CN216687194U - Hoisting mechanism for thermal field sleeve of single crystal silicon furnace - Google Patents
Hoisting mechanism for thermal field sleeve of single crystal silicon furnace Download PDFInfo
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- CN216687194U CN216687194U CN202122173643.4U CN202122173643U CN216687194U CN 216687194 U CN216687194 U CN 216687194U CN 202122173643 U CN202122173643 U CN 202122173643U CN 216687194 U CN216687194 U CN 216687194U
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Abstract
The utility model relates to the technical field of semiconductor processing equipment. A hoisting mechanism for a thermal field sleeve of a monocrystalline silicon furnace comprises a loop chain electric hoist and a hoisting cantilever, wherein the hoisting cantilever comprises an I-shaped steel rail; the chain electric hoist moves horizontally on the I-shaped steel rail, a limiting block is arranged on the I-shaped steel rail, and a first limiting switch used for sensing the limiting block is arranged on the chain electric hoist; the lifting cantilever is rotatably connected with the lifting cantilever through a support; the rotary driving mechanism comprises a mounting frame, the mounting frame is mounted on the optical axis, and the rotary driving mechanism is in transmission connection with the lifting arm; the lower end of the lifting arm is detachably connected with a limiting plate, an arc-shaped guiding groove is formed in the limiting plate, and a limiting collision block is detachably connected to the arc-shaped guiding groove; and a second limit switch used for sensing a limit collision block is arranged on the mounting frame. The thermal field sleeve can be conveniently centered and hoisted.
Description
Technical Field
The utility model relates to the field of semiconductor processing equipment, in particular to a hoisting mechanism.
Background
Hoisting the thermal field sleeve of the semiconductor single crystal silicon furnace comprises crucible hoisting, graphite crucible hoisting and thermal field hoisting; these hoisting mechanisms typically require the use of lifting hoisting mechanisms such as overhead cranes.
The installation condition of the overhead travelling crane is limited by factors such as the need of a factory building for a large enough floor area to ensure a space for installing the bridge and certain requirements for the height in the factory building, and sometimes the low efficiency caused by insufficient machine positions and the back-and-forth movement of the overhead travelling crane is caused.
Meanwhile, when a crown block is used for hoisting a thermal field sleeve, the hoisting position of the part at the furnace body centering position is difficult to ensure only by the naked eyes and experience of an operator, and the shaking generated by the back-and-forth movement during the hoisting centering can easily scratch the inner cavity of the furnace body, so that the economic loss caused by the delay of the construction period is directly caused.
SUMMERY OF THE UTILITY MODEL
Aiming at the problems in the prior art, the utility model provides a hoisting mechanism for a thermal field sleeve of a monocrystalline silicon furnace, which is used for solving at least one technical problem.
In order to achieve the aim, the utility model provides a hoisting mechanism for a thermal field sleeve of a monocrystalline silicon furnace, which comprises a ring chain electric hoist and is characterized by also comprising a lifting cantilever, wherein the lifting cantilever comprises a horizontally arranged I-shaped steel rail and an obliquely arranged reinforcing rod;
the electric chain hoist horizontally moves on the I-shaped steel rail, the I-shaped steel rail is provided with a limiting block used for limiting the limiting position of the electric chain hoist, and the electric chain hoist is provided with a first limiting switch used for sensing the limiting block;
the lifting cantilever is rotatably connected with the lifting cantilever, and the upper end and the lower end of the optical axis are arranged on the upright post through a support;
the optical axis is arranged on the optical axis, and the rotary driving mechanism is in transmission connection with the lifting arm;
the lower end of the lifting arm is detachably connected with a limiting plate, an arc-shaped guiding groove is formed in the limiting plate, and a limiting collision block is detachably connected to the arc-shaped guiding groove;
and a second limit switch used for sensing the limit collision block is arranged on the mounting rack.
