CN216556006U - Diffusion pump movable fixing device - Google Patents
Diffusion pump movable fixing device Download PDFInfo
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- CN216556006U CN216556006U CN202122446829.2U CN202122446829U CN216556006U CN 216556006 U CN216556006 U CN 216556006U CN 202122446829 U CN202122446829 U CN 202122446829U CN 216556006 U CN216556006 U CN 216556006U
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- diffusion pump
- sliding
- pump body
- underframe
- diffusion
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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Abstract
The utility model discloses a diffusion pump movable fixing device, which comprises: the diffusion pump comprises a fixed base, a sliding underframe and a diffusion pump body, wherein the fixed base is provided with a slide way structure which is transversely extended; the sliding underframe is slidably arranged on the slideway structure, and the sliding end part of the slideway structure is provided with a limiting structure for positioning the sliding underframe; the diffusion pump body is arranged on the sliding underframe. The limiting structure can slide the diffusion pump body to be positioned, a working position and a maintenance position are limited on the sliding direction, when the diffusion pump body needs to be maintained, the diffusion pump body can be moved to the maintenance position from the working position along the slide way structure, the maintenance is good, the diffusion pump body is moved to the working position from the maintenance position along the slide way structure, then the diffusion pump body is fixedly installed, the operation is convenient, the labor intensity of workers is greatly reduced, and the safety risk is reduced.
Description
Technical Field
The utility model relates to the technical field of vacuum coating machines, in particular to a movable fixing device for a diffusion pump.
Background
Diffusion pumps are one of the most widespread and leading tools currently used to obtain high vacuum, commonly referred to as oil diffusion pumps. When using, need often refuel or maintain the pump body, prior art generally all assists through hoisting equipment, operates inconveniently to there is the potential safety hazard that falls and damage equipment.
SUMMERY OF THE UTILITY MODEL
The present invention is directed to a diffusion pump mobile fastening device that solves one or more of the problems set forth in the prior art, and provides at least one useful alternative or creation.
The technical scheme adopted for solving the technical problems is as follows:
the utility model provides a diffusion pump movable fixing device, which comprises: the diffusion pump comprises a fixed base, a sliding underframe and a diffusion pump body, wherein the fixed base is provided with a slide way structure which is transversely extended; the sliding underframe is slidably arranged on the slideway structure, and a limiting structure for positioning the sliding underframe is arranged at the sliding end part of the slideway structure; the diffusion pump body is mounted on the sliding underframe.
The utility model has the beneficial effects that: when using, the diffusion pump body is installed on the slip chassis, and install on unable adjustment base slip chassis slide structure, the tip setting of sliding of slide structure is used for carrying out the limit structure who fixes a position to the slip chassis, and limit structure can slide the diffusion pump body and fix a position to define the work position and maintain the position on the direction of sliding, when needs are maintained the diffusion pump body, can follow the work position along slide structure with the diffusion pump body and remove to maintaining the position, it is good to maintain, will diffuse the pump body and follow the slide structure from maintaining the position and remove to the work position, carry out fixed mounting to the diffusion pump body again, and convenient operation, greatly reduced workman's intensity of labour like this has reduced the safety risk.
As a further improvement of the technical scheme, a supporting lifting structure which can freely stretch up and down and is fixed is arranged at the bottom of the diffusion pump body, and the diffusion pump body is arranged on the sliding underframe through the supporting lifting structure.
Because the diffusion pump body when installing on vacuum coating machine system, need dock fixedly with the interface that corresponds, this scheme realizes the lift of the diffusion pump body in the work position through supporting elevation structure, when the diffusion pump body moves to the work position, support elevation structure and upwards rise the diffusion pump body, make the butt joint interface of the diffusion pump body and the interface butt joint on the vacuum coating machine system, carry out fixed mounting, when the diffusion pump body is maintained, support elevation structure and down the diffusion pump body, make the diffusion pump body deviate from vacuum coating machine system, later draw the diffusion pump body to the maintenance position again, the dismouting of the diffusion pump body of so can being convenient for, satisfy the matching equipment with current vacuum coating machine system.
As the further improvement of above-mentioned technical scheme, support elevation structure and include a plurality of flexible stabilizer blades that are the upper and lower extension setting, the upper and lower both ends of flexible stabilizer blade divide into stiff end and flexible end, the stiff end is fixed in the bottom of the diffusion pump body, flexible end is contradicted with the slip chassis.
The lifting of the diffusion pump body is realized through a plurality of telescopic support legs in the scheme, wherein the telescopic support legs are telescopic rod pieces which can be freely stretched and fixed, such as conventional electric push rods, hydraulic rods and the like.
