas of conventional wafer holds incasement space fixed, can't adjust the height according to actual conditions is nimble, do not possess the function of nimble adjustment incasement space height, to the above-mentioned problem, the improvement that corresponds has all been done to this scheme, the layer board structure of putting the material has been optimized, it can drag out the material of top easily to imitate the conveyer belt structure messenger, and a set of ground connection conducting wire group has been increased in the box outside, can lead destaticizing fast, the transformation has been done with inside simultaneously, the user of service can adjust the height of layer board according to actual need is nimble.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a nitrogen gas of crystal disk holds case to what provide among the above-mentioned background art does not possess the problem of the function of the material of being convenient for to take.

In order to achieve the above object, the utility model provides a following technical scheme: the utility model provides a nitrogen gas of wafer holds case, comprises a box body, transversely be provided with the layer board between the inside both sides of box, nitrogen generator is installed to one side of box, fixedly connected with pipe between nitrogen generator's the top and the top of box one side, the bottom fixedly connected with L type metal sheet of box one side, the inside both sides of box fixedly connected with fixed plate respectively, the top of layer board is provided with the material structure of being convenient for take.

The material structure convenient to take includes the material frame plate, material frame plate fixed connection is on the top of layer board, the inside on material frame plate top is provided with three internal grooves of group, swing joint has the multiunit to change the roller between the inside both sides of internal groove.

Preferably, the outside cladding of commentaries on classics roller has the rubber belt, the top of rubber belt and the material shelf place the horizontal plane unanimous.

Preferably, the rollers are arranged at equal intervals.

Preferably, one side transverse welding of L type metal sheet has around the stake, the copper line is installed on the top of L type metal sheet one side, the bottom swing joint of copper line has the copper ingot, the copper line is along evenly coiling around the outside of stake.

Preferably, one side fixedly connected with multiunit support bar of fixed plate, three groups of support arriss are installed to the bottom of support bar, the top of support bar is cemented there is the silica gel antislip strip, the top of silica gel antislip strip is unanimous with the bottom place horizontal plane of layer board, and the two contacts each other.

Preferably, one side activity of box front end articulates there is the chamber door, the inside of chamber door is provided with the observation window, the switch handle is installed to one side of case door front end, the top fixedly connected with control panel of box front end.

Compared with the prior art, the beneficial effects of the utility model are that: the nitrogen containing box for the wafer not only realizes the function of conveniently taking materials and the function of timely conducting and removing static electricity, but also realizes the function of flexibly adjusting the height of the space in the box;

(1) by arranging the material frame plate, the inner groove, the rotary roller and the rubber belt, when the wafer taking device is used, wafers are packed and then embedded into the supports one by one, the supports are placed on the material frame plate, three groups of placing areas are divided by the three groups of rubber belts on the material frame plate, when a wafer group on the corresponding rubber belt needs to be taken, the supports only need to be grasped to drag the supports outwards, the rotary roller rotates under the action of friction force, the rubber belt rolls outwards, the labor spent by a user in taking is reduced, and the function of facilitating taking of the materials is achieved;

(2) by arranging the L-shaped metal plate, the winding pile, the copper wire and the copper ingot, when the device is used, a user takes up the copper ingot to pull outwards, opens the copper wire along the winding pile, completely stretches the copper wire, places the copper ingot on the ground, guides the electrostatic charges on the box body onto the copper wire by the L-shaped metal plate, transmits the electrostatic charges to the copper ingot through the copper wire, guides the electrostatic charges out of the copper wire to the ground, and facilitates the collection of the copper wire by the winding pile, so that the function of timely conducting and removing the electrostatic charges is realized;

(3) through being provided with fixed plate, support bar, support arris and silica gel antislip strip, during the use, according to the height of the actual pile up neatly of the wafer group who treats existence, can take out the layer board and insert the support bar surface of suitable height, the silica gel antislip strip on the support bar can increase frictional force and improve the stability of layer board, supports the arris and provides the support of bottom for the support bar, and the fixed plate provides the basis for the installation of support bar, has realized the function of nimble adjustment incasement space height.

