CN216770202U - Annealing stove pipeline formula heat cycle device - Google Patents
Annealing stove pipeline formula heat cycle device Download PDFInfo
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- CN216770202U CN216770202U CN202220086286.XU CN202220086286U CN216770202U CN 216770202 U CN216770202 U CN 216770202U CN 202220086286 U CN202220086286 U CN 202220086286U CN 216770202 U CN216770202 U CN 216770202U
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Abstract
The utility model relates to the technical field of annealing furnaces, in particular to an annealing furnace pipeline type thermal circulation device which comprises a device body, wherein the device body comprises an annealing furnace body, a device bottom plate and an air extractor, one side of the device bottom plate is fixedly connected with a rotating motor, the output end of the rotating motor is fixedly connected with the air extractor, and a thermal circulation pipeline is transversely inserted into the air extractor in a penetrating manner. According to the utility model, through the arrangement of the annealing furnace body, the device bottom plate and the air pump, when the device is used, a worker can perform internal heating by starting the heating resistance wire, heat energy can be rapidly blown into the annealing furnace body through the fan, the working efficiency of the device is greatly improved, meanwhile, the worker starts the servo motor to drive the rotary gear to rotate through the contraction plate, when the rotary gear rotates, the blowing angle of the fan can be adjusted at a constant speed, so that the internal heat is dispersed more uniformly, and the practicability of the device is greatly improved.
Description
Technical Field
The utility model relates to the technical field of annealing furnaces, in particular to a pipeline type heat circulating device of an annealing furnace.
Background
An annealing furnace is a process used in the manufacture of semiconductor devices that includes heating a plurality of semiconductor wafers to affect their electrical properties. The heat treatment is designed for different effects. The wafer may be heated to activate the dopants, convert the thin film into a thin film or convert the thin film into a wafer substrate interface, densify the deposited thin film, change the state of the grown thin film, repair implanted damage, move dopants or transfer dopants from one thin film to another or from the thin film into the wafer substrate.
However, the existing annealing furnace has the defects of high internal heat volatility, energy consumption increase and device practicability reduction, so that the annealing furnace pipeline type heat circulating device needs to be designed to solve the problems.
SUMMERY OF THE UTILITY MODEL
The utility model aims to provide a pipeline type heat circulating device of an annealing furnace, which aims to solve the problems that the prior annealing furnace proposed in the background art has volatile internal heat, not only increases energy consumption, but also reduces the practicability of the device.
In order to achieve the purpose, the utility model provides the following technical scheme: an annealing furnace pipe thermal cycle apparatus comprising:
the device comprises a device body, wherein the device body comprises an annealing furnace body, a device bottom plate and an air pump, one side of the device bottom plate is fixedly connected with a rotating motor, the output end of the rotating motor is fixedly connected with the air pump, a thermal circulation pipeline is transversely inserted into the air pump, one side of the device bottom plate is fixedly connected with the annealing furnace body, a detection window is formed in the surface of the annealing furnace body, the surface of the detection window is fixedly connected with scale marks, one side of the thermal circulation pipeline is provided with an adjusting mechanism, and one side of the annealing furnace body is provided with a supporting mechanism;
heating mechanism, heating mechanism includes mount and heating bottom plate, one side fixedly connected with mount of heating bottom plate, one side fixedly connected with electric heating resistance silk of mount, one side fixedly connected with servo motor of heating bottom plate, servo motor's the reciprocal lead screw of output fixedly connected with, the heating base has been cup jointed to one side of reciprocal lead screw, the both sides swing joint of heating base has the shrink board, and is two sets of the expansion plate has all been cup jointed, and is two sets of the inside of shrink board one side swing joint of expansion plate has the fan.
Preferably, the surface of the annealing furnace body is provided with a detection window, and the surface of the detection window is fixedly connected with scale marks.
Preferably, one side of the reciprocating screw rod is connected with a rotating gear in a meshing manner, and one side of the rotating gear is movably connected to the heating base.
Preferably, adjustment mechanism includes regulating plate and thread bush, the fixed surface of thermal cycle pipeline is connected with the regulating plate, the thread bush has been cup jointed on the surface of thermal cycle pipeline, the internal thread of thread bush is connected with the screw thread lead screw, one side fixedly connected with connecting rod of screw thread lead screw, one side fixedly connected with carousel of connecting rod.
Preferably, the surface of the turntable is sleeved with a non-slip mat.
Preferably, the supporting mechanism comprises a first supporting rod and a connecting cylinder, one side of the annealing furnace body is movably connected with the first supporting rod, one side of the first supporting rod is fixedly connected with the connecting cylinder, one side of the connecting cylinder is fixedly connected with a second supporting rod, and one side of the second supporting rod is movably connected with a supporting base.
