CN216800878U - Fluid infusion calibrating device and fluid infusion system - Google Patents

Abstract

The utility model discloses a liquid supplementing calibration device and a liquid supplementing system, relates to the technical field of battery piece cleaning, and is used for calibrating a preset liquid supplementing deviation. The liquid supplementing calibration device comprises a liquid supplementing unit, a first conversion output unit, a metering unit, a waste liquid disposal unit and a second conversion output unit. The liquid supplementing unit is used for providing cleaning liquid with a preset amount. The inlet of the first conversion output unit is connected with the outlet of the liquid supplementing unit, and the outlet of the first conversion output unit is respectively in controllable communication with the metering unit and the cleaning tank, so that cleaning liquid provided by the liquid supplementing unit can be selectively and quantitatively transferred to the metering unit or the cleaning tank. The metering unit can meter the received cleaning liquid to obtain the measured quantity of the cleaning liquid. The inlet of the second conversion output unit is connected with the outlet of the metering unit, and the outlet of the second conversion output unit is respectively in controllable communication with the waste liquid disposal unit and the cleaning tank, so that the cleaning liquid in the metering unit can be selectively and quantitatively transferred to the waste liquid disposal unit or the cleaning tank.

Description

Fluid infusion calibrating device and fluid infusion system

Technical Field

The utility model relates to the technical field of battery piece cleaning, in particular to a liquid supplementing calibration device and a liquid supplementing system.

Background

In the preparation of crystalline silicon solar cells, silicon wafers are generally contaminated from various aspects, such as equipment, tools, and the environment, during cutting, handling, or processing. At this time, the silicon wafer needs to be cleaned by a cleaning technique. The cleaning technique can be classified into a dry cleaning technique and a wet cleaning technique. The wet cleaning technique is a technique of causing chemical reactions between organic solvents and various chemical reagents and impurities adsorbed on the surface of a silicon wafer to desorb (desorb) the impurities from the surface of the silicon wafer.

When a wet cleaning technology is used for cleaning silicon wafers, a wet cleaning device is usually adopted, a cleaning tank included in the wet cleaning device is filled with cleaning liquid, the silicon wafers are contained in the cleaning liquid, and the cleaning of the silicon wafers is realized by using the cleaning liquid. Along with the continuous consumption of the cleaning liquid, the concentration of the cleaning liquid can be reduced, and at the moment, the cleaning effect can be influenced. In order to keep the concentration of the cleaning solution stable, after a certain number of batches of silicon wafers are cleaned, a preset amount of cleaning solution needs to be added into the cleaning tank.

When the existing machine liquid supplementing tank is used, the liquid supplementing tank is provided with a liquid supplementing prefabricating device, a certain solution volume is preset for one-time liquid supplementing, but after the liquid supplementing prefabricating device is used for a long time, the preset liquid supplementing amount can deviate; how to solve the problem that the set liquid supplementing value data is inconsistent with the actual liquid supplementing value data is a big problem for keeping the concentration of the liquid medicine stable in the industry.

SUMMERY OF THE UTILITY MODEL

The present invention provides a fluid replacement calibration device and a fluid replacement system, which can be used for calibrating a predetermined fluid replacement deviation, and include:

in a first aspect, the present invention provides a fluid infusion calibration apparatus for a cleaning tank, the fluid infusion calibration apparatus includes a fluid infusion unit, a first conversion output unit, a metering unit, a waste fluid disposal unit, and a second conversion output unit. The liquid supplementing unit is used for providing cleaning liquid with a preset amount. The inlet of the first conversion output unit is connected with the outlet of the liquid supplementing unit, and the outlet of the first conversion output unit is respectively in controllable communication with the metering unit and the cleaning tank, so that the cleaning liquid provided by the liquid supplementing unit can be selectively and quantitatively transferred to the metering unit or the cleaning tank. The metering unit can meter the received cleaning liquid to obtain the measured quantity of the cleaning liquid. The inlet of the second conversion output unit is connected with the outlet of the metering unit, and the outlet of the second conversion output unit is respectively in controllable communication with the waste liquid disposal unit and the cleaning tank, so that the cleaning liquid in the metering unit can be selectively and quantitatively transferred to the waste liquid disposal unit or the cleaning tank.

Compared with the prior art, when the liquid supplementing calibration device provided by the utility model is applied to the cleaning tank, the liquid supplementing state and the calibration state can be divided.

When the liquid supplementing calibration device is in a liquid supplementing state, the liquid supplementing unit is communicated with the cleaning tank through the first conversion output unit. At this time, the cleaning liquid with the preset amount provided by the liquid supplementing unit is directly supplemented to the cleaning tank through the first conversion output unit so as to maintain the concentration of the cleaning liquid in the cleaning tank to be stable.

When the liquid supplementing calibration device is in a calibration state, the liquid supplementing unit is communicated with the metering unit through the first conversion output unit, at the moment, the cleaning liquid with the preset amount provided by the liquid supplementing unit is transferred to the metering unit, and the metering unit meters the received cleaning liquid to obtain the measured amount of the cleaning liquid. Under the condition that the measured quantity is less than or equal to the preset quantity, the metering unit is communicated with the cleaning tank through the second conversion output unit, and the cleaning liquid with the measured quantity less than the preset quantity is continuously transferred to the cleaning tank so as to maintain the stable concentration of the cleaning liquid in the cleaning tank. Based on this, the cleaning liquid in the metering unit does not need to be separately processed outside the discharge fluid replacement calibration device. In this case, the waste of the cleaning liquid due to the discharge can be effectively reduced.

