CN216778340U - Exhaust treatment device for epitaxial furnace production - Google Patents
Exhaust treatment device for epitaxial furnace production Download PDFInfo
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- CN216778340U CN216778340U CN202122873693.3U CN202122873693U CN216778340U CN 216778340 U CN216778340 U CN 216778340U CN 202122873693 U CN202122873693 U CN 202122873693U CN 216778340 U CN216778340 U CN 216778340U
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Abstract
The utility model relates to the technical field of industrial waste gas treatment mechanisms, in particular to a waste gas treatment device for epitaxial furnace-based production. Mainly aims at the problem of poor treatment effect of the waste gas generated by the existing epitaxial furnace. The technical scheme comprises the following steps: the exhaust treatment device comprises an exhaust treatment device shell and an air suction pump arranged on one side wall of the exhaust treatment device shell, a filter screen is arranged in a middle inner cavity of the exhaust treatment device shell, an atomizing spray head is arranged on one side of the filter screen, a reciprocating lead screw is arranged on the other side of the filter screen, a moving block is arranged on the surface of a rod body of the reciprocating lead screw, and a cleaning rod is arranged between one side wall of the moving block and the side wall of the filter screen. According to the utility model, a part of impurity particles contained in the waste gas are directly changed into particle water drops through the atomizing nozzle and are removed through the sewage draining groove and the filter plate, the residual waste gas sequentially passes through the filter screen and the adsorption plate, the impurity particle removing effect is further improved, the impurity particles remained on the surface of the filter screen can be removed through the reciprocating movement of the cleaning rod, and the impurity particle removing capacity is improved.
Description
Technical Field
The utility model relates to the technical field of industrial waste gas treatment mechanisms, in particular to a waste gas treatment device for epitaxial furnace production.
Background
The existing treatment of waste gas generated in the production process of an epitaxial furnace is simple, and the waste gas is only treated in a directional discharging and centralized way and is mainly introduced into a waste gas treatment device through an air suction pump. The existing waste gas treatment device is simple in structure, particle impurities contained in waste gas are difficult to effectively remove, the waste gas treatment effect is poor, the environment is not favorably protected, and therefore the waste gas treatment device for epitaxial furnace production is required to effectively remove the impurity particles contained in the waste gas.
SUMMERY OF THE UTILITY MODEL
The utility model aims to provide an exhaust gas treatment device for epitaxial furnace production, which can effectively remove impurity particles contained in exhaust gas, aiming at the problems in the background technology.
The technical scheme of the utility model is as follows: the utility model provides a waste gas treatment device for production based on epitaxial furnace, includes the waste gas treatment device shell and locates the aspirator pump of a waste gas treatment device shell lateral wall, the middle part inner chamber of waste gas treatment device shell is equipped with the filter screen, and the filter screen is close to one side of aspirator pump is equipped with the atomizer, the opposite side of filter screen is equipped with reciprocal lead screw, and the body of rod surface of reciprocal lead screw is equipped with the movable block, a lateral wall of movable block with be equipped with the cleaning rod between the lateral wall of filter screen.
Preferably, the two sides of the bottom wall of the shell of the waste gas treatment device are respectively provided with a sewage discharge groove and an installation cavity, an inner cavity of the installation cavity is internally provided with a driving motor and a transmission rod connected with the output end of the driving motor, a rod body of the transmission rod penetrates through the wall body of the shell of the waste gas treatment device and extends into the inner cavity of the sewage discharge groove, a bottom rod body of the reciprocating screw rod extends into the inner cavity of the installation cavity, bevel gears are fixedly arranged on the bottom rod body of the reciprocating screw rod and one end rod body of the transmission rod, and the adjacent bevel gears are meshed with each other.
Preferably, one side of the filter screen, which is far away from the air suction pump, is provided with an adsorption plate, one side wall of the waste gas treatment device shell is communicated with an exhaust pipe, the top of the waste gas treatment device shell is provided with a water pump, a water delivery pipeline is connected between the water pump and the atomizing spray head, and an air inlet pipe is communicated between the air suction pump and an inner cavity of the waste gas treatment device shell.
Preferably, the fixed blocks are fixedly mounted on two side walls of the groove cavity of the sewage draining groove, the movable grooves are formed in the inner side walls of the fixed blocks and are adjacent to each other, the filter plates are arranged between the movable grooves, springs are arranged in the groove cavities of the movable grooves, and the springs are located at the bottoms of the filter plates.
Preferably, the rod body of the drive rod is provided with an eccentric cam, and the eccentric cam is positioned at the top of the filter plate.