This patent is through optimizing hoisting machine and constructing, has replaced the overhead traveling crane, hits the combination of piece and second limit switch, stopper and first limit switch through the spacing, is convenient for realize the centering hoist and mount to thermal field portion cover. The limiting collision block is detachably arranged on the arc-shaped guide groove, so that the position of the limiting collision block can be conveniently adjusted.
Preferably, the number of the arc-shaped guide grooves is two, the two arc-shaped guide grooves are concentric, and an arc-shaped positioning blind hole is adjacently arranged on each arc-shaped guide groove;
the same limiting collision block is arranged on the limiting plate through a screw passing through the arc-shaped guide groove and a positioning pin passing through the arc-shaped positioning blind hole.
The fixing effect of the limiting collision block is convenient to guarantee. The two arc-shaped guide grooves are respectively used for fixing the two limit collision blocks.
Further preferably, the lifting arm rotation driving mechanism comprises a motor, a speed reducer, a large chain wheel and a small chain wheel, and the motor and the speed reducer are mounted on the mounting frame;
the power output shaft of the motor is connected with the power input shaft of the speed reducer, a small chain wheel is sleeved on the power output shaft of the speed reducer, and the small chain wheel is connected with the large chain wheel through a chain;
the large sprocket is mounted on the lift arm.
Facilitating the realization of the rotary drive of the lifting arm.
Further preferably, the top demountable installation of speed reducer has a shroud fixed plate, can dismantle on the shroud fixed plate to be connected with and be used for the cover to establish big sprocket outlying left safety cover, can dismantle on the shroud fixed plate to be connected with and be used for the cover to establish big sprocket outlying right safety cover.
The dustproof protection of the periphery of the large chain wheel and the small chain wheel is convenient to realize.
Preferably, the mounting frame is provided with a waist-shaped hole, and the mounting frame is detachably connected with an adjusting block;
the adjusting block is provided with a through hole for passing through a mounting screw, and the mounting screw passes through the through hole and the waist-shaped hole to be connected with the speed reducer;
the adjusting block is connected with an adjusting bolt for adjusting the transverse distance between the speed reducer and the optical axis in a threaded manner, the end part of the adjusting bolt is abutted to the mounting frame, and the adjusting bolt is horizontally arranged.
The horizontal adjustment of the position of the speed reducer is convenient to realize.
Preferably, rings for emergency limit are further mounted at two ends of the I-shaped steel rail in the length direction.
The mechanical limit device is used for mechanical limit in emergency.
Further preferably, an upper support is installed at the upper end of the optical axis, the lower end of the optical axis is connected with a lower support in an inserting mode, and a blind hole used for connecting the optical axis in an inserting mode is formed in the lower support.
The supporting and fixing of the optical axis are convenient to realize.
Preferably, the lifting cantilever comprises an upper sleeve fixedly connected with the reinforcing rod and a lower sleeve fixedly connected with the i-shaped steel rail;
an oilless bushing is arranged between the upper sleeve and the optical axis;
an oilless bushing is installed between the lower sleeve and the optical axis.
The rotation effect of the cantilever is convenient to lift.
Further preferably, the lifting cantilever further comprises a vertically arranged hollow tube, and the hollow tube is fixedly connected with the upper sleeve and the lower sleeve.
The fixing effect of the lifting cantilever is convenient to improve.
Further preferably, the mounting bracket is established including the cover the outlying installation cover of optical axis, the upper end of installation cover with be equipped with terminal surface ball bearing between the lower extreme that promotes the cantilever, terminal surface ball bearing cover is established the periphery of optical axis.
The mutual interference between the lifting cantilever and the mounting rack is avoided.
Drawings
FIG. 1 is a schematic diagram of an embodiment of the present invention;
fig. 2 is a partial cross-sectional view of the rotary drive mechanism of fig. 1 of the present invention.
FIG. 3 is a partial schematic view of the present invention at the cover mount plate;
fig. 4 is a partial enlarged view of the present invention.
