CN216772102U - Sample carrier for observing semiconductor by metallographic microscope - Google Patents
Sample carrier for observing semiconductor by metallographic microscope Download PDFInfo
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- CN216772102U CN216772102U CN202123337524.4U CN202123337524U CN216772102U CN 216772102 U CN216772102 U CN 216772102U CN 202123337524 U CN202123337524 U CN 202123337524U CN 216772102 U CN216772102 U CN 216772102U
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- rotary rod
- semiconductor
- observing
- metallographic microscope
- sample carrier
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Abstract
The utility model discloses a sample carrier for observing a semiconductor by a metallographic microscope, which comprises a base, a rotary rod and a clamping plate clamp, wherein the rotary rod is rotatably arranged on the base around the axis of the rotary rod, and the rotary rod is connected with a control knob capable of controlling the rotary rod to rotate; the splint anchor clamps are fixed to be set up in the tip of rotary rod for the centre gripping waits to observe the semiconductor. The utility model can conveniently and quickly observe the surface, the section and other angles of the sample in a short time, and provide multi-angle sample appearance data.
Description
Technical Field
The utility model relates to the technical field of a semiconductor for metallographic microscope detection, in particular to a sample carrier for observing a semiconductor by a metallographic microscope.
Background
The laboratory usually uses a metallographic microscope to observe the surface/cross section of the semiconductor wafer chip or discrete device, and by observing and measuring the surface/cross section morphology, the product structure or packaging level is known, so as to provide data support for better product production. In actual observation, due to the problem of placing a semiconductor sample, particularly for wafer chip splinters with irregular sizes, the problem that the surface and the cross section cannot be observed quickly occurs; in general, it takes a long time to observe the surface and cross section of the same sample, and observation at other tilt angles cannot be satisfied in a short time.
SUMMERY OF THE UTILITY MODEL
The utility model aims to provide a sample carrier for observing a semiconductor by a metallographic microscope, and aims to solve the problems in the prior art brought forward by the background technology.
The technical problem of the utility model is mainly solved by the following technical scheme: a sample carrying table for observing a semiconductor by a metallographic microscope comprises a base, a rotary rod and a clamping plate clamp, wherein the rotary rod is rotatably arranged on the base around the axis of the rotary rod, and the rotary rod is connected with a control knob capable of controlling the rotary rod to rotate; the clamping plate clamp is fixedly arranged at the end part of the rotating rod and used for clamping a semiconductor to be observed.
Preferably, the base is provided with angle scales along the circumferential direction of the control knob.
Preferably, the angle scale is formed by stamping steel marks or laser printing.
Preferably, the base is provided with a rotating rod fixing knob for fastening the rotating rod.
Preferably, the splint clamp is inserted into an end of the rotating rod, and the rotating rod is provided with a clamp fixing knob for fastening the splint clamp.
Preferably, the clamping plate clamp comprises two clamping plates and a screwing screw for controlling the distance between the two clamping plates.
Preferably, the material of the splint is glass fiber, polyurethane or PVC.
Preferably, the rotating rod and the control knob are made of PVC, copper or aluminum alloy respectively.
Preferably, the base is made of wood, iron or aluminum alloy.
Compared with the prior art, the utility model has the advantages that: the utility model can conveniently and rapidly observe the surface, the cross section and other angles of the sample in a short time, and provide multi-angle sample appearance data.
Drawings
Fig. 1 is a schematic view of the overall structure of the present invention.
Fig. 2 is an enlarged schematic view of the cleat clamp of the present invention.
Fig. 3 is a schematic front view of the present invention.
Fig. 4 is a side view schematic of the present invention.
Fig. 5 is a schematic top view of the present invention.
Fig. 6 is an enlarged top view of the cleat clip of the present invention.
In the figure: 1-a base; 2-control knob; 3-angle scale; 4-rotating the rod fixing knob; 5-rotating the rod; 6-a splint clamp; 7-clamp fixing knob; 8-screwing the screw.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is further specifically described below by way of embodiments in combination with the accompanying drawings.
