CN216707187U

CN216707187U - CMP polishing pad gum laminating equipment

Info

Publication number: CN216707187U
Application number: CN202123245286.4U
Authority: CN
Inventors: 宋献礼; 周军
Original assignee: Tuogao Industry And Trade Suzhou Co ltd
Current assignee: Tuogao Industry And Trade Suzhou Co ltd
Priority date: 2021-12-22
Filing date: 2021-12-22
Publication date: 2022-06-10
Anticipated expiration: 2031-12-22

Abstract

The utility model discloses a CMP polishing pad back glue laminating device which comprises a box body, wherein a supporting plate is fixedly connected to the bottom of an inner cavity of the box body, a moving box is fixedly connected to the top of the supporting plate, a conveying roller is arranged in the inner cavity of the moving box, a placing roller is fixedly connected to the left side of the top of the box body, a heating roller is fixedly connected to the left side of the rear side of the inner cavity of the box body, a connecting roller is fixedly connected to the rear side of the inner cavity of the box body and positioned on the right side of the heating roller, a first air cylinder is fixedly connected to the top of the box body and positioned on the right side of the placing roller, and a pressing plate is fixedly connected to the output end of the first air cylinder. According to the utility model, through the matched use of the box body, the supporting plate, the moving box, the conveying roller, the placing roller, the heating roller, the connecting roller, the first air cylinder, the pressing plate, the collecting roller, the servo motor, the second air cylinder, the fixing plate, the telescopic rod, the fixing box and the pressing roller, the gum attaching and pressing treatment can be automatically carried out, and the gum attaching efficiency is improved.

Description

CMP polishing pad gum laminating equipment

Technical Field

The utility model relates to the technical field of back glue laminating equipment, in particular to back glue laminating equipment for a CMP (chemical mechanical polishing) polishing pad.

Background

CMP polishing pad also is called polishing skin, polishing cloth, polishing piece, the important auxiliary material of deciding surface quality in the chemical mechanical polishing, and CMP polishing pad need use gum laminating equipment to carry out the rubberizing to polishing pad in production and processing, but degree of automation is low when current gum laminating equipment uses, has reduced the automatic laminating efficiency of gum, influences production efficiency.

SUMMERY OF THE UTILITY MODEL

The utility model aims to provide CMP polishing pad gum laminating equipment which has the advantage of high processing efficiency and solves the problems that the existing gum laminating equipment is low in automation degree when in use, the gum automatic laminating efficiency is reduced, and the production efficiency is influenced.

In order to achieve the purpose, the utility model provides the following technical scheme: the CMP polishing pad back glue laminating equipment comprises a box body, wherein a supporting plate is fixedly connected to the bottom of an inner cavity of the box body, a moving box is fixedly connected to the top of the supporting plate, a conveying roller is arranged in an inner cavity of the moving box, a placing roller is fixedly connected to the left side of the top of the box body, a heating roller is fixedly connected to the left side of the rear side of the inner cavity of the box body, a connecting roller is fixedly connected to the rear side of the inner cavity of the box body and positioned on the right side of the heating roller, a first air cylinder is fixedly connected to the top of the box body and positioned on the right side of the placing roller, a pressing plate is fixedly connected to the output end of the first air cylinder, a collecting roller is fixedly connected to the top of the box body and positioned on the right side of the first air cylinder, a servo motor is fixedly connected to the front side of the collecting roller, a second air cylinder is fixedly connected to the right side of the box body, a fixing plate is fixedly connected to the output end of the second air cylinder, and a telescopic rod is fixedly connected to the bottom of the fixing plate, the bottom fixedly connected with fixed case of telescopic link, the inner chamber fixedly connected with compression roller of fixed case.

Preferably, the two sides of the box body and the top of the movable box are both provided with a through groove, and the front side of the box body is provided with transparent glass.

Preferably, the rear side of the inner cavity of the box body is fixedly connected with two photoelectric sensors.

Preferably, the rear side of the inner cavity of the box body is fixedly connected with a capacitive displacement sensor, and the capacitive displacement sensor is positioned at the top of the connecting roller.

Preferably, the surface cover of telescopic link is equipped with the spring, the top and the fixed plate fixed connection of spring, the bottom and the fixed case fixed connection of spring.