Wherein, 1 is the endless chain electric block, 2 is first limit switch, 3 is the stopper, 4 are the tow chain, 5 are for promoting the cantilever, 6 are the optical axis, 7 are the upper bracket, 8 are oil-free bush, 9 are the ring, 10 are rotary drive mechanism, 11 are spacing bumping piece, 12 are second limit switch, 13 are the undersetting, 14 are the stand, 15 are big sprocket, 16 are left safety cover, 17 are the chain, 18 are the limiting plate, 19 are terminal surface ball bearing, 20 are the round pin axle, 21 are the mounting bracket, 22 are the speed reducer, 23 are the regulating block, 24 are the lower packing ring, 25 are little sprocket, 26 are right safety cover, 27 are the upper packing ring, 28 are the cover fixing plate.
Detailed Description
The utility model is further described below with reference to the accompanying drawings.
Referring to fig. 1 to 4, a hoisting mechanism for a thermal field sleeve of a monocrystalline silicon furnace comprises an electric chain hoist 1. Preferably, the HSY operation type endless chain electric hoist.
The lifting cantilever 5 comprises a horizontally arranged I-shaped steel rail and an obliquely arranged reinforcing rod; the electric chain hoist 1 moves horizontally on an I-shaped steel rail, a limiting block 3 used for limiting the limiting position of the electric chain hoist is arranged on the I-shaped steel rail, and a first limiting switch 2 used for sensing the limiting block 3 is arranged on the electric chain hoist 1;
the lifting device also comprises an optical axis 6 which is rotatably connected with the lifting cantilever 5, and the upper end and the lower end of the optical axis 6 are arranged on the upright post 14 through a support;
the device also comprises a rotary driving mechanism 10 for driving the lifting arm to rotate, wherein the rotary driving mechanism 10 comprises a mounting frame 21, the mounting frame 21 is mounted on the optical axis 6, and the rotary driving mechanism 10 is in transmission connection with the lifting arm; the lower end of the lifting arm is detachably connected with a limiting plate 18, the limiting plate 18 is provided with an arc-shaped guiding groove, and the arc-shaped guiding groove is detachably connected with a limiting collision block 11; the mounting bracket 21 is provided with a second limit switch 12 for sensing the limit bump 11. This patent is through optimizing hoisting machine and constructing, has replaced the overhead traveling crane, hits the combination of piece 11 and second limit switch 12, stopper 3 and first limit switch 2 through the spacing, is convenient for realize the centering hoist and mount to thermal field portion cover. Through spacing hitting block 11 demountable installation on the arc guiding groove, be convenient for hit the adjustment of 11 positions of block to spacing. The first limit switch and the second limit switch may be travel limit switches.
The arc-shaped guide grooves are two, the two arc-shaped guide grooves are concentric, and an arc-shaped positioning blind hole is adjacently arranged on each arc-shaped guide groove; the same limiting collision block is arranged on the limiting plate through a screw passing through the arc-shaped guide groove and a positioning pin passing through the arc-shaped positioning blind hole. The two arc-shaped guide grooves are arranged inside and outside. The central angle of the two arc-shaped guide grooves is 150 degrees. The fixing effect of the limiting collision block 11 is convenient to guarantee.
The lifting arm rotation driving mechanism 10 comprises a motor, a speed reducer 22, a large chain wheel 15 and a small chain wheel 25, and the motor and the speed reducer 22 are arranged on the mounting frame 21; the power output shaft of the motor is connected with the power input shaft of the speed reducer 22, the power output shaft of the speed reducer 22 is sleeved with a small chain wheel 25, and the small chain wheel 25 is connected with the large chain wheel 15 through a chain 17; the large sprocket 15 is mounted on the lift arm. Facilitating the rotary drive of the lifting arm. An upper washer 27 and a lower washer 24 are sleeved on a power output shaft of the speed reducer, and the small chain wheel is clamped between the upper washer 27 and the lower washer 24.
