CN216688305U - Magnetron sputtering coating machine installation base convenient to adjust - Google Patents
Magnetron sputtering coating machine installation base convenient to adjust Download PDFInfo
- Publication number
- CN216688305U CN216688305U CN202220095772.8U CN202220095772U CN216688305U CN 216688305 U CN216688305 U CN 216688305U CN 202220095772 U CN202220095772 U CN 202220095772U CN 216688305 U CN216688305 U CN 216688305U
- Authority
- CN
- China
- Prior art keywords
- coating machine
- magnetron sputtering
- corner
- sputtering coating
- adjust
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000011248 coating agent Substances 0.000 title claims abstract description 67
- 238000000576 coating method Methods 0.000 title claims abstract description 67
- 238000001755 magnetron sputter deposition Methods 0.000 title claims abstract description 49
- 238000009434 installation Methods 0.000 title claims abstract description 17
- 238000013016 damping Methods 0.000 claims abstract description 17
- 206010020649 Hyperkeratosis Diseases 0.000 claims description 7
- 230000001105 regulatory effect Effects 0.000 claims description 6
- 230000035939 shock Effects 0.000 description 5
- 230000000694 effects Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000009423 ventilation Methods 0.000 description 2
- 230000006978 adaptation Effects 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 239000000872 buffer Substances 0.000 description 1
- 230000003139 buffering effect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 239000007888 film coating Substances 0.000 description 1
- 238000009501 film coating Methods 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Images
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
The utility model discloses a magnetron sputtering coating machine installation base convenient to adjust, which comprises four corner seats and four connecting rods, wherein the four corner seats are connected in a tail-ending adjacent mode through the four connecting rods to form a base main body, a coating machine is placed on the base main body, the four corner seats respectively support four corners of the coating machine, and supporting legs used for damping and adjusting the balance state of the base main body are arranged on the lower side walls of the corner seats.
Description
Technical Field
The utility model relates to the technical field of installation of coating machines, in particular to an installation base of a magnetron sputtering coating machine, which is convenient to adjust.
Background
The magnetron sputtering coating machine can generate vibration in the operation process, so that the operation stability of the magnetron sputtering coating machine is influenced, the existing magnetron sputtering coating machine has more sizes, the existing installation base can not be adjusted according to the size of the actual coating machine, and the practicability and the stability are poor; when the magnetron sputtering coating machine can generate a large amount of heat in the operation process, the ventilation effect of the installation base of the common magnetron sputtering coating machine is poor, the heat dissipation of the bottom of the magnetron sputtering coating machine is not facilitated, and the coating quality is influenced, so that the installation base of the magnetron sputtering coating machine convenient to adjust is provided.
SUMMERY OF THE UTILITY MODEL
The utility model aims to provide a magnetron sputtering coating machine mounting base convenient to adjust so as to solve the problems in the background technology.
In order to achieve the purpose, the utility model provides the following technical scheme: the utility model provides a magnetron sputtering coating machine installation base convenient to adjust, includes four corner seats and four connecting rods, and four corner seats are connected with the form that the end is adjacent through four connecting rods and are formed the base main part, the coating machine is placed in the base main part, four corner seats support the four corners of coating machine respectively, be equipped with the supporting leg that is used for the shock attenuation and adjusts base main part balanced state on the lower lateral wall of corner seat.
Preferably, be perpendicular form on the lateral wall of angle seat and open and have two slots, the tip of connecting rod slides and pegs graft in the inside of slot, and the connecting rod slides in the inside of slot, realizes adjusting the interval between two adjacent angle seats to the size of base main part is adjusted in the realization, thereby the adaptation uses in not unidimensional coating machine, the meshing is connected with the dead bolt of lock on the lateral wall of angle seat, the screw thread end of the dead bolt of lock runs through the lateral wall of angle seat and the activity top is pressed on the lateral wall of connecting rod.
