CN216478738U - Lifting device - Google Patents
Lifting device Download PDFInfo
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- CN216478738U CN216478738U CN202122868305.2U CN202122868305U CN216478738U CN 216478738 U CN216478738 U CN 216478738U CN 202122868305 U CN202122868305 U CN 202122868305U CN 216478738 U CN216478738 U CN 216478738U
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- screw
- lifting device
- supporting plate
- sealing unit
- chamber
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Abstract
The utility model relates to a lifting device, which comprises a driving mechanism, a transmission mechanism connected with the driving mechanism and a plurality of chamber sealing units connected with the transmission mechanism, wherein the driving mechanism is connected with a motion controller externally connected with an upper computer, the upper computer controls the driving mechanism to drive the transmission mechanism to rotate through the motion controller, and the transmission mechanism changes the rotating motion into the lifting motion of the chamber sealing units. The utility model aims to provide a lifting device which is low in cost, small in occupied space and easy to synchronously control.
Description
Technical Field
The utility model relates to a lifting device, in particular to a device for lifting parts in a sealed chamber.
Background
The silicon wafer and the silicon wafer protection cover need to move up and down at a specific position in the sealed cavity, and need to keep sealing in the up-and-down moving process.
The existing lifting device mainly comprises a driving mechanism and a plurality of chamber sealing units, wherein the plurality of chamber sealing units are of the same structure or different structures.
Based on the difference of the driving forms of the driving mechanisms, the existing lifting device mainly has the following two schemes:
the first method comprises the following steps: arranging a driving mechanism, wherein the driving mechanism drives a plurality of chamber sealing units with different structures through different connecting pieces;
and the second method comprises the following steps: a plurality of drive mechanisms are provided, each chamber sealing unit being directly driven by a separate drive mechanism.
The two solutions described above have the following disadvantages:
firstly, excessive power elements, closed-loop control and other related parts are introduced, the synchronous control difficulty is high, and accurate coordination is realized, so that the high-precision stable movement of the elements in the sealed cavity is difficult;
secondly, the occupied space is large, and the narrow part of the bottom space of the sealed cavity is not suitable for use;
thirdly, the technical difficulty of the magnetic coupling sealing form of the chamber sealing unit is high, and the cost is high.
Therefore, a lifting device with low cost, small occupied space and easy synchronous control is urgently needed.
SUMMERY OF THE UTILITY MODEL
The utility model aims to provide a lifting device which is low in cost, small in occupied space and easy to synchronously control.
In order to solve the technical problem, the application provides the following technical scheme:
the utility model relates to a lifting device, which comprises a driving mechanism, a transmission mechanism and a plurality of chamber sealing units, wherein the driving mechanism is connected with a motion controller externally connected with an upper computer, the transmission mechanism is connected with the driving mechanism, the chamber sealing units are connected with the transmission mechanism, the upper computer controls the driving mechanism to drive the transmission mechanism to rotate through the motion controller, and the transmission mechanism changes the rotating motion into the lifting motion of the chamber sealing units.
The utility model relates to a lifting device, wherein a transmission mechanism is a ball screw pair, a plurality of chamber sealing units are fixed on a sealing unit supporting plate at intervals, and the ball screw pair is connected with the sealing unit supporting plate through a screw and sealing unit supporting plate connecting piece.
The utility model relates to a lifting device, which further comprises a mounting seat, wherein the ball screw pair comprises a screw rod and a screw nut, the screw rod is arranged in the vertical direction, the screw nut is arranged outside the screw rod and matched with the screw rod, the upper end of the screw rod penetrates through the screw rod and a sealing unit supporting plate connecting piece, the rear two ends of the screw rod are supported on the front side surface of the mounting seat through bearings, the lower end of the screw rod is fixedly connected with a driving mechanism, and the screw nut is fixed in the rear middle of the screw rod and the sealing unit supporting plate connecting piece.
The utility model relates to a lifting device, wherein two guide rails parallel to the axis of a screw rod are fixed on a mounting seat at intervals, the two guide rails are positioned on two sides of the screw rod, each guide rail is connected with a guide rail sliding block in a sliding manner, and the two guide rail sliding blocks are fixedly connected with the screw rod and a sealing unit supporting plate connecting piece.