Compared with the prior art, the utility model has the beneficial effects that:
1. through being provided with annealing stove body, device bottom plate and air extractor, when the device uses, staff's accessible starts the electric resistance silk and carries out inside generating heat, can blow in annealing stove body inside with heat energy fast through the fan, promoted the work efficiency that the device used greatly, simultaneously, staff starts servo motor and drives the rotatory gear rotation through the shrink board, when the rotatory gear is rotatory, can be at the uniform velocity adjustment fan the angle of blowing, make inside heat dispersion more even, promoted the practicality of device greatly.
2. When the device uses, the rotatory carousel of staff's accessible drives the screw lead screw at the inside rotation of thread bush, rotates the thread bush inside from the thread bush, keeps inside steam circulation unobstructed, has promoted the convenience of the use of device greatly, simultaneously, when the device uses and accomplishes, the accessible anticlockwise rotation carousel with screw lead screw block inside the thread bush, has promoted the security of device use.
Drawings
FIG. 1 is a schematic sectional elevation view of the structure of the present invention;
FIG. 2 is a schematic sectional front view of the heating mechanism of the present invention;
FIG. 3 is a schematic sectional front view of the adjusting mechanism of the present invention;
fig. 4 is a schematic front view of the supporting mechanism structure of the present invention.
In the figure: 100. a device body; 110. an annealing furnace body; 111. a detection window; 112. scale lines; 113. a device chassis; 114. an air extractor; 115. a rotating electric machine; 116. a thermal cycle line; 200. a heating mechanism; 210. an electric heating resistance wire; 211. a fixed mount; 212. heating the base; 213. heating the soleplate; 214. a reciprocating screw rod; 215. a rotating gear; 216. a servo motor; 217. a shrink plate; 218. a retractable plate; 219. a fan; 300. an adjustment mechanism; 310. an adjusting plate; 311. a threaded sleeve; 312. a threaded lead screw; 313. a turntable; 314. a non-slip mat; 315. a connecting rod; 400. a support mechanism; 410. a first support bar; 411. a connecting cylinder; 412. a second support bar; 413. and a base is supported.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1-4, an embodiment of the present invention is shown:
a pipeline type thermal circulation device of an annealing furnace comprises a device body 100, wherein the device body 100 comprises an annealing furnace body 110, a device bottom plate 113 and an air extractor 114, one side of the device bottom plate 113 is fixedly connected with a rotating motor 115, the output end of the rotating motor 115 is fixedly connected with the air extractor 114, a thermal circulation pipeline 116 is transversely inserted into the air extractor 114, one side of the device bottom plate 113 is fixedly connected with the annealing furnace body 110, a detection window 111 is formed in the surface of the annealing furnace body 110, a scale mark 112 is fixedly connected to the surface of the detection window 111, one side of the thermal circulation pipeline 116 is provided with an adjusting mechanism 300, and one side of the annealing furnace body 110 is provided with a supporting mechanism 400;
Furthermore, the surface of the annealing furnace body 110 is provided with a detection window 111, the surface of the detection window 111 is fixedly connected with scale marks 112, and workers can observe the working condition of the internal raw materials through the detection window 111 and the scale marks 112, so that the practicability of the device is improved.
Furthermore, one side meshing of reciprocating screw 214 is connected with rotary gear 215, and one side swing joint of rotary gear 215 is on heating base 212, and the staff starts servo motor 216 and drives rotary gear 215 rotatory through shrink board 217, and when rotary gear 215 was rotatory, the at uniform velocity adjustment fan 219 the angle of blowing made inside heat dispersion more even, has promoted the practicality of device greatly.
Further, adjustment mechanism 300 includes regulating plate 310 and thread bush 311, the fixed surface of thermal cycle pipeline 116 is connected with regulating plate 310, thread bush 311 has been cup jointed on the surface of thermal cycle pipeline 116, the inside threaded connection of thread bush 311 has screw lead screw 312, one side fixedly connected with connecting rod 315 of screw lead screw 312, one side fixedly connected with carousel 313 of connecting rod 315, staff's accessible rotation carousel 313, it is inside rotatory at thread bush 311 to drive screw lead screw 312, it is inside to leave thread bush 311 with screw bush 311, it is unobstructed to keep inside hot gas circulation, the convenience of the use of device has been promoted, and simultaneously, when the device used the completion, accessible anticlockwise rotation carousel 313 blocks screw lead screw 312 inside thread bush 311, the security of device use has been promoted.
Furthermore, the surface of the rotating disc 313 is sleeved with the anti-slip pad 314, when the rotating disc 313 is rotated by a worker, the friction between the hand and the device can be increased by holding the anti-slip pad 314, the hand slip is prevented, and the use safety of the device is improved.
Further, the supporting mechanism 400 comprises a first supporting rod 410 and a connecting cylinder 411, one side of the annealing furnace body 110 is movably connected with the first supporting rod 410, one side of the first supporting rod 410 is fixedly connected with the connecting cylinder 411, one side of the connecting cylinder 411 is fixedly connected with a second supporting rod 412, one side of the second supporting rod 412 is movably connected with a supporting base 413, when the device is used, the supporting effect of the first supporting rod 410 can be achieved on the device, and the use stability of the device is greatly improved.