And under the condition that the measured quantity is greater than the preset quantity, the metering unit is communicated with the waste liquid disposal unit through the second conversion output unit, and the cleaning liquid of which the measured quantity is greater than the preset quantity is transferred into the waste liquid treatment unit. Under the prerequisite of avoiding measured quantity to be greater than the washing liquid that predetermines the volume and shifting to the washing tank, can effectually avoid the great washing liquid of measured quantity to cause the fluctuation to the washing liquid concentration in the washing tank.

And under the condition that the measured quantity of the cleaning liquid obtained by metering by the metering unit is greater than or less than the preset quantity, adjusting the preset quantity of the cleaning liquid output by the liquid supplementing unit, and recalibrating the adjusted preset quantity until the adjusted preset quantity meets the requirement.

According to the application process, the liquid supplementing calibration device provided by the utility model can effectively realize the calibration function under the condition of meeting the normal liquid supplementing requirement so as to realize the deviation compensation of the cleaning liquid. In addition, in the calibration process, the cleaning solution for calibration can be effectively utilized, so that the waste of resources of the cleaning solution is reduced.

In one implementation, the liquid supplementing unit comprises a liquid supplementing tank and a prefabricated liquid supplementing measuring tool connected with an outlet of the liquid supplementing tank, and the prefabricated liquid supplementing measuring tool is used for measuring a preset amount of cleaning liquid. And the inlet of the first conversion output unit is connected with the outlet of the prefabricated liquid supplementing measuring tool.

As an example, the prefabricated fluid infusion measuring tool is a first valve with a preset flow rate, and the first valve is arranged on an output pipeline of the fluid infusion tank.

Under the condition of adopting above-mentioned technical scheme, in practical application, when prefabricated liquid supplementation measuring tool is washing tank or measuring unit ration supply washing liquid, because first valve has and predetermines the flow, at this moment, only need control the opening time of first valve can realize the volume of presetting the volume washing liquid and get. That is, in the case that the prefabricated liquid supplement measuring tool only comprises the first valve, the measuring of the preset amount of the cleaning liquid can be realized. At this time, the prefabricated fluid infusion measuring tool has the advantage of simple structure, so that the structure of the fluid infusion calibration device can be simplified as a whole.

As another example, the prefabricated fluid replacement gauge includes a first measuring cylinder and a first fluid level sensor disposed on an outer wall of the first measuring cylinder, and the fluid replacement tank stops supplying the cleaning fluid to the first measuring cylinder when the first fluid level sensor determines that the cleaning fluid output by the fluid replacement tank into the first measuring cylinder reaches a preset amount.

Under the condition of adopting above-mentioned technical scheme, the volume of the volume washing liquid is got in the cooperation of first graduated flask first level sensor realization predetermineeing, in practical application, opens the fluid infusion jar in order to shift the washing liquid from the fluid infusion jar to first graduated flask, and under the condition that first graduated flask received the washing liquid, first level sensor real-time supervision first graduated flask received the volume of washing liquid. And when the first liquid level sensor determines that the cleaning liquid output from the liquid supplementing tank into the first measuring cylinder reaches a preset amount, the liquid supplementing tank stops supplying the cleaning liquid to the first measuring cylinder. At this time, the first measuring cylinder measures a preset amount of cleaning liquid.

In the actual use process, when the condition that the liquid supplementing tank excessively transfers the cleaning liquid to the first measuring cylinder exists, and when the first liquid level sensor detects that the cleaning liquid excessively transfers, redundant cleaning liquid can be discharged from the first measuring cylinder, so that the preset amount of the cleaning liquid measured by the first measuring cylinder can meet the requirement. That is, the risk of a deviation between the actual amount of cleaning liquid taken by the first measuring cylinder and the preset amount is reduced. The measuring accuracy of the first measuring cylinder is improved, and after the cleaning liquid in the first measuring cylinder is transferred into the cleaning tank, the concentration stability in the cleaning tank can be ensured. After the cleaning liquid in the first measuring cylinder is transferred to the metering unit, the calibration precision can be improved.

In one implementation, the first switching output unit and/or the second switching output unit is a three-way valve. And the selectable quantitative amount of the cleaning liquid output by the metering unit is transferred to the waste liquid disposal unit or the cleaning tank by the three-way valve. The three-way valve is adopted as a standard component, so that the selective quantitative transfer of the cleaning liquid can be realized, and the effects of simple structure and low use cost are achieved.

As an example, the metering unit includes a second measuring cylinder, the second measuring cylinder is a transparent measuring cylinder, and the cylinder wall of the transparent measuring cylinder is provided with scale marks. The second measuring cylinder is provided with an inlet and an outlet, the inlet is connected with the outlet of the first conversion output unit, and the outlet is connected with the inlet of the second conversion output unit.

Under the condition of adopting the technical scheme, in practical application, the transparent measuring cylinder is used for receiving the cleaning liquid quantitatively transferred from the liquid supplementing unit, and at the moment, the scale marks on the cylinder wall of the transparent measuring cylinder can be manually read to obtain the measured value of the cleaning liquid, so that the cleaning liquid measuring device has the effect of simple operation.

As a second example, at least one second liquid level sensor is arranged on the outer wall of the second measuring cylinder. The second measuring cylinder is provided with an inlet and an outlet, the inlet is connected with the outlet of the first conversion output unit, and the outlet is connected with the inlet of the second conversion output unit.