Preferably, the supporting leg includes the fixed block, fixed block fixed connection is on the lower lateral wall of angle seat, open the inside in fixed block has the edge hole, the inside sliding connection in edge hole has rag bolt, rag bolt's the downward vertical lateral wall that runs through the fixed block of screw thread end and meshing cover have connect the callus on the sole, the regulating block has been cup jointed on rag bolt's the lateral wall, be equipped with between regulating block and the callus on the sole and be used for carrying out absorbing damping spring to the coating machine.
Preferably, the supporting leg still includes the ball seat, the ball seat is located the inside of callus on the sole, just the side meshing fixed connection that goes up of ball seat is at rag bolt's lower extreme, the downside of ball seat rotates and is connected with universal ball wheel.
Preferably, the outer side walls of the four connecting rods are fixedly provided with bubble levels for detecting whether the coating machine is in a balanced state.
Preferably, the inner side wall of the corner seat is fixedly connected with a support, and the support is fixedly provided with an exhaust fan for removing heat from the bottom end of the film coating machine.
Preferably, the upper side surface of the corner seat is fixedly adhered with an anti-slip mat for preventing the film plating machine from sliding and turning over on the base body.
Compared with the prior art, the utility model has the beneficial effects that:
1. the damping spring is used for buffering the shake generated during the operation of the magnetron sputtering coating machine, so that the moving problem of the magnetron sputtering coating machine caused by the shake can be effectively avoided, the stability of the operation of the equipment is ensured, the height of the corresponding angle seat is changed by rotating the adjusting block downwards or upwards, the adjustment of the balance degree of the base main body is facilitated, and the magnetron sputtering coating machine can be ensured to be in a balanced state through the detection of the bubble level meter;
2. the connecting rod slides in the slot, so that the distance between two adjacent corner seats is changed, and the size of the base main body is adjusted, so that the base main body can be suitable for magnetron sputtering coating machines with different sizes, and the application range is wider;
3. the utility model can discharge the heat at the bottom of the magnetron sputtering coating machine by starting the exhaust fan, improves the ventilation effect at the bottom of the magnetron sputtering coating machine, is beneficial to radiating the bottom of the magnetron sputtering coating machine and improves the coating quality.
Drawings
FIG. 1 is a schematic diagram I of the overall structure of the present invention;
FIG. 2 is a schematic diagram II of the overall structure of the present invention;
FIG. 3 is an exploded view of the corner base, connecting rod, locking bolt and slot of the present invention;
FIG. 4 is an exploded view of the corner seats and non-slip mats of the present invention;
FIG. 5 is a schematic structural view of a fixing block, an adjusting block, a damping spring and a foot pad of the present invention;
FIG. 6 is a cross-sectional view of the fixing block, the corner holes, the adjusting block, the anchor bolts, the damping springs and the foot pads of the present invention;
FIG. 7 is a cross-sectional exploded view of the fixing block, the corner holes, the adjusting block, the anchor bolts, the damping springs and the foot pads of the present invention;
fig. 8 is a sectional view of both end mount bearings of the damper spring according to the present invention.
In the figure: 1. angle seat, 101, slot, 102, slipmat, 2, connecting rod, 3, supporting leg, 301, fixed block, 302, edges and corners hole, 303, rag bolt, 304, callus on the sole, 305, regulating block, 306, damping spring, 307, ball seat, 308, universal ball wheel, 4, dead bolt, 5, support, 6, exhaust fan, 7, bubble spirit level.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1-8, the present invention provides a technical solution: the utility model provides a magnetron sputtering coating machine installation base convenient to adjust, includes four corner bases 1 and four connecting rods 2, and four corner bases 1 are connected with the form that the end is adjacent through four connecting rods 2 and are formed the base main part, the coating machine is placed in the base main part, four corner bases 1 support the four corners of coating machine respectively, be equipped with the supporting leg 3 that is used for the shock attenuation and adjusts base main part balanced state on the lower lateral wall of corner bases 1.
