CN216498944U - Grinding fluid stirring device - Google Patents
Grinding fluid stirring device Download PDFInfo
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- CN216498944U CN216498944U CN202121503252.8U CN202121503252U CN216498944U CN 216498944 U CN216498944 U CN 216498944U CN 202121503252 U CN202121503252 U CN 202121503252U CN 216498944 U CN216498944 U CN 216498944U
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Abstract
The utility model relates to silicon wafer processing, in particular to a grinding fluid stirring device. The utility model provides a lapping liquid agitating unit, includes stirred vessel, puddler, agitator, stirred vessel is equipped with the through-hole, motor fixed mounting is in stirred vessel's outside, stirred vessel is equipped with the through-hole, the puddler passes the through-hole and connects the output shaft of motor. The utility model has the beneficial effects that: the utility model provides a device of stirring lapping liquid, the agitator still can reciprocate along the puddler when the stirring rotates, and increase stirring scope and change stirring atress direction improve stirring effect.
Description
Technical Field
The utility model relates to silicon wafer processing, in particular to a grinding fluid stirring device.
Background
One of the main components of a silicon wafer processing apparatus is an abrasive liquid supply apparatus, which has a main function of pre-stirring an abrasive liquid, preventing abrasive particles in the abrasive liquid from precipitating, ensuring uniform distribution of each component in the abrasive liquid, and diluting the abrasive liquid according to actual needs. The precipitation phenomenon is more remarkable because the abrasive grains are precipitated after the abrasive liquid is left standing for a certain period of time, particularly, the abrasive grains are larger or contain metal oxides with higher density, such as alumina and the like. Pre-agitation is an important part of the slurry supply process. However, the stirring effect of the prior art slurry stirring device is limited.
SUMMERY OF THE UTILITY MODEL
The utility model aims to solve the technical problem of overcoming the defects in the prior art and provides a grinding fluid stirring device.
The utility model is realized by the following technical scheme:
the utility model provides a grinding fluid agitating unit, includes motor, stirred tank, puddler, agitator, stirred tank is equipped with the through-hole, motor fixed mounting is in stirred tank's outside, the puddler passes through the through-hole and connects the output shaft of motor, the puddler is equipped with the external screw thread section inside stirred tank, the both ends of external screw thread section are equipped with spacing lug respectively, the agitator includes go-between and stirring vane, the outer wall fixed connection of stirring vane and go-between, it is a plurality of stirring vane evenly distributed is on the outer wall of go-between, the inner wall of go-between is equipped with the internal thread, the go-between passes through internal thread and external screw thread section with the puddler and is connected.
According to the above technical scheme, preferably, stirred vessel is cylindrical container, stirred vessel includes curved surface lateral wall, bottom surface and upper cover, the curved surface lateral wall is connected with bottom surface integrated into one piece, the upper cover can be dismantled with the curved surface lateral wall and be connected, motor fixed connection upper cover, the through-hole sets up on the upper cover.
According to the above technical solution, preferably, both ends of the external thread section are respectively provided with an upper limit projection and a lower limit projection, and an upper connection spring and a lower connection spring are respectively arranged between the connection ring and the upper limit projection and between the connection ring and the lower limit projection.
The utility model has the beneficial effects that: the utility model provides a device of stirring lapping liquid, the agitator still can reciprocate along the puddler when the stirring rotates, and increase stirring scope and change stirring atress direction improve stirring effect. The stirring container is used for containing grinding fluid. One embodiment of the mixing vessel is a cylindrical vessel.
The puddler is located stirred vessel, and the puddler can rotate in stirred vessel, and the puddler is connected the output shaft of motor. One embodiment of the stirring rod is: the stirring container is provided with a through hole, the motor is fixedly installed outside the stirring container, the stirring container is provided with a through hole, and the stirring rod penetrates through the through hole and is connected with an output shaft of the motor. The stirring rod is used for driving the stirrer to rotate and limiting the movement of the stirrer.
The stirrer comprises a connecting ring and stirring blades, the stirring blades are fixedly connected with the outer wall of the connecting ring, and the stirring blades are uniformly distributed on the outer wall of the connecting ring. The inner wall of the connecting ring is provided with internal threads, the stirring rod is provided with an external thread section inside the stirring container, two ends of the external thread section are respectively provided with a limiting lug, and the connecting ring is connected with the stirring rod through the internal threads and the external thread section.
The motor drives the puddler and rotates, and the puddler passes through the screw thread and promotes the agitator and rotate, and the agitator rotates the inertia that produces and makes the agitator move along the screw thread, and the agitator also reciprocates along the puddler in the pivoted, and increase stirring scope improves stirring effect with change stirring atress direction.
The two ends of the external thread section are respectively provided with an upper limiting lug and a lower limiting lug, and an upper connecting spring and a lower connecting spring are respectively arranged between the connecting ring and the upper limiting lug and between the connecting ring and the lower limiting lug. Go up connecting spring and connecting spring down and can drive the agitator and reset, go up the natural state cooperation agitator of spacing lug and lower spacing lug and the state of spacing lug contact down.
Drawings
Fig. 1 shows a schematic front view of an embodiment of the present invention.
In the figure: 1. the stirring device comprises a stirring container, 2 stirring rods, 3 motors, 4 external thread sections, 5 connecting rings, 6 stirring blades, 7 upper limiting lugs, 8 lower limiting lugs, 9 upper connecting springs and 10 lower connecting springs.
Detailed Description
In order to make the technical solutions of the present invention better understood by those skilled in the art, the present invention will be further described in detail with reference to the accompanying drawings and preferred embodiments.
