CN216622312U

CN216622312U - MEMS gas sensor

Info

Publication number: CN216622312U
Application number: CN202123017822.5U
Authority: CN
Inventors: 陈朝红
Original assignee: Suzhou Yuansente Technology Co ltd
Current assignee: Suzhou Yuansente Technology Co ltd
Priority date: 2021-12-03
Filing date: 2021-12-03
Publication date: 2022-05-27
Anticipated expiration: 2031-12-03

Abstract

The utility model discloses an MEMS gas sensor, which comprises a substrate, a sensor main body and a dust cover arranged on the sensor main body, wherein the sensor main body is covered and protected by the dust cover, the effect of protecting the outside of the gas sensor is achieved, the probability that the gas sensor is damaged by external force or the gas sensitive part of the sensor main body is influenced in the matching use process of the gas sensor is greatly reduced, the sensor main body is matched with a conductive copper pipe inserted and connected inside a conductive layer in a jack on the substrate in the axial direction through a conductive elastic sheet on an insertion column, the conductive elastic sheet elastically abuts against the inner wall of the conductive copper pipe, the conductive elastic sheet is electrically connected with a metal lead through the matching of the conductive copper pipe and the conductive layer, the sensor main body and the substrate are quickly assembled in a separable mode, the assembly efficiency of the sensor main body is improved, and meanwhile, later-stage overhauling and disassembly are facilitated.

Description

MEMS gas sensor

Technical Field

The utility model belongs to the technical field of sensors, and particularly relates to an MEMS gas sensor.

Background

The gas sensor is an important component in the technical field of MEMS (micro electro Mechanical Systems) sensing, and the realization of high sensitivity and long-term use stability of target gas under the constraint conditions of low power consumption, small size and low cost is an important technical research and development direction of the MEMS gas sensor. The existing MEMS gas sensor is mainly fixedly installed by tin soldering or supporting legs, and is easily influenced by factors such as humidity and temperature in the air after long-term use, and corrosion occurs in different degrees, so that the MEMS is not firmly fixed, the accuracy of a monitoring result is influenced, the long-term use requirement cannot be met, and the gas sensor is inconvenient to disassemble and overhaul when damaged.

Therefore, among the prior art, for the convenience to MEMS gas sensor installation and improve life, a car air quality monitoring who announces number "CN 214539360U" uses MEMS gas sensor, including sensor body and base plate, the ventilation groove has been seted up to the base plate bottom, the substrate surface is provided with fastening bolt, the base plate inboard is provided with sensor body, sensor body bottom both sides all are provided with the pin, the pin groove has been seted up to the base plate inboard, pin inslot side is provided with the cross support frame, the through-hole has been seted up on the cross support frame surface, through-hole one side is provided with the metal lead, the through-hole inner wall is provided with the installation fastener, installation fastener outside cover is equipped with the jump ring, the jump ring outside is provided with the rubber pad.

To above-mentioned this MEMS gas sensor for car air quality monitoring, the sensor body adopts the joint on the surface of cross support frame, pin and the mutual adaptation in pin groove carry out the lock, the installation fastener passes the through-hole and offsets with the jump ring, improve the convenient degree of installation between sensor body and the base plate, only the mode through the lock is to pin and pin groove looks lock joint, it can produce not hard up to use for a long time to laminate between messenger pin and the pin groove, and when dismantling sensor body and base plate, because the card of installation fastener is held fixedly, can't dismantle, must damage the installation fastener during the dismantlement, thereby cause the damage of base plate and sensor body, and the operation of difficult later stage maintenance dismantlement.

SUMMERY OF THE UTILITY MODEL

The present invention is directed to a MEMS gas sensor to solve the above problems.

In order to achieve the purpose, the utility model provides the following technical scheme:

an MEMS gas sensor comprises a substrate, a sensor main body and a dust cover arranged on the sensor main body, wherein a sensor mounting groove is formed in the top surface of the substrate, a jack in the center of the sensor mounting groove penetrates through the substrate, a conductive copper pipe is tightly attached to the inner wall of a conductive layer on the inner wall of the jack, and the tail end of a metal lead connected with the outer wall of the conductive layer penetrates through the substrate and is arranged at the bottom end of a welding plug column on the bottom surface of the substrate;

the sensor main body is embedded in the sensor mounting groove, and a conductive elastic sheet on an inserting column at the center of the bottom end of the sensor main body is abutted and attached to the inner wall of a conductive copper pipe;

the dust cover bottom just covers the sensor main part with sensor mounting groove inner wall joint, the insulating rubber layer card that is the outer slope on the outer wall of dust cover bottom is located between sensor mounting groove and the dust cover outer wall.