Drawings

Fig. 1 is a schematic front view of the present invention;

FIG. 2 is a schematic view of the structure of the present invention showing the opened state of the door;

fig. 3 is an enlarged partial sectional view of the utility model at a in fig. 1;

fig. 4 is an enlarged structural schematic view of a top-view partial section of the material frame plate of the present invention;

fig. 5 is a schematic view of the side view of the fixing plate of the present invention.

In the figure: 1. a box body; 2. a box door; 3. an observation window; 4. a pallet; 5. a switch handle; 6. a material rack plate; 7. an inner tank; 8. rotating the roller; 9. a rubber belt; 10. a control panel; 11. a conduit; 12. a nitrogen generator; 13. an L-shaped metal plate; 14. pile winding; 15. a copper wire; 16. a copper ingot; 17. a fixing plate; 18. a supporting strip; 19. a support edge; 20. silica gel antislip strip.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

Example 1: referring to fig. 1-5, a nitrogen containing box for wafers comprises a box body 1, a box door 2 is movably hinged to one side of the front end of the box body 1, an observation window 3 is arranged inside the box door 2, a switch handle 5 is arranged on one side of the front end of the box door 2, a control panel 10 is fixedly connected to the top end of the front end of the box body 1, a supporting plate 4 is transversely arranged between two sides inside the box body 1, a nitrogen generator 12 is arranged on one side of the box body 1, a guide pipe 11 is fixedly connected between the top end of the nitrogen generator 12 and the top end of one side of the box body 1, and a material taking structure is arranged at the top end of the supporting plate 4;

referring to fig. 1-5, the nitrogen containing box for wafers further comprises a material taking structure, the material taking structure comprises a material frame plate 6, the material frame plate 6 is fixedly connected to the top end of the supporting plate 4, three groups of inner grooves 7 are formed in the top end of the material frame plate 6, and a plurality of groups of rotating rollers 8 are movably connected between two sides of the inner parts of the inner grooves 7;

the outer part of the rotating roller 8 is coated with a rubber belt 9, the top end of the rubber belt 9 is consistent with the horizontal plane of the top end of the material frame plate 6, and the rotating rollers 8 are arranged at equal intervals to facilitate pulling out the materials;

specifically, as shown in fig. 1 and 4, after the wafers are packaged, the wafers are embedded into the support one by one, the support is placed on the material frame plate 6, three groups of rubber belts 9 on the material frame plate 6 are divided into three groups of placing areas, when the wafer groups on the corresponding rubber belts 9 need to be taken, the support is only required to be grabbed to drag outwards, under the action of friction force, the rotating rollers 8 rotate, the rubber belts 9 roll outwards, the labor consumed by a user when the user takes the wafers is reduced, and the function of conveniently taking the wafers is achieved.

Example 2: the bottom end of one side of the box body 1 is fixedly connected with an L-shaped metal plate 13, a winding pile 14 is transversely welded on one side of the L-shaped metal plate 13, a copper wire 15 is installed at the top end of one side of the L-shaped metal plate 13, a copper ingot 16 is movably connected to the bottom end of the copper wire 15, and the copper wire 15 is uniformly wound along the outer part of the winding pile 14 and is convenient to store;

specifically, as shown in fig. 1 and 3, the user takes up the copper ingot 16 and pulls outwards, opens the copper wire 15 along winding the stake 14, after making it completely spread, places the copper ingot 16 on the ground, and the L-shaped metal plate 13 can guide the electrostatic charge on the box 1 onto the copper wire 15, and transmits to the copper ingot 16 through the copper wire 15, exports to the ground, and winding the stake 14 can make things convenient for accomodating of copper wire 15, has realized in time leading the function of static.

Example 3: two sides of the interior of the box body 1 are fixedly connected with fixing plates 17 respectively, one side of each fixing plate 17 is fixedly connected with a plurality of groups of supporting strips 18, the bottom ends of the supporting strips 18 are provided with three groups of supporting ridges 19, the top ends of the supporting strips 18 are glued with silica gel anti-slip strips 20, the top ends of the silica gel anti-slip strips 20 are consistent with the horizontal plane of the bottom ends of the supporting plates 4, and the top ends of the silica gel anti-slip strips 20 are in mutual contact with the horizontal plane of the bottom ends of the supporting plates 4, so that the stability is improved;

specifically, as shown in fig. 2 and 5, according to the actual stacking height of the wafer group to be present, the supporting plate 4 can be drawn out and inserted into the surface of the supporting bar 18 with a proper height, the silica gel anti-slip strips 20 on the supporting bar 18 can increase friction force to improve the stability of the supporting plate 4, the supporting ribs 19 provide bottom support for the supporting bar 18, and the fixing plate 17 provides a foundation for the installation of the supporting bar 18, thereby realizing the function of flexibly adjusting the height of the space in the box.

