CN216704917U - Coating apparatus - Google Patents

Abstract

The utility model describes a coating device, which comprises a supporting mechanism, a feeding mechanism, a cooling mechanism and a driving mechanism, wherein the supporting mechanism is provided with a supporting surface for supporting a coating object and a fluid cavity adjacent to the supporting surface, the feeding mechanism comprises a distributing part for distributing slurry, the distributing part comprises a shell with a cavity for containing the slurry and a discharge hole communicated with the cavity, the cooling mechanism is communicated with the fluid cavity of the supporting mechanism and conveys a cooling medium to the fluid cavity of the supporting mechanism, and the driving mechanism drives the supporting mechanism and/or the feeding mechanism to move relatively. The coating equipment of the utility model can form a low-temperature coating environment by the cooling medium when coating the coating object, reduce the volatilization rate of the slurry supplied to the coating object and further form a film on the coating object comprehensively and stably.

Description

Coating apparatus

Technical Field

The utility model relates to a coating device.

Background

Currently, with the development of industries such as chip, display, and solar energy, each factory has a higher demand for precise film forming technology. The technology for preparing the film layer by coating the wet film and drying the wet film is simple to use when preparing the film layer and has low cost, so the method for preparing the film layer by coating the wet film and drying the wet film is widely applied to some precision coating industries.

In the prior art, in order to reduce the production cost and improve the production capacity, a wet coating and drying method is often adopted to prepare a film layer, the wet coating and drying method comprises various methods such as slit coating, spin coating, blade coating and the like, and a liquid film with large area, high consistency and accurate film thickness can be obtained by adopting the slit coating, so the slit coating method is also often adopted to carry out the coating.

However, when large-area coating is performed, some problems that do not easily occur when a small-sized liquid film is prepared easily occur, as compared with when a small-lot and small-sized liquid film is prepared. When a liquid film with a large size is prepared, the time for coating the film is several times or even ten times longer than that for preparing the liquid film with the same small size. In this case, if the solvent forming the liquid film is volatilized rapidly, the gradient of the solvent is different between the front end and the rear end of the coating film, and the film thickness tends to be uneven, and if the crystal nucleated during the drying of the liquid film occurs, the film formation may fail. And for some film layers with optical performance requirements (such as perovskite liquid films), if the film cannot be uniformly formed in a short time, the photoelectric efficiency of the film can be seriously influenced.

Disclosure of Invention

The present invention has been made in view of the above-described state of the art, and an object thereof is to provide a coating apparatus capable of controlling or reducing the volatilization rate of a solvent of a liquid film.

The utility model provides a coating device, which comprises a supporting mechanism, a feeding mechanism, a cooling mechanism and a driving mechanism, wherein the supporting mechanism is provided with a supporting surface for supporting a coating object and a fluid cavity adjacent to the supporting surface, the feeding mechanism comprises a distributing part for distributing slurry, the distributing part comprises a shell with a cavity for containing the slurry and a discharge port communicated with the cavity, the cooling mechanism is communicated with the fluid cavity of the supporting mechanism and conveys a cooling medium to the fluid cavity of the supporting mechanism, and the driving mechanism drives the supporting mechanism and/or the feeding mechanism to move relatively.

In the coating apparatus according to the present invention, the support mechanism supports the coating object, the supply mechanism feeds the slurry to the discharge port through the distribution portion for distributing the slurry, the slurry discharged from the discharge port flows to the coating object, and the drive mechanism drives the supply mechanism to move the support mechanism and/or the supply mechanism relative to each other. Thereby, the coating object can be coated by the coating apparatus. In addition, the support mechanism has a fluid chamber, and the cooling mechanism communicates with the fluid chamber and delivers a cooling medium to the fluid chamber. In this case, when the coating apparatus applies the coating object, the cooling mechanism feeds the cooling medium to the fluid chamber adjacent to the support surface, so that the low temperature condition of the slurry-forming liquid film can be maintained during the coating process, and further the volatilization of the slurry can be suppressed until the coating of a large area size is completed, whereby the volatilization rate of the slurry can be controlled or reduced, and the desired effect of the large area coating can be improved.