Example 1
A sample carrying table for observing a semiconductor by a metallographic microscope is used for observing the surface, section and other angles of the semiconductor such as a wafer chip, a discrete device and the like by the metallographic microscope, and as shown in figures 1 to 6, the sample carrying table mainly comprises a base 1, a rotating rod 5 and a clamping plate clamp 6.
Wherein wooden base 1 is L shape, the 5 levels of rotary rod of aluminium alloy matter wear to locate in base 1's vertical portion, the tip of rotary rod 5 is equipped with aluminium alloy matter's control knob 2, through the steerable rotary rod 5 rotation of control knob 2, and be equipped with the fixed knob 4 of rotary rod of aluminium alloy matter on base 1, make rotary rod 5 rotatory to the target angle after, make it support to carry out the fastening position at rotary rod 5 on rotary rod 5 through the fixed knob 4 of rotary rod of screwing.
In order to control the rotating angle conveniently, an angle scale 3 is printed on the outer ring of the base 1 along the rotating button 4 in a steel seal mode, for example, the angle scale is 90 degrees upwards, the angle scale is 0 degree horizontally, and the control knob 2 is provided with a pointer.
The splint anchor clamps 6 are inserted in the groove of the surface of one end of the rotary rod 5 far away from the control knob 2, the rotary rod 5 is provided with an aluminum alloy anchor clamp fixing knob 7 for fastening the splint anchor clamps 6, and after the splint anchor clamps 6 are installed on the rotary rod 5, the splint anchor clamps 6 are fastened by screwing the anchor clamp fixing knob 7 to abut against the splint anchor clamps 6. The clamping plate clamp 6 comprises two clamping plates made of PVC materials and a screwing screw 8 for controlling the distance between the two clamping plates, and articles to be observed can be clamped between the two clamping plates through the screwing screw 8.
In this embodiment, the cross section and the surface of the wafer chip are observed as an example, and the specific process is as follows:
1. vertically screwing the chip between the clamping plate clamps 6 through screwing screws 8;
2. the clamp plate clamp 6 is fixed on the rotating rod 5 through a clamp fixing knob 7;
3. the control knob 2 with a pointer is aligned to the 90-degree scale, and the fixed knob 4 is fixed through a rotating rod after alignment;
4. placing the sample carrying table under a metallographic microscope for observation;
5. after the section is observed, the sample does not need to be taken down, the pointer of the control knob 2 is only required to be aligned to 0 degree, and the surface of the sample can be observed by positioning the rotary rod fixing knob 4.
The sample carrying table for observing the semiconductor by the metallographic microscope can realize convenient and rapid observation of the surface, the cross section and the shapes of other angles of a sample under the metallographic microscope in a short time.
Example 2
A sample carrying table for observing a semiconductor by a metallographic microscope is used for observing the surface, section and other angles of the semiconductor such as a wafer chip, a discrete device and the like by the metallographic microscope, and as shown in figures 1 to 6, the sample carrying table mainly comprises a base 1, a rotating rod 5 and a clamping plate clamp 6.
Wherein aluminium alloy matter base 1 is L shape, on the vertical portion of base 1 is worn to locate by copper's rotary rod 5 level, the tip of rotary rod 5 is equipped with copper's control knob 2, through the steerable rotary rod 5 rotation of control knob 2, and be equipped with copper's the fixed knob 4 of rotary rod on base 1, make rotary rod 5 rotatory to target angle after, make it support to carry out the fastening position at rotary rod 5 on rotary rod 5 through the fixed knob 4 of rotary rod of screwing.
In order to control the rotating angle conveniently, angle scales 3 are printed on the outer ring of the base 1 along the rotating button 4 in a laser printing mode, for example, the angle scales are 90 degrees upwards and 0 degree horizontally, and the control knob 2 is provided with a pointer.
