CN216800442U - Improve inhomogeneous pump valve structure of spreading machine volume of gluing - Google Patents
Improve inhomogeneous pump valve structure of spreading machine volume of gluing Download PDFInfo
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- CN216800442U CN216800442U CN202123058902.5U CN202123058902U CN216800442U CN 216800442 U CN216800442 U CN 216800442U CN 202123058902 U CN202123058902 U CN 202123058902U CN 216800442 U CN216800442 U CN 216800442U
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- check valves
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Abstract
The utility model provides a pump valve structure for improving uneven glue amount of a glue spreader, which comprises a glue pump, at least two glue dripping heads and check valves with the number corresponding to that of the glue dripping heads, wherein the glue pump is communicated with the check valves through a multi-way joint, and the check valves are communicated with the glue dripping heads correspondingly.
Description
Technical Field
The utility model relates to the technical field of photoelectric production, in particular to a pump valve structure for improving uneven glue amount of a glue spreader.
Background
The glue spreader belongs to an important instrument in the photolithography process. When the photoresist is coated by rotation, the axis of the rotation carrier provides a suitable vacuum to adsorb the wafer above, and drives the wafer to rotate, so that the photoresist sprayed on the wafer moves to the periphery of the wafer due to centrifugal force, and finally the photoresist layer with uniform thickness is formed. In order to guarantee the homogeneity of photoresist layer, the spreading machine in the trade all is one and glues head of glue pump control, if let a gluey pump on the spreading machine correspond a plurality of glue heads that drip, though can reduce the cost, but produce the uneven problem of volume of gluing easily when a glue head supplies glue alone, for example, CND spreading machine's gluey pump is one and drags three modes, the work of three glue heads of a pumping control, so the pumping supplies when gluing alone to one of them glue head, have partly glue flow in two other glue head's pipeline, thereby lead to the glue volume that three glue head was told all inaccurate. The inaccurate glue amount can result in more or less glue coated on the wafer surface, which leads to the rework of the wafer due to uneven glue coating, and affects the wafer productivity and production cost.
SUMMERY OF THE UTILITY MODEL
The technical problem to be solved by the utility model is as follows: the pump valve structure for improving the uneven glue amount of the glue spreader can ensure that glue discharging is accurate and even under the condition that one glue pump is used for dripping a plurality of glue heads.
In order to solve the technical problems, the technical scheme adopted by the utility model is as follows:
the pump valve structure comprises a glue pump, at least two glue dripping heads and check valves, wherein the check valves correspond to the glue dripping heads in quantity, the glue pump is communicated with the check valves through a multi-way connector, and the check valves correspond to the glue dripping heads in quantity.
Furthermore, a suck-back valve is arranged between the check valve and the glue dripping head.
Furthermore, a tee joint is arranged on a pipeline between the suck-back valve and the air supply electromagnetic valve, and the check valve is communicated with the tee joint.
Further, the check valve and the three-way joint as well as the suck-back valve and the three-way joint are connected through an air pipe with the diameter of 4 mm.
Furthermore, the check valves, the suck-back valve and the glue dripping head are all three, and the three check valves are communicated with the glue pump through four-way joints.
The utility model has the beneficial effects that: set up the check valve between the glue pump that takes much and the glue dripping head, control the check valve through the control system control check valve of spreading machine, control other non-used glue dripping head pipeline when the glue dripping head is told glue and open, can avoid during the photoresist flows into other non-used glue dripping head pipelines to guarantee that other glue dripping heads are independently not influenced and realize that the volume of gluing is stable, guarantee that each glue dripping head goes out to glue accurately even.
Drawings
Fig. 1 is a schematic connection diagram of a pump valve structure for improving uneven glue amount of a glue spreader according to an embodiment of the present invention.
Description of reference numerals:
1. a glue pump; 2. a four-way joint; 3. a non-return valve; 4. a suck-back valve; 5. a three-way joint; 6. a glue dripping head; 7. an electromagnetic valve.
Detailed Description
In order to explain technical contents, achieved objects, and effects of the present invention in detail, the following description is made with reference to the accompanying drawings in combination with the embodiments.
Referring to fig. 1, a pump-valve structure for improving the non-uniformity of glue amount of a glue spreader comprises a glue pump, at least two glue dripping heads and check valves corresponding to the glue dripping heads in number, wherein the glue pump is communicated with the check valves through multi-way joints, and the check valves are communicated with the glue dripping heads correspondingly.
From the above description, the beneficial effects of the present invention are: set up the check valve between the glue pump that takes much and the glue dripping head, control the check valve through the control system control check valve of spreading machine, control the check valve on other unused glue dripping head pipelines and make the pipeline keep closing when the glue dripping head is told, can avoid during the photoresist flows into other unused glue dripping head pipelines to guarantee that other glue dripping heads are glued volume separately and are not influenced and realize that the volume of gluing is stable, guarantee that each glue dripping head goes out to glue accurately even.
Furthermore, a suck-back valve is arranged between the check valve and the glue dripping head.
Furthermore, a three-way joint is arranged on a pipeline between the suck-back valve and the air supply electromagnetic valve, and the check valve is communicated with the three-way joint.
It can be known from the above description that the check valve and the suck-back valve are communicated through the three-way joint, so that the check valve and the suck-back valve in the same pipeline share the driving gas, the corresponding check valve at the pump port is automatically opened when the corresponding glue dripping head is controlled to spit liquid, and other unused valves are in a closed state, thereby preventing the photoresist from flowing into other unused pipelines.
Further, the check valve and the three-way joint as well as the suck-back valve and the three-way joint are connected through an air pipe with the diameter of 4 mm.
