CN216714711U

CN216714711U - High-reliability long-life screw vacuum pump for polycrystalline silicon tablet press

Info

Publication number: CN216714711U
Application number: CN202122864882.4U
Authority: CN
Inventors: 陈全玉
Original assignee: Jiangyin Tiantian Vacuum Equipment Co ltd
Current assignee: Jiangyin Tiantian Vacuum Equipment Co ltd
Priority date: 2021-11-22
Filing date: 2021-11-22
Publication date: 2022-06-10
Anticipated expiration: 2031-11-22

Abstract

The utility model discloses a high-reliability long-life screw vacuum pump for a polycrystalline silicon tablet press, which relates to the technical field of screw vacuum pump equipment and comprises a base, a cavity, a top plate, a vacuum pump main body, a sliding block, a reset spring, an installation block, a sliding groove, a movable block, a compression spring, a sliding rod, a supporting plate, a buffer spring, a cooling box, a cooling pipe, a servo motor, a turbine, a contact, a warning lamp, a connecting rod and a push rod. According to the utility model, through the matching of the buffer spring and the reset spring, the buffer and shock absorption effects are realized on the vacuum pump main body, the damage to the vacuum pump main body is avoided, the service life of the vacuum pump main body is ensured, the use effect of the device is ensured, when the vibration amplitude of the vacuum pump main body is too large, the support plate moves upwards to a certain degree, so that the warning lamp starts to work, the warning effect is realized on workers, the damage to the vacuum pump main body due to vibration is avoided, and the safety of the device is ensured.

Description

High-reliability long-life screw vacuum pump for polycrystalline silicon tablet press

Technical Field

The utility model relates to the technical field of screw vacuum pump equipment, in particular to a high-reliability long-service-life screw vacuum pump for a polycrystalline silicon tablet press.

Background

The screw vacuum pump is an air pumping device which utilizes a pair of screws to synchronously rotate in a high speed and reverse direction in a pump shell to generate air suction and exhaust functions, is a renewal product of an oil seal type vacuum pump, can pump out gas occasions containing a large amount of water vapor and a small amount of dust, and is widely applied to the fields of enterprises with higher requirements on clean vacuum, such as domestic pharmacy, chemical industry, semiconductors and the like. The screw vacuum pump belongs to a non-contact dry pump, is an ideal pump in the early 90 s of the 20 th century, and is widely applied to the advantages of wide pumping speed range, simple and compact structure, no friction of pumping cavity elements, long service life, low energy consumption, no oil pollution and the like. Polysilicon tablet presses typically require the use of a screw vacuum pump for the processing operation.

The existing screw vacuum pump for polycrystalline silicon is easy to vibrate in the installation, movement and working processes, the device lacks a buffer damping mechanism for the screw vacuum pump, the damage of the vacuum pump is easy to cause, the service life of the vacuum pump is influenced, and the use effect of the device is influenced.

SUMMERY OF THE UTILITY MODEL

The utility model aims to provide a high-reliability long-life screw vacuum pump for a polycrystalline silicon tablet press, which aims to solve the problems in the background technology.

In order to solve the technical problems, the utility model provides the following technical scheme: the screw vacuum pump comprises a base, wherein a cavity is formed in the top of the base, a top plate is arranged on the inner wall of the cavity and is in sliding connection with the cavity, a vacuum pump body is arranged on the top of the top plate, a buffer mechanism is arranged on the inner wall of the cavity, an installation block is arranged in the center of the bottom of the inner wall of the cavity, a sliding groove is formed in the installation block, a sliding block is arranged on the inner wall of the sliding groove and is in sliding connection with the sliding groove through a compression spring, a sliding rod is arranged on the top of the sliding block, one end of the sliding rod extends to the position above the installation block and is sleeved with a support plate, a buffer spring is arranged on the top of the support plate, one end of the buffer spring is fixedly connected with the bottom of the top plate, connecting rods which are in rotating connection are symmetrically arranged on the bottom of the support plate, one end of each connecting rod is in rotating connection with the buffer mechanism, and a cooling mechanism is arranged on the top of the top plate, the inner wall of the sliding groove is provided with a warning mechanism.

Further, buffer gear includes two sliders, two the slider symmetry slide set up in cavity inner wall bottom both sides, two slider outer wall keeps away from a lateral symmetry and is equipped with reset spring, reset spring one end with cavity inner wall fixed connection, slider top one side is equipped with the push rod of rotating the connection, push rod one end with roof bottom rotates and connects, plays the cushioning effect to the roof.

