CN216808617U - Novel etching machine sprays wabbler mechanism drive device - Google Patents
Novel etching machine sprays wabbler mechanism drive device Download PDFInfo
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- CN216808617U CN216808617U CN202220520719.8U CN202220520719U CN216808617U CN 216808617 U CN216808617 U CN 216808617U CN 202220520719 U CN202220520719 U CN 202220520719U CN 216808617 U CN216808617 U CN 216808617U
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Abstract
The utility model discloses a novel etching machine spraying and swinging mechanism driving device, which belongs to the technical field of mechanical equipment and comprises a connecting support and an installation support plate arranged inside the connecting support, wherein a direct current motor is arranged at the top end inside the installation support plate through a support, the power output end of the direct current motor is connected with a coupler, the power output end of the coupler penetrates through the installation support plate and is fixedly connected with a driving disc, the driving disc is rotatably connected to the top surface of the installation support plate, a sliding rail is fixedly arranged on one side, away from the driving disc, of the top surface of the installation support plate, a lubricating mechanism for lubricating the sliding rail is arranged between the sliding rail and the driving disc, and the top surface of the sliding rail is slidably connected with a sliding block; the double-guide-rail and cam bearing swinging mechanism can simplify a double-guide-rail structure and a cam bearing structure of a traditional structure, can reduce cost, simultaneously reduces the replacement frequency of the cam bearing and the equipment maintenance time, and improves the stability of the swinging driving mechanism.
Description
Technical Field
The utility model relates to the technical field of mechanical equipment, in particular to a novel driving device of a spraying and swinging mechanism of an etching machine.
Background
In the production industry of thin film transistor liquid crystal displays (TFT-LCDs), in the process of carrying out liquid medicine etching on glass substrates, in order to ensure the etching uniformity, a nozzle on the upper part of the glass substrate needs to do swinging reciprocating motion, so that etching liquid can be uniformly sprayed on the glass substrate, and the etching uniformity of the glass substrate is ensured. The nozzle does swinging reciprocating motion, the working principle is that the circular motion of the motor is converted into the linear reciprocating motion of the pull rod through the connecting rod, the pull rod is connected with the spray pipe through the connecting piece, and then the linear reciprocating motion of the pull rod is converted into the reciprocating swinging motion of the spray pipe.
The existing swing driving mechanism drives a disc to rotate through the rotation of a motor, a cam bearing is installed on the disc at a certain distance away from a rotation center, a cross beam is installed above the disc, two ends of the cross beam are fixed with a linear guide rail, a long hole is processed in the middle of the cross beam, the cam bearing is fixed in the long hole, and when the disc rotates, the cam bearing can drive the cross beam to reciprocate back and forth, so that the rotary motion of the motor is converted into the linear reciprocating motion, and the swing driving mechanism has the following defects:
1. the swing driving mechanism uses two guide rails, so that the needed space is large and the cost is high.
2. When the cam bearing on the disc moves in the cross beam, the cam bearing is stressed greatly, is easy to damage or is seriously abraded with the cross beam, and the cross beam and the cam bearing need to be replaced regularly.
SUMMERY OF THE UTILITY MODEL
1. Technical problem to be solved
Aiming at the problems in the prior art, the utility model aims to provide a novel driving device of a spraying swing mechanism of an etching machine, which can realize the simplification of a double-guide-rail structure and a cam bearing structure in the traditional structure, can reduce the cost, and simultaneously reduces the replacement frequency of the cam bearing, the equipment maintenance time and the stability of the swing driving mechanism.
2. Technical scheme
In order to solve the above problems, the present invention adopts the following technical solutions.
A novel etching machine spraying and swinging mechanism driving device comprises a connecting support and an installation support plate arranged inside the connecting support, wherein a direct current motor is installed at the top end inside the installation support plate through the support, the power output end of the direct current motor is connected with a coupler, the power output end of the coupler penetrates through the installation support plate and is fixedly connected with a driving disc, the driving disc is rotatably connected to the top surface of the installation support plate, a slide rail is fixedly installed on one side, away from the driving disc, of the top surface of the installation support plate, a lubricating mechanism for lubricating the slide rail is arranged between the slide rail and the driving disc, a slide block is slidably connected to the top surface of the slide rail, a connecting support is fixedly installed at the top end of the slide block, a first connecting bolt is fixedly welded at one end, close to the driving disc, of the connecting support, and is in transmission connection with the driving disc through a connecting rod mechanism, wherein one end of the connecting rod mechanism is rotatably connected to the first connecting bolt, the other end of the connecting rod mechanism is rotatably connected to one side of the top surface of the driving disc through a regulating mechanism, the side surface of the connecting support is perpendicularly welded with a connecting shaft, and the connecting shaft is far away from one end of the connecting support and is fixedly provided with an adapter.