The splint anchor clamps 6 are inserted in the groove of the surface of one end of the rotary rod 5 far away from the control knob 2, and the rotary rod 5 is provided with a copper anchor clamp fixing knob 7 for fastening the splint anchor clamps 6, and after the splint anchor clamps 6 are installed on the rotary rod 5, the splint anchor clamps 6 are fastened by screwing the anchor clamp fixing knob 7 to abut against the splint anchor clamps 6. The clamping plate clamp 6 comprises two clamping plates made of glass fiber materials and a screwing screw 8 for controlling the distance between the two clamping plates, and an object to be observed can be clamped between the two clamping plates through the screwing screw 8.
This embodiment takes a cross-sectional view of a discrete device as an example, and the specific process is as follows:
1. vertically screwing the discrete device between the clamping plate clamps 6 through screwing screws 8;
2. the clamp plate clamp 6 is fixed on the rotating rod 5 through a clamp fixing knob 7;
3. the control knob 2 with a pointer is aligned to the 90-degree scale, and the fixed knob 4 is fixed through a rotating rod after alignment;
4. placing the sample carrying table under a metallographic microscope for observation;
5. if need observe other angles in cross-section, need not take off the sample, only need to rotate control knob 2 to the angle that needs to observe, reuse fixed knob 4 location of rotary rod, can observe the sample and correspond the angle cross-section.
The metallographic microscope of this embodiment observes semiconductor and uses sample carrier can realize in the short time conveniently, swift observation sample table & the appearance of cross-section and other angles under the metallographic microscope.
Finally, it should be noted that the above embodiments are merely representative examples of the present invention. It is obvious that the utility model is not limited to the embodiments described above, but that many variations are possible. Any simple modifications and equivalents of the above embodiments made in accordance with the technical spirit of the present invention should be considered as falling within the scope of the present invention.
Claims (9)
1. A sample carrier for observing a semiconductor by a metallographic microscope is characterized by comprising a base, a rotary rod and a clamping plate clamp, wherein the rotary rod is rotatably arranged on the base around the axis of the rotary rod, and the rotary rod is connected with a control knob capable of controlling the rotary rod to rotate; the splint anchor clamps are fixed to be set up in the tip of rotary rod for the centre gripping waits to observe the semiconductor.
2. The sample carrier for observing a semiconductor by a metallographic microscope according to claim 1, wherein the base is provided with angle scales along the circumferential direction of the control knob.
3. The sample carrier for observing the semiconductor by the metallographic microscope according to claim 2, wherein the angle scale is formed by printing a steel stamp or laser printing.
4. The sample carrier for observing a semiconductor through a metallographic microscope according to claim 1, wherein a rotary rod fixing knob for fastening a rotary rod is provided on the base.
5. The sample carrier for observing a semiconductor by a metallographic microscope according to claim 1, wherein the clamp plate jig is inserted into an end portion of the rotating rod, and a jig fixing knob for fastening the clamp plate jig is provided on the rotating rod.
6. The sample carrier for observing a semiconductor through a metallographic microscope according to claim 1, wherein the clamp plate jig comprises two clamp plates and a screw for controlling a distance between the two clamp plates.
7. The sample carrier for observing a semiconductor through a metallographic microscope according to claim 6, wherein the clamping plate is made of glass fiber, polyurethane or PVC.
8. The sample carrier for observing the semiconductor by the metallographic microscope according to claim 1, wherein the rotating rod and the control knob are made of PVC, copper or aluminum alloy.
9. The sample carrier for observing a semiconductor by a metallographic microscope according to claim 1, wherein the base is made of wood, iron, or an aluminum alloy.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202123337524.4U CN216772102U (en) | 2021-12-28 | 2021-12-28 | Sample carrier for observing semiconductor by metallographic microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202123337524.4U CN216772102U (en) | 2021-12-28 | 2021-12-28 | Sample carrier for observing semiconductor by metallographic microscope |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN216772102U true CN216772102U (en) | 2022-06-17 |
Family
ID=81970016
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202123337524.4U Active CN216772102U (en) | 2021-12-28 | 2021-12-28 | Sample carrier for observing semiconductor by metallographic microscope |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN216772102U (en) |
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2021
- 2021-12-28 CN CN202123337524.4U patent/CN216772102U/en active Active
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