In the coating apparatus according to the present invention, the cooling medium may be a cooling gas or a cooling liquid. Thereby, the temperature of the surrounding space is reduced to some extent by the cooling gas and the cooling liquid, whereby the movement rate of the molecules can be reduced.

In addition, in the coating apparatus according to the present invention, the supply mechanism may further include a storage tank that is connected to the distribution portion and stores the slurry, the storage tank may have a fluid chamber that is connected to the cooling mechanism and is adjacent to and not connected to a storage space of the storage tank, and the cooling mechanism may convey the cooling medium to the fluid chamber of the storage tank. In this case, when the coating object is coated, the low-temperature environment in which the slurry is present in the stock tank is maintained by the cooling medium, whereby the volatilization rate of the slurry can be effectively controlled or reduced.

In the coating apparatus according to the present invention, the housing may have a fluid chamber communicating with the cooling mechanism and adjacent to and not communicating with the chamber, and the cooling mechanism may supply the cooling medium to the fluid chamber of the housing. Thereby, the temperature of the casing can be effectively controlled, so that the slurry held in the casing can be in an environment having a stable temperature.

In the coating apparatus according to the present invention, the support mechanism may have a flat plate shape and may have a predetermined width and a predetermined length. In this case, the coating object of the corresponding size is set according to the predetermined width and length, whereby the coating object can be placed relatively smoothly and completely on the support mechanism.

Further, in the coating apparatus according to the present invention, optionally, the fluid chamber of the support mechanism includes a plurality of tubular chambers communicating with each other, the plurality of tubular chambers being arranged side by side. Thereby, the cooling medium can be fed in at a plurality of positions where the tubular cavity is formed.

In addition, in the coating apparatus according to the present invention, optionally, a length of each of the tubular chambers is equal to the predetermined width, and the plurality of tubular chambers are arranged along a length direction of the support mechanism; or the length of each tubular chamber is equal to the predetermined length, and the plurality of tubular chambers are arranged in the width direction of the support mechanism. Under the condition, when the coating object is coated, the cooling medium is introduced into the fluid cavity through the cooling mechanism, so that the temperature of each part corresponding to the fluid cavity can be in a stable low-temperature environment, the volatilization rate of the solvent of the liquid film is further reduced, and the coating object can be stably formed into the film.

In addition, in the coating apparatus according to the present invention, optionally, the discharge port has a slit shape, and a length of the discharge port is not less than the predetermined width. In this case, when the slurry is supplied to the coating object by the supply mechanism and the coating is performed, the coating can be performed relatively over the entire surface of the coating object.

In addition, in the coating apparatus according to the present invention, optionally, the fluid chamber of the housing extends along a length direction of the discharge port. Thus, when the outlet supplies the slurry to the coating object while the cooling medium is communicated into the fluid chamber, the volatilization rate of the slurry at the outlet can be controlled by cooling correspondingly.

In the coating apparatus according to the present invention, the drive mechanism may drive the distribution portion to move horizontally in a longitudinal direction of the support mechanism. In this case, when the coating object is coated by the distribution portion, the movement is controlled by the driving mechanism, so that the coating object can be coated by relatively convenient control.

According to the coating apparatus of the present invention, the volatilization rate of the liquid film solvent can be controlled or reduced to form a film on the entire surface of the coating object stably.

Drawings

The utility model will now be explained in further detail by way of example only with reference to the accompanying drawings, in which:

fig. 1 is an overall schematic view showing a coating apparatus according to an embodiment of the present invention.

Fig. 2 is a schematic view showing a support mechanism according to an embodiment of the present invention.

Fig. 3 is a schematic view showing a feeding mechanism according to an embodiment of the present invention.