Further, adjustment mechanism is including seting up in the regulation spout of driver disc top surface one side, the inside slip embedding of regulation spout has the slide, slide top fixed weld has the second connecting bolt, adjust the inside running through of spout the slide rotates and is connected with accommodate the lead screw, accommodate the lead screw with slide threaded connection.
Furthermore, one end of the adjusting screw rod penetrates through the driving disc and is fixedly provided with a rotating cap.
Furthermore, link mechanism including set up in first connecting bolt with central connecting rod between the second connecting bolt, the symmetrical threaded connection in central connecting rod both ends has telescopic screw, two telescopic screw keeps away from the equal fixed welding of central connecting rod one end has the flake to connect, one of them the flake connects to rotate cup joint in on the second connecting bolt, another the flake connects to rotate cup joint in on the first connecting bolt.
Furthermore, the lubricating mechanism comprises a lubricating groove arranged inside the sliding rail and oil outlet micropores uniformly penetrating and arranged on the side wall of the sliding rail slide, oil absorption cotton blocks are embedded inside the lubricating groove, one end of the sliding rail close to the driving disc is detachably provided with a sealing end cover for plugging the oil absorption cotton blocks, two oil conveying pipes are symmetrically arranged on the sealing end cover, oil conveying holes are uniformly arranged on the surfaces of the oil conveying pipes, the oil conveying pipes are embedded inside the oil absorption cotton blocks, the top surface of the mounting support plate is close to the sealing end cover and is fixedly provided with an oil supply pipe cavity, one end of the oil supply pipe cavity close to the sealing end cover is provided with two connecting ports, the connecting ports are connected with the inlet ends of the oil conveying pipes, a piston column is embedded inside the oil supply pipe cavity in a sliding manner, one end of the piston column far away from the connecting ports is fixedly provided with a push column, the piston post is kept away from to the pushing column one end runs through oil supply lumen fixed mounting has the connecting block, the connecting block side with fixed embedding has reset spring between the piston post side, reset spring encircle in the pushing column surface.
Furthermore, an oil tank is mounted on one side, close to the oil supply pipe cavity, of the top surface of the mounting support plate, and an oil outlet of the oil tank is communicated with the inner part of the oil supply pipe cavity through a pipeline.
Furthermore, the oil inlet hole of the oil supply pipe cavity is arranged at the length center of the oil supply pipe cavity, the extension length of the piston column is smaller than the half length of the oil supply pipe cavity, a one-way valve is embedded in the oil inlet hole of the oil supply pipe cavity, and the direction of the one-way valve faces the inside of the oil supply pipe cavity.
Furthermore, a one-way valve is embedded in the connection position of the connection port and the oil delivery pipe, and the flow direction of the one-way valve faces towards the oil delivery pipe.
Furthermore, the connecting block is hemispherical, a driving push rod is fixedly mounted on the outer surface of the central shaft on the bottom surface of the driving disc, the driving push rod is of a cam-shaped structure, and the side surface of the driving push rod is tangent to the outer surface of the connecting block.
3. Advantageous effects
Compared with the prior art, the utility model has the advantages that:
(1) compared with the traditional structure, the double-guide-rail structure and the cam bearing structure of the traditional structure are simplified, the cost can be reduced, the replacement frequency of the cam bearing is reduced, the equipment maintenance time is reduced, and the stability of the swing driving mechanism is improved.
(2) This scheme is provided with adjustment mechanism and link mechanism, can be as required, and suitable adjustment straight reciprocating motion's stroke length makes it accord with the production requirement more for the device application scope is wider, is convenient for promote.
(3) This scheme is provided with lubricated mechanism, can be at the in-process that uses, constantly to filling lubricating oil between slide rail and the slider, lubricate the slip of slider, reduce friction and loss to guarantee straight reciprocating motion's smooth and easy nature.
Drawings
FIG. 1 is a schematic perspective view of the present invention;
FIG. 2 is a partial schematic view of the present invention;
FIG. 3 is an exploded view of the lubrication mechanism of the present invention;
FIG. 4 is a schematic cross-sectional view of the lubrication mechanism of the present invention;
FIG. 5 is a schematic view of an adjustment mechanism according to the present invention;
FIG. 6 is an exploded view of the adjustment mechanism of the present invention;
fig. 7 is a schematic structural diagram of the link mechanism of the present invention.
