CN216639704U - Auxiliary chamber of single crystal furnace - Google Patents
Auxiliary chamber of single crystal furnace Download PDFInfo
- Publication number
- CN216639704U CN216639704U CN202220145965.XU CN202220145965U CN216639704U CN 216639704 U CN216639704 U CN 216639704U CN 202220145965 U CN202220145965 U CN 202220145965U CN 216639704 U CN216639704 U CN 216639704U
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- single crystal
- auxiliary chamber
- crystal furnace
- upper cover
- chamber body
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Abstract
The utility model relates to a single crystal furnace auxiliary chamber which is more convenient to clean and wipe. The technical scheme adopted comprises the following steps: the single crystal furnace auxiliary chamber comprises a single crystal furnace auxiliary chamber body, wherein the side wall of the single crystal furnace auxiliary chamber body is at least provided with a cleaning window, the cleaning window comprises a base welded on the side wall of the single crystal furnace auxiliary chamber body and an upper cover hinged to one end of the base through a hinge, a cooling liquid flow channel is arranged in the upper cover, and a water inlet and a water outlet communicated with the cooling liquid flow channel are arranged on one side of the upper cover. The advantages are as follows: 1. the side wall of the auxiliary chamber body of the single crystal furnace is provided with the group of cleaning windows, the auxiliary chamber body of the single crystal furnace can be cleaned in a segmented mode through the cleaning windows, and the auxiliary chamber body of the single crystal furnace does not need to be detached.
Description
Technical Field
The utility model relates to an auxiliary chamber of a single crystal furnace.
Background
The auxiliary chamber of the single crystal furnace is one of important components of the single crystal furnace, and volatile matters are adhered to the inner wall of the auxiliary chamber of the single crystal furnace after the single crystal rod is pulled, so that each furnace needs to be cleaned and wiped. Because the auxiliary chamber of the single crystal furnace is of a cylindrical structure with the height of several meters, the cleaning and wiping of the inner wall of the auxiliary chamber are very troublesome, and the auxiliary chamber is usually required to be disassembled and then inserted from the port of the auxiliary chamber of the single crystal furnace for cleaning and wiping by utilizing a long cleaning and wiping device in the prior art, so that the defects of troublesome cleaning and wiping, long maintenance period and the like exist, the production efficiency is greatly reduced, and the production cost is improved.
SUMMERY OF THE UTILITY MODEL
The utility model aims to provide a single crystal furnace auxiliary chamber which is more convenient to clean and wipe.
In order to solve the above problems, the technical scheme adopted by the utility model comprises: the auxiliary chamber body of the single crystal furnace is characterized in that: the side wall of the single crystal furnace auxiliary chamber body is at least provided with a cleaning window, the cleaning window comprises a base welded on the side wall of the single crystal furnace auxiliary chamber body and an upper cover hinged to one end of the base through a hinge, a cooling liquid flow channel is arranged in the upper cover, and a water inlet and a water outlet communicated with the cooling liquid flow channel are arranged on one side of the upper cover.
The auxiliary chamber of the single crystal furnace is characterized in that: the cooling liquid flow channel is surrounded by first rib plates and second rib plates which are oppositely arranged at the upper end of the upper cover and are arranged in a staggered mode, and a sealing cover plate which covers the cooling liquid flow channel is welded at the upper end of the upper cover.
The auxiliary chamber of the single crystal furnace is characterized in that: and welding holes are formed in the positions, corresponding to the first rib plate and the second rib plate, of the cover plate.
The auxiliary chamber of the single crystal furnace is characterized in that: and a sealing ring is arranged between the base and the upper cover.
The auxiliary chamber of the single crystal furnace is characterized in that: the other end of the base is provided with a rotatable screw rod seat through a mounting seat, the screw rod seat is provided with a locking screw rod, and the upper cover is provided with a U-shaped locking port matched with the locking screw rod.
The auxiliary chamber of the single crystal furnace is characterized in that: the cleaning windows are arranged at the upper, middle and lower positions of the side wall of the auxiliary chamber body of the single crystal furnace.
The auxiliary chamber of the single crystal furnace has the following advantages: 1. the cleaning window is arranged on the side wall of the auxiliary chamber body of the single crystal furnace, the auxiliary chamber body of the single crystal furnace can be cleaned in a segmented mode through the cleaning window, the auxiliary chamber body of the single crystal furnace can be cleaned without being disassembled, and the cleaning and cleaning work can be completed by means of a relatively convenient cleaning and cleaning device or directly by hand, so that the cleaning and cleaning convenience and efficiency are greatly improved; 2. the cleaning window is provided with a cooling system, and the crystal growth of the single crystal furnace cannot be influenced.
The utility model is further described below with reference to the accompanying drawings.
Drawings
FIG. 1 is a schematic view showing the construction of an auxiliary chamber of a single crystal furnace according to the present invention;
FIG. 2 is a cross-sectional view of the auxiliary chamber of the single crystal growing furnace of the present invention;
FIG. 3 is an exploded view of the cleaning window of the present invention;
FIG. 4 is a schematic structural view of the upper cover of the present invention;
FIG. 5 is a schematic view of the closure of the present invention;
fig. 6 is a schematic structural view of the base of the present invention.