As a further improvement of the technical scheme, a limiting installation groove is formed in the top of the sliding bottom frame, and the telescopic end stretches into the limiting installation groove and is abutted against the groove bottom of the limiting installation groove.
In order to facilitate the fixed of slip chassis and flexible stabilizer blade to and the dismouting of the convenient diffusion pump body, the slip chassis of this scheme comes to carry on spacing conflict with the flexible end of flexible stabilizer blade bottom through spacing mounting groove, avoids the diffusion pump body to slide out from the slip chassis at the in-process that slides, and when maintaining, lifting device can hang out the diffusion pump body from the slip chassis fast, makes things convenient for the change of the diffusion pump body.
As a further improvement of the technical scheme, the telescopic end is connected with a spherical foot cup and is abutted against the limiting installation groove through the foot cup. Wherein the spherical foot cup can lead the telescopic end to rapidly extend into the limit mounting groove.
As a further improvement of the above technical solution, the number of the telescopic legs is three, the three telescopic legs are distributed in a triangular shape on the overlooking projection plane, the sliding underframe is in a triangular shape, and the three telescopic legs are respectively abutted against three corners of the sliding underframe.
The three telescopic supporting legs are distributed in a triangular shape on the overlooking projection surface, so that the supporting lifting of the supporting lifting structure can be realized at lower manufacturing cost, and the sliding bottom frame is also in a triangular shape.
As a further improvement of the above technical solution, the slide structure includes at least two guide rails arranged side by side, a pulley mechanism is arranged at the bottom of the sliding bottom frame, and the sliding bottom frame is slidably connected with the at least two guide rails through the pulley mechanism.
The slide structure in this scheme adopts the structure of two at least guide rails that set up side by side, and the slip chassis realizes sliding fit through pulley mechanism with the guide rail.
As a further improvement of the above technical solution, the pulley assembly includes three pulley assemblies, and the three pulley assemblies are distributed in a triangular shape on a top projection plane, wherein one of the pulley assemblies is in sliding fit with one of the guide rails, and the other two of the pulley assemblies are in sliding fit with the other guide rail.
Wherein the loose pulley assembly of this scheme also sets up three loose pulley assembly, also can satisfy under the prerequisite of sliding support, realizes manufacturing cost's reduction.
As a further improvement of the above technical scheme, the limiting structure comprises at least two limiting blocks arranged at intervals along the extending direction of the guide rail.
The limiting structure in this scheme comes to slide the slip chassis through the stopper and carries on spacingly, and the stopper can set up on guide rail or unable adjustment base's body, and the stopper can contradict with pulley mechanism or the body of slip chassis to the realization is spacing to the diffusion pump body, and wherein two stoppers can correspond the work position and the maintenance position of the diffusion pump body respectively.
As a further improvement of the technical scheme, the bottom of the fixed base is connected with a plurality of foundation screws. The fixing base in the scheme is fixedly arranged on the ground or a fixing piece arranged outside the ground through a plurality of foundation screws.
Drawings
The utility model is further described with reference to the accompanying drawings and examples;
FIG. 1 is a schematic structural view of an embodiment of a diffusion pump mobile fixing device provided by the present invention, wherein two arrows respectively represent a forward direction and a backward direction, wherein two arrows respectively represent an upward direction and a downward direction, and wherein two arrows respectively represent a left direction and a right direction;
FIG. 2 is a partial enlarged view of portion B of FIG. 1;
FIG. 3 is a front view of an embodiment of the diffusion pump flexible fixture of the present invention, wherein the two arrows respectively represent upward and downward directions, and wherein the two arrows respectively represent left and right directions;
FIG. 4 is a cross-sectional view A-A of FIG. 1, wherein the two arrows indicate upward and downward directions, respectively, and wherein the two arrows indicate forward and backward directions, respectively;
fig. 5 is a partially enlarged view of a portion C in fig. 4.
Detailed Description
Reference will now be made in detail to the present preferred embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to like elements throughout.
In the description of the present invention, it should be understood that the orientation or positional relationship referred to in the description of the orientation, such as the upper, lower, front, rear, left, right, etc., is based on the orientation or positional relationship shown in the drawings, and is only for convenience of description and simplification of description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention.
In the description of the present invention, if words such as "a plurality" are described, the meaning is one or more, the meaning of a plurality is two or more, more than, less than, more than, etc. are understood as excluding the present number, and more than, less than, etc. are understood as including the present number.
In the description of the present invention, unless otherwise explicitly limited, terms such as arrangement, installation, connection and the like should be understood in a broad sense, and those skilled in the art can reasonably determine the specific meanings of the above terms in the present invention in combination with the specific contents of the technical solutions.
