CN216799273U - High-purity gas low-temperature adsorption and purification equipment - Google Patents
High-purity gas low-temperature adsorption and purification equipment Download PDFInfo
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- CN216799273U CN216799273U CN202123033740.XU CN202123033740U CN216799273U CN 216799273 U CN216799273 U CN 216799273U CN 202123033740 U CN202123033740 U CN 202123033740U CN 216799273 U CN216799273 U CN 216799273U
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Abstract
The utility model provides high-purity gas low-temperature adsorption purification equipment which comprises a vacuum tank body, a top connecting flange, a detachable cleaning frame structure, a liquid nitrogen inlet pipe, an inlet ball valve, a low-temperature cooling frame structure, a liquid nitrogen outlet pipe, a trapezoidal through hole, a spiral sealing frame structure, an outlet ball valve, an adsorbent outlet valve, a gas outlet pipe, an outlet valve, a high-concentration gas inlet pipe and an inlet valve, wherein the top connecting flange is integrally arranged at the upper part of the outer side of the vacuum tank body; the detachable cleaning frame structure is arranged at the upper part of the vacuum tank body; the liquid nitrogen inlet pipe is arranged on the upper part of the detachable cleaning frame structure. The beneficial effects of the utility model are as follows: through the setting of the arc-shaped sealing cover, the bottom connecting flange and the top connecting flange, the arc-shaped sealing cover is convenient to detach from the upper part of the vacuum tank body through the bottom connecting flange and the top connecting flange, and the inner side of the vacuum tank body and the inner side of the arc-shaped sealing cover are cleaned.
Description
Technical Field
The utility model belongs to the technical field of high-purity gas low-temperature adsorption and purification, and particularly relates to high-purity gas low-temperature adsorption and purification equipment.
Background
In the low-temperature adsorption, namely in a low-temperature vacuum device, the wall of a container or other solid materials and gas have the interaction of adsorption, absorption, desorption and the like, the phenomenon that one or more layers of gas are accumulated on the surface of adsorption-solid, the phenomenon that absorption-gas diffuses and permeates into the solid and is dissolved, and the phenomenon that desorption or desorption-gas or steam adsorbed by the materials is released in vacuum, and the interaction of the solid and the gas, namely the solid-gas interface phenomenon is one of the important problems encountered in the process of obtaining and maintaining reliable operation by applying a low-temperature vacuum system by superconductivity.
However, the existing high-purity gas low-temperature adsorption and purification equipment has the problems of being troublesome in cleaning the inner side, poor in cooling effect on gas and poor in sealing effect on a joint.
Therefore, it is necessary to develop a low-temperature adsorption purification device for high-purity gas.
SUMMERY OF THE UTILITY MODEL
In order to solve the technical problems, the utility model provides a high-purity gas low-temperature adsorption purification device, which is realized by the following technical scheme:
a high-purity gas low-temperature adsorption purification device comprises a vacuum tank body, a top connecting flange, a detachable cleaning frame structure, a liquid nitrogen inlet pipe, an inlet ball valve, a low-temperature cooling frame structure, a liquid nitrogen outlet pipe, a trapezoidal through hole, a spiral sealing frame structure, an outlet ball valve, an adsorbent outlet valve, a gas outlet pipe, an outlet valve, a high-concentration gas inlet pipe and an inlet valve, wherein the top connecting flange is integrally arranged at the upper part of the outer side of the vacuum tank body; the detachable cleaning frame structure is arranged at the upper part of the vacuum tank body; the liquid nitrogen inlet pipe is arranged at the upper part of the detachable cleaning frame structure; the inlet ball valve is in threaded connection with the left side of the upper part of the liquid nitrogen inlet pipe; the low-temperature cooling frame structure is arranged on the inner side of the vacuum tank body; the liquid nitrogen outlet pipe is arranged in the middle of the lower part of the low-temperature cooling frame structure; the trapezoidal through hole is formed in the middle of the lower part of the vacuum tank body; the spiral sealing frame structure is arranged at the lower part of the outer side of the liquid nitrogen outlet pipe; the outlet ball valve is in threaded connection with the lower part of the liquid nitrogen outlet pipe; the adsorbent outlet valve is in threaded connection with the right lower part of the vacuum tank body; the gas outlet pipe is welded at the lower part of the left side of the vacuum tank body, and the inner side of the gas outlet pipe is communicated with the lower part of the inner side of the vacuum tank body; the outlet valve is in threaded connection with the left side of the gas outlet pipe; the high-concentration gas inlet pipe is arranged on the left side of the detachable cleaning frame structure; the inlet valve is in threaded connection with the left side of the high-concentration gas inlet pipe.