Furthermore, the tail end of the welding insertion column is provided with a welding tin block connected with the metal lead.

The base plate is inserted the post through the welding and is pegged graft fixedly with matched with product, inserts post and product welded fastening with the welding through the welding tin bar, ensures that the welding is inserted post and product complex compactness, because the welding tin bar is located the end that the post was inserted in the welding during dismantlement, only need to be to being located the welding tin bar heating melting back that the post was inserted in the welding end and can realize inserting the separation of post and product to the welding.

Furthermore, the upper top surface of the base plate is provided with a guide arc groove arranged at the outer edge of the sensor mounting groove.

The arrangement of the guide arc groove enlarges the range of the gas-sensitive part above the sensor main body, and avoids the reduction of the gas-sensitive monitoring range after the sensor main body is embedded in the sensor mounting groove.

Furthermore, the inserting column is at least evenly provided with two conductive elastic sheets, and the tail ends of the conductive elastic sheets are provided with welding tin points.

The conductive elastic sheet closely abuts against the inner wall of the conductive copper pipe closely attached to the conductive layer in the insertion hole after the insertion column is inserted into the insertion hole, so that the outer wall of the insertion column is in abutting electric connection with the inner wall of the conductive copper pipe through the outer inclined elasticity of the conductive elastic sheet, the sensor main body is kept in stable electric connection with the metal lead through the matching of the insertion column and the conductive copper pipe, and the soldering tin point is matched, welded and fixed when the conductive elastic sheet and the conductive copper pipe are particularly required to be fixed.

Furthermore, a plurality of fine micropores arranged above the gas-sensitive part of the sensor main body are uniformly distributed on the dust cover, and a plurality of inclined fine micropores are arranged at the outer edge of the dust cover.

The fine micro holes are used for communicating gas in the air with the interior of the dust cover, so that the sensor main body can detect the gas in the air conveniently, and the inclined fine micro holes are communicated with the interior of the dust cover for matching the fine holes with the air in each direction outside the dust cover.

Furthermore, the outer wall of the insulating rubber layer is provided with a soft anti-skid groove in a transverse sawtooth shape.

The back between sensor main part and the sensor mounting groove is gone into to the bottom card of dust cover, and the rubber layer card is between dust cover outer wall and sensor mounting groove inner wall, and soft antiskid groove adopts soft rubber to make, has after dust cover and sensor mounting groove block with the antiskid laminating of sensor mounting groove inner wall, further fixes the effect at the sensor mounting groove to the sensor main part.

Compared with the prior art, the utility model has the following technical effects and advantages: the sensor main body is embedded in the sensor mounting groove on the top surface of the substrate and is matched with the dust cover in a covering mode, the effect of protecting the outside of the sensor main body is achieved, the probability that the sensor main body is damaged by external force or the gas sensitive part of the sensor main body is influenced in the matching use process of the sensor main body is greatly reduced, and therefore the service life of the MEMS gas sensor is prolonged, and the use monitoring precision of the MEMS gas sensor is improved;

the bottom center of sensor main part is pegged graft fixedly through inserting the copper tube that post and the inseparable joint of conducting layer inner wall on the base plate, the outer wall that the post was inserted in the realization is detachable electricity even through conductive elastic piece and copper tube laminating realization, need not fixed mode such as welding, the assembly efficiency to sensor main part and base plate is improved, or through the terminal welding tin point of conductive elastic piece and copper tube according to the needs welded fastening to the installation of sensor main part, when needs are dismantled to the sensor main part, it can directly to the copper tube and the conducting layer dismantlement of the conductive elastic piece welding together on the cartridge of sensor main part bottom can, the realization is overhauld the quick dismantlement of sensor main part and base plate.

Drawings

FIG. 1 is a schematic structural view of the present invention;

FIG. 2 is an assembled exterior view of the sensor body and shield of the present invention;

fig. 3 is a bottom view of fig. 2 of the present invention.