Referring to fig. 1 to 5, the diffusion pump movable fixture of the present invention is made as follows:
the diffusion pump movable fixture of the present embodiment includes a stationary base 100, a sliding bottom frame 200, and a diffusion pump body 300.
The bottom of the fixed base 100 is connected with a plurality of anchor screws 130, and when the fixed base 100 is installed, the fixed base is fixedly installed on the ground or an external fixed part through the anchor screws 130; the fixing base 100 is provided with a slide structure extending transversely, specifically, the slide structure of the present embodiment includes two guide rails 110 arranged side by side, in some other embodiments, the slide structure may adopt a structure such as a sliding groove, and the number of the guide rails 110 may be three or more than four.
And the sliding chassis 200 is slidably mounted to the slideway structure, specifically: the bottom of the sliding bottom frame 200 is provided with a pulley mechanism, the sliding bottom frame 200 is connected with at least two guide rails 110 in a sliding manner through the pulley mechanism, the pulley mechanism of the embodiment includes three pulley assemblies 220, the three pulley assemblies 220 are distributed in a triangular manner on a top projection surface, one of the pulley assemblies 220 is in sliding fit with one of the guide rails 110, and the other two pulley assemblies 220 are in sliding fit with the other guide rail 110, so that the manufacturing cost can be reduced on the premise of meeting the requirement of sliding support.
The diffusion pump body 300 is mounted on the sliding chassis 200, and a sliding end of the sliding track structure is provided with a limiting structure for positioning the sliding chassis 200, the limiting structure of this embodiment includes at least two limiting blocks 120 arranged at intervals along the extending direction of the guide rail 110, the guide rail 110 of this embodiment is provided with two limiting blocks 120, wherein the limiting blocks 120 can be arranged on the guide rail 110 or the body of the fixed base 100, and the limiting blocks 120 can be abutted against the pulley mechanism or the body of the sliding chassis 200, so as to limit the diffusion pump body 300, wherein the two limiting blocks 120 can position the diffusion pump body 300 in a sliding manner, and define a working position and a maintenance position in the sliding direction, when the diffusion pump body 300 needs to be maintained, the diffusion pump body 300 can be moved from the working position to the maintenance position along the sliding track structure, and the maintenance is completed, the diffusion pump body 300 is moved from the maintenance position to the working position along the sliding track structure, and the diffusion pump body 300 is fixedly installed, so that the operation is convenient, the labor intensity of workers is greatly reduced, and the safety risk is reduced.
Further, a supporting lifting structure which can freely stretch up and down and is fixed is arranged at the bottom of the diffusion pump body 300, the diffusion pump body 300 is installed on the sliding bottom frame 200 through the supporting lifting structure, because the diffusion pump body 300 needs to be in butt joint with a corresponding interface for fixing when being installed on a vacuum coating machine system, the scheme realizes the lifting of the diffusion pump body 300 at a working position through the supporting lifting structure, when the diffusion pump body 300 moves to the working position, the supporting lifting structure lifts the diffusion pump body 300 upwards to enable the butt joint interface of the diffusion pump body 300 to be in butt joint with the interface on the vacuum coating machine system for fixed installation, when the diffusion pump body 300 is maintained, the supporting lifting structure lowers the diffusion pump body 300 to enable the diffusion pump body 300 to be separated from the vacuum coating machine system, and then the diffusion pump body 300 is pulled to a maintenance position, so as to be convenient for the disassembly and assembly of the diffusion pump body 300, the matching assembly with the existing vacuum coating machine system is met.
Specifically, this embodiment support elevation structure includes a plurality of flexible stabilizer blades 400 that extend the setting from top to bottom that are, the upper and lower both ends of flexible stabilizer blade 400 divide into stiff end and flexible end, the stiff end is fixed in the bottom of the diffusion pump body 300, flexible end is contradicted with slip chassis 200, realizes the lift of the diffusion pump body 300 through a plurality of flexible stabilizer blades 400, and wherein flexible stabilizer blade 400 is the flexible member that can freely stretch out and draw back and fix such as conventional electric putter, hydraulic stem.
In order to facilitate the fixing of the sliding bottom frame 200 and the telescopic supporting leg 400 and facilitate the disassembly and assembly of the diffusion pump body 300, the embodiment is that the top of the sliding bottom frame 200 is provided with a limit installation groove 210, the telescopic end stretches into the limit installation groove 210 and the groove bottom of the limit installation groove 210 is abutted, the sliding bottom frame 200 is abutted with the telescopic end at the bottom of the telescopic supporting leg 400 through the limit installation groove 210 to avoid the diffusion pump body 300 from slipping out of the sliding bottom frame 200 in the sliding process, and when the diffusion pump body 300 is maintained, the hoisting equipment can rapidly hoist the diffusion pump body 300 out of the sliding bottom frame 200, thereby facilitating the replacement of the diffusion pump body 300.