Under the condition of adopting the technical scheme, in practical application, the second measuring cylinder can be a transparent measuring cylinder or a non-transparent measuring cylinder, the second measuring cylinder is used for receiving the cleaning liquid quantitatively transferred from the liquid supplementing unit, and at the moment, the second liquid level sensor can be used for acquiring the measured value of the cleaning liquid in the second measuring cylinder, so that the measuring device has the advantage of high measuring precision.

As a third example, the metering unit includes a container and a scale disposed below the container. The container has an inlet connected to the outlet of the first switching output unit and an outlet connected to the inlet of the second switching output unit.

In a second aspect, the present invention further provides a fluid infusion system, which includes a signal collecting device for collecting a fluid infusion signal. And the data processing device is in communication connection with the signal acquisition device and is used for generating a liquid supplementing control signal under the condition of receiving the liquid supplementing signal. And the communication device is in communication connection with the data processing device and is used for receiving and sending the fluid infusion control signal to the fluid infusion calibration device. And the liquid supplementing calibration device is in communication connection with the communication device, and supplements a preset amount of cleaning liquid to the cleaning tank under the control of the liquid supplementing control signal when the liquid supplementing calibration device is in a liquid supplementing state. And when the liquid supplementing calibration device is in a calibration state, discharging a preset amount of cleaning liquid to the metering unit.

The fluid infusion calibration device is the fluid infusion calibration device according to any implementation manner/example of the first aspect.

As an example, the signal collecting device is a photoelectric sensor, and is configured to collect an optical signal in the cleaning tank within a preset time interval, and generate the fluid infusion signal when a deviation value of the optical signal is greater than or equal to a preset deviation value.

As a second example, the signal collecting device is an ultrasonic sensor, and is configured to collect the concentration of the cleaning solution in the cleaning tank within a preset time interval, and generate the fluid replacement signal when the deviation value of the concentration is greater than or equal to the preset deviation value.

In one implementation manner, the fluid infusion system further includes a control device, and the control device is in communication connection with the fluid infusion calibration device and is used for controlling the fluid infusion calibration device to be in a fluid infusion state or a calibration state.

In one implementation, the fluid replacement system has a plurality of fluid replacement periods, and a calibration node is formed between two adjacent fluid replacement periods. The control device controls the liquid supplementing calibration device to be in a liquid supplementing state in the liquid supplementing period. And the control device controls the liquid supplementing calibration device to be in a calibration state when calibrating the node.

Compared with the prior art, the beneficial effects of the fluid infusion system provided by the utility model are the same as those of the fluid infusion calibration device in the technical scheme, and the details are not repeated here.

Drawings

The accompanying drawings, which are included to provide a further understanding of the utility model and are incorporated in and constitute a part of this specification, illustrate embodiments of the utility model and together with the description serve to explain the utility model and not to limit the utility model. In the drawings:

fig. 1 is a schematic structural diagram of a fluid infusion calibration apparatus according to an embodiment of the present invention;

FIG. 2 is a schematic structural diagram of a metering unit according to an embodiment of the present invention;

fig. 3 is a schematic structural diagram of another metering unit according to an embodiment of the present invention.

Reference numerals:

1-a cleaning tank;

20-liquid supplement unit, 21-first conversion output unit, 22-metering unit,

23-a waste liquid disposal unit, 24-a second conversion output unit;

220-a second measuring cylinder, 221-a second liquid level sensor, 222-a container,

223-weighing machine.

Detailed Description

In order to make the technical problems, technical solutions and advantageous effects to be solved by the present invention more clearly apparent, the present invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the utility model and do not limit the utility model.

It will be understood that when an element is referred to as being "secured to" or "disposed on" another element, it can be directly on the other element or be indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or be indirectly connected to the other element.

Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless specifically defined otherwise. The meaning of "a number" is one or more unless specifically limited otherwise.

In the description of the present invention, it is to be understood that the terms "upper", "lower", "front", "rear", "left", "right", and the like indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the referred device or element must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present invention.

In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.

At present, before a wet cleaning technology is adopted to clean a silicon wafer, cleaning solution with initial concentration needs to be contained in a cleaning tank of cleaning equipment. When the silicon wafer is cleaned, the silicon wafer is accommodated in the cleaning tank and soaked in the cleaning solution. The cleaning solution is continuously consumed along with the continuous chemical reaction between the cleaning solution and the impurities on the surface of the silicon wafer. At this time, the volume ratio or the weight ratio of the effective chemicals in the cleaning solution will be smaller and smaller. That is, the concentration of the cleaning liquid will be smaller and smaller. In order to maintain the proportion (volume ratio or weight ratio) of the effective chemicals in the cleaning solution, i.e. to maintain the concentration of the cleaning solution stable, a preset amount of cleaning solution needs to be timely replenished into the cleaning tank after one or several cleaning cycles.

The fluid infusion device that prior art provided generally includes the fluid infusion jar, and the splendid attire has the washing liquid that has certain concentration in the fluid infusion jar. The fluid infusion tanks are all provided with fluid infusion prefabricating devices.

For example, the liquid replenishing prefabricating device can be that a valve with a certain flow rate is installed on an output pipeline of the liquid replenishing tank, a preset amount of cleaning liquid is obtained by controlling the opening time of the valve, and the preset amount of cleaning liquid is further replenished into the cleaning tank. At this point, the supply of the cleaning liquid in the cleaning tank is completed to maintain the concentration of the cleaning liquid in the cleaning tank stable.