Further, cooling body includes the cooler bin, the cooler bin set up in the roof top, the cooler bin is located vacuum pump main part one side, the cooler bin outer wall is equipped with the cooling tube, cooling tube one end extends to inside the vacuum pump main part, the cooler bin top is equipped with servo motor, the matching of cooling tube inner wall is equipped with the turbine of rotating the connection, servo motor output shaft with turbine fixed connection carries out cooling work to the vacuum pump main part.

Furthermore, the inner wall of the cavity is provided with a slide rail matched with the slide block, the inner part of the mounting block is provided with a through groove matched with the slide bar, the slide rail plays a role in guiding the slide block, and the through groove ensures the stability of the mounting block during movement.

Further, slider outer wall one side be equipped with connecting rod assorted ball bearing, backup pad top symmetry is equipped with the auxiliary rod, the auxiliary rod with vacuum pump main part sliding connection, ball bearing have guaranteed the stability when connecting rod moves, and the auxiliary rod plays the guide effect to the backup pad.

Further, warning mechanism includes the contact, the contact set up in spout inner wall one side, the contact is located the movable block top, base top one side is equipped with the warning light, the contact with warning light electric connection, when the vibrations of vacuum pump main part are too strong, warns the work.

Compared with the prior art, the utility model has the following beneficial effects:

1. according to the utility model, the mounting block, the sliding block, the supporting plate and the connecting rod are arranged, and the buffer spring is matched with the reset spring, so that the vacuum pump main body is buffered and damped, the damage to the vacuum pump main body is avoided, the service life of the vacuum pump main body is ensured, and the use effect of the device is ensured.

2. According to the utility model, by arranging the contact and the warning lamp, when the vibration amplitude of the vacuum pump main body is too large, the supporting plate moves upwards to a certain degree, so that the warning lamp starts to work, a warning effect is achieved for workers, the vacuum pump main body is prevented from being damaged due to vibration, and the safety of the device is ensured.

Drawings

The accompanying drawings, which are included to provide a further understanding of the utility model and are incorporated in and constitute a part of this specification, illustrate embodiments of the utility model and together with the description serve to explain the principles of the utility model and not to limit the utility model. In the drawings:

FIG. 1 is a front cross-sectional view of the present invention in its entirety;

FIG. 2 is an enlarged schematic view of the utility model at A in FIG. 1;

FIG. 3 is an enlarged schematic view of the utility model at B of FIG. 1;

FIG. 4 is a schematic structural view of a slide bar of the present invention;

in the figure: 1. a base; 2. a cavity; 3. a top plate; 4. a vacuum pump main body; 5. a slider; 6. a return spring; 7. mounting blocks; 8. a chute; 9. a movable block; 10. a compression spring; 11. a slide bar; 12. a support plate; 13. a buffer spring; 14. a cooling tank; 15. a cooling tube; 16. a servo motor; 17. a turbine; 18. a contact; 19. a warning light; 20. a connecting rod; 21. a push rod.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

Referring to fig. 1-4, the present invention provides the following technical solutions: the screw vacuum pump with high reliability and long service life for the polycrystalline silicon tabletting machine comprises a base 1, wherein a cavity 2 is formed in the top of the base 1, a top plate 3 in sliding connection is arranged on the inner wall of the cavity 2, a vacuum pump main body 4 is arranged on the top of the top plate 3, a buffer mechanism is arranged on the inner wall of the cavity 2 and comprises two sliders 5, the two sliders 5 are symmetrically and slidably arranged on two sides of the bottom of the inner wall of the cavity 2, a reset spring 6 is symmetrically arranged on one side, away from the outer wall of each of the two sliders 5, one end of the reset spring 6 is fixedly connected with the inner wall of the cavity 2, a push rod 21 in rotary connection is arranged on one side of the top of each of the sliders 5, one end of the push rod 21 is rotatably connected with the bottom of the top plate 3, an installation block 7 is arranged at the center of the bottom of the inner wall of the cavity 2, a chute 8 is formed in the installation block 7, and a movable block 9 in sliding connection is arranged on the inner wall of the chute 8, the movable block 9 is connected with the chute 8 through a compression spring 10, a slide rod 11 is arranged at the top of the movable block 9, one end of the slide rod 11 extends to the upper part of the installation block 7 and is sleeved with a support plate 12, a buffer spring 13 is arranged at the top of the support plate 12, one end of the buffer spring 13 is fixedly connected with the bottom of the top plate 3, a connecting rod 20 which is rotatably connected is symmetrically arranged at the bottom of the support plate 12, one end of the connecting rod 20 is rotatably connected with the buffer mechanism, a cooling mechanism is arranged at the top of the top plate 3 and comprises a cooling box 14, the cooling box 14 is arranged at the top of the top plate 3, the cooling box 14 is positioned at one side of the vacuum pump main body 4, a cooling pipe 15 is arranged on the outer wall of the cooling box 14, one end of the cooling pipe 15 extends to the inside of the vacuum pump main body 4, and a servo motor 16 is arranged at the top of the cooling box 14, the inner wall of the cooling pipe 15 is provided with a turbine 17 in a matching manner, and the output shaft of the servo motor 16 is fixedly connected with the turbine 17.