A cover fixing plate 28 is detachably mounted on the top of the speed reducer 22, a left protective cover 16 covering the periphery of the large chain wheel 15 is detachably connected to the cover fixing plate 28, and a right protective cover 26 covering the periphery of the large chain wheel 15 is detachably connected to the cover fixing plate. The dustproof protection of the peripheries of the large chain wheel 15 and the small chain wheel 25 is convenient to realize.
A waist-shaped hole is formed in the mounting frame 21, and an adjusting block 23 is detachably connected to the mounting frame; the adjusting block 23 is provided with a through hole for passing through a mounting screw, and the mounting screw passes through the through hole and the waist-shaped hole to be connected with the speed reducer; threaded connection has the adjusting bolt who is used for adjusting horizontal interval between speed reducer 22 and the optical axis on the regulating block, and adjusting bolt's tip offsets with the mounting bracket, and adjusting bolt level sets up. It is convenient to achieve horizontal adjustment of the position of the speed reducer 22.
An upper support 7 is installed at the upper end of the optical axis 6, the lower end of the optical axis 6 is connected with a lower support 13 in an inserting mode, and a blind hole used for connecting the optical axis 6 in an inserting mode is formed in the lower support 13. The optical axis 6 is supported and fixed conveniently.
The lifting cantilever 5 comprises an upper sleeve fixedly connected with the reinforcing rod and a lower sleeve fixedly connected with the I-shaped steel rail; an oilless bushing 8 is arranged between the upper sleeve and the optical axis 6; an oilless bushing 8 is installed between the lower sleeve and the optical axis 6. Facilitating the lifting of the rotating effect of the boom 5. The lifting cantilever 5 further comprises a vertically arranged hollow tube which is fixedly connected with the upper sleeve and the lower sleeve. Facilitating an improved fixation of the lifting jib 5.
The mounting frame 21 comprises a mounting sleeve sleeved on the periphery of the optical axis 6, an end face ball bearing 19 is arranged between the upper end of the mounting sleeve and the lower end of the lifting cantilever 5, and the end face ball bearing 19 is sleeved on the periphery of the optical axis 6. Avoiding interference between the lifting jib 5 and the mounting frame 21. The mounting sleeve is connected with the optical axis through a pin shaft. The mounting sleeve and the optical axis are provided with through holes penetrating through the pin shaft 20.
The electric chain hoist is connected with the lifting cantilever through a drag chain 4.
The foregoing is only a preferred embodiment of the present invention, and it should be noted that it is obvious to those skilled in the art that various modifications and improvements can be made without departing from the principle of the present invention, and these modifications and improvements should also be considered as the protection scope of the present invention.
Claims (10)
1. A hoisting mechanism for a thermal field sleeve of a monocrystalline silicon furnace comprises a ring chain electric hoist and is characterized by further comprising a lifting cantilever, wherein the lifting cantilever comprises a horizontally arranged I-shaped steel rail and an obliquely arranged reinforcing rod;
the electric chain hoist horizontally moves on the I-shaped steel rail, the I-shaped steel rail is provided with a limiting block used for limiting the limiting position of the electric chain hoist, and the electric chain hoist is provided with a first limiting switch used for sensing the limiting block;
the lifting cantilever is rotatably connected with the lifting cantilever, and the upper end and the lower end of the optical axis are arranged on the upright post through a support;
the optical axis is arranged on the optical axis, and the rotary driving mechanism is in transmission connection with the lifting arm;
the lower end of the lifting arm is detachably connected with a limiting plate, an arc-shaped guiding groove is formed in the limiting plate, and a limiting collision block is detachably connected to the arc-shaped guiding groove;
and the mounting rack is provided with a second limit switch for sensing the limit collision block.
2. The hoisting mechanism for the thermal field sleeve of the monocrystalline silicon furnace of claim 1, wherein: the arc-shaped guide grooves are two, the two arc-shaped guide grooves are concentric, and an arc-shaped positioning blind hole is adjacently arranged on each arc-shaped guide groove;
the same limiting block is arranged on the limiting plate through a screw passing through the arc-shaped guiding groove and a positioning pin passing through the arc-shaped positioning blind hole.