However, as the service life of the replenishment liquid preparation device increases, a deviation occurs between the actual amount of the cleaning liquid to be replenished into the cleaning tank and the preset amount. For example, when the valve attached to the pipeline of the fluid reservoir is a pneumatic valve, if the amount of air for driving the pneumatic valve to open and close is insufficient, the opening degree of the pneumatic valve may be reduced. At this time, the actual amount of the cleaning liquid supplied into the cleaning tank through the pneumatic valve within the preset time may be less than the preset amount. Therefore, the concentration of the cleaning liquid in the cleaning tank becomes small, and the cleaning effect of the cleaning liquid on the silicon wafer becomes poor.

For example, since the cleaning solution generally has a certain corrosivity, when the valve is corroded, the valve cannot timely block the supply of the cleaning solution from the solution replenishing tank to the cleaning tank when the valve is closed, and at this time, the concentration of the cleaning solution in the cleaning tank becomes high, and the cleaning solution may excessively clean the silicon wafer, thereby affecting the quality of the silicon wafer.

Therefore, how to solve the problem that the preset amount of the cleaning solution is inconsistent with the actual amount is a big problem that the industry keeps the concentration of the cleaning solution in the cleaning tank stable.

Although the prior art also provides a fluid replacement calibration device, in actual use, a manual hand-held metering unit is required to measure the cleaning fluid from the fluid replacement preparation device, and then read/acquire the measured amount of the cleaning fluid in the metering unit. It should be understood that the cleaning solution is generally a chemical, and there is a risk of injury to the operator's body when the cleaning solution is measured from the fluid replacement preparation unit by manually holding the metering unit.

In order to reduce the risk of injury to the operator's body from the above-mentioned operations, in practical applications, the operator needs to wear protective clothing. At this time, there is a problem that the operation by one person is inconvenient. That is, at least two operators are required to participate in the process of measuring the cleaning liquid. Wherein, one person operates the board, and the measurement unit is handed to another person and is received the washing liquid. Based on this, there is a problem that it takes time and labor.

After the measuring unit measures the cleaning liquid and reads/acquires the measured amount of the cleaning liquid, the prior art processes the cleaning liquid in the measuring unit by directly pouring the cleaning liquid into a waste liquid tank and the like. In this case, the cleaning liquid cannot be reused, and thus there is a problem that the cleaning liquid is wasted.

In order to solve the above technical problems, an embodiment of the present invention provides a fluid infusion calibration apparatus.

Referring to fig. 1, the fluid infusion calibration apparatus provided by the embodiment of the present invention is applied to a cleaning tank 1, and includes a fluid infusion unit 20, a first converting and outputting unit 21, a metering unit 22, a waste liquid disposal unit 23, and a second converting and outputting unit 24. The fluid infusion unit 20 is used for providing a preset amount of cleaning fluid. The inlet of the first conversion output unit 21 is connected with the outlet of the liquid supplementing unit 20, and the outlet of the first conversion output unit 21 is respectively in controllable communication with the metering unit 22 and the cleaning tank 1, so that the cleaning liquid provided by the liquid supplementing unit 20 can be selectively and quantitatively transferred to the metering unit 22 or the cleaning tank 1. The metering unit 22 is capable of metering the received cleaning liquid to obtain a measured amount of cleaning liquid. The inlet of the second switching output unit 24 is connected with the outlet of the metering unit 22, and the outlet of the second switching output unit 24 is respectively in controllable communication with the waste liquid disposal unit 23 and the cleaning tank 1, so that the cleaning liquid in the metering unit 22 can be selectively and quantitatively transferred to the waste liquid disposal unit 23 or the cleaning tank 1.

In order to more clearly understand how the fluid replacement calibration device provided by the embodiment of the present invention is applied to the cleaning tank 1, a specific embodiment will be described below, and it should be understood that the following description is only for explanation and not for limitation.

For example, the volume and concentration of the cleaning solution in the cleaning tank 1 need to be constant at 10L and 20%, and after a cleaning cycle is completed (a cleaning cycle may be a group of silicon wafers or a plurality of groups of silicon wafers), the concentration of the cleaning solution is reduced to 10% (after a cleaning cycle is completed, the concentration of the cleaning solution in the cleaning tank 1 can be detected in real time by any existing concentration detection device). At this time, a cleaning solution with a preset amount needs to be supplied into the cleaning tank 1 by the solution replenishing unit 20, and the solubility of the cleaning solution needs to be greater than the concentration of the original cleaning solution in the cleaning tank 1, and may be 40%, for example. When the concentration of the cleaning solution in the cleaning tank 1 is reduced to 10%, the preset amount x of the cleaning solution that the solution supplementing unit 20 needs to provide to the cleaning tank 1 is:

(40％*x+10L*10％)/(x+10L)＝20％

that is, the preset amount x is 0.5L.

In case that the preset amount x is determined to be 0.5L, the liquid replenishment unit 20 controllably transfers 0.5L of the cleaning liquid to the metering unit 22 or the cleaning bath 1. Specifically, as mentioned above, a fluid infusion node may be formed between adjacent cleaning cycles, and a calibration node may be formed between two adjacent fluid infusion nodes. That is, at the fluid replacement node, 0.5L of the cleaning solution supplied from the fluid replacement unit 20 can be transferred to the cleaning tank 1 to maintain the concentration in the cleaning tank 1 stable at 20%. At this time, the above state may be defined as a fluid replacement state. At the calibration node, 0.5L of the cleaning solution provided by the solution replenishing unit 20 may be transferred to the measuring unit 22, so as to obtain an actual measurement value of the cleaning solution by the measuring unit 22. At this time, the above state may be defined as a calibration state.