In the figure: 1. a substrate; 2. a sensor body; 3. a dust cover; 4. a sensor mounting groove; 5. a jack; 6. a conductive layer; 7. a conductive copper tube; 8. a soft anti-slip groove; 9. a metal lead; 10. welding the inserted column; 11. inserting a column; 12. a conductive spring plate; 13. an insulating rubber layer; 14. welding a tin block; 15. a guide arc groove; 16. welding a tin point; 17. fine pores; 18. the fine pores are inclined.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

The utility model provides an MEMS gas sensor as shown in figures 1-3, which comprises a substrate 1, a sensor main body 2 and a dust cover 3 arranged on the sensor main body 2, wherein a sensor mounting groove 4 is arranged on the top surface of the substrate 1, a jack 5 at the center in the sensor mounting groove 4 penetrates through the substrate 1, a conductive copper pipe 7 is tightly attached to the inner wall of a conductive layer 6 on the inner wall of the jack 5, the tail end of a metal lead 9 connected with the outer wall of the conductive layer 6 penetrates through the substrate 1 and is arranged at the bottom end of a welding plug 10 on the bottom surface of the substrate 1, and a welding tin block 14 connected with the metal lead 9 is arranged at the tail end of the welding plug 10. After the substrate 1 is fixedly spliced with a matched product through the welding insert column 10, the welding insert column 10 is fixedly welded with the product through the welding tin block 14, the matching tightness of the welding insert column 10 and the product is ensured, and the welding tin block 14 at the tail end of the welding insert column 10 is positioned during disassembly, so that the welding insert column 10 can be separated from the product only by heating and melting the welding tin block 14 at the tail end of the welding insert column 10, and the substrate 1 and the product can be disassembled;

the sensor body 2 is embedded in the sensor mounting groove 4, and the upper top surface of the substrate 1 is provided with a guide arc groove 15 arranged at the outer edge of the sensor mounting groove 4. The arrangement of the guide arc groove 15 enlarges the range of the gas-sensitive part above the sensor main body 2, and avoids the reduction of the gas-sensitive monitoring range after the sensor main body 2 is embedded in the sensor mounting groove 4. The conductive elastic sheet 12 on the inserted column 11 at the center of the bottom end of the sensor main body 2 is contacted and attached with the inner wall of the conductive copper pipe 7. At least two conductive elastic sheets 12 are uniformly distributed on the inserted column 11, and the tail ends of the conductive elastic sheets 12 are provided with soldering tin points 16. The conductive elastic sheet 12 is closely abutted against the inner wall of the conductive copper pipe 7 closely attached to the conductive layer 6 in the jack 5 after the insertion column 11 is inserted into the jack 5, so that the outer wall of the insertion column 11 is abutted against and electrically connected with the inner wall of the conductive copper pipe 7 through the outer inclination elasticity of the conductive elastic sheet 12, the sensor main body 2 is kept in electrical connection stability with the metal lead 9 through the cooperation of the insertion column 11 and the conductive copper pipe 7, and the welding tin points 16 are matched, welded and fixed when the conductive elastic sheet 12 and the conductive copper pipe 7 are particularly required to be fixed;

the bottom of the dust cover 3 is connected with the inner wall of the sensor mounting groove 4 in a clamped mode and covers the sensor main body 2, a plurality of fine micropores 17 arranged above the gas-sensitive portion of the sensor main body 2 are evenly distributed on the dust cover 3, and a plurality of inclined fine micropores 18 are arranged on the outer edge of the dust cover 3. The fine micro holes 17 are used for communicating gas in the air with the interior of the dust cover 3, so that the sensor main body 2 can detect the gas in the air conveniently, and the inclined fine micro holes 18 are used for matching with the fine micro holes 17 to communicate the air in all directions outside the dust cover 3 with the interior of the dust cover 3;

the insulating rubber layer 13 card that is the external inclination on the outer wall of 3 bottom ends of dust cover is located between sensor mounting groove 4 and the outer wall of dust cover 3, is equipped with the soft antiskid groove 8 that is horizontal cockscomb structure on the outer wall of insulating rubber layer 13. Sensor main part 2 and sensor mounting groove 4 back are gone into to the bottom card of dust cover 3, and insulating rubber layer 13 card is between 3 outer walls of dust cover and 4 inner walls of sensor mounting groove, and soft antiskid groove 8 adopts soft rubber to make, have after

dust cover

3 and 4 blocks of sensor mounting groove with 4 inner walls of sensor mounting groove antiskid laminating, further fix the effect at sensor mounting groove 4 to sensor main part 2.

