CN216681713U - Can reduce polishing thick liquid circulating device of foam volume - Google Patents
Can reduce polishing thick liquid circulating device of foam volume Download PDFInfo
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- CN216681713U CN216681713U CN202220122167.5U CN202220122167U CN216681713U CN 216681713 U CN216681713 U CN 216681713U CN 202220122167 U CN202220122167 U CN 202220122167U CN 216681713 U CN216681713 U CN 216681713U
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Abstract
The utility model relates to the technical field of polishing slurry circulating devices, in particular to a polishing slurry circulating device capable of reducing foam amount, which comprises a slurry circulating barrel and is characterized in that: the slurry circulating barrel is provided with a liquid pumping device, a stirring device and a defoaming device; the defoaming device comprises a stainless steel defoaming net, a cyclone separator, a filter screen and an opening drainage groove, the side surface of the top of the cyclone separator is connected with a slurry return pipe, the top of the cyclone separator is provided with the stainless steel defoaming net, the bottom of the cyclone separator is connected with the filter screen, the lower end of the filter screen is connected with the opening drainage groove, and the opening drainage groove extends into the slurry circulating barrel; the beneficial effects are as follows: in the backflow process of the slurry, the two-stage defoaming device can effectively reduce foams, and the device is simple and easy to produce; in the slurry circulation process, the defoaming agent is not required to be added, so that the inconvenience brought to cleaning by the adhesion of the defoaming agent on a workpiece is avoided, and the cost is reduced.
Description
Technical Field
The utility model relates to the technical field of polishing slurry circulating devices, in particular to a polishing slurry circulating device capable of reducing foam quantity.
Background
At present, glass cover plates, crystal pendants, sapphire, silicon carbide substrates and various metals of electronic products such as mobile phones, tablet computers, liquid crystal displays and the like need to be subjected to surface flattening and surface smoothness improvement through a chemical mechanical polishing process.
When the cover glass is subjected to chemical mechanical polishing, polishing slurry containing abrasive grains flows between the workpiece and the polishing pad. At this time, chemical substances and abrasives in the slurry cause chemical reactions such as hydrolysis and corrosion with the surface of the workpiece, and thus an oxide film which is easily removed is formed on the surface of the workpiece. The film is then removed by the mechanical action of the abrasive and polishing pad in the slurry and flows away with the polishing slurry, leaving the workpiece exposed to a new surface. And thereafter undergoes chemical etching and mechanical action of the slurry, and is removed again. And circularly performing the chemical mechanical action of the polishing slurry on the workpiece to finish the chemical mechanical polishing of the workpiece.
During the cyclic polishing process, the temperature of the slurry is gradually increased due to the accumulation of impurities in the slurry, such as glass, polishing brushes, polishing skin debris, and the friction between the workpiece and the polishing pad, and the pH of the slurry is also increased, so that part of the impurities are dissolved in the polishing slurry, and more foams are generated in the reflowed slurry. Defoaming agents are usually added to eliminate foams in the polishing process, at present, commercially available defoaming agents are mainly silicones, polyethers and mineral oils, and the addition of the defoaming agents to the polishing slurry can effectively eliminate foams, but the defoaming agents are consumed in the slurry circulation process and need to be continuously supplemented, so that the cost is increased. In addition, the defoaming agent belongs to an oily substance, is easy to adhere to a polished workpiece and is not beneficial to cleaning.
SUMMERY OF THE UTILITY MODEL
The utility model aims to solve the technical problems in the existing production process and provide a polishing slurry circulating device capable of reducing the foam amount.
In order to achieve the purpose, the technical scheme provided by the utility model is as follows:
a polishing slurry circulating device capable of reducing the amount of foam comprises a slurry circulating barrel 7, and is characterized in that: the slurry circulating barrel 7 is provided with a liquid pumping device, a stirring device and a defoaming device; remove the foam device and include that stainless steel removes foam net 3, cyclone 4, filter screen 5 and opening drainage groove 6, cyclone 4's top side is connected with slurry return pipe 11, stainless steel removes foam net 3 is installed at cyclone 4's top, cyclone 4's bottom is connected with filter screen 5, opening drainage groove 6 is connected to filter screen 5's lower extreme, opening drainage groove 6 stretches into inside thick liquids circulation bucket 7.