After the metering unit 22 acquires the preset amount of 0.5L of the cleaning liquid, a real measurement of the cleaning liquid may be acquired by the metering unit 22.

As an example, in the case that the measured amount is determined to be less than 0.5L, the amount of the cleaning solution output by the solution replenishing unit 20 may be adjusted such that the output amount of the cleaning solution after the adjustment is greater than the previous output amount.

As another example, in the case where the measured amount is determined to be greater than 0.5L, the amount of the cleaning liquid output by the liquid replenishment unit 20 may be adjusted such that the output amount of the cleaning liquid after the adjustment is smaller than the previous output amount.

It should be understood that the amount of cleaning fluid output by the fluid replacement unit 20 is not adjusted once and needs to be calibrated again to ensure that the actual amount of cleaning fluid output by the fluid replacement unit 20 is equal to the preset amount of 0.5L.

Compared with the prior art, when the liquid supplementing calibration device provided by the utility model is applied to the cleaning tank 1, the liquid supplementing state and the calibration state can be divided.

When the fluid infusion calibration device is in the fluid infusion state, the fluid infusion unit 20 is communicated with the cleaning tank 1 through the first conversion output unit 21. At this time, the cleaning solution with a preset amount supplied by the solution replenishment unit 20 is directly replenished to the cleaning tank 1 through the first switching output unit 21 to maintain the concentration of the cleaning solution in the cleaning tank 1 stable.

When the fluid infusion calibration device is in a calibration state, the fluid infusion unit 20 is communicated with the metering unit 22 through the first conversion output unit 21, at this time, the cleaning fluid with a preset amount provided by the fluid infusion unit 20 is transferred into the metering unit 22, and the metering unit 22 meters the received cleaning fluid to obtain an actually measured amount of the cleaning fluid. Under the condition that the measured quantity is less than or equal to the preset quantity, the metering unit 22 is communicated with the cleaning tank 1 through the second conversion output unit 24, and the cleaning solution of which the measured quantity is less than the preset quantity is continuously transferred to the cleaning tank 1, so as to maintain the concentration of the cleaning solution in the cleaning tank 1 to be stable. Based on this, the cleaning liquid in the metering unit 22 does not need to be separately processed as a process outside the discharge fluid replacement calibration device. In this case, the waste of the cleaning liquid due to the discharge can be effectively reduced.

In the case that the measured quantity is greater than the preset quantity, the metering unit 22 communicates with the waste liquid disposal unit 23 through the second conversion output unit 24, and the cleaning liquid of which the measured quantity is greater than the preset quantity is transferred to the waste liquid disposal unit. Under the prerequisite of avoiding measured quantity to be greater than the washing liquid that predetermines the volume and shifting to in the washing tank 1, can effectually avoid the great washing liquid of measured quantity to cause the fluctuation to the washing liquid concentration in the washing tank 1.

And under the condition that the measured quantity of the cleaning liquid obtained by the metering unit 22 is greater than or less than the preset quantity, adjusting the preset quantity of the cleaning liquid output by the liquid supplementing unit 20, and recalibrating the adjusted preset quantity until the adjusted preset quantity meets the requirement.

From the application processes, the fluid infusion calibration device provided by the utility model can effectively realize the calibration function under the condition of meeting the normal fluid infusion so as to realize the deviation compensation of the cleaning fluid. In addition, in the calibration process, the cleaning solution for calibration can be effectively utilized, so that the waste of resources of the cleaning solution is reduced. In addition, since the first switching output unit 21 is used to realize the controllable communication between the liquid replenishing unit 20 and the cleaning tank 1 and the metering unit 22, and the second switching output unit 24 is used to realize the controllable communication between the metering unit 22 and the cleaning tank 1 and the waste liquid disposal unit 23. That is, no matter in the liquid replenishment state or the calibration state, the replenishment of the cleaning liquid into the cleaning tank 1 and the transfer of the cleaning liquid to the metering unit 22 can be realized without a human operator directly contacting the cleaning liquid. In this case, the risk of damage to the health of the operator due to the operator directly contacting the cleaning liquid can be reduced. Moreover, the liquid can be replenished or calibrated by one person, so the device also has the advantages of time saving and labor saving.

Referring to fig. 1, as a possible implementation manner, the fluid infusion unit 20 includes a fluid infusion tank (not shown in the figure) and a pre-made fluid infusion gauge (not shown in the figure) connected to an outlet of the fluid infusion tank, and the pre-made fluid infusion gauge is used for measuring a preset amount of cleaning fluid. The inlet of the first conversion output unit 21 is connected with the outlet of the prefabricated liquid supplementing measuring tool.

Referring to fig. 1, the solution replenishing tank is used for storing cleaning solution, and has an input pipeline and an inlet for filling the cleaning solution into the solution replenishing tank, and an outlet pipeline and an output pipeline for transferring the cleaning solution to the prefabricated solution replenishing measuring tool. As mentioned above, the cleaning liquid is typically a chemical agent, which inevitably has a certain corrosiveness. Based on this, can coat corrosion-resistant material layer on the inner wall of fluid infusion jar, under the circumstances that reduces fluid infusion jar and be corroded, can improve the life of fluid infusion jar. The fluid replacement tank may also be provided with a pump for delivering the cleaning fluid. When the liquid replenishing pump is used specifically, an input pipeline of the pump can be communicated into the liquid replenishing tank through an outlet of the liquid replenishing tank, and an output pipeline of the pump can be regarded as an output pipeline of the liquid replenishing tank at the moment. In this case, the pump may have an output line connected to an inlet of the pre-manufactured fluid replacement gauge. The outlet of the prefabricated liquid supplementing measuring tool is connected with the inlet of the first conversion output unit 21.