Compared with the prior art, the utility model has the following beneficial technical effects:
through the atomizer with some foreign particle that contain in the waste gas directly become the granule drop of water to clear away through blowdown groove and filter plate, remaining waste gas passes through filter screen and adsorption plate in proper order, further promotes the foreign particle and clears away the effect, and can clear away the remaining foreign particle in filter screen surface through the reciprocating motion of cleaning rod, has promoted the foreign particle scavenging ability.
Drawings
FIG. 1 is a schematic front sectional view of an embodiment of the present invention;
FIG. 2 is a side view of the eccentric cam of FIG. 1;
fig. 3 is an enlarged schematic view of a portion a of fig. 1.
Reference numerals: 1. an exhaust gas treatment device housing; 2. an eccentric cam; 3. a getter pump; 4. an air inlet pipe; 5. an atomizing spray head; 6. a water pump; 7. a filter screen; 8. a cleaning rod; 9. a moving block; 10. an adsorption plate; 11. an exhaust pipe; 12. a reciprocating screw rod; 13. a drive motor; 14. a bevel gear; 15. a mounting cavity; 16. a transmission rod; 17. a sewage draining groove; 18. filtering the plate; 19. a fixed block; 20. a movable groove; 21. a spring.
Detailed Description
The technical solution of the present invention is further explained with reference to the accompanying drawings and specific embodiments.
Example one
As shown in fig. 1-3, the waste gas treatment device for epitaxial furnace production provided by the utility model comprises a waste gas treatment device shell 1 and an air suction pump 3 arranged on the left side wall of the waste gas treatment device shell 1, a filter screen 7 is arranged in the middle inner cavity of the waste gas treatment device shell 1, an atomizing nozzle 5 is arranged on one side of the filter screen 7 close to the air suction pump 3, a reciprocating screw rod 12 is arranged on the other side of the filter screen 7, a moving block 9 is arranged on the rod body surface of the reciprocating screw rod 12, and a cleaning rod 8 is arranged between one side wall of the moving block 9 and the side wall of the filter screen 7.
In this embodiment, the exhaust gas generated in the epitaxial furnace can be introduced into the exhaust gas treatment apparatus by the getter pump 3 and treated. The filter screen 7 divides the inner cavity of the waste gas treatment device shell 1 into a left part and a right part, and the atomizing nozzle 5 is positioned at the top of the inner cavity at the left side, and the outer part of the atomizing nozzle can be connected with a water conveying mechanism. The rod body of the reciprocating screw rod 12 and the wall body of the waste gas treatment device shell 1 are installed through a bearing, the moving block 9 is in threaded connection with the reciprocating threads on the surface of the rod body of the reciprocating screw rod 12, and the reciprocating screw rod 12 can drive the cleaning rod 8 to reciprocate up and down in the rotating process under the limiting effect of the cleaning rod 8. Through atomizer 5 with some foreign particles that contain in the waste gas directly become the granule drop of water and clear away, remaining waste gas further promotes foreign particles through filter screen 7 and clears away the effect, and can clear away the remaining foreign particles in filter screen 7 surface through the upper and lower reciprocating motion of clean pole 8, has promoted foreign particles scavenging capacity.
Example two
As shown in fig. 1, 2 and 3, the waste gas treatment device for epitaxial furnace production according to the present invention further includes a blowdown groove 17 and an installation cavity 15 respectively disposed on two sides of a bottom wall of a housing 1 of the waste gas treatment device, a driving motor 13 and a driving rod 16 connected to a coupler at an output end of the driving motor 13 are disposed in an inner cavity of the installation cavity 15, a rod body of the driving rod 16 penetrates through a wall body of the housing 1 of the waste gas treatment device and extends into an inner cavity of the blowdown groove 17, a rod body at a bottom end of a reciprocating screw rod 12 extends into the inner cavity of the installation cavity 15, bevel gears 14 are fixedly disposed on the rod body at the bottom end of the reciprocating screw rod 12 and a rod body at one end of the driving rod 16, adjacent bevel gears 14 are engaged with each other, an adsorption plate 10 is disposed on a side of a filter screen 7 away from an air suction pump 3, and an exhaust pipe 11 is communicated with a side wall of the housing 1 of the waste gas treatment device, the top of exhaust treatment device shell 1 is equipped with water pump 6, and be connected with conduit between water pump 6 and the atomizer 5, the intercommunication has intake pipe 4 between the inner chamber of aspirator pump 3 and exhaust treatment device shell 1, the equal fixed mounting in vallecular cavity both sides wall of blowdown groove 17 has fixed block 19, movable groove 20 has been seted up to fixed block 19's inside wall, and be equipped with filter plate 18 between the adjacent movable groove 20, be equipped with spring 21 in the vallecular cavity of movable groove 20, and spring 21 is located the bottom of filter plate 18, the body of rod fixed mounting that the one end of driving motor 13 was kept away from to transfer line 16 has eccentric cam 2, and eccentric cam 2 is located the top of filter plate 18.