In addition, the telescopic end is connected with a spherical foot cup 410, and the telescopic end is abutted against the limit mounting groove 210 through the foot cup 410. The spherical foot cup 410 can make the telescopic end quickly extend into the limit mounting groove 210.
Furthermore, the number of the retractable legs 400 of the present embodiment is three, the three retractable legs 400 are distributed in a triangular shape on the top view projection plane, the sliding bottom frame 200 is in a triangular shape, the three retractable legs 400 respectively abut against the three corners of the sliding bottom frame 200, the three retractable legs 400 are distributed in a triangular shape on the top view projection plane, the supporting and the lifting of the supporting and lifting structure can be realized at a lower manufacturing cost, and the sliding bottom frame 200 is also in a triangular shape.
In other embodiments, the sliding chassis 200 can have other shapes and the telescoping legs 400 can have other arrangements.
While the preferred embodiments of the present invention have been illustrated and described, it will be understood by those skilled in the art that the present invention is not limited to the details of the embodiments shown and described, but is capable of numerous equivalents and substitutions without departing from the spirit of the utility model as set forth in the claims appended hereto.
Claims (10)
1. The utility model provides a diffusion pump activity fixing device which characterized in that: it includes:
the fixed base (100) is provided with a slide way structure which extends transversely;
the sliding underframe (200) is slidably arranged on the slideway structure, and a limiting structure for positioning the sliding underframe (200) is arranged at the sliding end part of the slideway structure;
a diffusion pump body (300) mounted on the sliding chassis (200).
2. The diffusion pump moving fixture of claim 1, wherein:
the bottom of the diffusion pump body (300) is provided with a supporting lifting structure which can freely stretch up and down and is fixed, and the diffusion pump body (300) is arranged on the sliding bottom frame (200) through the supporting lifting structure.
3. The diffusion pump moving fixture as claimed in claim 2, wherein:
support elevation structure and include a plurality of flexible stabilizer blades (400) that are the upper and lower extension setting, the upper and lower both ends of flexible stabilizer blade (400) are divided into stiff end and flexible end, the stiff end is fixed in the bottom of the diffusion pump body (300), flexible end is contradicted with slip chassis (200).
4. A diffusion pump mobile fastening device according to claim 3, characterized in that:
the top of sliding bottom frame (200) is provided with spacing mounting groove (210), flexible end stretch into spacing mounting groove (210) and with the tank bottom of spacing mounting groove (210) is contradicted.
5. The diffusion pump movable fixture of claim 4, wherein:
the telescopic end is connected with a spherical foot cup (410), and the telescopic end is abutted against the limiting installation groove (210) through the foot cup (410).
6. The diffusion pump movable fixture device according to claim 3, wherein:
the number of the telescopic supporting legs (400) is three, the three telescopic supporting legs (400) are distributed in a triangular shape on a overlooking projection surface, the sliding underframe (200) is in a triangular shape, and the three telescopic supporting legs (400) are respectively abutted against three corners of the sliding underframe (200).
7. The diffusion pump moving fixture of claim 1, wherein:
the slide structure comprises at least two guide rails (110) arranged side by side, a pulley mechanism is arranged at the bottom of the sliding bottom frame (200), and the sliding bottom frame (200) is connected with the at least two guide rails (110) in a sliding mode through the pulley mechanism.
8. The diffusion pump moving fixture of claim 7, wherein:
the pulley mechanism comprises three pulley assemblies (220), the three pulley assemblies (220) are distributed in a triangular shape on a top projection surface, one of the pulley assemblies (220) is in sliding fit with one of the guide rails (110), and the other two pulley assemblies (220) are in sliding fit with the other guide rail (110).
9. The diffusion pump moving fixture of claim 7, wherein:
the limiting structure comprises at least two limiting blocks (120) which are arranged at intervals along the extending direction of the guide rail (110).
10. The diffusion pump moving fixture of claim 1, wherein:
the bottom of the fixed base (100) is connected with a plurality of anchor screws (130).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122446829.2U CN216556006U (en) | 2021-10-11 | 2021-10-11 | Diffusion pump movable fixing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122446829.2U CN216556006U (en) | 2021-10-11 | 2021-10-11 | Diffusion pump movable fixing device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN216556006U true CN216556006U (en) | 2022-05-17 |
Family
ID=81566624
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202122446829.2U Active CN216556006U (en) | 2021-10-11 | 2021-10-11 | Diffusion pump movable fixing device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN216556006U (en) |
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2021
- 2021-10-11 CN CN202122446829.2U patent/CN216556006U/en active Active
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