CN216749810U - Multi-section heating single-end element base structure - Google Patents
Multi-section heating single-end element base structure Download PDFInfo
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- CN216749810U CN216749810U CN202122474894.6U CN202122474894U CN216749810U CN 216749810 U CN216749810 U CN 216749810U CN 202122474894 U CN202122474894 U CN 202122474894U CN 216749810 U CN216749810 U CN 216749810U
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Abstract
The utility model discloses a multi-section heating single-end element base structure which comprises three base bodies, wherein the circumference of the side surface of each base body is provided with three outer circular notches, one side of each base body is provided with a limiting counter bore, the bottom of each limiting counter bore is provided with a limiting bottom surface, and the limiting bottom surface is provided with a penetrating threading hole. The magnesium oxide base is convenient to install, the qualification rate of finished products is improved, each section of magnesium rod is positioned in the center of the stainless steel, and the thickness of the insulating layer is uniform.
Description
Technical Field
The utility model relates to the technical field of semiconductor equipment heating element materials, in particular to a multi-section heating single-end element base structure.
Background
In the processing and production process of the heating element of the pan-semiconductor equipment, the heating element with a single-end outgoing line with the length of more than 3 meters is needed, and the heating element is needed to heat a semiconductor wafer to the process temperature in vacuum so as to effectively coat the film. The traditional heating element with a single-head outgoing line of more than 3 meters in length is heated in vacuum, the process temperature is high (more than 850 ℃), and the phenomena of poor thermal insulation performance and poor voltage resistance are easy to occur. The heating element with a single-head outlet wire of more than 3 meters in length has short service life and is not in accordance with safety regulations. In addition, in the processing process of the heating element with a single-end outgoing line more than 3 meters in length, because the heating element is long, the processing length of the magnesium rod wound with the resistance wire is only within 500, multiple sections are needed to be spliced, and the traditional multiple sections are spliced to adopt a tripod made of magnesium oxide.
A tripod made of conventional magnesium oxide is mainly used for processing a single magnesium rod, and the magnesium rod spliced by multiple sections cannot be limited and can be ensured to be uniform in insulating layer thickness and loosened. The heating element with a single-end outgoing line of more than 3 meters in length is processed by a tripod made of magnesium oxide, so that the primary failure rate is very high in the production process.
SUMMERY OF THE UTILITY MODEL
The utility model aims to solve the defects in the prior art and provides a base structure of a multi-section heating single-end element.
In order to achieve the purpose, the utility model adopts the following technical scheme:
the utility model provides a single-ended component base structure of multistage heating, includes the base, base side circumference has seted up the excircle notch and has threely, base one side has seted up spacing counter bore, spacing counter bore bottom is provided with spacing bottom surface, the through wires hole that runs through is seted up to spacing bottom surface.
As a further scheme of the utility model, the three outer circular notches are uniformly distributed on the side surface of the base.
As a further scheme of the utility model, two threading holes are uniformly distributed on the limiting bottom surface.
The utility model has the beneficial effects that:
1) according to the utility model, the magnesium oxide base is convenient to install, and the qualification rate of finished products is improved;
2) ensuring that each section of magnesium rod is positioned in the center of the stainless steel and the thickness of the insulating layer is uniform;
3) the limiting bottom surface can ensure that the base cannot move in the stainless steel, each section of magnesium rod cannot deviate from the inner center of the stainless steel, and the thickness of the insulating layer is uniform;
4) the structure made of magnesium oxide on the sectional outer circle ensures that magnesium powder can be filled in the processing process;
5) can be used at vacuum environment temperature above 850 ℃;
6) the threading hole can ensure that 2 leads cannot be short-circuited.
Drawings
FIG. 1 is a front cross-sectional view of a multi-section heating single-ended member base construction according to the present invention;
FIG. 2 is a side cross-sectional view of a multi-section heating single-ended component base structure according to the present invention.
In the figure: 1. the device comprises an outer circular notch 2, a threading hole 3, a limiting bottom surface 4 and a limiting counter bore.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments.
Referring to fig. 1-2, a multistage heating single-ended component base structure, includes the base, base side circumference has seted up excircle notch 1 and has three, base one side has seted up spacing counter bore 4, spacing counter bore 4 bottom is provided with spacing bottom surface 3, spacing bottom surface 3 is seted up through-going through wire hole 2.
According to the utility model, the three outer circular notches 1 are uniformly distributed on the side surface of the base.
According to the utility model, two threading holes 2 are uniformly distributed on the limiting bottom surface 3.
The working principle is as follows: during the in-service use, after 2 sections above magnesium pole winding resistance wires, with 1 section magnesium pole top installation multistage heating single-ended component base, then wear out two through wires holes 2 of base with the magnesium pole lead wire of winding resistance wire, install another section winding resistance wire magnesium pole on the base to penetrate the lead wire of last section magnesium pole, then with wholly penetrating in the stainless steel pipe.
Having thus shown and described the basic principles and essential features of the utility model and its advantages, it will be evident to those skilled in the art that the utility model is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential attributes thereof, and it is therefore intended that the embodiments be considered as illustrative and not restrictive in all respects, the scope of the utility model being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein without any reference to the appended claims, any reference signs in the claims being thus intended to be construed as limiting the claims as they relate to.
Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.
Claims (3)
1. The utility model provides a single-ended component base structure of multistage heating, includes the base, its characterized in that, base side circumference has seted up excircle notch (1) and has threely, base one side has seted up spacing counter bore (4), spacing counter bore (4) bottom is provided with spacing bottom surface (3), threading hole (2) that run through are seted up to spacing bottom surface (3).
2. The multiple section heating single ended element base structure of claim 1, wherein three of said cylindrical notches (1) are evenly distributed on the base side.
3. The multiple section heating single end element base structure as claimed in claim 2, wherein the two threading holes (2) are uniformly distributed on the bottom surface (3).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122474894.6U CN216749810U (en) | 2021-10-14 | 2021-10-14 | Multi-section heating single-end element base structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122474894.6U CN216749810U (en) | 2021-10-14 | 2021-10-14 | Multi-section heating single-end element base structure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN216749810U true CN216749810U (en) | 2022-06-14 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202122474894.6U Active CN216749810U (en) | 2021-10-14 | 2021-10-14 | Multi-section heating single-end element base structure |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN216749810U (en) |
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2021
- 2021-10-14 CN CN202122474894.6U patent/CN216749810U/en active Active
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