Preferably, the lower part of the liquid nitrogen outlet pipe is inserted into the inner side of the trapezoidal through hole, and the inner side of the adsorbent outlet valve is communicated with the right lower part of the inner side of the vacuum tank body.
Compared with the prior art, the utility model has the beneficial effects that:
1. according to the vacuum tank, the arc-shaped sealing cover, the bottom connecting flange and the top connecting flange are arranged, so that the arc-shaped sealing cover can be conveniently detached from the upper part of the vacuum tank body by a worker through the bottom connecting flange and the top connecting flange, and the inner side of the vacuum tank body and the inner side of the arc-shaped sealing cover can be cleaned.
2. According to the utility model, the arrangement of the inlet connecting pipe and the distributing pipe is beneficial to uniformly dividing the liquid nitrogen at the inner side of the liquid nitrogen inlet pipe, so that the liquid nitrogen is divided into a plurality of parts to enter the inner side of the cooling fin plate, thereby uniformly cooling the high-concentration gas and increasing the cooling effect of the device on the high-concentration gas.
3. According to the utility model, the supporting separation net is beneficial to fixing the cooling fin plate, the phenomenon that the joint is broken due to overlarge stress on the inlet connecting pipe and the material distributing pipe, the service life of the device is influenced, the normal flow of gas is not influenced is prevented, and meanwhile, the cooling fin plate can be taken out through the supporting separation net to clean the outer side of the cooling fin plate.
4. In the utility model, the liquid inlet hole and the liquid outlet hole are arranged, so that liquid nitrogen can move from the periphery of the inner side of the hollow cooling cavity to the middle of the inner side of the hollow cooling cavity through the distance between the liquid inlet hole and the liquid outlet hole, the uniform flow of the liquid nitrogen in the inner side of the hollow cooling cavity is ensured, and the uniform fluidity of the liquid nitrogen in the inner side of the hollow cooling cavity is improved.
5. According to the utility model, the arrangement of the cooling separation net is beneficial to blocking the flowing speed of liquid nitrogen at the inner side of the hollow cooling cavity, and further ensuring that the liquid nitrogen is uniformly distributed at the inner side of the hollow cooling cavity, so that the cooling effect of the device on high-concentration gas is further realized by matching with the structure of the cooling fin plate.
6. According to the utility model, the arrangement of the cooling fin plate and the hollow cooling cavity is beneficial to increasing the contact area of the cooling fin plate and the high-concentration gas through the structural layout of the cooling fin plate, so that the cooling air at the inner side of the cooling fin plate is ensured to cool the high-concentration gas, and the cold cutting effect of the device is further improved.
7. According to the utility model, the arrangement of the locking pressing plate and the trapezoidal sealing ring is beneficial to matching with the threaded connection between the outer side thread groove and the inner thread pipe, so that the locking pressing plate pushes the trapezoidal sealing ring upwards, the outer side of the locking pressing plate is tightly attached to the inner side of the trapezoidal through hole, the sealing effect between the vacuum tank body and the liquid nitrogen outlet pipe is increased, and the sealing property of the device is increased.
8. According to the liquid nitrogen outlet pipe, the fixing sleeve, the mounting bolt, the outer side thread groove and the inner thread pipe are arranged, so that the fixing sleeve is fixed on the outer side of the liquid nitrogen outlet pipe through the mounting bolt, and the inner thread pipe pushes the locking pressing plate to move upwards through thread transmission between the outer side thread groove and the inner thread pipe.
Drawings
Fig. 1 is a schematic structural view of the present invention.
FIG. 2 is a schematic structural view of a removable cleaning rack structure of the present invention.
FIG. 3 is a top view of the cryocooling gantry structure of the present invention.
Fig. 4 is a schematic structural view of the spiral seal holder structure of the present invention.