The liquid pumping device comprises a first motor 8, a submerged pump 1 and a slurry outlet pipe 9, wherein the first motor 8 is installed on a barrel cover 701 of a slurry circulating barrel 7, the submerged pump 1 is installed on an output shaft of the first motor 8, the submerged pump 1 is placed in the slurry circulating barrel 7, the slurry outlet pipe 9 is installed on the submerged pump 1, and the slurry outlet pipe 9 extends out of the slurry circulating barrel 7.
And an air inlet 12 is formed at the upper end of the stainless steel defoaming net 3.
The stirring device comprises a second motor 10 and a stirring paddle 2, wherein the second motor 10 is installed on a barrel cover 701 of the slurry circulating barrel 7, the stirring paddle 2 is installed on an output shaft of the second motor 10, and the stirring paddle 2 extends into the slurry circulating barrel 7.
The stainless steel defoaming net 3 is a primary defoaming device.
The filter screen 5 is a two-stage defoaming device.
The cone angle of the cyclonic fluid separator 4 is 18 °.
The included angle between the opening drainage groove 6 and the surface of the slurry circulating barrel 7 is 5 DEG
The utility model has the following beneficial effects:
1. in the backflow process of the slurry, the two-stage defoaming device can effectively reduce foams, and the device is simple and easy to produce;
2. in the slurry circulation process, the defoaming agent is not required to be added, so that the inconvenience brought to cleaning by the adhesion of the defoaming agent on a workpiece is avoided, and the cost is reduced.
Drawings
For a more clear understanding of the present invention, the present disclosure will be further described by reference to the drawings and illustrative embodiments which are provided for illustration and are not to be construed as limiting the disclosure.
FIG. 1 is a front view of the apparatus of the present invention;
FIG. 2 is a top view of the apparatus of the present invention.
Shown in the figure: submerged pump 1, stirring rake 2, stainless steel defoaming net 3, cyclone 4, filter screen 5, opening drainage groove 6, thick liquids circulation bucket 7, first motor 8, play thick liquid pipe 9, second motor 10, backrush 11, air intlet 12, bung 701.
Detailed Description
The following description of the preferred embodiments of the present invention is provided for the purpose of illustration and description, and is in no way intended to limit the utility model.
Example 1
A polishing slurry circulating device capable of reducing the amount of foam comprises a slurry circulating barrel 7, and is characterized in that: the slurry circulating barrel 7 is provided with a liquid pumping device, a stirring device and a defoaming device;
the liquid pumping device comprises a first motor 8, a submerged pump 1 and a slurry outlet pipe 9, wherein the first motor 8 is arranged on a barrel cover 701 of a slurry circulating barrel 7, the submerged pump 1 is arranged on an output shaft of the first motor 8, the submerged pump 1 is placed in the slurry circulating barrel 7, the slurry outlet pipe 9 is arranged on the submerged pump 1, and the slurry outlet pipe 9 extends out of the slurry circulating barrel 7; the stirring device comprises a second motor 10 and a stirring paddle 2, the second motor 10 is arranged on a barrel cover 701 of the slurry circulating barrel 7, the stirring paddle 2 is arranged on an output shaft of the second motor 10, and the stirring paddle 2 extends into the slurry circulating barrel 7; remove the foam device and include that the stainless steel removes foam net 3, cyclone 4, filter screen 5 and opening drainage groove 6, cyclone 4's top side is connected with slurry return pipe 11, cyclone 4's top is installed the stainless steel and is removed foam net 3, the stainless steel removes the upper end of foam net 3 and is equipped with air intlet 12, cyclone 4's bottom is connected with filter screen 5, opening drainage groove 6 is connected to the lower extreme of filter screen 5, opening drainage groove 6 stretches into inside thick liquids circulation bucket 7.
The stainless steel defoaming net 3 is a primary defoaming device.
The filter screen 5 is a two-stage defoaming device.
The cone angle of the cyclonic fluid separator 4 is 18 °.