According to the MEMS gas sensor, the sensor main body 2 is embedded in the sensor mounting groove 4 on the upper top surface of the substrate 1 and is matched with the dust cover 3 in a covering mode, the effect of protecting the outside of the sensor main body 2 is achieved, the probability that the sensor main body 2 is damaged by external force or the gas sensitive part of the sensor main body 2 is influenced in the matching use process of the sensor main body 2 is greatly reduced, and therefore the service life and the use monitoring precision of the MEMS gas sensor are improved;

the center of the bottom end of the sensor main body 2 is fixedly inserted into the conductive copper pipe 7 tightly clamped with the inner wall of the conductive layer 6 on the substrate 1 through the insertion column 11, so that the outer wall of the insertion column 11 is attached to the conductive copper pipe 7 through the conductive elastic sheet 12 to realize separable electric connection, fixing modes such as welding and the like are not needed, and the assembly efficiency of the sensor main body 2 and the substrate 1 is improved;

or the solder points 16 at the tail end of the conductive elastic sheet 12 and the conductive copper tube 7 are welded and fixed according to the installation requirement of the sensor main body 2, and when the sensor main body 2 needs to be disassembled, the conductive copper tube 7 welded together with the conductive elastic sheet 12 inserted at the bottom end of the sensor main body 2 is directly disassembled from the conductive layer 6, so that the sensor main body 2 and the substrate 1 can be rapidly disassembled and overhauled.

Finally, it should be noted that: although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that modifications may be made to the embodiments or portions thereof without departing from the spirit and scope of the utility model.

Claims

1. The utility model provides a MEMS gas sensor, includes base plate (1), sensor main part (2) and locates dust cover (3) on sensor main part (2), its characterized in that: the sensor mounting structure comprises a substrate (1), wherein a sensor mounting groove (4) is formed in the top surface of the substrate (1), a jack (5) in the center of the sensor mounting groove (4) penetrates through the substrate (1), a conductive copper pipe (7) is tightly attached to the inner wall of a conductive layer (6) on the inner wall of the jack (5), and the tail end of a metal lead (9) connected with the outer wall of the conductive layer (6) penetrates through the substrate (1) and is arranged at the bottom end of a welding plug post (10) on the bottom surface of the substrate (1);

the sensor main body (2) is embedded in the sensor mounting groove (4), and a conductive elastic sheet (12) on an inserting column (11) in the center of the bottom end of the sensor main body (2) is abutted and attached to the inner wall of the conductive copper pipe (7);

dust cover (3) bottom and sensor mounting groove (4) inner wall joint just cover sensor main part (2), insulating rubber layer (13) card that is the outer slope on dust cover (3) bottom outer wall is located between sensor mounting groove (4) and dust cover (3) outer wall.

2. A MEMS gas sensor as claimed in claim 1 wherein: and a welding tin block (14) connected with the metal lead (9) is arranged at the tail end of the welding inserting column (10).

3. A MEMS gas sensor as claimed in claim 1 wherein: and a guide arc groove (15) arranged at the outer edge of the sensor mounting groove (4) is formed in the upper top surface of the substrate (1).

4. A MEMS gas sensor as claimed in claim 1 wherein: the plug-in post (11) is at least uniformly provided with two conductive elastic sheets (12), and the tail ends of the conductive elastic sheets (12) are provided with soldering tin points (16).

5. A MEMS gas sensor as claimed in claim 1 wherein: the dust cover (3) is evenly provided with a plurality of fine pores (17) arranged above the gas-sensitive part of the sensor main body (2), and the outer edge of the dust cover (3) is provided with a plurality of inclined fine pores (18).

6. A MEMS gas sensor as claimed in claim 1 wherein: and the outer wall of the insulating rubber layer (13) is provided with a soft anti-skid groove (8) in a transverse sawtooth shape.