The reference numbers in the figures illustrate:
1. connecting a bracket; 2. mounting a support plate; 3. a drive disk; 4. a slide rail; 5. a slider; 6. connecting a support; 7. a first connecting bolt; 8. a connecting shaft; 9. an adapter; 10. a central link; 11. a telescopic screw; 12. a fisheye joint; 13. a direct current motor; 14. a coupling; 15. adjusting the sliding chute; 16. a slide base; 17. a second connecting bolt; 18. adjusting the screw rod; 19. rotating the cap; 20. driving the push rod; 21. a lubrication groove; 22. oil outlet micropores; 23. sealing the end cover; 24. an oil absorbent cotton block; 25. an oil delivery pipe; 26. an oil transfer hole; 27. an oil supply lumen; 28. a connection port; 29. a piston post; 30. pushing the column; 31. a return spring; 32. connecting blocks; 33. an oil tank.
Detailed Description
The technical solution in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention; it is to be understood that the embodiments described are merely exemplary embodiments, rather than exemplary embodiments, and that all other embodiments may be devised by those skilled in the art without departing from the scope of the present invention.
Example (b):
referring to fig. 1-7, a novel etching machine spray swinging mechanism driving device comprises a connecting support 1 and a mounting support plate 2 mounted inside the connecting support 1, a dc motor 13 is mounted at the top end inside the mounting support plate 2 through the support, a coupling 14 is connected to the power output end of the dc motor 13, a driving disc 3 is fixedly connected to the power output end of the coupling 14 through the mounting support plate 2, the driving disc 3 is rotatably connected to the top surface of the mounting support plate 2, a slide rail 4 is fixedly mounted on the top surface of the mounting support plate 2 away from one side of the driving disc 3, a lubricating mechanism for lubricating the slide rail 4 is arranged between the slide rail 4 and the driving disc 3, a slide block 5 is slidably connected to the top surface of the slide rail 4, a connecting support 6 is fixedly mounted at the top end of the connecting support 6 close to the driving disc 3, a first connecting bolt 7 is fixedly welded to one end of the connecting support 6 close to the driving disc 3, and the first connecting bolt 7 is in transmission connection with the driving disc 3 through a connecting rod mechanism, one end of the connecting rod mechanism is rotatably connected to the first connecting bolt 7, the other end of the connecting rod mechanism is rotatably connected with one side of the top surface of the driving disc 3 through an adjusting mechanism, a connecting shaft 8 is perpendicularly welded to the side surface of the connecting support 6, and an adapter 9 is fixedly mounted at one end, far away from the connecting support 6, of the connecting shaft 8.
Referring to fig. 1-6, the adjusting mechanism includes an adjusting sliding groove 15 arranged on one side of the top surface of the driving disc 3, a sliding seat 16 is embedded in the adjusting sliding groove 15 in a sliding manner, a second connecting bolt 17 is fixedly welded to the top end of the sliding seat 16, an adjusting screw rod 18 is rotatably connected to the adjusting sliding groove 15 by penetrating through the sliding seat 16, the adjusting screw rod 18 is in threaded connection with the sliding seat 16, the distance between the second connecting bolt 17 and the center of the circle of the driving disc 3 can be adjusted by rotating the adjusting screw rod 18, the stroke length of linear motion can be adjusted, and the device can meet the production requirements better.
Referring to fig. 5 and 6, a rotating cap 19 is fixedly installed at one end of the adjusting screw rod 18 penetrating through the driving disc 3, so that the adjusting screw rod 18 can be rotated by a tool through the rotating cap 19, and the adjusting screw rod 18 can be rotated more conveniently.
Referring to fig. 1 and 7, the link mechanism includes a central link 10 disposed between a first connecting bolt 7 and a second connecting bolt 17, and meanwhile, two ends of the central link 10 are symmetrically and threadedly connected with telescopic screws 11, and two telescopic screws 11 are far away from one end of the central link 10 and are fixedly welded with fisheye joints 12, one fisheye joint 12 is rotatably sleeved on the second connecting bolt 17, the other fisheye joint 12 is rotatably sleeved on the first connecting bolt 7, the central link 10 can be rotated forwards or backwards through the access, the telescopic screws 11 are contracted or extended outwards towards the inside of the central link 10, and then the stroke length of the linear motion is changed, so that the device is wider in application range.