Preferably, the top of the left side of the inner cavity of the box body is fixedly connected with a dust removal pipe, the surface of the dust removal pipe is communicated with a suction nozzle, the bottom of the inner cavity of the box body is fixedly connected with a fan, the air inlet end of the fan is communicated with the dust removal pipe through a hose, and the air outlet end of the fan extends to the outer side of the box body.

Compared with the prior art, the utility model has the following beneficial effects:

1. according to the utility model, through the matched use of the box body, the supporting plate, the moving box, the conveying roller, the placing roller, the heating roller, the connecting roller, the first air cylinder, the pressing plate, the collecting roller, the servo motor, the second air cylinder, the fixing plate, the telescopic rod, the fixing box and the pressing roller, the gum laminating and pressing treatment can be automatically carried out, the gum laminating efficiency is improved, and the problems that the automation degree is low when the existing gum laminating equipment is used, the gum automatic laminating efficiency is reduced and the production efficiency is influenced are solved.

2. According to the utility model, the photoelectric sensor is arranged, so that the position of a workpiece can be positioned, the capacitive displacement sensor is arranged, so that the conveying length of the glue film can be detected, the buffering property can be increased by arranging the spring, and the box body can be subjected to dust removal treatment by arranging the dust removal pipe, the suction nozzle and the fan, so that dust is prevented from falling into the box body and the attaching effect is reduced.

Drawings

FIG. 1 is a schematic view of the internal structure of the present invention;

FIG. 2 is a schematic view of the external structure of the present invention;

FIG. 3 is an enlarged view of the utility model at A in FIG. 1.

In the figure: 1. a box body; 2. a support plate; 3. a mobile box; 4. a conveying roller; 5. placing a roller; 6. a heating roller; 7. a connecting roller; 8. a first cylinder; 9. pressing a plate; 10. a collection roller; 11. a servo motor; 12. a second cylinder; 13. a fixing plate; 14. a telescopic rod; 15. a fixed box; 16. a compression roller; 17. a photosensor; 18. a capacitive displacement sensor; 19. a spring; 20. a dust removal pipe; 21. a suction nozzle; 22. a fan.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

Referring to fig. 1-3, a CMP polishing pad gum attaching device includes a box 1, through grooves are formed in two sides of the box 1 and on the top of a movable box 3, transparent glass is disposed on the front side of the box 1, two photoelectric sensors 17 are fixedly connected to the rear side of an inner cavity of the box 1, a capacitive displacement sensor 18 is fixedly connected to the rear side of the inner cavity of the box 1, the capacitive displacement sensor 18 is disposed on the top of a connecting roller 7, a dust removing pipe 20 is fixedly connected to the left top of the inner cavity of the box 1, a suction nozzle 21 is communicated with the surface of the dust removing pipe 20, a fan 22 is fixedly connected to the bottom of the inner cavity of the box 1, an air inlet end of the fan 22 is communicated with the dust removing pipe 20 through a hose, an air outlet end of the fan 22 extends to the outer side of the box 1, the workpiece position can be located by disposing the photoelectric sensors 17, by disposing the capacitive displacement sensors 18, the glue film conveying length can be detected, the buffering performance can be increased by arranging a spring 19, the box body 1 can be subjected to dust removal treatment by arranging a dust removal pipe 20, a suction nozzle 21 and a fan 22, dust is prevented from falling into the box body 1 to reduce the laminating effect, the bottom of the inner cavity of the box body 1 is fixedly connected with a supporting plate 2, the top of the supporting plate 2 is fixedly connected with a movable box 3, the inner cavity of the movable box 3 is provided with a conveying roller 4, the left side of the top of the box body 1 is fixedly connected with a placing roller 5, the left side of the rear side of the inner cavity of the box body 1 is fixedly connected with a heating roller 6, the rear side of the inner cavity of the box body 1 is fixedly connected with a connecting roller 7 positioned on the right side of the heating roller 6, the top of the box body 1 and the right side of the placing roller 5 are fixedly connected with a first air cylinder 8, the output end of the first air cylinder 8 is fixedly connected with a pressing plate 9, the top of the box body 1 and the right side of the first air cylinder 8 are fixedly connected with a collecting roller 10, the front side of the collecting roller 10 is fixedly connected with a servo motor 11, the right side of the box body 1 is fixedly connected with a second air cylinder 12, the output end of the second air cylinder 12 is fixedly connected with a fixed plate 13, the bottom of the fixed plate 13 is fixedly connected with an expansion rod 14, the surface of the expansion rod 14 is sleeved with a spring 19, the top of the spring 19 is fixedly connected with the fixed plate 13, the bottom of the spring 19 is fixedly connected with a fixed box 15, the bottom of the expansion rod 14 is fixedly connected with a fixed box 15, the inner cavity of the fixed box 15 is fixedly connected with a compression roller 16, and the first air cylinder 8, the pressure plate 9, the collecting roller 10, the servo motor 11, the second air cylinder 12, the fixed plate 13, the expansion rod 14, the fixed box 15 and the compression roller 16 are matched for use, so that gum laminating and pressing treatment can be automatically carried out, and the gum laminating efficiency is improved, the problem of current gum laminating equipment degree of automation when using low, reduced the automatic laminating efficiency of gum, influence production efficiency is solved.