Fig. 4 is a schematic view showing the supply of the distribution portion according to the embodiment of the present invention.

Detailed Description

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. In the following description, the same components are denoted by the same reference numerals, and redundant description thereof is omitted. The drawings are schematic and the ratio of the dimensions of the components and the shapes of the components may be different from the actual ones.

It is noted that, as used herein, the terms "comprises," "comprising," or any other variation thereof, such that a process, method, system, article, or apparatus that comprises or has a list of steps or elements is not necessarily limited to those steps or elements expressly listed, but may include or have other steps or elements not expressly listed or inherent to such process, method, article, or apparatus.

The present embodiment relates to a coating apparatus, which is a slit coating apparatus for coating a sheet material surface with a slurry to form a film on the surface. The slit coating apparatus according to the present embodiment can be applied to coating a wafer and can improve uniformity of film thickness.

The coating apparatus according to the present embodiment may also be referred to as a coating apparatus, or the like, but it should be understood that each of the above names is intended to represent an apparatus for coating a slurry on a surface of a coating object to form a film on the surface of the coating object according to the present embodiment, and should not be construed as limiting.

It should be noted that, in the present invention, the terms of orientation or relative terms of orientation such as "one side", "opposite side", "upward", "downward", "upper surface", "lower surface", and the like are used with reference to the general operational attitude, and should not be construed as limiting.

Fig. 1 is an overall schematic view showing a coating apparatus 1 according to an example of the present embodiment.

In the present embodiment, the coating apparatus 1 may include a support mechanism 10, a supply mechanism 20, a cooling mechanism 30, and a drive mechanism 40 (see fig. 1). In some examples, the support mechanism 10 may be used to support the coating object 100, the feed mechanism 20 may be used to supply the slurry to the coating object 100, and the drive mechanism 40 may drive the support mechanism 10 and/or the feed mechanism 20 to relatively move the support mechanism 10 and the feed mechanism 20. In some examples, the driving mechanism 40 may drive the feeding mechanism 20 to move from one side of the supporting mechanism 10 to the opposite side along a prescribed direction (a direction indicated by D1 in fig. 1).

Fig. 2 is a schematic view showing the support mechanism 10 according to the embodiment of the present invention.

In some examples, the support mechanism 10 may have a support surface and a fluid cavity. The support surface may be used to support the coating object 100.

In some examples, the cooling mechanism 30 may be in communication with fluid cavities in each mechanism. In this case, the cooling mechanism 30 may be used to deliver a cooling medium to the fluid chamber to maintain the mechanisms in a relatively stable low temperature environment.

In some examples, the fluid cavity of the support mechanism 10 may be in communication with the cooling mechanism 30. In some examples, the fluid cavity may be adjacent to the bearing surface. Thereby, the cooling medium can be supplied to the fluid chamber by the cooling mechanism 30 to maintain the support surface at a relatively stable temperature. In some examples, the cooling medium may be a cooling gas or a cooling liquid.

In some examples, the fluid chamber of the support mechanism 10 may include a plurality of tubular chambers in communication with one another, the plurality of tubular chambers being arranged side-by-side. In some examples, the length of each tubular cavity may be equal to the predetermined width, and a plurality of tubular cavities may be arranged along the length of the support mechanism 10. In addition, the length of each tubular chamber may be equal to a predetermined length, and a plurality of tubular chambers are arranged along the width direction of the support mechanism 10. In this case, when the coating object 100 is coated, the cooling medium is introduced into the fluid chamber through the cooling mechanism 30, and since the tubular chambers are arranged side by side in the supporting mechanism 10 and the cooling medium therein is relatively uniformly distributed in the supporting mechanism 10, the temperature of each part of the supporting mechanism 10 can be in a stable low-temperature environment, and further the volatilization rate of the solvent of the liquid film is reduced, so that the coating object 100 on the supporting surface can be stably formed into a film.