3. The hoisting mechanism for the thermal field sleeve of the monocrystalline silicon furnace of claim 1, wherein: the lifting arm rotation driving mechanism comprises a motor, a speed reducer, a large chain wheel and a small chain wheel, and the motor and the speed reducer are arranged on the mounting frame;
the power output shaft of the motor is connected with the power input shaft of the speed reducer, a small chain wheel is sleeved on the power output shaft of the speed reducer, and the small chain wheel is connected with the large chain wheel through a chain;
the large sprocket is mounted on the lift arm.
4. The hoisting mechanism for the thermal field sleeve of the monocrystalline silicon furnace of claim 3, wherein: demountable installation has a shroud fixed plate on the top of speed reducer, can dismantle on the shroud fixed plate to be connected with and be used for the cover to establish big sprocket outlying left safety cover, can dismantle on the shroud fixed plate to be connected with and be used for the cover to establish big sprocket outlying right safety cover.
5. The hoisting mechanism for the thermal field sleeve of the monocrystalline silicon furnace of claim 3, wherein: the mounting frame is provided with a waist-shaped hole, and the mounting frame is detachably connected with an adjusting block;
the adjusting block is provided with a through hole for passing through a mounting screw, and the mounting screw passes through the through hole and the waist-shaped hole and is connected with the speed reducer;
the adjusting block is connected with an adjusting bolt for adjusting the transverse distance between the speed reducer and the optical axis in a threaded manner, the end part of the adjusting bolt is abutted to the mounting frame, and the adjusting bolt is horizontally arranged.
6. The hoisting mechanism for the thermal field sleeve of the monocrystalline silicon furnace of claim 1, wherein: and two ends of the I-shaped steel rail in the length direction are also provided with circular rings for emergency limiting.
7. The hoisting mechanism for the thermal field sleeve of the monocrystalline silicon furnace of claim 1, wherein: the upper end of the optical axis is provided with an upper support, the lower end of the optical axis is connected with a lower support in an inserting mode, and the lower support is provided with a blind hole used for connecting the optical axis in an inserting mode.
8. The hoisting mechanism for the thermal field sleeve of the monocrystalline silicon furnace of claim 1, wherein: the lifting cantilever comprises an upper sleeve fixedly connected with the reinforcing rod and a lower sleeve fixedly connected with the I-shaped steel rail;
an oilless bushing is arranged between the upper sleeve and the optical axis;
an oilless bushing is installed between the lower sleeve and the optical axis.
9. The hoisting mechanism for the thermal field sleeve of the monocrystalline silicon furnace of claim 8, wherein: the lifting cantilever further comprises a hollow pipe which is vertically arranged, and the hollow pipe is fixedly connected with the upper sleeve and the lower sleeve.
10. The hoisting mechanism for the thermal field sleeve of the monocrystalline silicon furnace of claim 1, wherein: the mounting bracket is established including the cover the outlying installation cover of optical axis, the upper end of installation cover with be equipped with terminal surface ball bearing between the lower extreme that promotes the cantilever, terminal surface ball bearing cover is established the periphery of optical axis.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122173643.4U CN216687194U (en) | 2021-09-09 | 2021-09-09 | Hoisting mechanism for thermal field sleeve of single crystal silicon furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122173643.4U CN216687194U (en) | 2021-09-09 | 2021-09-09 | Hoisting mechanism for thermal field sleeve of single crystal silicon furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN216687194U true CN216687194U (en) | 2022-06-07 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202122173643.4U Active CN216687194U (en) | 2021-09-09 | 2021-09-09 | Hoisting mechanism for thermal field sleeve of single crystal silicon furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN216687194U (en) |
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2021
- 2021-09-09 CN CN202122173643.4U patent/CN216687194U/en active Active
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