During the use, place the polishing pad that needs the rubberizing on conveying roller 4, conveying roller 4 carries the polishing pad to the right side, warming mill 6 heats the glued membrane, photoelectric sensor 17 detects the polishing pad position, when the polishing pad is located clamp plate 9 below, first cylinder 8 drives clamp plate 9 downstream, clamp plate 9 presses the glued membrane after the heating on the surface of polishing pad, the polishing pad after the press mold continues to carry to the right side, second cylinder 12 drives fixed plate 13 downstream, fixed plate 13 drives fixed box 15 downstream, compression roller 16 extrudees the polishing pad after the pad pasting once more, the polishing pad after the pad pasting is carried to the right side of box 1 to the right side, the completion of polishing pad back of the body veneer gluing laminating this moment.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the utility model, the scope of which is defined in the appended claims and their equivalents.

Claims

CMP polishing pad back glue laminating equipment comprises a box body (1), and is characterized in that: the bottom of the inner cavity of the box body (1) is fixedly connected with a supporting plate (2), the top of the supporting plate (2) is fixedly connected with a movable box (3), the inner cavity of the movable box (3) is provided with a conveying roller (4), the left side of the top of the box body (1) is fixedly connected with a placing roller (5), the left side of the rear side of the inner cavity of the box body (1) is fixedly connected with a heating roller (6), the rear side of the inner cavity of the box body (1) is fixedly connected with a connecting roller (7) positioned at the right side of the heating roller (6), the top of the box body (1) is fixedly connected with a first air cylinder (8) positioned at the right side of the placing roller (5), the output end of the first air cylinder (8) is fixedly connected with a pressing plate (9), the top of the box body (1) is fixedly connected with a collecting roller (10) positioned at the right side of the first air cylinder (8), and the front side of the collecting roller (10) is fixedly connected with a servo motor (11), the right side fixedly connected with second cylinder (12) of box (1), the output fixedly connected with fixed plate (13) of second cylinder (12), the bottom fixedly connected with telescopic link (14) of fixed plate (13), the bottom fixedly connected with headstock (15) of telescopic link (14), the inner chamber fixedly connected with compression roller (16) of headstock (15).
2. The CMP polishing pad backing tape application apparatus of claim 1, wherein: the two sides of the box body (1) and the top of the movable box (3) are provided with through grooves, and transparent glass is arranged on the front side of the box body (1).
3. The CMP polishing pad backing tape application apparatus of claim 1, wherein: the rear side of box (1) inner chamber is fixed connection has photoelectric sensor (17), photoelectric sensor (17)'s quantity is two.
4. The CMP polishing pad backing tape application apparatus of claim 1, wherein: the rear side of the inner cavity of the box body (1) is fixedly connected with a capacitive displacement sensor (18), and the capacitive displacement sensor (18) is positioned at the top of the connecting roller (7).
5. The CMP polishing pad backing tape application apparatus of claim 1, wherein: the surface cover of telescopic link (14) is equipped with spring (19), the top and fixed plate (13) fixed connection of spring (19), the bottom and the fixed case (15) fixed connection of spring (19).
6. The CMP polishing pad backing tape application apparatus of claim 1, wherein: the utility model discloses a dust removal device, including box (1), dust removal pipe (20), the surface intercommunication of dust removal pipe (20) has suction nozzle (21), the bottom fixedly connected with fan (22) of box (1) inner chamber, the air inlet end of fan (22) passes through hose and dust removal pipe (20) intercommunication, the air-out end of fan (22) extends to the outside of box (1).