CN216550670U - Novel target and backplate welded structure - Google Patents
Novel target and backplate welded structure Download PDFInfo
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- CN216550670U CN216550670U CN202122798920.0U CN202122798920U CN216550670U CN 216550670 U CN216550670 U CN 216550670U CN 202122798920 U CN202122798920 U CN 202122798920U CN 216550670 U CN216550670 U CN 216550670U
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- target
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- back plate
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
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Abstract
In order to solve the problem of high use temperature of target welding in the prior art, the utility model discloses a novel target and back plate welding structure, which comprises a target body and a back plate body, wherein a first adhesive layer is attached to the upper surface of the back plate body, a layer of heat conduction material is attached to the first adhesive layer, and a second adhesive layer is attached to the lower surface of the target body; the production process has the advantages that extra working hours cannot be increased during use, the efficiency of the original production process cannot be reduced, and compared with the prior art, the production process has higher use value.
Description
Technical Field
The utility model relates to the technical field of target welding processing, in particular to a novel target and back plate welding structure.
Background
Most of welding in the current target market is pure indium welding, but because the melting point of indium is lower, the requirements on sputtering power and a cooling system of a machine are strict, and the actual sputtering needs higher power with higher efficiency, high-melting-point alloy welding flux and high-temperature glue welding flux are promoted, the high-melting-point alloy has higher general hardness and is easy to crack and desolder when being deformed at high temperature, and in order to solve the problem, the utility model discloses a novel welding structure of the target and a back plate.
SUMMERY OF THE UTILITY MODEL
Utility model purpose: in order to overcome the defects in the background technology, the utility model discloses a novel welding structure of a target and a back plate.
The technical scheme is as follows: the utility model provides a novel target and backplate welded structure, includes target body and backplate body, backplate body upper surface is attached with adhesive layer one, adhesive layer one is attached with one deck heat conduction material, the lower surface of target body is attached with adhesive layer two, before target body and backplate body welding, adhesive layer two can be attached at the upper surface of heat conduction material.
Further, the heat conducting material is specifically a graphite sheet material.
Further, the length of the back plate body is larger than that of the target material body.
Further, the first adhesive layer and the second adhesive layer both adopt double-sided adhesive tapes.
The utility model realizes the following beneficial effects:
the utility model can solve the problem of high sputtering power of the target material and no desoldering in the coating process, and has simple manufacturing process and low cost; the production process has the advantages that extra working hours cannot be increased during use, the efficiency of the original production process cannot be reduced, and compared with the prior art, the production process has higher use value.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the present disclosure and together with the description, serve to explain the principles of the disclosure.
FIG. 1 is a schematic view of the separation structure disclosed in the present invention.
Fig. 2 is a schematic view of the attachment structure disclosed in the present invention.
In the figure: 10 target material body, 20 back plate body, 30 glue layer one, 40 glue layer two, 50 heat conduction material.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments.
Examples
Referring to fig. 1-2, a novel target and backplate welded structure, includes target body 10 and backplate body 20, backplate body 20 upper surface is attached to have glue film one 30, glue film one 30 is attached to have one deck heat conduction material 50, in the use, heat conduction material 50 is preferably graphite sheet material, enables it to possess the heat conduction effect of preferred like this, target body 10's lower surface is attached to have glue film two 40, before welding target body 10 and backplate body 20, glue film two 40 can attach at the upper surface of heat conduction material, when target body 10 is attached with backplate body 20, alright carry out high temperature welding work.
In the present embodiment, the length of the backing plate body 20 is greater than the length of the target body 10.
In this embodiment, the first adhesive layer 30 and the second adhesive layer 40 both adopt double-sided adhesive tapes, so that the first adhesive layer can adhere and fix the heat conducting material and the back plate body, and the second adhesive layer can adhere and fix the target body and the heat conducting body.
According to the implementation of the embodiments, the utility model can solve the problem of high sputtering power of the target material and no desoldering in the coating process, and has simple manufacturing process and low cost; the production process has the advantages that extra working hours cannot be increased during use, the efficiency of the original production process cannot be reduced, and compared with the prior art, the production process has higher use value.
The above embodiments are merely illustrative of the technical ideas and features of the present invention, and are intended to enable those skilled in the art to understand the contents of the present invention and implement the present invention, and not to limit the scope of the present invention. All equivalent changes or modifications made according to the spirit of the present invention should be covered within the protection scope of the present invention.
Claims (4)
1. The utility model provides a novel target and backplate welded structure, its characterized in that, includes target body (10) and backplate body (20), backplate body (20) upper surface is attached to have glue film one (30), glue film one (30) are attached to have one deck heat conduction material (50), the lower surface of target body (10) is attached to have glue film two (40), before welding target body (10) and backplate body (20), glue film two (40) can be attached at the upper surface of heat conduction material (50).
2. The new target-to-backing plate bonding structure of claim 1, wherein said thermally conductive material (50) is a graphite sheet material.
3. The novel target and backing plate welding structure of claim 1, wherein the length of the backing plate body (20) is greater than the length of the target body (10).
4. The novel target and backing plate welding structure of claim 1, wherein said first adhesive layer (30) and said second adhesive layer (40) are both double-sided adhesive tape.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122798920.0U CN216550670U (en) | 2021-11-16 | 2021-11-16 | Novel target and backplate welded structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122798920.0U CN216550670U (en) | 2021-11-16 | 2021-11-16 | Novel target and backplate welded structure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN216550670U true CN216550670U (en) | 2022-05-17 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202122798920.0U Active CN216550670U (en) | 2021-11-16 | 2021-11-16 | Novel target and backplate welded structure |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN216550670U (en) |
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2021
- 2021-11-16 CN CN202122798920.0U patent/CN216550670U/en active Active
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