The working principle is as follows: when the device uses, the staff accessible starts the electrothermal wire 210 and internally generates heat, can blow in heat energy into inside the annealing stove body 110 fast through fan 219, has promoted the work efficiency that the device used, simultaneously, the staff starts servo motor 216 and drives rotatory gear 215 through shrink board 217 rotatory, when rotatory gear 215 is rotatory, can be at the uniform velocity adjustment fan 219 the angle of blowing, make inside heat dispersion more even, has promoted the practicality of device.
Staff's accessible rotation carousel 313 drives screw lead 312 at the internal rotation of thread bush 311, rotates thread bush 311 inside from thread bush 311, keeps inside steam circulation unobstructed, has promoted the convenience of the use of device, and simultaneously, when the device was used and is accomplished, accessible anticlockwise rotation carousel 313 blocks screw lead 312 inside thread bush 311, has promoted the security of device use.
It will be evident to those skilled in the art that the utility model is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential attributes thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the utility model being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Claims (6)
1. An annealing furnace pipe type heat circulating device is characterized by comprising:
the device comprises a device body (100), wherein the device body (100) comprises an annealing furnace body (110), a device bottom plate (113) and an air extractor (114), one side of the device bottom plate (113) is fixedly connected with a rotating motor (115), the output end of the rotating motor (115) is fixedly connected with the air extractor (114), a heat circulation pipeline (116) is transversely inserted into the air extractor (114), one side of the device bottom plate (113) is fixedly connected with the annealing furnace body (110), a detection window (111) is formed in the surface of the annealing furnace body (110), a scale mark (112) is fixedly connected to the surface of the detection window (111), one side of the heat circulation pipeline (116) is provided with an adjusting mechanism (300), and one side of the annealing furnace body (110) is provided with a supporting mechanism (400);
heating mechanism (200), heating mechanism (200) includes mount (211) and heating bottom plate (213), one side fixedly connected with mount (211) of heating bottom plate (213), one side fixedly connected with resistance wire (210) of mount (211), one side fixedly connected with servo motor (216) of heating bottom plate (213), the reciprocal lead screw (214) of output fixedly connected with of servo motor (216), heating base (212) has been cup jointed to one side of reciprocal lead screw (214), the both sides swing joint of heating base (212) has shrink board (217), and is two sets of shrink board (217)'s inside has all been cup jointed expansion plate (218), and is two sets of one side swing joint of expansion plate (218) has fan (219).
2. The annealing furnace pipe type heat cycle device according to claim 1, wherein: a detection window (111) is formed in the surface of the annealing furnace body (110), and scale marks (112) are fixedly connected to the surface of the detection window (111).
3. The annealing furnace pipe heat cycle apparatus according to claim 1, wherein: one side of the reciprocating screw rod (214) is connected with a rotating gear (215) in a meshing manner, and one side of the rotating gear (215) is movably connected to the heating base (212).
4. The annealing furnace pipe type heat cycle device according to claim 1, wherein: adjustment mechanism (300) are including regulating plate (310) and thread bush (311), the fixed surface of thermal cycle pipeline (116) is connected with regulating plate (310), thread bush (311) have been cup jointed on the surface of thermal cycle pipeline (116), the inside threaded connection of thread bush (311) has screw thread lead screw (312), one side fixedly connected with connecting rod (315) of screw thread lead screw (312), one side fixedly connected with carousel (313) of connecting rod (315).
5. The annealing furnace pipe type heat cycle apparatus according to claim 4, wherein: and the surface of the rotating disc (313) is sleeved with a non-slip mat (314).
6. The annealing furnace pipe heat cycle apparatus according to claim 1, wherein: the supporting mechanism (400) comprises a first supporting rod (410) and a connecting cylinder (411), one side of the annealing furnace body (110) is movably connected with the first supporting rod (410), one side of the first supporting rod (410) is fixedly connected with the connecting cylinder (411), one side of the connecting cylinder (411) is fixedly connected with a second supporting rod (412), and one side of the second supporting rod (412) is movably connected with a supporting base (413).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220086286.XU CN216770202U (en) | 2022-01-13 | 2022-01-13 | Annealing stove pipeline formula heat cycle device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220086286.XU CN216770202U (en) | 2022-01-13 | 2022-01-13 | Annealing stove pipeline formula heat cycle device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN216770202U true CN216770202U (en) | 2022-06-17 |
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ID=81977758
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202220086286.XU Active CN216770202U (en) | 2022-01-13 | 2022-01-13 | Annealing stove pipeline formula heat cycle device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN216770202U (en) |
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2022
- 2022-01-13 CN CN202220086286.XU patent/CN216770202U/en active Active
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