In this embodiment, the rod body of the transmission rod 16 is movably mounted to the wall of the housing 1 of the exhaust gas treatment device. When the driving motor 13 rotates, the driving rod 16 is driven to rotate, under the meshing transmission effect of the bevel gear 14, the reciprocating screw rod 12 rotates together, so that the cleaning rod 8 is driven to remove impurity particles on the surface of the filter screen 7, the eccentric cam 2 is driven to rotate continuously in the rotating process of the driving rod 16, the filter plate 18 is driven to reciprocate up and down continuously under the action of the spring 21, further filtration treatment is carried out on waste liquid flowing through the sewage discharge groove 17, and the waste gas treatment effect is improved.
The above embodiments are merely some preferred embodiments of the present invention, and those skilled in the art can make various alternative modifications and combinations of the above embodiments based on the technical solution of the present invention and the related teaching of the above embodiments.
Claims (5)
1. The utility model provides a waste gas treatment device for epitaxial furnace production, includes waste gas treatment device shell (1) and locates aspirator pump (3) of a waste gas treatment device shell (1) lateral wall, its characterized in that: the middle inner cavity of the waste gas treatment device shell (1) is provided with a filter screen (7), one side of the filter screen (7) close to the air suction pump (3) is provided with an atomizing nozzle (5), the other side of the filter screen (7) is provided with a reciprocating lead screw (12), the rod body surface of the reciprocating lead screw (12) is provided with a moving block (9), and a cleaning rod (8) is arranged between one side wall of the moving block (9) and the side wall of the filter screen (7).
2. The waste gas treatment device for epitaxial furnace production according to claim 1, characterized in that: the waste gas treatment device comprises a waste gas treatment device shell (1), and is characterized in that a sewage discharge groove (17) and a mounting cavity (15) are respectively formed in two sides of the bottom wall of the waste gas treatment device shell (1), a driving rod (16) which is provided with a driving motor (13) and is connected with the output end of the driving motor (13) is arranged in the inner cavity of the mounting cavity (15), a rod body of the driving rod (16) penetrates through the wall body of the waste gas treatment device shell (1) and extends to the inner cavity of the sewage discharge groove (17), the bottom rod body of a reciprocating screw rod (12) extends to the inner cavity of the mounting cavity (15), and bevel gears (14) are fixedly mounted on the bottom rod body of the reciprocating screw rod (12) and the rod body at one end of the driving rod (16) and are meshed with each other adjacent bevel gears (14).
3. The waste gas treatment device for epitaxial furnace production according to claim 2, characterized in that: keep away from filter screen (7) one side of aspirator pump (3) is equipped with adsorption plate (10), a lateral wall intercommunication of exhaust treatment device shell (1) has blast pipe (11), the top of exhaust treatment device shell (1) is equipped with water pump (6), just water pump (6) with be connected with water pipeline between atomizer (5), aspirator pump (3) with intercommunication has intake pipe (4) between the inner chamber of exhaust treatment device shell (1).
4. The waste gas treatment device for epitaxial furnace production according to claim 3, characterized in that: the equal fixed mounting in vallecular cavity both sides wall of blowdown groove (17) has fixed block (19), movable groove (20) have been seted up to the inside wall of fixed block (19), and adjacent be equipped with filter plate (18) between movable groove (20), be equipped with spring (21) in the vallecular cavity of movable groove (20), just spring (21) are located the bottom of filter plate (18).
5. The waste gas treatment device for epitaxial furnace production according to claim 4, characterized in that: the rod body of the drive rod (16) one end of keeping away from driving motor (13) is fixedly provided with an eccentric cam (2), and eccentric cam (2) is located at the top of filter plate (18).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122873693.3U CN216778340U (en) | 2021-11-23 | 2021-11-23 | Exhaust treatment device for epitaxial furnace production |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122873693.3U CN216778340U (en) | 2021-11-23 | 2021-11-23 | Exhaust treatment device for epitaxial furnace production |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN216778340U true CN216778340U (en) | 2022-06-21 |
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ID=82004170
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202122873693.3U Active CN216778340U (en) | 2021-11-23 | 2021-11-23 | Exhaust treatment device for epitaxial furnace production |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN216778340U (en) |
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2021
- 2021-11-23 CN CN202122873693.3U patent/CN216778340U/en active Active
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