The utility model relates to a lifting device, wherein a connecting piece of a lead screw and a supporting plate of a sealing unit adopts a stepped plate-shaped structure, a lead screw penetrating hole is formed in the connecting piece, and the lead screw is in clearance fit with the lead screw penetrating hole.
The utility model relates to a lifting device, wherein a limit switch for controlling the upper limit and the lower limit of the lifting action of a plurality of chamber sealing units is arranged on the side surface of a connecting piece of a lead screw and a sealing unit supporting plate.
The utility model relates to a lifting device, wherein a position sensor for feeding back a position signal of the lifting device to a motion controller is arranged on one side of a mounting seat.
The utility model relates to a lifting device, wherein a sealing chamber is connected above a mounting seat.
The utility model relates to a lifting device, wherein a limit switch adopts a photoelectric limit switch or a mechanical limit switch, and a position sensor adopts a grating ruler or a magnetic grating ruler.
The utility model relates to a lifting device, wherein a driving mechanism is a motor, the motor adopts a servo motor or a stepping motor, and when the motor adopts the servo motor, an output shaft of the motor is provided with a rotary encoder.
Compared with the prior art, the lifting device has the following beneficial effects:
firstly, a driving mechanism motor is in transmission connection with a plurality of chamber sealing units through a transmission mechanism, the transmission mechanism and the chamber sealing units are connected with a sealing unit supporting plate connecting piece and a sealing unit supporting plate through a lead screw, and related parts such as excessive power elements, closed-loop control and the like are not introduced, so that synchronous control is easy;
secondly, the occupied space is small, and the narrow part of the bottom space of the sealed cavity is also applicable.
In the lifting device, the flatness of the three sealing units can be quickly adjusted by adding the adjusting gaskets with different thicknesses at the bottoms of the sealing units, and the lifting device is simple in structure.
The lifting device of the present invention will be further described with reference to the accompanying drawings.
Drawings
FIG. 1 is a general schematic view of a lift system according to the present invention;
FIG. 2 is an exploded view of the lift device of the present invention;
FIG. 3 is a front view of the lift of the present invention;
FIG. 4 is a left side view of the lift of the present invention;
FIG. 5 is a top view of the lift device of the present invention;
FIG. 6 is a schematic view of the installation of the lifting device and the sealed chamber of the present invention;
FIG. 7 is a view showing a state of use between the lifting device and the sealing chamber according to the present invention.
Detailed Description
As shown in fig. 1 to 5, the lifting device of the utility model comprises a driving mechanism, a transmission mechanism, three chamber sealing units 1, three adjusting gaskets 2, a sealing unit supporting plate 3, two limit switches 4, a mounting seat 5 with a positioning pin 501 on the top, a lead screw and sealing unit supporting plate connecting piece 6 and a position sensor 9, wherein the driving mechanism adopts a motor 10, the transmission mechanism adopts a ball screw pair, the ball screw pair comprises a lead screw 7 arranged along the vertical direction and a lead screw nut 71 arranged outside the lead screw 7 and matched with the lead screw 7, the upper end of the lead screw 7 passes through the lead screw and sealing unit supporting plate connecting piece 6, the upper end and the lower end of the lead screw 7 are supported on the front side surface of the mounting seat 5 through a bearing 72, the lower end of the lead screw 7 is fixedly connected with an output shaft of the motor 10 through a coupler, two guide rails 8 parallel to the axis of the lead screw 7 are fixed on the front side surface of the mounting seat 5 at intervals, two guide rails 8 are positioned at the left side and the right side of a screw 7, each guide rail 8 is connected with a guide rail sliding block 81 in a sliding way, the front side surfaces of the two guide rail sliding blocks 81 are fixedly connected with the rear side surface of a connecting piece 6 of a screw and a sealing unit supporting plate, a screw nut 71 is fixedly connected with the middle part of the rear side surface of the connecting piece 6 of the screw and the sealing unit supporting plate, the sealing unit supporting plate 3 is fixed at the front side surface of the connecting piece 6 of the screw and the sealing unit supporting plate by screws, a plurality of chamber sealing units 1 are fixed on the sealing unit supporting plate 3 at intervals, an adjusting gasket 2 is arranged at the bottom of the chamber sealing unit 1, the height difference between the chamber sealing units 1 is leveled by a plurality of adjusting gaskets 2, two limit switches 4 are arranged at the side surface of the connecting piece 6 of the screw and the sealing unit and are used for controlling the upper and lower limits of the lifting action of the sealing unit, a position sensor 9 is arranged on a mounting base 5 and positioned at the rear side of the guide rail sliding blocks 81, the position sensor 9 is a lifting position detection mechanism for feeding back a position signal of the lifting device to the motion controller, and the motion controller is used for controlling the rotation of the motor.