In some examples, the support mechanism 10 may have a flat plate shape and have a predetermined width and a predetermined length. In some examples, support mechanism 10 may include an outer stage and an inner stage (not shown). The bearing surface may be located on the inner stage, and the inner stage may be disposed on the outer stage.

Fig. 3 is a schematic view showing the feeding mechanism 20 according to the embodiment of the present invention.

In some examples, the slurry may be supplied through the supply mechanism 20 to coat the coating object 100. In some examples, the feed mechanism 20 may include a dispensing portion 22 that dispenses the slurry. The dispensing part 22 may be used to dispense the slurry so that the slurry is delivered to the coating object 100 to facilitate coating of the coating object 100.

In some examples, the dispensing portion 22 may also include a housing and a spout (not shown). In some examples, the housing may have a chamber 220 that contains the slurry. In some examples, the outlet may be in communication with the chamber 220. The slurry in the chamber 220 may exit through an exit port.

In some examples, the length of the spout may be no less than the predetermined width. In some examples, the spout may be slit-shaped. In this case, when the slurry is supplied to the coating object 100 through the discharge port, the slurry can be relatively uniformly applied to the coating object 100 through the slit.

In some examples, the discharging opening may form a square coating region to cover the coating object 100 when moving from one side of the supporting mechanism 10 to the opposite other side along a prescribed direction, that is, the discharging opening may form a square coating region to complete coating of the coating object 100 when moving from one side of the supporting mechanism 10 to the opposite other side along a prescribed direction.

In some examples. There may be a fluid cavity within the housing that is connected to the cooling mechanism 30. In some embodiments, the cooling medium may be delivered to the distribution portion 22 through a fluid cavity associated with the cooling mechanism 30. In this case, the distribution portion 22 can distribute the slurry without causing a large adverse effect due to the heat exchange with the hot air and thus increasing the volatilization rate of the slurry. Thereby enabling the volatilization rate of the slurry to be reduced.

In some examples, the fluid cavity of the housing may extend along a length of the spout. In this case, when the coating object 100 is coated with the slurry flowing out of the discharge port, it is possible to reduce an undesirable temperature change of the slurry in the casing due to the exchange with the hot air. Thereby, the volatilization rate of the slurry can be stably controlled.

In some examples, the feed mechanism 20 may also include a pre-coat portion (not shown). In some examples, the precoating portion may be disposed below the spout and on a path of movement of the spout toward the support mechanism 10 in some examples. In some examples, the supply mechanism 20 may supply the slurry to the precoat portion in advance before supplying the slurry to the coating object 100 through the discharge port. In this case, by supplying the slurry to the precoating portion in advance to discharge the gas in the discharge port and fill the slurry, uniform coating can be facilitated.

In some examples, the drive mechanism 40 may be used to drive the support mechanism 10 and the feed mechanism 20 to move relative to each other. In some examples, the driving mechanism 40 may drive the feeding mechanism 20 to move from one side of the supporting mechanism 10 to the opposite side. In some examples, the drive mechanism 40 may drive the feed mechanism 20 to move as the slurry is supplied.

Fig. 4 is a schematic diagram showing the supply of the distribution section 22 according to the embodiment of the present invention.

In some examples, the feeding mechanism 20 may further include a storage tank 21 communicating with the dispensing portion 22 and storing the slurry. In some examples, the accumulator 21 may also have a fluid cavity in communication with the cooling mechanism 30 and adjacent to and not in communication with the accumulator space of the accumulator 21. In some examples, the cooling mechanism 30 may deliver a cooling medium to the fluid cavity of the accumulator 21. Therefore, the volatilization rate of the slurry in the storage tank 21 can be reduced, and the utilization rate of the slurry is improved.

In some examples, the fluid chamber of the support mechanism 10, the fluid chamber of the reservoir 21, and the fluid chamber within the housing may be independent of each other and not in communication. Specifically, the cooling mechanism 30 can control the conveyance of the cooling medium in the fluid chamber of the support mechanism 10, the fluid chamber of the accumulator 21, or the fluid chamber in the housing, respectively.