The inner wall of the cavity 2 is provided with a sliding rail matched with the sliding block 5, the mounting block 7 is internally provided with a through groove matched with the sliding rod 11, the sliding rail limits the moving direction of the sliding block 5, the stability of the sliding block 5 during moving is ensured, the through groove plays a role in guiding the sliding rod 11, and the stability of the sliding rod 11 during moving is ensured.

5 outer wall one side of slider be equipped with connecting rod 20 assorted ball bearing, the symmetry in backup pad 12 top is equipped with the auxiliary rod, the auxiliary rod with 4 sliding connection of vacuum pump main part replace the rotation through setting up ball bearing, have guaranteed the stability when connecting rod 20 moves, and the auxiliary rod plays the guide effect to backup pad 12, has guaranteed the stability when backup pad 12 moves.

The implementation mode is specifically as follows: when the vacuum pump is used, the mounting block 7, the sliding block 5, the supporting plate 12 and the connecting rod 20 are arranged, when the vacuum pump works, the vacuum pump main body 4 is fixed at the top of the top plate 3, when a moving device or the vacuum pump main body 4 is required to work, the top plate 3 and the vacuum pump main body 4 vibrate, when the top plate 3 moves downwards, the top plate 3 drives the two push rods 21 to swing, the push rods 21 drive the sliding blocks 5 to move, the two sliding blocks 5 approach each other, the reset spring 6 is stretched at the moment, the top plate 3 is buffered, so that the vacuum pump main body 4 is buffered and damped, when the two sliding blocks 5 approach each other, the sliding blocks 5 drive the connecting rod 20 to swing, the connecting rod 20 drives the supporting plate 12 to move upwards, the supporting plate 12 drives the sliding rod 11 to move, the sliding rod 11 drives the movable block 9 to move upwards, the sliding groove 8 in the mounting block 7 plays a role in guiding for the movable block 9, the stability of the support plate 12 during movement is ensured, at the moment, the compression spring 10 is stretched, the buffer effect is realized on the movement of the sliding block 5, the further shock absorption effect is realized on the top plate 3, when the support plate 12 moves upwards, the relative distance between the support plate 12 and the top plate 3 is close, the buffer spring 13 is compressed, the buffer spring 13 realizes the further shock absorption effect on the vacuum pump main body 4, when the downward movement distance of the top plate 3 is larger, the upward movement distance of the support plate 12 is larger, the distance between the support plate 12 and the top plate 3 is smaller, the shock absorption effect of the buffer spring 13 is stronger, the self-adaptive shock absorption effect is realized on the vacuum pump main body 4, the buffer shock absorption effect is realized on the vacuum pump main body 4 through the matching of the buffer spring 13 and the reset spring 6, the damage to the vacuum pump main body 4 is avoided, the service life of the vacuum pump main body 4 is ensured, and the use effect of the device is ensured, when vacuum pump main part 4 carries out the during operation, servo motor 16 begins work, drive turbine 17 and rotate, turbine 17 makes the coolant liquid flow in the inside of cooling tube 15, the inside and the inside of cooler bin 14 of the casing of coolant liquid vacuum pump main part 4 flow, thereby play the cooling effect to vacuum pump main part 4, the working effect of device has been guaranteed, and servo motor 16 is located the outside of vacuum pump main part 4, the vibrations that vacuum pump main part 4 received have been reduced, the working effect of device has been guaranteed.

Referring to fig. 1-2, the present invention provides the following technical solutions: polycrystalline silicon is screw vacuum pump of high reliability long-life for tablet press still including set up in the warning mechanism of 8 inner walls of spout, warning mechanism includes contact 18, contact 18 set up in 8 inner walls of spout one side, contact 18 is located the movable block 9 top, 1 top one side of base is equipped with warning light 19, contact 18 with 19 electric connection of warning light.

The implementation mode specifically comprises the following steps: during the use, through setting up contact 18 and warning light 19, when the vibration range of vacuum pump main part 4 is great, backup pad 12 carries out the up-and-down motion thereupon, when the vibration range of vacuum pump main part 4 is too big, backup pad 12 upwards moves to certain extent, backup pad 12 contacts contact 18, make warning light 19 begin to work, play the warning effect to the staff, the vacuum pump main part 4 vibrations of suggestion this moment are too big, thereby overhaul work to vacuum pump main part 4, avoid vacuum pump main part 4 because damage appears in the vibrations, the security of device has been guaranteed.