The sealing unit supporting plate 3 is of a bent plate-shaped structure, the two end parts and the bent parts of the sealing unit supporting plate are respectively provided with a bayonet 31, and the three cavity sealing units 1 are respectively clamped in the bayonets and locked and fixed through double nuts. The lead screw and sealing unit supporting plate connecting piece 6 is of a stepped plate-shaped structure, lead screw penetrating holes 61 are formed in the lead screw and sealing unit supporting plate connecting piece 6, and the lead screw penetrating holes 61 are in clearance fit with the lead screw. The guide rail 8 is slidably engaged with the guide rail slider 81.
In the lifting device, the limit switch 4 can adopt a photoelectric limit switch or a mechanical limit switch; the position sensor 9 adopts a grating ruler or a magnetic grating ruler or a pull wire sensor; the motor 10 is a servo motor or a stepping motor, and when the servo motor is adopted, a rotary encoder is installed on an output shaft of the servo motor.
Referring to fig. 2 and 6, in the embodiment, the mounting base 5 is used as a base body and is fixed, the mounting base 5 is provided with a mounting hole 502 and a positioning hole, a positioning pin 501 is arranged in the positioning hole in a penetrating manner, the height difference between the sealing units of the chamber is leveled by the adjusting gasket 2, the position sensor 9 is fixed on the connecting piece 6 of the screw rod and the supporting plate of the sealing unit, when the upper computer sends a command to the motion controller of the lifting device, the motion controller controls the motor 10 to rotate, drives the screw rod 7 to rotate, further drives the screw rod nut 71 to move on the screw rod 7, because the lead screw and sealing unit supporting plate connecting piece 6 is fixed on the lead screw nut 71, the sealing unit supporting plate 3 is fixedly connected with the lead screw and sealing unit supporting plate connecting piece 6 through screws, the chamber sealing unit 1 is fixed on the sealing unit supporting plate 3, thereby finally converting the rotational movement of the motor 10 into the lifting movement of the chamber sealing unit 1. The limit switch 4 controls the upper limit and the lower limit of the lifting action of the chamber sealing unit 1, and the position sensor 9 is a lifting position detection mechanism and is matched with a motion controller, so that the closed-loop control of the position of the whole device is realized.
Referring to fig. 6 and 7, the lifting device of the present invention is accurately installed at the bottom of the sealed chamber 100 through the installation base 5 and the positioning pin 501 (the bottom of the sealed chamber 100 is provided with a positioning hole 1001 corresponding to the positioning pin 501 and an installation hole 1002 corresponding to the installation hole 502 on the installation base). The three chamber sealing units 1 are fastened with the bottom holes 1003 of the sealing chamber 100 through the split type top mounting flange 106, and the chamber sealing units 1 and the sealing chamber 100 form a complete sealing chamber.
The lifting device has the following beneficial effects:
firstly, a driving mechanism motor is in transmission connection with a plurality of chamber sealing units through a transmission mechanism, the transmission mechanism and the chamber sealing units are connected with a sealing unit supporting plate connecting piece and a sealing unit supporting plate through a lead screw, relevant parts such as excessive power elements and closed-loop control are not introduced, synchronous control is easy, and accurate control of lifting positions of the parts in the chamber is achieved.
Secondly, the occupied space is small, and the narrow part of the bottom space of the sealed cavity is also applicable.