In the figure:
1. a vacuum tank body; 2. a top connecting flange; 3. a detachable cleaning frame structure; 31. an arc-shaped sealing cover; 32. A bottom connecting flange; 33. supporting the separation net; 34. an inlet connection pipe; 35. distributing pipes; 4. liquid nitrogen enters the pipe; 5. an inlet ball valve; 6. a cryocooling rack structure; 61. cooling the fin plate; 62. a hollow cooling chamber; 63. a liquid inlet hole; 64. a liquid outlet hole; 65. cooling the separation net; 7. a liquid nitrogen outlet pipe; 8. a trapezoidal through hole; 9. a spiral seal carrier structure; 91. fixing the sleeve; 92. installing a bolt; 93. an outer thread groove; 94. an internally threaded tube; 95. locking the pressing plate; 96. a trapezoidal sealing ring; 10. an outlet ball valve; 11. a sorbent outlet valve; 12. a gas outlet pipe; 13. an outlet valve; 14. a high-concentration gas inlet pipe; 15. an inlet valve.
Detailed Description
The utility model is further described below with reference to the accompanying drawings:
example (b):
as shown in fig. 1 and fig. 2, a high-purity gas low-temperature adsorption purification device comprises a vacuum tank body 1, a top connecting flange 2, a detachable cleaning frame structure 3, a liquid nitrogen inlet pipe 4, an inlet ball valve 5, a low-temperature cooling frame structure 6, a liquid nitrogen outlet pipe 7, a trapezoidal through hole 8, a spiral sealing frame structure 9, an outlet ball valve 10, an adsorbent outlet valve 11, a gas outlet pipe 12, an outlet valve 13, a high-concentration gas inlet pipe 14 and an inlet valve 15, wherein the top connecting flange 2 is integrally arranged at the upper part of the outer side of the vacuum tank body 1; the detachable cleaning frame structure 3 is arranged at the upper part of the vacuum tank body 1; the liquid nitrogen inlet pipe 4 is arranged at the upper part of the detachable cleaning frame structure 3; the inlet ball valve 5 is in threaded connection with the left side of the upper part of the liquid nitrogen inlet pipe 4; the low-temperature cooling frame structure 6 is arranged on the inner side of the vacuum tank body 1; the liquid nitrogen outlet pipe 7 is arranged in the middle of the lower part of the low-temperature cooling frame structure 6; the trapezoidal through hole 8 is formed in the middle of the lower part of the vacuum tank body 1; the spiral sealing frame structure 9 is arranged at the lower part of the outer side of the liquid nitrogen outlet pipe 7; the outlet ball valve 10 is in threaded connection with the lower part of the liquid nitrogen outlet pipe 7; the adsorbent outlet valve 11 is in threaded connection with the right lower part of the vacuum tank body 1; the gas outlet pipe 12 is welded at the lower part of the left side of the vacuum tank body 1, and the inner side of the gas outlet pipe is communicated with the lower part of the inner side of the vacuum tank body 1; the outlet valve 13 is in threaded connection with the left side of the gas outlet pipe 12; the high-concentration gas inlet pipe 14 is arranged at the left side of the detachable cleaning frame structure 3; the inlet valve 15 is connected to the left side of the high-concentration gas inlet pipe 14 in a threaded manner; the detachable cleaning frame structure 3 comprises an arc-shaped sealing cover 31, a bottom connecting flange 32, a supporting separation net 33, an inlet connecting pipe 34 and a material distributing pipe 35, wherein the bottom connecting flange 32 is integrally arranged at the lower part of the outer side of the arc-shaped sealing cover 31; the supporting separation net 33 is welded at the lower part of the inner side of the arc-shaped sealing cover 31; the inlet connecting pipe 34 is connected with the upper part of the inner side of the arc-shaped sealing cover 31 in a flange mode; the material distributing pipes 35 are respectively welded at the periphery of the lower part of the inlet connecting pipe 34; the bolts at the joint of the bottom connecting flange 32 and the top connecting flange 2 are removed, the arc-shaped sealing cover 31 is moved upwards, the low-temperature cooling frame structure 6 is removed from the inner side of the vacuum tank body 1 through the supporting separation net 33, and the inner side of the vacuum tank body 1 is cleaned.