As shown in the figure, the grinding fluid stirring device comprises a motor, a stirring container 1, a stirring rod 2 and a stirrer, wherein the stirring container is provided with a through hole, the motor 3 is fixedly installed outside the stirring container, the stirring rod penetrates through the through hole and is connected with an output shaft of the motor, an external thread section 4 is arranged inside the stirring container, two ends of the external thread section are respectively provided with a limiting lug, the stirrer comprises a connecting ring 5 and stirring blades 6, the stirring blades are fixedly connected with the outer wall of the connecting ring, the stirring blades are uniformly distributed on the outer wall of the connecting ring, the inner wall of the connecting ring is provided with internal threads, and the connecting ring is connected with the stirring rod through the internal threads and the external thread section.
According to the above embodiment, preferably, the stirring container is a cylindrical container, the stirring container includes a curved side wall, a bottom surface and an upper cover, the curved side wall is connected with the bottom surface in an integrated manner, the upper cover is detachably connected with the curved side wall, the motor is fixedly connected with the upper cover, and the through hole is formed in the upper cover.
According to the above embodiment, preferably, the two ends of the external thread section are respectively provided with the upper limit projection 7 and the lower limit projection 8, and the upper connecting spring 9 and the lower connecting spring 10 are respectively arranged between the connecting ring and the upper limit projection and the lower limit projection.
The working principle of the embodiment is as follows: the stirring container is used for containing grinding fluid. One embodiment of the mixing vessel is a cylindrical vessel.
The puddler is located stirred vessel, and the puddler can rotate in stirred vessel, and the puddler is connected the output shaft of motor. One embodiment of the stirring rod is: the stirring container is provided with a through hole, the motor is fixedly installed outside the stirring container, the stirring container is provided with a through hole, and the stirring rod penetrates through the through hole and is connected with an output shaft of the motor. The stirring rod is used for driving the stirrer to rotate and limiting the movement of the stirrer.
The stirrer comprises a connecting ring and stirring blades, the stirring blades are fixedly connected with the outer wall of the connecting ring, and the stirring blades are uniformly distributed on the outer wall of the connecting ring. The inner wall of the connecting ring is provided with internal threads, the stirring rod is provided with an external thread section inside the stirring container, two ends of the external thread section are respectively provided with a limiting lug, and the connecting ring is connected with the stirring rod through the internal threads and the external thread section.
The motor drives the puddler and rotates, and the puddler passes through the screw thread and promotes the agitator and rotate, and the agitator rotates the inertia that produces and makes the agitator move along the screw thread, and the agitator also reciprocates along the puddler in the pivoted, and increase stirring scope improves stirring effect with change stirring atress direction.
The two ends of the external thread section are respectively provided with an upper limiting lug and a lower limiting lug, and an upper connecting spring and a lower connecting spring are respectively arranged between the connecting ring and the upper limiting lug and between the connecting ring and the lower limiting lug. Go up connecting spring and connecting spring down and can drive the agitator and reset, go up the natural state cooperation agitator of spacing lug and lower spacing lug and the state of spacing lug contact down.
The beneficial effects of the utility model are: the utility model provides a device of stirring lapping liquid, the agitator still can reciprocate along the puddler when the stirring rotates, and increase stirring scope and change stirring atress direction improve stirring effect.
The foregoing is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, various modifications and decorations can be made without departing from the principle of the present invention, and these modifications and decorations should also be regarded as the protection scope of the present invention.
Claims (3)
1. The utility model provides a lapping liquid agitating unit which characterized in that: including motor, stirred vessel, puddler, agitator, stirred vessel is equipped with the through-hole, motor fixed mounting is in stirred vessel's outside, the puddler passes through the through-hole and connects the output shaft of motor, the puddler is equipped with the external screw thread section in stirred vessel inside, the both ends of external screw thread section are equipped with spacing lug respectively, the agitator includes go-between and stirring vane, stirring vane and the outer wall fixed connection of go-between, it is a plurality of stirring vane evenly distributed is on the outer wall of go-between, the inner wall of go-between is equipped with the internal thread, the go-between passes through internal thread and external screw thread section connection with the puddler.
2. The slurry stirring apparatus according to claim 1, wherein: the stirring container is a cylindrical container, the stirring container comprises a curved surface side wall, a bottom surface and an upper cover, the curved surface side wall is connected with the bottom surface in an integrated mode, the upper cover is detachably connected with the curved surface side wall, the upper cover is fixedly connected with the motor, and the through hole is formed in the upper cover.
3. The slurry stirring apparatus according to claim 1, wherein: the two ends of the external thread section are respectively provided with an upper limiting lug and a lower limiting lug, and an upper connecting spring and a lower connecting spring are respectively arranged between the connecting ring and the upper limiting lug as well as between the connecting ring and the lower limiting lug.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121503252.8U CN216498944U (en) | 2021-07-02 | 2021-07-02 | Grinding fluid stirring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121503252.8U CN216498944U (en) | 2021-07-02 | 2021-07-02 | Grinding fluid stirring device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN216498944U true CN216498944U (en) | 2022-05-13 |
Family
ID=81460292
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202121503252.8U Active CN216498944U (en) | 2021-07-02 | 2021-07-02 | Grinding fluid stirring device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN216498944U (en) |
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2021
- 2021-07-02 CN CN202121503252.8U patent/CN216498944U/en active Active
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
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| TR01 | Transfer of patent right |
Effective date of registration: 20230814 Address after: Room 401-04-24, Building G, Haitai Green Industry Base, No. 6 Haitai Development Sixth Road, Huayuan Industrial Zone, Xiqing District, Tianjin, 300392 Patentee after: TIANJIN XIMEI SEMICONDUCTOR MATERIALS CO.,LTD. Address before: 300000 No.83, Qiwei Road, Dawangzhuang, Hedong District, Tianjin (room 212, area B, second floor) Patentee before: TIANJIN XIMEI TECHNOLOGY Corp.,Ltd. |