As can be seen from the above description, the pipeline communicated between the check valve and the suck-back valve and the tee is set as the air pipe with the same diameter, so that synchronous control is facilitated.
Furthermore, the check valves, the suck-back valve and the glue dripping head respectively comprise three check valves, and the three check valves are communicated with the glue pump through a four-way joint.
It can be known from the above description that, by arranging the four-way valve near the glue pump to connect with the three glue dripping head pipelines respectively, the check valve is installed at the pump port, when in operation, only the corresponding check valve is opened, and other check valves are in a closed state, so that the photoresist glue only flows into the opened check valve pipeline to avoid the photoresist from flowing into other pipelines, thereby ensuring sufficient pressure of the photoresist, each way of check valve and suck-back valve is opened and closed by the same air source, when the glue head spits the glue, the corresponding pump port check valve is automatically opened, and the low-cost reformation of the CND glue spreader with three belts can be realized.
The pump valve structure can be applied to a glue spreader with a glue pump for supplying glue to a plurality of glue dripping heads, and the flow direction of the glue is controlled by adding three check valves at the pump port to prevent the discharged glue from flowing into other pipelines, so that the aim of solving the problem of uneven glue spreading is fulfilled, and the multiple purposes of one pump are realized.
Referring to fig. 1, a first embodiment of the present invention is:
a pump valve structure for improving uneven glue amount of a glue spreader comprises a glue pump 1 and three glue coating pipelines, wherein each glue coating pipeline comprises a check valve 3, a suck-back valve 4, a three-way joint 5 and a glue dripping head 6.
Wherein, check valve 3, suck-back valve 4 and glue dripping head 6 connect gradually, set up three way connection 5 and connect check valve 3 through 4 mm's trachea on the pipeline between suck-back valve 4 and the solenoid valve 7 of air feed, suck-back valve 4 and three way connection 5 and the air supply pipeline between solenoid valve 7 also adopt 4 mm's trachea, make suck-back valve 4 and check valve 3 share the same gas drive. The glue pump 1 is communicated with three check valves 3 through a four-way joint 2, and the pipelines among the check valves 3, the suck-back valve 4 and the glue dripping head 6 all adopt rubber pipes with the size of 1/4.
The working principle of the first embodiment of the utility model is as follows:
in the utility model, when the driving gas is introduced, the check valve opens the passage to enable the glue solution to flow through, and the suck-back valve stops suck-back to enable the glue solution to smoothly pass through, so that the gluing work is carried out; when the driving gas is removed, the check valve closes the passage to prevent the glue solution from passing through, and the suck-back valve opens the suck-back valve to prevent the glue solution from rushing out of the glue dripping head and dripping due to glue spraying inertia and gravity.
A check valve is arranged between each path of the glue dripping head pipeline and the glue pump, and the driving gas of the check valve and the suck-back valve is the same, so that the check valve can be automatically opened when the glue dripping head is controlled to discharge liquid, and the valves of the other two pipelines which are not opened are in a closed state, so that the photoresist can not flow into the other two glue dripping head pipelines.
In summary, the pump valve structure for improving uneven glue amount of the glue spreader provided by the utility model controls the flow direction of the glue by installing the check valve at the pump port to ensure that the glue reaches the enough amount of the glue at the appointed glue dripping head, realizes common control by connecting the tee joint to the check valve at the pump port for supplying air to the check valve at the front section of the air stop valve of the original glue dripping head glue-dispensing suck-back valve, automatically opens the corresponding pump port check valve when the glue dripping head dispenses the glue, and the photoresist can not flow into the pipeline of the other glue dripping head, thereby ensuring that the glue amount of each of the three glue dripping heads is not influenced by other glue dripping heads to ensure stable glue amount, realizing the problem of improving glue amount of the glue spreader with low cost, and realizing multiple purposes of one pump.
The above description is only an embodiment of the present invention, and not intended to limit the scope of the present invention, and all equivalent changes made by using the contents of the present specification and the drawings, or applied directly or indirectly to the related technical fields, are included in the scope of the present invention.
Claims (5)
1. The pump valve structure is characterized by comprising a glue pump, at least two glue dripping heads and check valves, wherein the check valves correspond to the glue dripping heads in number, the glue pump is communicated with the check valves through a multi-way connector, and the check valves correspond to the glue dripping heads.
2. The pump-valve structure for improving the glue amount non-uniformity of the glue spreader as claimed in claim 1, wherein a suck-back valve is disposed between the check valve and the glue dripping head.
3. The pump-valve structure for improving the uneven glue amount of the glue spreader as claimed in claim 2, wherein a tee joint is arranged on a pipeline between the suck-back valve and the air supply solenoid valve, and the check valve is communicated with the tee joint.
4. The structure of claim 3, wherein said check valve is connected to said tee fitting by a tube having a diameter of 4 mm.
5. The structure of claim 4, wherein said check valves, said suck-back valve and said dispensing head are all three, and said three check valves are connected to said glue pump through a four-way joint.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202123058902.5U CN216800442U (en) | 2021-12-07 | 2021-12-07 | Improve inhomogeneous pump valve structure of spreading machine volume of gluing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202123058902.5U CN216800442U (en) | 2021-12-07 | 2021-12-07 | Improve inhomogeneous pump valve structure of spreading machine volume of gluing |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN216800442U true CN216800442U (en) | 2022-06-24 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202123058902.5U Active CN216800442U (en) | 2021-12-07 | 2021-12-07 | Improve inhomogeneous pump valve structure of spreading machine volume of gluing |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN216800442U (en) |
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2021
- 2021-12-07 CN CN202123058902.5U patent/CN216800442U/en active Active
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