The form of the pre-fabricated fluid infusion gauge is various and is not limited herein.

Referring to fig. 1, as an example, the pre-manufactured fluid replacement measure may be a first valve (not shown) disposed on an output line of the fluid replacement tank, the first valve having a predetermined flow rate. For example, when the preset amount of the cleaning solution that the pre-manufactured fluid replacement gauge needs to transfer to the cleaning tank 1 or the metering unit 22 is 0.5L, and the preset flow rate of the first valve is 1L/min, the opening time of the first valve may be controlled to be 0.5min, so as to ensure that the output of the pre-manufactured fluid replacement gauge meets the requirement of the preset amount of 0.5L.

When the fluid infusion calibration device is in the calibration state, the valve is opened for 0.5min, and the first switching output unit 21 transfers a predetermined amount of 0.5L of the cleaning fluid to the metering unit 22. If the measured value of the cleaning liquid measured by the measuring unit 22 is 0.45L, it indicates that the measured value of the cleaning liquid output by the prefabricated liquid supplementing measuring tool is smaller than the preset value, i.e. the actual flow rate of the first valve is 0.9L/min. At this time, in order to ensure that the amount of the cleaning liquid output by the first valve meets the requirement that the preset amount is 0.5L, the opening time of the first valve needs to be adjusted to 0.56 min. I.e. the opening time of the first valve needs to be extended by 0.06 min.

Referring to fig. 1, it can be seen from the above application process that when the prefabricated liquid supplement measuring tool quantitatively supplies the cleaning liquid to the cleaning tank 1 or the measuring unit 22, since the first valve has a preset flow rate, the preset amount of the cleaning liquid can be measured only by controlling the opening time of the first valve. That is to say, under the condition that prefabricated fluid infusion measuring tool only includes first valve, can realize the volume of predetermineeing the washing liquid volume. At this time, the prefabricated fluid infusion measuring tool has the advantage of simple structure, so that the structure of the fluid infusion calibration device can be simplified as a whole. And the preset amount of the cleaning liquid can be adjusted by controlling the opening time of the first valve, and the cleaning liquid valve has the advantage of convenient and quick adjustment.

As another example, the prefabricated fluid infusion gauge includes a first measuring cylinder and a first fluid level sensor disposed on an outer wall of the first measuring cylinder, and the fluid infusion tank stops supplying the cleaning fluid to the first measuring cylinder when the first fluid level sensor determines that the cleaning fluid output by the fluid infusion tank into the first measuring cylinder reaches a preset amount.

The measuring of volume washing liquid is predetermine in the cooperation of first graduated flask first level sensor realization, in practical application, opens the fluid infusion jar and shifts the washing liquid to first graduated flask from the fluid infusion jar in, under the condition that first graduated flask received the washing liquid, the volume of the washing liquid that first level sensor real-time supervision first graduated flask received. When the first liquid level sensor determines that the cleaning liquid output from the liquid supplementing tank into the first measuring cylinder reaches a preset amount, the liquid supplementing tank stops supplying the cleaning liquid to the first measuring cylinder. At this time, the first measuring cylinder measures a preset amount of cleaning liquid.

In the actual use process, when the condition that the liquid supplementing tank excessively transfers the cleaning liquid to the first measuring cylinder exists, and when the first liquid level sensor detects that the cleaning liquid excessively transfers, redundant cleaning liquid can be discharged from the first measuring cylinder, so that the preset amount of the cleaning liquid measured by the first measuring cylinder can meet the requirement. That is, the risk of a deviation between the actual amount of cleaning fluid measured by the first measuring cylinder and the preset amount is reduced. The measuring accuracy of the first measuring cylinder is improved, and after the cleaning liquid in the first measuring cylinder is transferred into the cleaning tank, the concentration stability in the cleaning tank can be ensured. After the cleaning liquid in the first measuring cylinder is transferred to the metering unit, the calibration precision can be improved.

Referring to fig. 1, as a possible implementation manner, the first switching output unit 21 and/or the second switching output unit 24 is a three-way valve. The cleaning liquid provided by the liquid replenishing unit 20 is selectively and quantitatively transferred to the metering unit 22 or the cleaning tank 1 by using a three-way valve, and the cleaning liquid outputted by the metering unit is selectively and quantitatively transferred to the waste liquid disposal unit 23 or the cleaning tank 1 by using a three-way valve. The three-way valve is adopted as a standard component, so that the selective quantitative transfer of the cleaning liquid can be realized, and the effects of simple structure and low use cost are achieved.

Referring to fig. 2, as a possible implementation manner, the metering unit 22 includes a second measuring cylinder 220, the second measuring cylinder 220 is a transparent measuring cylinder, and the cylinder wall of the transparent measuring cylinder is provided with scale lines. The second measuring cylinder 220 has an inlet connected to the outlet of the first switching output unit 21 and an outlet connected to the inlet of the second switching output unit 221.

Referring to fig. 1 and 2, in practical application, in a calibration state, the cleaning liquid output by the liquid replenishment unit 20 is transferred into the second measuring cylinder 220 through the outlet of the first conversion output unit 21 and the inlet of the second measuring cylinder 220. Because the second measuring cylinder 220 is a transparent measuring cylinder and has scale marks thereon, at this time, the volume of the cleaning liquid in the second measuring cylinder 220 can be manually read to obtain the measured amount of the cleaning liquid. On the basis, the relationship between the measured amount and the preset amount of the cleaning liquid measured by the second measuring cylinder 220 is manually judged. And then the amount of the cleaning liquid output by the liquid replenishing unit 20 is adjusted to meet the requirement of the preset amount. From the application process, the transparent measuring cylinder with the scale lines is adopted, actual measurement of the cleaning liquid is read and judged manually, and the transparent measuring cylinder has the effects of simplicity in operation and low cost.