In some examples, the drive mechanism 40 may be substantially arch-bridge shaped. In some examples, the span of the drive mechanism 40 may be greater than the width of the support mechanism 10, and the vault height of the drive mechanism 40 may be greater than the height of the support mechanism 10. Thereby, it can be facilitated that the driving mechanism 40 drives the feeding mechanism 20 to move from one side of the supporting mechanism 10 to the opposite side.

In some examples, the coating apparatus 1 may further include a storage tank 21. In some examples, the storage tank 21 may be connected to the dispensing portion 22 by a pipe. In some examples, multiple valves may be provided on the conduits to control the opening and closing of each conduit. In some examples, slurry may be drawn from the holding tank 21 by a feed pump 23. In some examples, the suction valve may be opened until the feed pump 23 completes feeding, and after the feed is completed, the discharge valve may be opened until the gas in the feed pump 23 is discharged. In some examples, the completion of the feeding and the removal of the gas may be judged by providing a pressure monitor on the liquid feeding pump 23 or the distribution portion 22. This can satisfactorily suck the slurry in the distribution portion 22.

While the utility model has been described in detail in connection with the drawings and examples, it is to be understood that the above description is not intended to limit the utility model in any way. Those skilled in the art can make modifications and variations to the present invention as needed without departing from the true spirit and scope of the utility model, and such modifications and variations are within the scope of the utility model.

Claims (10)

1. A coating apparatus, characterized in that,

the coating device comprises a supporting mechanism, a feeding mechanism, a cooling mechanism and a driving mechanism, wherein the supporting mechanism is provided with a supporting surface for supporting a coating object and a fluid cavity adjacent to the supporting surface, the feeding mechanism comprises a distribution part for distributing slurry, the distribution part comprises a shell with a cavity for accommodating the slurry and a discharge hole communicated with the cavity, the cooling mechanism is communicated with the fluid cavity of the supporting mechanism and conveys a cooling medium to the fluid cavity of the supporting mechanism, and the driving mechanism drives the supporting mechanism and/or the feeding mechanism to enable the supporting mechanism and/or the feeding mechanism to move relatively.

2. Coating apparatus according to claim 1,

the cooling medium is cooling gas or cooling liquid.

3. Coating apparatus according to claim 1,

the feeding mechanism further comprises a storage tank communicated with the distribution part and used for storing slurry, the storage tank is provided with a fluid cavity communicated with the cooling mechanism and adjacent to and not communicated with the storage space of the storage tank, and the cooling mechanism conveys the cooling medium to the fluid cavity of the storage tank.

4. Coating apparatus according to claim 3,

the shell is provided with a fluid cavity which is communicated with the cooling mechanism, is adjacent to the cavity and is not communicated with the cavity, and the cooling mechanism conveys the cooling medium to the fluid cavity of the shell.

5. Coating apparatus according to claim 1,

the support mechanism is flat and has a predetermined width and a predetermined length.

6. Coating apparatus according to claim 5,

the fluid chamber of the support mechanism includes a plurality of tubular chambers in communication with one another, the plurality of tubular chambers being arranged side by side.

7. Coating apparatus according to claim 6,

the length of each tubular cavity is equal to the predetermined width, and the plurality of tubular cavities are arranged along the length direction of the supporting mechanism; or the length of each tubular chamber is equal to the predetermined length, and the plurality of tubular chambers are arranged in the width direction of the support mechanism.

8. Coating apparatus according to claim 5,

the discharge hole is in a slit shape, and the length of the discharge hole is not less than the preset width.

9. Coating apparatus according to claim 8,

the fluid cavity of the housing extends along the length direction of the discharge port.

10. Coating apparatus according to claim 8,

the driving mechanism drives the distribution part to horizontally move along the length direction of the supporting mechanism.

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