In the above embodiment, as shown in fig. 3, specifically, the low-temperature cooling rack structure 6 includes a cooling fin 61, a hollow cooling cavity 62, a liquid inlet hole 63, a liquid outlet hole 64 and a cooling screen 65, where the hollow cooling cavity 62 is opened on the inner side of the cooling fin 61; the liquid inlet holes 63 are respectively formed in the periphery of the front end of the cooling fin plate 61; the liquid outlet hole 64 is formed in the middle of the rear end of the cooling fin plate 61; the cooling separation net 65 is respectively welded at the periphery of the inner side of the cooling fin plate 61; the liquid nitrogen enters the inner periphery of the cooling fin plate 61 and is blocked by the cooling separation net 65, so that the liquid nitrogen is uniformly distributed on the inner side of the hollow cooling cavity 62 and finally flows into the inner side of the liquid nitrogen outlet pipe 7 through the liquid outlet hole 64.
As shown in fig. 4, in the above embodiment, specifically, the spiral seal holder structure 9 includes a fixing sleeve 91, a mounting bolt 92, an outer threaded groove 93, an internal threaded pipe 94, a locking pressure plate 95 and a trapezoidal seal ring 96, wherein the mounting bolt 92 is screwed on the lower portion of the front end of the fixing sleeve 91; the outer side thread groove 93 is arranged at the upper part of the outer side of the fixed sleeve 91; the internal thread pipe 94 is in threaded connection with the upper part of the outer side of the fixed sleeve 91; the locking pressing plate 95 is integrally arranged at the upper part of the outer side of the internal thread pipe 94; the trapezoidal sealing ring 96 is arranged at the upper part of the locking pressure plate 95; the trapezoidal sealing ring 96 and the fixing sleeve 91 are respectively sleeved on the outer side of the liquid nitrogen outlet pipe 7, then the mounting bolt 92 is screwed, and then the locking pressing plate 95 pushes the trapezoidal sealing ring 96 upwards through the threaded connection between the outer side thread groove 93 and the inner thread pipe 94.
In the above embodiment, specifically, the lower part of the liquid nitrogen outlet pipe 7 is inserted into the inner side of the trapezoidal through hole 8, and the inner side of the adsorbent outlet valve 11 is communicated with the right lower part of the inner side of the vacuum tank 1.
In the above embodiment, specifically, the arc-shaped sealing cover 31 is placed on the upper portion of the vacuum tank 1, the bottom connecting flange 32 is connected with the top connecting flange 2 through bolts, and the inner side of the device is convenient to clean after the arc-shaped sealing cover 31 is detached.
In the above embodiment, specifically, the lower part of the inner side of the inlet connecting pipe 34 is communicated with the upper part of the inner side of the material distributing pipe 35, and the upper part of the inlet connecting pipe 34 is in threaded connection with the lower part of the inlet connecting pipe 34, so as to uniformly distribute liquid nitrogen.
In the above embodiment, specifically, the high concentration gas inlet pipe 14 is welded to the left side of the arc-shaped sealing cover 31, and the upper part of the inner side is communicated with the right side of the interior of the high concentration gas inlet pipe 14.
In the above embodiment, specifically, the cooling fin 61 is disposed inside the vacuum tank 1, and the upper portion of the cooling fin is inserted into the inner side of the supporting separation net 33, and is connected to the joint of the supporting separation net 33 by bolts, so as to increase the contact area between the cooling fin 61 and the gas.
In the above embodiment, specifically, the lower portions of the distributing pipes 35 are respectively welded to the front ends of the cooling fins 61, and the inner sides of the distributing pipes 35 are communicated with the inner sides of the liquid inlet holes 63, so as to ensure that liquid nitrogen enters the inner sides of the hollow cooling cavities 62.
In the above embodiment, specifically, the liquid nitrogen outlet pipe 7 is welded at the middle position of the rear end of the cooling fin plate 61, and the upper part of the inner side of the liquid nitrogen outlet pipe 7 is communicated with the inner side of the liquid outlet hole 64, so as to ensure that liquid nitrogen normally flows out.
In the above embodiment, specifically, the cooling screen 65 is disposed between the liquid inlet hole 63 and the liquid outlet hole 64, and the outlet ball valve 10 is disposed at the lower right portion of the cooling fin 61 to delay the flow velocity of the liquid nitrogen inside the hollow cooling cavity 62.
In the above embodiment, specifically, the fixing sleeve 91 is sleeved outside the liquid nitrogen outlet pipe 7, and the mounting bolt 92 is screwed at the connection position of the fixing sleeve 91 and the liquid nitrogen outlet pipe 7.