Referring to fig. 1 and 2, as a possible implementation, at least one second liquid level sensor 221 is disposed on an outer wall of the second measuring cylinder 220. The second measuring cylinder 220 has an inlet connected to the outlet of the first switching output unit 21 and an outlet connected to the inlet of the second switching output unit 24. It should be noted that, in this case, the second measuring cylinder 220 may be a transparent measuring cylinder or an opaque measuring cylinder.

Referring to fig. 1 and 2, in practical application, in a calibration state, the cleaning liquid output by the liquid replenishment unit 20 is transferred into the second measuring cylinder 220 through the outlet of the first conversion output unit 21 and the inlet of the second measuring cylinder 220. At this time, the second liquid level sensor 221 may automatically acquire an actual measurement value of the cleaning liquid in the second measuring cylinder 220. When the measured value is obtained, manual participation is not needed, so that the method has the advantage of high measurement precision.

Referring to fig. 1 and 3, as one possible implementation, the metering unit 22 includes a container 222 and a weigher 223 disposed below the container 222. The container 222 has an inlet connected to the outlet of the first switching output unit 21 and an outlet connected to the inlet of the second switching output unit 24.

Referring to fig. 1 and 3, in practical applications, in a calibration state, the cleaning solution output by the solution supplementing unit 20 is transferred into the container 222 through the outlet of the first switching output unit 21 and the inlet of the container 222. The weighing device 223 weighs the cleaning liquid contained in the container 222, and then converts the weight into a volume of the cleaning liquid.

In a second aspect, an embodiment of the present invention further provides a fluid infusion system, where the fluid infusion system includes a signal acquisition device, and is configured to acquire a fluid infusion signal. And the data processing device is in communication connection with the signal acquisition device and is used for generating a liquid supplementing control signal under the condition of receiving the liquid supplementing signal. And the communication device is in communication connection with the data processing device and is used for receiving and sending the fluid infusion control signal to the fluid infusion calibration device. And the liquid supplementing calibration device is in communication connection with the communication device, and supplements a preset amount of cleaning liquid to the cleaning tank under the control of the liquid supplementing control signal when the liquid supplementing calibration device is in a liquid supplementing state. And when the liquid supplementing calibration device is in a calibration state, discharging a preset amount of cleaning liquid to the calibration unit. The fluid infusion calibration device is the fluid infusion calibration device according to any one embodiment of the first aspect.

In practical application, the signal acquisition device can be used for acquiring the state change in the cleaning tank in real time to obtain a liquid supplementing signal.

For example, when the signal collection device is a photoelectric sensor, the photoelectric sensor can be used to collect optical signals in the cleaning tank within a preset time interval. It should be understood that the predetermined time interval may be the time required for one cleaning cycle or an integer multiple of the time required for one cleaning cycle. When the silicon wafer is cleaned in the cleaning tank and taken out of the cleaning tank, the light intensity around the cleaning tank changes, for example, when the silicon wafer is taken out of the cleaning tank and gradually gets away from the cleaning tank, the shielding of the silicon wafer around the cleaning tank gradually changes into the shielding of no silicon wafer. At this time, the intensity of light around the cleaning tank is changed from dark to strong. The photoelectric sensor gathers light signal and generates the deviation value, when the deviation value is greater than or equal to and predetermines the deviation value, can generate the fluid infusion signal.

For another example, when the signal collection device is an ultrasonic sensor, the concentration of the cleaning solution in the cleaning tank may be collected at predetermined time intervals, and the fluid replacement signal may be generated when a deviation value of the concentration (where the deviation value refers to a deviation between an actually measured value of the concentration of the cleaning solution in the cleaning tank and a predetermined value) is greater than or equal to a predetermined deviation value.

Two ways of obtaining the fluid replacement signal are listed above, and it should be understood that the two ways are not limited to the above two ways.

After the signal acquisition device acquires the fluid infusion signal, the fluid infusion signal can be sent to the data processing device, and the data processing device generates a fluid infusion control signal and sends the fluid infusion control signal to the fluid infusion calibration device through the communication device under the condition that the data processing device receives the fluid infusion signal.

As mentioned above, the fluid replacement calibration device has a fluid replacement state and a calibration state. When the fluid infusion calibration device is in the fluid infusion state and in the calibration state, the fluid infusion calibration device can be automatically controlled by the control device and can also be manually controlled. For example, after the cleaning tank finishes cleaning N batches of silicon wafers, the fluid replacement calibration apparatus may be placed in a fluid replacement state, where N may be 1, 2, 3, or 4. The fluid replacement calibration apparatus may be placed in a calibration state after the cleaning tank is operated for N months, where N may be 1, 2, 3, or 4, etc. When the control device is adopted for automatic control, the control device is in communication connection with the liquid supplementing calibration device and is used for controlling the liquid supplementing calibration device to be in a liquid supplementing state and a calibration state. It should be understood that the fluid replacement system has a plurality of fluid replacement periods, and a calibration node is formed between two adjacent fluid replacement periods. The control device controls the liquid supplementing calibration device to be in a liquid supplementing state in the liquid supplementing period. And the control device controls the liquid supplementing calibration device to be in a calibration state when calibrating the node.