Detailed Description
Referring to fig. 1 to 6, the auxiliary chamber of the single crystal furnace of the present invention comprises an auxiliary chamber body 1 of the single crystal furnace, and the cleaning windows 2 are disposed at upper, middle and lower positions of the side wall of the auxiliary chamber body 1 of the single crystal furnace. The cleaning window 2 comprises a base 3 welded on the side wall of the auxiliary chamber body 1 of the single crystal furnace and an upper cover 4 hinged to one end of the base 3 through a hinge 17. The side wall of the auxiliary chamber body 1 of the single crystal furnace consists of an inner wall and an outer wall, and a gap between the inner wall and the outer wall is used for containing cooling water. The bottom of the base 3 is also provided with a base inner wall 18 and a base inner wall 19 which are respectively welded with the inner wall and the outer wall of the single crystal furnace auxiliary chamber body 1. A cooling liquid flow channel 5 is arranged in the upper cover 4, and a water inlet 6 and a water outlet 7 which are communicated with the cooling liquid flow channel 5 are arranged on one side of the upper cover 4. The water inlet 6 and the water outlet 7 can be respectively connected with pipelines, so that a circulating cooling water path is formed in the cooling liquid flow channel 5.
Preferably, the coolant flow channel 5 is enclosed by first rib plates 8 and second rib plates 9 which are oppositely arranged at the upper end of the upper cover 4 and are arranged in a staggered manner, so that the coolant flow channel 5 forms a continuous S-shaped structure. The first rib plate 8, the second rib plate 9 and the upper cover 4 are integrally formed. And finally, a cover plate 10 which is covered on the cooling liquid flow channel 5 is welded at the upper end of the upper cover 4. Through the structure, the upper end of the upper cover 4 can be conveniently processed on the cooling liquid flow channel 5, and the cooling effect is ideal.
Preferably, the sealing cover plate 10 is provided with welding holes 11 at positions corresponding to the first rib plate 8 and the second rib plate 9. The welding holes 11 are welded, so that the sealing cover plate 10 is connected with the first rib plate 8 and the second rib plate 9, the connection strength of the sealing cover plate 10 is improved, and the sealing cover plate 10 is prevented from being deformed due to overhigh pressure.
Preferably, a sealing ring 12 is arranged between the base 3 and the upper cover 4 to improve the sealing performance between the base 3 and the upper cover 4.
Preferably, the other end of the base 3 is provided with a rotatable screw seat 14 through a mounting seat 13, the screw seat 14 is provided with a locking screw 15, the upper cover 4 is provided with a U-shaped locking port 16 matched with the locking screw 15, and the base 3 and the upper cover 4 can be quickly locked or unlocked through the structure.
Although the present invention has been described with reference to the above embodiments, it will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the utility model.
Claims (6)
1. The utility model provides a single crystal growing furnace auxiliary chamber, includes single crystal growing furnace auxiliary chamber body (1), its characterized in that: the side wall of the single crystal furnace auxiliary chamber body (1) is at least provided with a cleaning window (2), the cleaning window (2) comprises a base (3) welded on the side wall of the single crystal furnace auxiliary chamber body (1) and an upper cover (4) hinged to one end of the base (3) through a hinge (17), a cooling liquid flow channel (5) is arranged in the upper cover (4), and a water inlet (6) and a water outlet (7) communicated with the cooling liquid flow channel (5) are arranged on one side of the upper cover.
2. The single crystal furnace subchamber of claim 1, characterized in that: the cooling liquid flow passage (5) is defined by first rib plates (8) and second rib plates (9) which are oppositely arranged at the upper end of the upper cover (4) and are arranged in a staggered mode, and a sealing cover plate (10) which is covered on the cooling liquid flow passage (5) is welded at the upper end of the upper cover (4).
3. The single crystal furnace subchamber of claim 2, characterized in that: and welding holes (11) are formed in the positions, corresponding to the first rib plate (8) and the second rib plate (9), of the sealing cover plate (10).
4. The single crystal furnace subchamber of claim 1, characterized in that: and a sealing ring (12) is arranged between the base (3) and the upper cover (4).
5. The single crystal furnace subchamber of claim 1, characterized in that: the other end of base (3) is equipped with rotatable screw rod seat (14) through mount pad (13), be equipped with locking screw (15) on screw rod seat (14), be equipped with on upper cover (4) with locking screw (15) complex "U" shape locking mouth (16).
6. The single crystal furnace subchamber of claim 1, characterized in that: the cleaning windows (2) are arranged at the upper, middle and lower positions of the side wall of the auxiliary chamber body (1) of the single crystal furnace.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220145965.XU CN216639704U (en) | 2022-01-20 | 2022-01-20 | Auxiliary chamber of single crystal furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220145965.XU CN216639704U (en) | 2022-01-20 | 2022-01-20 | Auxiliary chamber of single crystal furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN216639704U true CN216639704U (en) | 2022-05-31 |
Family
ID=81727556
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202220145965.XU Active CN216639704U (en) | 2022-01-20 | 2022-01-20 | Auxiliary chamber of single crystal furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN216639704U (en) |
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2022
- 2022-01-20 CN CN202220145965.XU patent/CN216639704U/en active Active
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