The working principle is as follows: when the utility model is used, firstly, the wafers are packed and then embedded into the support one by one, the support is placed on the material frame plate 6, three groups of placing areas are divided by the three groups of rubber belts 9 on the material frame plate 6, when the wafer group on the corresponding rubber belt 9 needs to be taken, the support is only needed to be grabbed and dragged outwards, the rotating roller 8 rotates under the action of friction force, the rubber belt 9 rolls outwards, the labor spent by a user when taking the wafer group is reduced, and the function of conveniently taking the materials is realized; a user takes up the copper ingot 16 to pull outwards, opens the copper wire 15 along the winding pile 14, and places the copper ingot 16 on the ground after the copper wire 15 is completely unfolded, the L-shaped metal plate 13 can guide the electrostatic charges on the box body 1 onto the copper wire 15, and the electrostatic charges are transmitted to the copper ingot 16 through the copper wire 15 and are led out to the ground, the winding pile 14 can facilitate the storage of the copper wire 15, and the function of timely conducting and removing static electricity is realized; according to the actual stacking height of the wafer group to be stored, the supporting plate 4 can be pulled out and inserted into the surface of the supporting strip 18 with a proper height, the silica gel anti-slip strips 20 on the supporting strip 18 can increase friction force to improve the stability of the supporting plate 4, the supporting ribs 19 provide bottom support for the supporting strip 18, the fixing plate 17 provides a foundation for installation of the supporting strip 18, and the function of flexibly adjusting the height of the space in the box is achieved.

It will be evident to those skilled in the art that the invention is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential attributes thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.

Claims

1. The utility model provides a nitrogen gas of wafer holds case, includes box (1), its characterized in that: the nitrogen gas generator is characterized in that a supporting plate (4) is transversely arranged between two sides in the box body (1), a nitrogen gas generator (12) is installed on one side of the box body (1), a guide pipe (11) is fixedly connected between the top end of the nitrogen gas generator (12) and the top end of one side of the box body (1), an L-shaped metal plate (13) is fixedly connected to the bottom end of one side of the box body (1), fixing plates (17) are respectively fixedly connected to two sides in the box body (1), and a material taking structure is arranged at the top end of the supporting plate (4);

the material structure of being convenient for take includes material frame plate (6), material frame plate (6) fixed connection is on the top of layer board (4), the inside on material frame plate (6) top is provided with three internal grooves of group (7), swing joint has the multiunit to change roller (8) between the inside both sides of internal groove (7).

2. A nitrogen containing box for wafers as claimed in claim 1, characterized in that: the outside cladding of commentaries on classics roller (8) has rubber belt (9), the top of rubber belt (9) is unanimous with the top place horizontal plane of material frame plate (6).

3. A nitrogen containing box for wafers as set forth in claim 1, characterized in that: the rotating rollers (8) are arranged at equal intervals.

4. A nitrogen containing box for wafers as set forth in claim 1, characterized in that: the horizontal welding of one side of L type metal sheet (13) has around stake (14), copper line (15) are installed on the top of L type metal sheet (13) one side, the bottom swing joint of copper line (15) has copper ingot (16), copper line (15) are along the even coiling of outside around stake (14).

5. A nitrogen containing box for wafers as set forth in claim 1, characterized in that: one side fixedly connected with multiunit support bar (18) of fixed plate (17), three groups of support arris (19) are installed to the bottom of support bar (18), the top of support bar (18) is cemented and is had silica gel antislip strip (20), the top of silica gel antislip strip (20) is unanimous with the bottom place horizontal plane of layer board (4), and the two contacts each other.

6. A nitrogen containing box for wafers as set forth in claim 1, characterized in that: one side activity of box (1) front end articulates there is chamber door (2), the inside of chamber door (2) is provided with observation window (3), switch handle (5) are installed to one side of chamber door (2) front end, the top fixedly connected with control panel (10) of box (1) front end.