In the above embodiment, specifically, the trapezoid sealing ring 96 is sleeved on the outer side of the liquid nitrogen outlet pipe 7, and the upper part of the outer side of the trapezoid sealing ring 96 is inserted into the lower part of the inner side of the trapezoid through hole 8.
In the above embodiment, specifically, the fixing sleeve 91 is disposed at the upper portion of the outlet ball valve 10, and the inner side of the female screw pipe 94 is screwed with the outer screw groove 93.
Principle of operation
The working principle of the utility model is as follows: when the inner side is cleaned, the bolt at the joint of the bottom connecting flange 32 and the top connecting flange 2 is detached, the arc-shaped sealing cover 31 is moved upwards, the low-temperature cooling frame structure 6 is detached from the inner side of the vacuum tank body 1 through the supporting and isolating net 33, the inner side of the vacuum tank body 1 is cleaned, the low-temperature cooling frame structure 6 is installed to the inner side of the vacuum tank body 1 again, the liquid nitrogen outlet pipe 7 penetrates through the trapezoidal through hole 8 at the moment, the trapezoidal sealing ring 96 and the fixing sleeve 91 are respectively sleeved on the outer side of the liquid nitrogen outlet pipe 7, the installation bolt 92 is screwed down, the locking pressing plate 95 pushes the trapezoidal sealing ring 96 upwards through the threaded connection between the outer threaded groove 93 and the inner threaded pipe 94, the trapezoidal sealing ring 96 is ensured to be tightly attached to the inner side of the trapezoidal through hole 8, the joint is sealed, the outlet ball valve 10 is screwed on the lower part of the liquid nitrogen outlet pipe 7, the inlet ball valve 5 is opened, advance pipe 4 through liquid nitrogen and get into import connecting pipe 34, the cooperation of rethread branch material pipe 35 and feed liquor hole 63 makes the liquid nitrogen get into the inboard position all around of cooling fin 61 to through the separation of cooling separation net 65, make liquid nitrogen evenly distributed in the inboard of cavity cooling chamber 62, flow into the inboard of liquid nitrogen exit tube 7 through liquid outlet hole 64 at last, high concentration gas and cooling fin 61 fully contact, carry out the cryoadsorption to high concentration gas and purify.
The technical solutions of the present invention or similar technical solutions designed by those skilled in the art based on the teachings of the technical solutions of the present invention are all within the scope of the present invention.
Claims (8)
1. The high-purity gas low-temperature adsorption and purification equipment is characterized by comprising a vacuum tank body (1), a top connecting flange (2), a detachable cleaning frame structure (3), a liquid nitrogen inlet pipe (4), an inlet ball valve (5), a low-temperature cooling frame structure (6), a liquid nitrogen outlet pipe (7), a trapezoidal through hole (8), a spiral sealing frame structure (9), an outlet ball valve (10), an adsorbent outlet valve (11), a gas outlet pipe (12), an outlet valve (13), a high-concentration gas inlet pipe (14) and an inlet valve (15), wherein the top connecting flange (2) is integrally arranged on the upper part of the outer side of the vacuum tank body (1); the detachable cleaning frame structure (3) is arranged at the upper part of the vacuum tank body (1); the liquid nitrogen inlet pipe (4) is arranged at the upper part of the detachable cleaning frame structure (3); the inlet ball valve (5) is in threaded connection with the left side of the upper part of the liquid nitrogen inlet pipe (4); the low-temperature cooling frame structure (6) is arranged on the inner side of the vacuum tank body (1); the liquid nitrogen outlet pipe (7) is arranged in the middle of the lower part of the low-temperature cooling frame structure (6); the trapezoidal through hole (8) is formed in the middle of the lower part of the vacuum tank body (1); the spiral sealing frame structure (9) is arranged at the lower part of the outer side of the liquid nitrogen outlet pipe (7); the outlet ball valve (10) is in threaded connection with the lower part of the liquid nitrogen outlet pipe (7); the adsorbent outlet valve (11) is in threaded connection with the right lower part of the vacuum tank body (1); the gas outlet pipe (12) is welded at the lower part of the left side of the vacuum tank body (1), and the inner side of the gas outlet pipe is communicated with the lower part of the inner side of the vacuum tank body (1); the outlet valve (13) is in threaded connection with the left side of the gas outlet pipe (12); the high-concentration gas inlet pipe (14) is arranged on the left side of the detachable cleaning frame structure (3); the inlet valve (15) is in threaded connection with the left side of the high-concentration gas inlet pipe (14); the detachable cleaning frame structure (3) comprises an arc-shaped sealing cover (31), a bottom connecting flange (32), a supporting separation net (33), an inlet connecting pipe (34) and a material distributing pipe (35), wherein the bottom connecting flange (32) is integrally arranged at the lower part of the outer side of the arc-shaped sealing cover (31); the supporting separation net (33) is welded at the lower part of the inner side of the arc-shaped sealing cover (31); the inlet connecting pipe (34) is connected to the upper part of the inner side of the arc-shaped sealing cover (31) in a flange mode; the material distributing pipes (35) are respectively welded at the periphery of the lower part of the inlet connecting pipe (34).