When the liquid supplementing calibration device is in a liquid supplementing state, the liquid supplementing calibration device supplements a preset amount of cleaning liquid to the cleaning tank under the control of the liquid supplementing control signal. And when the liquid supplementing calibration device is in a calibration state, discharging a preset amount of cleaning liquid to the metering unit.

In the foregoing description of embodiments, the particular features, structures, materials, or characteristics may be combined in any suitable manner in any one or more embodiments or examples.

The above description is only for the specific embodiments of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art can easily conceive of the changes or substitutions within the technical scope of the present invention, and all the changes or substitutions should be covered within the scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the appended claims.

Claims (10)

1. The utility model provides a fluid infusion calibrating device, is applied to the washing tank, its characterized in that includes: the device comprises a liquid supplementing unit, a first conversion output unit, a metering unit, a waste liquid disposal unit and a second conversion output unit;

the liquid supplementing unit is used for providing cleaning liquid with a preset amount;

the inlet of the first conversion output unit is connected with the outlet of the liquid supplementing unit, and the outlet of the first conversion output unit is respectively in controllable communication with the metering unit and the cleaning tank, so that the cleaning liquid provided by the liquid supplementing unit can be selectively and quantitatively transferred to the metering unit or the cleaning tank;

the metering unit can meter the received cleaning liquid to obtain the measured quantity of the cleaning liquid;

the inlet of the second conversion output unit is connected with the outlet of the metering unit, and the outlet of the second conversion output unit is respectively in controllable communication with the waste liquid disposal unit and the cleaning tank, so that the cleaning liquid in the metering unit can be selectively and quantitatively transferred to the waste liquid disposal unit or the cleaning tank.

2. The fluid infusion calibration device according to claim 1, wherein the fluid infusion unit comprises a fluid infusion tank and a prefabricated fluid infusion measuring tool connected with an outlet of the fluid infusion tank, and the prefabricated fluid infusion measuring tool is used for measuring a preset amount of cleaning fluid; and the inlet of the first conversion output unit is connected with the outlet of the prefabricated liquid supplementing measuring tool.

3. The fluid infusion calibration device according to claim 2, wherein the pre-manufactured fluid infusion measuring tool is a first valve with a preset flow rate, and the first valve is arranged on an output pipeline of the fluid infusion tank; or, the prefabricated liquid supplementing measuring tool comprises a first measuring cylinder and a first liquid level sensor arranged on the outer wall of the first measuring cylinder, and when the first liquid level sensor determines that the cleaning liquid output into the first measuring cylinder from the liquid supplementing tank reaches a preset amount, the liquid supplementing tank stops supplying the cleaning liquid to the first measuring cylinder.

4. The fluid infusion calibration device according to claim 1, wherein the first switching output unit and/or the second switching output unit is a three-way valve.

5. The fluid infusion calibration device according to claim 1, wherein the metering unit comprises a second measuring cylinder, the second measuring cylinder is a transparent measuring cylinder, and the cylinder wall of the transparent measuring cylinder is provided with scale marks; or at least one second liquid level sensor is arranged on the outer wall of the second measuring cylinder;

the second measuring cylinder is provided with an inlet and an outlet, the inlet is connected with the outlet of the first conversion output unit, and the outlet is connected with the inlet of the second conversion output unit.

6. The fluid replacement calibration device according to claim 1, wherein the metering unit comprises a container and a weigher disposed below the container; the container has an inlet connected to the outlet of the first switching output unit and an outlet connected to the inlet of the second switching output unit.

7. The fluid infusion system is characterized by comprising a signal acquisition device, a signal acquisition device and a signal processing device, wherein the signal acquisition device is used for acquiring fluid infusion signals;

the data processing device is in communication connection with the signal acquisition device and is used for generating a liquid supplementing control signal under the condition of receiving the liquid supplementing signal;

the communication device is in communication connection with the data processing device and is used for receiving and sending a fluid infusion control signal to the fluid infusion calibration device;

the liquid supplementing calibration device is in communication connection with the communication device, and supplements a preset amount of cleaning liquid to the cleaning tank under the control of the liquid supplementing control signal when the liquid supplementing calibration device is in a liquid supplementing state; when the liquid supplementing calibration device is in a calibration state, discharging a preset amount of cleaning liquid to the metering unit; the fluid replacement calibration device is the fluid replacement calibration device of any one of claims 1 to 6.

8. The fluid infusion system of claim 7, wherein the signal collection device is a photo sensor for collecting optical signals in the cleaning tank within a predetermined time interval, and generating the fluid infusion signal when a deviation value of the optical signals is greater than or equal to a predetermined deviation value; and/or the presence of a gas in the gas,

the signal acquisition device is an ultrasonic sensor and is used for acquiring the concentration of cleaning liquid in the cleaning tank within a preset time interval, and when the deviation value of the concentration is greater than or equal to the preset deviation value, the liquid supplementing signal is generated.

9. The fluid replacement system of claim 7, further comprising a control device in communication with the fluid replacement calibration device for controlling the fluid replacement calibration device to be in a fluid replacement state or a calibration state.

10. The fluid replacement system according to claim 9, wherein the fluid replacement system has a plurality of fluid replacement periods, and a calibration node is formed between two adjacent fluid replacement periods; the control device controls the liquid supplementing calibration device to be in a liquid supplementing state in the liquid supplementing period; and the control device controls the liquid supplementing calibration device to be in a calibration state when the calibration node is used.

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