The included angle between the opening drainage groove 6 and the surface of the slurry circulating barrel 7 is 5 DEG
When the polishing machine works, the prepared slurry is uniformly stirred in a slurry circulating barrel 7, then the polishing slurry is conveyed to a polishing disc of a machine table through a slurry outlet pipe 9 through a submerged pump 1 for polishing operation, the circulating slurry enters a cyclone separator 4 provided with a stainless steel defoaming net 3 through a slurry return pipe 11 for primary defoaming, the upper end of the stainless steel defoaming net 3 is provided with an air inlet 12, the lower end of the stainless steel defoaming net 3 is connected with the cyclone separator 4 and is a liquid-phase outlet, the cone angle of the cyclone separator 4 is set to be 18 degrees, the separation effect is optimal, the foam in the refluxing slurry is effectively reduced, the slurry passing through a primary defoaming device enters a filter screen 5 from the lower opening of the cyclone separator 4, the lower end of the filter screen 5 is connected with an opening drainage groove 6, the slurry enters the opening drainage groove 6 through the (5) for secondary defoaming, the included angle between the opening drainage groove 6 and a barrel cover 701 of the slurry circulating barrel 7 is set to be 5 degrees, and the tail end of the opening drainage groove 6 is immersed below the liquid level of the slurry, so that the slurry flowing back into the slurry circulating barrel 7 is consistent with the stirring direction, no foam is generated, and the problem that the slurry in the conventional device directly flows into the stirring barrel from the filter screen and splashes up the generated foam is solved.
It will be understood by those skilled in the art that the present invention is not limited to the embodiments described above, which are described in the specification and illustrated only to illustrate the principle of the present invention, but that various changes and modifications may be made therein without departing from the spirit and scope of the present invention, which fall within the scope of the utility model as claimed. The scope of the utility model is defined by the appended claims and equivalents thereof.
Claims (8)
1. A polishing slurry circulating apparatus capable of reducing the amount of foam, comprising a slurry circulating tub (7), characterized in that: the slurry circulating barrel (7) is provided with a liquid pumping device, a stirring device and a defoaming device; remove the foam device and include that the stainless steel removes foam net (3), cyclone (4), filter screen (5) and opening drainage groove (6), the top side of cyclone (4) is connected with slurry return pipe (11), stainless steel removes foam net (3) is installed at the top of cyclone (4), the bottom of cyclone (4) is connected with filter screen (5), opening drainage groove (6) are connected to the lower extreme of filter screen (5), opening drainage groove (6) stretch into inside thick liquids circulation bucket (7).
2. The polishing slurry circulating apparatus according to claim 1, wherein the slurry circulating apparatus comprises: the liquid pumping device comprises a first motor (8), an underwater pump (1) and a slurry outlet pipe (9), wherein the first motor (8) is installed on a barrel cover (701) of a slurry circulating barrel (7), the underwater pump (1) is installed on an output shaft of the first motor (8), the underwater pump (1) is placed in the slurry circulating barrel (7), the slurry outlet pipe (9) is installed on the underwater pump (1), and the slurry outlet pipe (9) extends out of the slurry circulating barrel (7).
3. The polishing slurry circulating apparatus according to claim 1, wherein the slurry circulating apparatus comprises: an air inlet (12) is arranged at the upper end of the stainless steel defoaming net (3).
4. The polishing slurry circulating apparatus according to claim 1, wherein the slurry circulating apparatus comprises: the stirring device comprises a second motor (10) and a stirring paddle (2), wherein the second motor (10) is installed on a barrel cover (701) of the slurry circulating barrel (7), the stirring paddle (2) is installed on an output shaft of the second motor (10), and the stirring paddle (2) stretches into the slurry circulating barrel (7).
5. The polishing slurry circulating apparatus according to claim 1, wherein the slurry circulating apparatus comprises: the stainless steel defoaming net (3) is a primary defoaming device.
6. The polishing slurry circulating apparatus according to claim 1, wherein the slurry circulating apparatus comprises: the filter screen (5) is a two-stage defoaming device.
7. The polishing slurry circulating apparatus according to claim 1, wherein the slurry circulating apparatus comprises: the cone angle of the cyclone separator (4) is 18 degrees.
8. The polishing slurry circulating apparatus according to claim 1, wherein the slurry circulating apparatus comprises: the included angle between the opening drainage groove (6) and the barrel cover (701) of the slurry circulating barrel (7) is 5 degrees.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220122167.5U CN216681713U (en) | 2022-01-18 | 2022-01-18 | Can reduce polishing thick liquid circulating device of foam volume |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220122167.5U CN216681713U (en) | 2022-01-18 | 2022-01-18 | Can reduce polishing thick liquid circulating device of foam volume |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN216681713U true CN216681713U (en) | 2022-06-07 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202220122167.5U Active CN216681713U (en) | 2022-01-18 | 2022-01-18 | Can reduce polishing thick liquid circulating device of foam volume |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN216681713U (en) |
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2022
- 2022-01-18 CN CN202220122167.5U patent/CN216681713U/en active Active
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