As shown in fig. 3, in order to adjust the size of the base body, the utility model can be applied to magnetron sputtering coating machines with different support sizes, specifically, two slots 101 are vertically formed on the side wall of the corner base 1, the end of the connecting rod 2 is slidably inserted into the slots 101, the connecting rod 2 slides in the slots 101 to adjust the distance between two adjacent corner bases 1, thereby adjusting the size of the base body 1, and adapting to coating machines with different sizes, the side wall of the corner base 1 is engaged and connected with a locking bolt 4, and the threaded end of the locking bolt 4 penetrates through the side wall of the corner base 1 and movably props against the side wall of the connecting rod 2;
when the size of base main part needs to be adjusted, unscrew dead bolt 4 of lock, the threaded end that causes dead bolt 4 of lock eliminates the lateral wall to connecting rod 2, thus, can make connecting rod 2 slide in the inside of slot 101, like this alright adjust the interval between two adjacent corner bases 1, and screw up dead bolt 4 again, the threaded end top that causes dead bolt 4 of lock pushes up on the lateral wall of connecting rod 2, at this moment, connecting rod 2 is fixed in slot 101, thereby fix two corner bases 1 of adjusting the interval, alright adjust the size of base main part like this, be favorable to supporting not unidimensional magnetron sputtering coating machine.
As shown in fig. 1, 2, and 5-7, in order to absorb shock for the magnetron sputtering coating machine, specifically, the support leg 3 includes a fixed block 301, the fixed block 301 is fixedly connected to a lower side wall of the corner base 1, a corner hole 302 is formed inside the fixed block 301, an anchor bolt 303 is slidably connected inside the corner hole 302, a threaded end of the anchor bolt 303 vertically penetrates through a side wall of the fixed block 301 downward and is engaged with a foot pad 304, an adjusting block 305 is engaged with a side wall of the anchor bolt 303, the adjusting block 305 is engaged with a lower end of the fixed block 301, and a shock absorbing spring 306 for absorbing shock for the coating machine is arranged between the adjusting block 305 and the foot pad 304;
when the supporting leg 3 is assembled during production and manufacturing, firstly, an anchor bolt 303 is sleeved on a fixed block 301, then an adjusting block 305 is sleeved on the anchor bolt 303 and then is meshed and connected with the lower end of the fixed block 301, then a damping spring 306 is sleeved on the anchor bolt 303, a foot pad 304 is meshed and sleeved on the thread of the anchor bolt 303, and then the fixed block 301 is fixed on the lower side wall of an angle seat 1 through screws; when the magnetron sputtering coating machine vibrates during operation, damping spring 306 buffers the rocking that the magnetron sputtering coating machine produced during operation, can effectively avoid the removal problem that the magnetron sputtering coating machine takes place because of vibrations to guaranteed the stability of equipment operation, further avoid damping spring 306 to twist reverse, as shown in fig. 8, damping spring 306's both ends are fixedly connected with bearing respectively, and the outer lane of two bearings is laminated with the tip of regulating block 305, callus on the sole 304 respectively.
As shown in fig. 6 and 7, in order to facilitate moving the magnetron sputtering coating machine, in particular, the support leg 3 further includes a ball seat 307, the ball seat 307 is located inside the foot pad 304, an upper side of the ball seat 307 is engaged and fixedly connected to a lower end of the anchor bolt 303, a lower side of the ball seat 307 is rotatably connected with a universal ball wheel 308, when the ball seat 307 is installed, the foot pad 304 is moved upwards to a position where a lower end of a thread of the anchor bolt 303 leaks outside, then the ball seat 307 is fixed to the lower end of the anchor bolt 303, and then the foot pad 304 is moved downwards to be reset, at this time, the ball seat 307 and the universal ball wheel 308 are hidden inside the foot pad 304, as shown in fig. 6, the foot pad 304 is rotated, due to the threaded connection of the foot pad 304 and the anchor bolt 303, the foot pad 304 compresses the damping spring 306 and slides upwards, the universal ball wheel 308 is in contact with the ground after the foot pad 304 slides upwards for a certain distance, after the coating machine is pushed, the universal ball wheel 308 rolls on the ground, so that the magnetron sputtering coating machine is driven to move.