2. The high-purity gas cryoadsorptive purification apparatus according to claim 1, wherein said cryocooling rack structure (6) comprises cooling fins (61), hollow cooling cavities (62), liquid inlet holes (63), liquid outlet holes (64) and cooling spacers (65), said hollow cooling cavities (62) being open on the inner side of said cooling fins (61); the liquid inlet holes (63) are respectively formed in the periphery of the front end of the cooling fin plate (61); the liquid outlet hole (64) is formed in the middle of the rear end of the cooling fin plate (61); the cooling separation net (65) is respectively welded at the periphery of the inner side of the cooling fin plate (61).
3. The high-purity gas cryoadsorptive purification apparatus according to claim 1, wherein said spiral seal holder structure (9) comprises a fixed sleeve (91), a mounting bolt (92), an external thread groove (93), an internal thread tube (94), a locking pressure plate (95) and a trapezoidal seal ring (96), said mounting bolt (92) being threadedly coupled to a lower portion of a front end of the fixed sleeve (91); the outer side thread groove (93) is formed in the upper part of the outer side of the fixed sleeve (91); the internal thread pipe (94) is in threaded connection with the upper part of the outer side of the fixed sleeve (91); the locking pressing plate (95) is integrally arranged at the upper part of the outer side of the internal thread pipe (94); the trapezoidal sealing ring (96) is arranged at the upper part of the locking pressing plate (95).
4. The high purity gas cryoadsorptive purification apparatus according to claim 1, wherein said arc-shaped sealing cover (31) is placed on the upper portion of said vacuum vessel (1), and said bottom connecting flange (32) is bolted to said top connecting flange (2).
5. The high purity gas cryoadsorptive purification apparatus according to claim 1, wherein said inlet connection pipe (34) has an inner lower portion communicating with an inner upper portion of said gas distribution pipe (35), and wherein said inlet connection pipe (34) has an upper portion threadedly coupled to a lower portion of said inlet connection pipe (34).
6. The high purity gas cryoadsorptive purification apparatus according to claim 1, wherein said high concentration gas inlet pipe (14) is welded to the left side of the arc-shaped sealing cover (31) and the upper portion of the inner side thereof is communicated with the inner right side of the high concentration gas inlet pipe (14).
7. The high-purity gas cryoadsorptive purification apparatus according to claim 2, wherein said cooling fin (61) is disposed inside said vacuum vessel (1) and has an upper portion inserted inside said supporting screen (33) and bolted to the connection of said supporting screen (33).
8. The apparatus for the low-temperature adsorption purification of high-purity gas according to claim 1, wherein the lower portions of the material distribution pipes (35) are respectively welded to the front ends of the cooling fins (61), and the inner sides of the material distribution pipes (35) are communicated with the inner sides of the liquid inlet holes (63).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202123033740.XU CN216799273U (en) | 2021-12-06 | 2021-12-06 | High-purity gas low-temperature adsorption and purification equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202123033740.XU CN216799273U (en) | 2021-12-06 | 2021-12-06 | High-purity gas low-temperature adsorption and purification equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN216799273U true CN216799273U (en) | 2022-06-24 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202123033740.XU Active CN216799273U (en) | 2021-12-06 | 2021-12-06 | High-purity gas low-temperature adsorption and purification equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN216799273U (en) |
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2021
- 2021-12-06 CN CN202123033740.XU patent/CN216799273U/en active Active
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