The working principle of the utility model is as follows:

referring to the attached drawings 1-4 of the specification, through the arrangement of the mounting block 7, the sliding block 5, the supporting plate 12 and the connecting rod 20 and the cooperation of the buffer spring 13 and the return spring 6, the vacuum pump main body 4 is buffered and damped, the vacuum pump main body 4 is prevented from being damaged, the service life of the vacuum pump main body 4 is guaranteed, and the using effect of the device is guaranteed.

Further, referring to the attached drawings 1-2 of the specification, by arranging the contact 18 and the warning lamp 19, when the vibration amplitude of the vacuum pump main body 4 is too large, the support plate 12 moves upwards to a certain degree, so that the warning lamp 19 starts to work, a warning effect is achieved for workers, the vacuum pump main body 4 is prevented from being damaged due to vibration, and the safety of the device is guaranteed.

It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.

Finally, it should be noted that: although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that changes may be made in the embodiments and/or equivalents thereof without departing from the spirit and scope of the utility model. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. Polycrystalline silicon is screw vacuum pump of high reliable long-life for tablet press, including base (1), its characterized in that: the vacuum pump is characterized in that a cavity (2) is formed in the top of the base (1), a top plate (3) in sliding connection is arranged on the inner wall of the cavity (2), a vacuum pump main body (4) is arranged at the top of the top plate (3), a buffer mechanism is arranged on the inner wall of the cavity (2), an installation block (7) is arranged at the center of the bottom of the inner wall of the cavity (2), a sliding groove (8) is formed in the installation block (7), a movable block (9) in sliding connection is arranged on the inner wall of the sliding groove (8), the movable block (9) is connected with the sliding groove (8) through a compression spring (10), a sliding rod (11) is arranged at the top of the movable block (9), one end of the sliding rod (11) extends to the upper portion of the installation block (7) and is sleeved with a support plate (12), a buffer spring (13) is arranged at the top of the support plate (12), one end of the buffer spring (13) is fixedly connected with the bottom of the top plate (3), the bottom of the supporting plate (12) is symmetrically provided with a connecting rod (20) which is connected in a rotating mode, one end of the connecting rod (20) is connected with the buffer mechanism in a rotating mode, the top of the top plate (3) is provided with a cooling mechanism, and the inner wall of the sliding groove (8) is provided with a warning mechanism.

2. The highly reliable long-life screw vacuum pump for a polysilicon sheet machine as set forth in claim 1, wherein: buffer gear includes two slider (5), two slider (5) symmetry slide set up in cavity (2) inner wall bottom both sides, two slider (5) outer wall is kept away from one side symmetry mutually and is equipped with reset spring (6), reset spring (6) one end with cavity (2) inner wall fixed connection, slider (5) top one side is equipped with and rotates push rod (21) of connecting, push rod (21) one end with roof (3) bottom is rotated and is connected.

3. The highly reliable long-life screw vacuum pump for a polysilicon sheet machine as set forth in claim 1, wherein: cooling body includes cooler bin (14), cooler bin (14) set up in roof (3) top, cooler bin (14) are located vacuum pump main part (4) one side, cooler bin (14) outer wall is equipped with cooling tube (15), cooling tube (15) one end extends to inside vacuum pump main part (4), cooler bin (14) top is equipped with servo motor (16), cooling tube (15) inner wall matches and is equipped with turbine (17) of rotating the connection, servo motor (16) output shaft with turbine (17) fixed connection.

4. The highly reliable long-life screw vacuum pump for a polysilicon sheet machine as set forth in claim 2, wherein: the inner wall of the cavity (2) is provided with a sliding rail matched with the sliding block (5), and a through groove matched with the sliding rod (11) is formed in the mounting block (7).

5. The highly reliable long-life screw vacuum pump for a polysilicon sheet machine as set forth in claim 2, wherein: slider (5) outer wall one side be equipped with connecting rod (20) assorted ball bearing, backup pad (12) top symmetry is equipped with the auxiliary rod, the auxiliary rod with vacuum pump main part (4) sliding connection.

6. The highly reliable long-life screw vacuum pump for a polysilicon sheet machine as set forth in claim 1, wherein: the warning mechanism comprises a contact (18), the contact (18) is arranged on one side of the inner wall of the sliding groove (8), the contact (18) is located above the movable block (9), a warning lamp (19) is arranged on one side of the top of the base (1), and the contact (18) is electrically connected with the warning lamp (19).