In order to enable the magnetron sputtering coating machine to be in a balanced state, specifically, the outer side walls of the four connecting rods 2 are fixedly provided with bubble levels 7 for detecting whether the coating machine is in the balanced state, when the magnetron sputtering coating machine is supported on an uneven ground, the magnetron sputtering coating machine can be known whether to be in the balanced state by observing the positions of bubbles in the bubble levels 7, and when the bubbles in the bubble levels 7 deviate, the magnetron sputtering coating machine is in an inclined state, the adjusting method comprises the following steps: the adjusting block 305 is rotated to enable the adjusting block 305 to slide up and down on the fixed block 301, when the adjusting block 305 slides down, the adjusting block 305 can compress the damping spring 306 downwards, and thus the damping spring 306 is enabled to push up the right-top angle seat 1 in a reverse upward mode through reverse elasticity of the damping spring 306, so that one corner of the magnetron sputtering coating machine can be pushed up upwards, otherwise, when the adjusting block 305 slides up, the right-top angle seat 1 can sink downwards, so that one corner of the magnetron sputtering coating machine can be adjusted downwards, and the magnetron sputtering coating machine is adjusted to be in a balanced state.
As shown in fig. 2 and 3, in order to dispel the heat to magnetron sputtering coating machine bottom, particularly, fixedly connected with support 5 on the inside wall of corner seat 1, fixed mounting has the exhaust fan 6 (the exhaust fan passes through the cable and is connected with external power supply electricity) that is used for getting rid of the coating machine bottom heat on support 5, and when magnetron sputtering coating machine started, exhaust fan 6 started simultaneously, and exhaust fan 6 blows the heat of magnetron sputtering coating machine bottom downwards this moment to blow off all around, thereby realize the bottom to magnetron sputtering coating machine and dispel the heat and cool down.
As shown in fig. 2 and 4, in order to enable the magnetron sputtering coater to be stably placed on the base body, specifically, a non-slip mat 102 is fixedly adhered to the upper side surface of the corner seat 1 for preventing the magnetron sputtering coater from sliding and turning over on the base body.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the utility model, the scope of which is defined in the appended claims and their equivalents.
Claims (7)
1. The utility model provides a magnetron sputtering coating machine installation base convenient to adjust, includes four corner seats (1) and four connecting rods (2), its characterized in that: four corner seats (1) are connected in a mode that the tails are adjacent through four connecting rods (2) to form a base main body, the coating machine is placed on the base main body, the four corner seats (1) respectively support four corners of the coating machine, and supporting legs (3) used for damping and adjusting the balance state of the base main body are arranged on the lower side wall of each corner seat (1).
2. The magnetron sputtering coating machine installation base convenient to adjust of claim 1 is characterized in that: the corner seat is characterized in that two slots (101) are vertically formed in the side wall of the corner seat (1), the end portion of the connecting rod (2) is inserted into the slots (101) in a sliding mode, a locking bolt (4) is connected to the side wall of the corner seat (1) in a meshed mode, and the threaded end of the locking bolt (4) penetrates through the side wall of the corner seat (1) and is movably pressed against the side wall of the connecting rod (2).
3. The magnetron sputtering coating machine installation base convenient to adjust of claim 1 is characterized in that: supporting leg (3) include fixed block (301), fixed block (301) fixed connection is on the lower lateral wall of angle seat (1), the inside of fixed block (301) is opened has edge hole (302), the inside sliding connection in edge hole (302) has rag bolt (303), the downward vertical lateral wall that runs through fixed block (301) of the screw thread end of rag bolt (303) engages and has cup jointed callus on the sole (304), regulating block (305) have been cup jointed on the lateral wall of rag bolt (303), be equipped with damping spring (306) between regulating block (305) and callus on the sole (304).