Referring to fig. 1-4, the lubricating mechanism includes a lubricating groove 21 provided inside the sliding rail 4 and oil outlet micropores 22 uniformly penetrating the side wall of the sliding rail 4, an oil absorption cotton block 24 is embedded inside the lubricating groove 21, a sealing end cover 23 for blocking the oil absorption cotton block 24 is detachably mounted at one end of the sliding rail 4 close to the driving disc 3, two oil pipes 25 are symmetrically mounted on the sealing end cover 23, oil delivery holes 26 are uniformly formed on the surface of the oil pipes 25, the oil pipes 25 are embedded inside the oil absorption cotton block 24, an oil supply pipe cavity 27 is fixedly mounted at one end of the mounting support plate 2 close to the sealing end cover 23, two connecting ports 28 are provided at one end of the oil supply pipe cavity 27 close to the sealing end cover 23, the connecting ports 28 are connected with the inlet end of the oil pipes 25, a piston column 29 is slidably embedded inside the oil supply pipe cavity 27, a push column 30 is fixedly mounted at one end of the piston column 29 far from the connecting ports 28, one end of the push column 30, far away from the piston column 29, penetrates through the oil supply pipe cavity 27 and is fixedly provided with a connecting block 32, a return spring 31 is fixedly embedded between the side surface of the connecting block 32 and the side surface of the piston column 29, the return spring 31 surrounds the outer surface of the push column 30, and meanwhile, the maximum return elastic force of the return spring 31 is greater than the maximum negative pressure formed by the oil supply pipe cavity 27, so that the piston column 29 can be conveniently reset; the piston column 29 can be pushed to move in the oil supply pipe cavity 27 through the push column 30, the return spring 31 is compressed at the same time, gas in the oil supply pipe cavity 27 is discharged through the oil conveying hole 26, then the piston column 29 is reset under the resilience of the return spring 31, negative pressure is formed in the oil supply pipe cavity 27, oil in the oil tank 33 is sucked into the oil supply pipe cavity 27 through a pipeline, the oil is filled into the oil absorption cotton block 24 through the oil conveying hole 26 under the circulating pushing of the driving push rod 20, the oil outlet micropores 22 gradually flow out, the sliding of the sliding block 5 is lubricated, and the smoothness of the linear reciprocating motion is guaranteed.
Referring to fig. 1 and 2, an oil tank 33 is mounted on the top surface of the mounting plate 2 near the oil supply tube cavity 27, and an oil outlet of the oil tank 33 is communicated with the inside of the oil supply tube cavity 27 through a pipeline, so that oil can be supplied to the inside of the oil supply tube cavity 27 through the oil tank 33.
Referring to fig. 3 and 4, the oil inlet hole of the oil supply tube cavity 27 is disposed at the length center of the oil supply tube cavity 27, and the extension length of the piston column 29 is less than half of the length of the oil supply tube cavity 27, so that oil can be pushed into the oil delivery tube 25 through the piston column 29 after entering, and meanwhile, a check valve is embedded in the oil inlet hole of the oil supply tube cavity 27 and faces the inside of the oil supply tube cavity 27, so that backflow of the oil during pushing can be avoided.
Referring to fig. 3 and 4, a check valve is embedded in the connection portion of the connection port 28 and the oil delivery pipe 25, and the flow direction of the check valve faces the oil delivery pipe 25, so that oil and air can be prevented from flowing back, and a negative pressure chamber can be conveniently formed inside the oil supply pipe cavity 27.
Referring to fig. 3 and 4, the connecting block 32 is hemispherical, the driving push rod 20 is fixedly mounted on the outer surface of the central axis of the bottom surface of the driving disc 3, the driving push rod 20 is in a cam-shaped structure, and the side surface of the driving push rod is tangent to the outer surface of the connecting block 32, so that the contact friction between the connecting block 32 and the driving push rod 20 can be reduced, meanwhile, the driving push rod 20 can circularly push the piston column 29 to move inside the oil supply pipe cavity 27 through the connecting block 32, and the moving stroke is slightly smaller than the length of the piston column 29, so that the oil inlet of the oil supply pipe cavity 27 can be blocked when the piston column 29 moves, and oil leakage is avoided.
When in use: firstly, the sliding stroke length can be adjusted through an adjusting mechanism and a connecting rod mechanism as required to enable the sliding stroke length to be more in line with the production requirements, then a direct current motor 13 drives a driving disc 3 to rotate circumferentially through a coupler 14, meanwhile, the connecting support 6 and a sliding block 5 are pushed to do linear reciprocating motion on a sliding rail 4 through the connecting rod mechanism, and then a connecting shaft 8 and an adapter 9 are pushed to do linear reciprocating motion, so that an etching liquid can be uniformly sprayed on a glass substrate through a nozzle, and the etching uniformity of the glass substrate is guaranteed;
secondly, the driving disc 3 can drive the driving push rod 20 to rotate while rotating, and then the piston column 29 is pushed to move in the oil supply pipe cavity 27 through the push column 30, and the return spring 31 is compressed, so that gas in the oil supply pipe cavity 27 is firstly discharged through the oil delivery hole 26, and then the piston column 29 is reset under the resilience of the return spring 31, so that negative pressure is formed in the oil supply pipe cavity 27, oil in the oil tank 33 is sucked into the oil supply pipe cavity 27 through a pipeline, the oil is filled into the oil absorption cotton block 24 through the oil delivery hole 26 under the circulating pushing of the driving push rod 20, and the oil gradually flows out through the oil outlet micropores 22, so as to lubricate the sliding of the sliding block 5, and thus ensure the smoothness of the linear reciprocating motion.
The foregoing is only a preferred embodiment of the present invention; the scope of the utility model is not limited thereto. Any person skilled in the art should be able to cover the technical scope of the present invention by equivalent or modified solutions and modifications within the technical scope of the present invention.
Claims (9)
1. The utility model provides a novel etching machine sprays wabbler mechanism drive device, includes linking bridge (1) and installs in inside installation extension board (2) of linking bridge (1), its characterized in that: the top end inside the installation support plate (2) is provided with a direct current motor (13) through a support, the power output end of the direct current motor (13) is connected with a coupler (14), the power output end of the coupler (14) penetrates through the fixedly connected driving disc (3) of the installation support plate (2), the driving disc (3) is rotatably connected to the top surface of the installation support plate (2), the top surface of the installation support plate (2) is far away from one side of the driving disc (3) and is fixedly provided with a slide rail (4), a lubricating mechanism used for lubricating the slide rail (4) is arranged between the slide rail (4) and the driving disc (3), the top surface of the slide rail (4) is slidably connected with a slide block (5), the top end of the slide block (5) is fixedly provided with a connection support (6), the top surface of the connection support (6) is close to one end of the driving disc (3) and is fixedly welded with a first connection bolt (7), first connecting bolt (7) with connect through being provided with the link mechanism transmission between drive disc (3), link mechanism wherein one end rotate connect in on first connecting bolt (7), the other end through be provided with adjustment mechanism with drive disc (3) top surface one side is rotated and is connected, connecting support (6) side vertical welding has connecting axle (8), connecting axle (8) are kept away from connecting support (6) one end fixed mounting has adapter (9).
2. The novel etching machine spraying and swinging mechanism driving device as claimed in claim 1, is characterized in that: adjustment mechanism is including seting up in regulation spout (15) of driving disc (3) top surface one side, it has slide (16) to adjust the inside slip embedding of spout (15), slide (16) top fixed weld has second connecting bolt (17), it runs through to adjust spout (15) inside slide (16) are rotated and are connected with accommodate the lead screw (18), accommodate the lead screw (18) with slide (16) threaded connection.
3. The novel etching machine spraying and swinging mechanism driving device as claimed in claim 2, is characterized in that: one end of the adjusting screw rod (18) penetrates through the driving disc (3) and is fixedly provided with a rotating cap (19).
4. The novel etching machine spraying and swinging mechanism driving device as claimed in claim 2, is characterized in that: link mechanism including set up in first connecting bolt (7) with center connecting rod (10) between second connecting bolt (17), center connecting rod (10) both ends symmetry threaded connection has telescopic screw (11), two telescopic screw (11) are kept away from center connecting rod (10) one end is the equal fixed welding of center connecting rod (10) has fisheye to connect (12), one of them fisheye connects (12) to rotate cup joint in on second connecting bolt (17), another fisheye connects (12) to rotate cup joint in on first connecting bolt (7).
5. The novel etching machine spraying and swinging mechanism driving device as claimed in claim 1, is characterized in that: the lubricating mechanism comprises a lubricating groove (21) arranged inside the sliding rail (4) and oil outlet micropores (22) uniformly penetrating the sliding rail (4) and arranged on the side wall of the sliding rail (4), an oil absorption cotton block (24) is embedded in the lubricating groove (21), the sliding rail (4) is close to one end of the driving disc (3), the sealing end cover (23) used for plugging the oil absorption cotton block (24) is detachably mounted at one end of the driving disc (3), two oil conveying pipes (25) are symmetrically mounted on the sealing end cover (23), oil conveying holes (26) are uniformly formed in the surface of each oil conveying pipe (25), each oil conveying pipe (25) is embedded in the oil absorption cotton block (24), an oil supply pipe cavity (27) is fixedly mounted on the sealing end cover (23) and is close to the top surface of the mounting support plate (2), two connecting ports (28) are arranged at one end of the sealing end cover (23), connection port (28) with the entrance point of defeated oil pipe (25) is connected, the inside slip embedding of fuel feeding lumen (27) has piston post (29), piston post (29) are kept away from connection port (28) one end fixed mounting has push post (30), push post (30) are kept away from piston post (29) one end is run through fuel feeding lumen (27) fixed mounting has connecting block (32), connecting block (32) side with fixed embedding has reset spring (31) between piston post (29) side, reset spring (31) encircle in push post (30) surface.
6. The novel etching machine spraying and swinging mechanism driving device as claimed in claim 5, is characterized in that: an oil tank (33) is mounted on one side, close to the oil supply pipe cavity (27), of the top surface of the mounting support plate (2), and oil outlets of the oil tank (33) are communicated with the inside of the oil supply pipe cavity (27) through pipelines.
7. The novel etching machine spraying and swinging mechanism driving device as claimed in claim 6, is characterized in that: the oil supply structure is characterized in that the position of an oil inlet hole of the oil supply pipe cavity (27) is arranged at the length center of the oil supply pipe cavity (27), the extending length of the piston column (29) is smaller than one half of the length of the oil supply pipe cavity (27), a one-way valve is embedded in the oil inlet hole of the oil supply pipe cavity (27), and the direction of the one-way valve faces the inside of the oil supply pipe cavity (27).
8. The novel etching machine spraying and swinging mechanism driving device as claimed in claim 5, is characterized in that: the connecting port (28) is embedded with a one-way valve at the joint with the oil delivery pipe (25), and the flow direction of the one-way valve faces to the oil delivery pipe (25).
9. The novel etching machine spraying and swinging mechanism driving device as claimed in claim 5, is characterized in that: the connecting block (32) is hemispherical, a driving push rod (20) is fixedly mounted on the outer surface of a central shaft on the bottom surface of the driving disc (3), the driving push rod (20) is of a cam-shaped structure, and the side surface of the driving push rod is tangent to the outer surface of the connecting block (32).
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CN202220520719.8U CN216808617U (en) | 2022-03-11 | 2022-03-11 | Novel etching machine sprays wabbler mechanism drive device |
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Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
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CN114455850A (en) * | 2022-03-11 | 2022-05-10 | 山东瑞翼德科技股份有限公司 | Novel etching machine sprays wabbler mechanism drive device |
CN114986327A (en) * | 2022-07-15 | 2022-09-02 | 鹰潭华菱光电仪器有限公司 | Polishing device for telescope processing |
CN116251207A (en) * | 2023-05-15 | 2023-06-13 | 山东中泰医疗器械有限公司 | Outdoor medical disinfection sprinkler |
CN117772416A (en) * | 2024-02-27 | 2024-03-29 | 山东瑞翼德科技股份有限公司 | Plasma cleaning device of etching machine |
CN118326398A (en) * | 2024-06-14 | 2024-07-12 | 江苏唐龙电子科技有限公司 | Spraying mechanism for etching machine |
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2022
- 2022-03-11 CN CN202220520719.8U patent/CN216808617U/en active Active
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN114455850A (en) * | 2022-03-11 | 2022-05-10 | 山东瑞翼德科技股份有限公司 | Novel etching machine sprays wabbler mechanism drive device |
CN114986327A (en) * | 2022-07-15 | 2022-09-02 | 鹰潭华菱光电仪器有限公司 | Polishing device for telescope processing |
CN116251207A (en) * | 2023-05-15 | 2023-06-13 | 山东中泰医疗器械有限公司 | Outdoor medical disinfection sprinkler |
CN117772416A (en) * | 2024-02-27 | 2024-03-29 | 山东瑞翼德科技股份有限公司 | Plasma cleaning device of etching machine |
CN117772416B (en) * | 2024-02-27 | 2024-05-31 | 山东瑞翼德科技股份有限公司 | Plasma cleaning device of etching machine |
CN118326398A (en) * | 2024-06-14 | 2024-07-12 | 江苏唐龙电子科技有限公司 | Spraying mechanism for etching machine |
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