Thirdly, the coordination control of the lifting height and the lifting action of a plurality of components in the chamber can be realized by replacing the sealing unit and the supporting plate of the chamber.
Fourthly, the flatness of the three sealing units can be quickly adjusted by adding adjusting gaskets with different thicknesses at the bottoms of the sealing units, and the structure is simple.
Fifthly, when one of the cavity sealing units or other parts are damaged, the cavity sealing units can be independently replaced, and the device is strong in universality and convenient to maintain.
The above-mentioned embodiments are merely illustrative of the preferred embodiments of the present invention, and do not limit the scope of the present invention, and various modifications and improvements of the technical solution of the present invention by those skilled in the art should fall within the protection scope defined by the claims of the present invention without departing from the spirit of the present invention.
Claims (10)
1. The utility model provides a lifting device, includes actuating mechanism, the last motion control ware that is connected with external host computer of actuating mechanism, its characterized in that, still include with drive mechanism that actuating mechanism connects and with a plurality of chamber seal unit (1) that drive mechanism connects, the host computer passes through motion control ware control the actuating mechanism drive mechanism is rotatory, drive mechanism becomes rotary motion the elevating movement of chamber seal unit (1).
2. The lifting device according to claim 1, characterized in that the transmission mechanism is a ball screw pair, a plurality of chamber sealing units (1) are fixed on the sealing unit supporting plate (3) at intervals, and the ball screw pair is connected with the sealing unit supporting plate (3) through a screw and sealing unit supporting plate connecting piece (6).
3. The lifting device according to claim 2, further comprising a mounting seat (5), wherein the ball screw pair comprises a screw (7) arranged in the vertical direction and a screw nut (71) arranged outside the screw (7) and matched with the screw, the upper end of the screw (7) penetrates through the rear two ends of the screw and sealing unit supporting plate connecting piece (6) and is supported on the front side surface of the mounting seat (5) through a bearing, the lower end of the screw nut (71) is fixedly connected with the driving mechanism, and the screw nut (71) is fixed in the rear middle of the screw and sealing unit supporting plate connecting piece (6).
4. The lifting device according to claim 3, characterized in that two guide rails (8) parallel to the axis of the screw (7) are fixed on the mounting base (5) at intervals, the two guide rails (8) are located on two sides of the screw (7), each guide rail (8) is connected with a guide rail sliding block (81) in a sliding manner, and the two guide rail sliding blocks (81) are fixedly connected with the screw and the sealing unit supporting plate connecting piece (6).
5. The lifting device as recited in claim 4, characterized in that the screw and seal unit pallet connection piece (6) is of a stepped plate-like structure and is provided with a screw through hole (61), and the screw (7) is in clearance fit with the screw through hole (61).
6. The lifting device according to any one of claims 3 to 5, characterized in that the side of the screw-to-sealing unit pallet connection (6) is provided with a limit switch (4) for controlling the upper and lower limits of the lifting action of the plurality of chamber sealing units (1).
7. A lifting device as claimed in claim 6, characterized in that the mounting (5) is fitted on one side with a position sensor (9) for feeding back a position signal of the lifting device to the motion controller.
8. Lifting device according to claim 7, characterised in that a sealed chamber (100) is connected above the mounting seat (5).
9. The lifting device according to claim 8, characterized in that the limit switch (4) is an electro-optical limit switch or a mechanical limit switch, and the position sensor (9) is a grating ruler or a magnetic grating ruler.
10. The lifting device according to claim 9, characterized in that the driving mechanism is a motor (10), the motor (10) is a servo motor or a stepping motor, and when the motor (10) is a servo motor, a rotary encoder is mounted on an output shaft thereof.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122868305.2U CN216478738U (en) | 2021-11-22 | 2021-11-22 | Lifting device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122868305.2U CN216478738U (en) | 2021-11-22 | 2021-11-22 | Lifting device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN216478738U true CN216478738U (en) | 2022-05-10 |
Family
ID=81399479
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202122868305.2U Active CN216478738U (en) | 2021-11-22 | 2021-11-22 | Lifting device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN216478738U (en) |
-
2021
- 2021-11-22 CN CN202122868305.2U patent/CN216478738U/en active Active
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