4. The magnetron sputtering coating machine installation base convenient to adjust of claim 3, characterized in that: the supporting leg (3) further comprises a ball seat (307), the ball seat (307) is located inside the foot pad (304), the upper side face of the ball seat (307) is fixedly connected to the lower end of the foundation bolt (303) in an engaged mode, and the lower side face of the ball seat (307) is rotatably connected with a universal ball wheel (308).
5. The magnetron sputtering coating machine installation base convenient to adjust of claim 3, characterized in that: the outer side walls of the four connecting rods (2) are fixedly provided with bubble levels (7).
6. The magnetron sputtering coating machine installation base convenient to adjust of claim 1 is characterized in that: fixedly connected with support (5) on the inside wall of corner seat (1), fixed mounting has exhaust fan (6) on support (5).
7. The magnetron sputtering coating machine installation base convenient to adjust of claim 1, characterized in that: and a non-slip mat (102) is fixedly adhered to the upper side surface of the corner seat (1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220095772.8U CN216688305U (en) | 2022-01-14 | 2022-01-14 | Magnetron sputtering coating machine installation base convenient to adjust |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220095772.8U CN216688305U (en) | 2022-01-14 | 2022-01-14 | Magnetron sputtering coating machine installation base convenient to adjust |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN216688305U true CN216688305U (en) | 2022-06-07 |
Family
ID=81821002
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202220095772.8U Expired - Fee Related CN216688305U (en) | 2022-01-14 | 2022-01-14 | Magnetron sputtering coating machine installation base convenient to adjust |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN216688305U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116321880A (en) * | 2023-05-12 | 2023-06-23 | 深圳易信科技股份有限公司 | Roller combination device for server cabinet |
-
2022
- 2022-01-14 CN CN202220095772.8U patent/CN216688305U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116321880A (en) * | 2023-05-12 | 2023-06-23 | 深圳易信科技股份有限公司 | Roller combination device for server cabinet |
| CN116321880B (en) * | 2023-05-12 | 2023-08-29 | 深圳易信科技股份有限公司 | Roller combination device for server cabinet |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN216688305U (en) | Magnetron sputtering coating machine installation base convenient to adjust | |
| CN107613690A (en) | A kind of Electric Appliance Cabinet with adjusting base | |
| CN106439426A (en) | Photovoltaic panel bracket with adjustable inclined angle | |
| CN211647142U (en) | Support frame for raised floor | |
| CN108730688A (en) | A kind of electromechanical equipment fixing device and its application method | |
| CN106149314A (en) | A kind of lower margin and washing machine | |
| WO2023020021A1 (en) | Balance adjusting mechanism for refrigerator and built-in refrigerator | |
| CN107359509A (en) | Electric power distributing cabinet with noise reduction function | |
| CN210978953U (en) | Anti-seismic support and hanger for water supply and drainage pipeline | |
| CN214171254U (en) | Threaded rod supporting seat convenient to adjust | |
| CN208763451U (en) | A kind of building-supporting mechanical device | |
| CN206988706U (en) | A kind of electronic equipment bottom seat | |
| CN205956292U (en) | Rubber shock absorber seat convenient to dismouting | |
| CN208880645U (en) | A kind of circuit board repair workbench | |
| CN206773623U (en) | A kind of vibration abatement of computer | |
| CN208442472U (en) | A kind of equipment erecting bed of electric power installation | |
| CN209823219U (en) | Platform is place with shock attenuation to power equipment | |
| CN220619474U (en) | Adjusting base structure and household appliance | |
| CN207362530U (en) | A kind of washing machine vibration damping bracket | |
| CN110829962A (en) | Photovoltaic power generation board with adjustable angle | |
| CN212840566U (en) | Mounting bracket for radio and television convenient to later stage adjustment position height | |
| CN215334863U (en) | Noise reduction type indoor pipeline erection support hanger capable of achieving multistage cushioning | |
| CN113532008B (en) | Footing assembly and refrigerator | |
| CN220103280U (en) | Prefabricated outer wall double-layer air conditioner support | |
| CN219227002U (en) | Good base of reliability for block terminal |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20220607 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |