CN216437543U - Air inlet structure under plasma - Google Patents
Air inlet structure under plasma Download PDFInfo
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- CN216437543U CN216437543U CN202122954556.2U CN202122954556U CN216437543U CN 216437543 U CN216437543 U CN 216437543U CN 202122954556 U CN202122954556 U CN 202122954556U CN 216437543 U CN216437543 U CN 216437543U
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- reaction cylinder
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- connecting seat
- cylinder
- air inlet
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Abstract
The utility model relates to a gas inlet structure under plasma, including compression waveguide and reaction cylinder, the compression waveguide guide pin bushing dress is in the outside of reaction cylinder, the water-cooling ring is installed respectively to the top and the bottom that compression waveguide is connected with the reaction cylinder, the closing plate is installed to the bottom flange face top side of reaction cylinder, the connecting seat is installed to the bottom flange face bottom side of reaction cylinder, the water-cooling chamber has been seted up to the inside of connecting seat, the intercommunication is installed to one side of connecting seat the intake pipe of reaction chamber in the reaction cylinder, the axial lead department of connecting seat sets up the through-hole that is linked together with the inner chamber of reaction cylinder. The utility model discloses a mode of admitting air down makes to have corrosive gas to keep away from the plasma excitation region to the reaction chamber, reduces the corruption of reaction gas to whole reaction chamber.
Description
Technical Field
The utility model relates to a microwave plasma technical field especially relates to an inlet structure under plasma.
Background
The plasma is a good electric conductor, and the plasma can be captured, moved and accelerated by utilizing a magnetic field which is skillfully designed. The vortex gas in the plasma forms high-temperature plasma flame through the discharge tube in the compression waveguide, and new corrosive gas may be generated at the position of the plasma excitation area at the lower part in the reaction cavity, so that the whole reaction cavity is corroded to a certain extent.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide an air inlet structure under plasma to solve the problem that meets among the above-mentioned background art.
In order to achieve the above purpose, the technical scheme of the utility model is as follows:
the utility model provides an air inlet structure under plasma, includes compression waveguide and reaction cylinder, the compression waveguide guide pin bushing dress is in the outside of reaction cylinder, the water-cooling ring is installed respectively to the top and the bottom that compression waveguide is connected with the reaction cylinder, the connecting seat is installed to the bottom of reaction cylinder, the water-cooling chamber has been seted up to the inside of connecting seat, the intake pipe of intercommunication reaction chamber in the reaction cylinder is installed to one side of connecting seat, the axial lead department of connecting seat sets up the through-hole that is linked together with the inner chamber of reaction cylinder.
In the scheme, the sealing plate is arranged on the outer side of the bottom of the reaction cylinder.
Furthermore, the top of the sealing plate and the top of the connecting seat are respectively provided with a sealing groove, and a rubber ring which is in contact with the flange surface at the bottom of the reaction cylinder is arranged in the sealing groove.
In the above scheme, the reaction cylinder outside is located and is installed the forced air cooling pipe on the water-cooling ring at top, the forced air cooling pipe is equipped with two and is used for air inlet and air-out respectively.
In the scheme, the inner diameter of the central through hole of the connecting seat is provided with an air inlet pipeline communicated with the inner cavity of the reaction cylinder, and the opening of the air inlet pipeline is upwards communicated with the inner cavity of the reaction cylinder.
Furthermore, the outer side of the top of the connecting seat is provided with an air outlet communicated with the inner cavity of the reaction cylinder.
Furthermore, a water cooling cavity is formed in the connecting seat.
Furthermore, the air inlet pipeline is formed by coaxially and fixedly arranging two layers of cylinders with different diameters, and the bottom of the air inlet pipeline is communicated with the air inlet pipe.
Compared with the prior art, the beneficial effects of the utility model are that: the gas inlet pipe is arranged at the lower part of the plasma, and the gas corrosive to the reaction cavity is far away from the plasma excitation area in a downward gas inlet mode, so that the corrosion of the reaction gas to the whole reaction cavity is reduced. Secondly, through set up the water-cooling ring in compression waveguide and reaction cylinder junction, the water-cooling ring is used for cooling the upper and lower two sides of compression waveguide, has seted up the water-cooling chamber in the inside of connecting seat, and the water-cooling chamber encircles the through-hole outside in the middle of the connecting seat, cools down the through-hole inner wall. The influence of plasma flame on the temperature of the reaction cavity wall is reduced through the water-cooling ring and the water-cooling cavity, and the corrosion of reaction gas to the whole reaction cavity is reduced.
In addition, an air inlet pipeline communicated with the inner cavity of the reaction cylinder is arranged on the inner diameter of the central through hole of the connecting seat, the air inlet pipeline can be coaxially arranged through two layers of thin-wall cylinders with different diameters, the air inlet pipeline is naturally formed between the outer wall of the cylinder at the inner layer and the inner wall of the cylinder at the outer layer, and the bottom of the air inlet pipeline is communicated with the air inlet pipe. Gas upwards gets into the reaction chamber along the admission line in, plasma flame reacts at the center of reaction section of thick bamboo and connecting seat, and the corrosive gas that produces like this can be by the separation of the thin wall drum of inlayer, avoids gaseous and reaction chamber direct contact, reduces the corruption of reactive gas to whole reaction chamber.
Drawings
The disclosure of the present invention is explained with reference to the drawings. It is to be understood that the drawings are designed solely for the purposes of illustration and not as a definition of the limits of the invention. In the drawings, like reference numerals are used to refer to like parts. Wherein:
fig. 1 is a schematic perspective view of an embodiment 1 of the present invention;
fig. 2 is a schematic front view of the structure of the present invention in embodiment 1;
FIG. 3 is a schematic view of the cross-sectional structure A-A of FIG. 2;
fig. 4 is a schematic top view of embodiment 1 of the present invention.
Fig. 5 is a schematic perspective view of the present invention in embodiment 2;
fig. 6 is a schematic front view of the structure of the present invention in embodiment 2;
FIG. 7 is a schematic cross-sectional view taken along line B-B of FIG. 6;
fig. 8 is an enlarged view of the structure of the portion C in fig. 7.
The reference numbers in the figures: 1-a compression waveguide; 2-a reaction cylinder; 3-sealing the plate; 4-rubber ring; 5-a connecting seat; 6-air cooling pipe; 7-water cooling ring; 8-a water cooling cavity; 9-an air inlet pipe; 10-an air intake duct; 11-air outlet.
Detailed Description
In order to make the technical means, creation features, achievement purposes and functions of the present invention easy to understand, the present invention will now be described in further detail with reference to the accompanying drawings. These drawings are simplified schematic drawings and illustrate the basic structure of the invention only in a schematic way, and therefore they show only the relevant components of the invention.
According to the technical scheme of the utility model, under the essential spirit of the utility model, general technical personnel in this field can propose the multiple structural style and the realization that can replace each other. Therefore, the following detailed description and the accompanying drawings are merely illustrative of the technical solutions of the present invention, and should not be considered as limiting or restricting the technical solutions of the present invention in their entirety or in any other way.
The technical solution of the present invention will be further described in detail with reference to the accompanying drawings and embodiments.
The sealing plate 3 is arranged on the outer side of the flange face at the bottom of the reaction cylinder 2, and the connecting seat 5 is arranged on the bottom side of the flange face at the bottom of the reaction cylinder 2. The top of closing plate 3 and the top of connecting seat 5 have seted up the seal groove respectively, are equipped with the rubber circle 4 that contacts with the bottom flange face of reaction cylinder 2 in the seal groove. The contact surface of the rubber ring 4 and the contact surface of the rubber ring is sealed, so that gas leakage is prevented.
The axial lead of the connecting seat 5 is provided with a through hole communicated with the inner cavity of the reaction cylinder 2, the inside of the connecting seat 5 is provided with a water cooling cavity 8, and the water cooling cavity 8 is used for being connected with cold water through an additionally arranged water pipe. The water-cooling cavity 8 is arranged along the reaction cavity of the reaction barrel 2, and the water-cooling cavity 8 surrounds the outer side of the through hole in the middle of the connecting seat 5 to cool the inner wall of the through hole. The intake pipe 9 of the reaction chamber in the intercommunication reaction section of thick bamboo 2 is installed to one side of connecting seat 5, to whole plasma, adopts the mode of admitting air down, makes to have corrosive gas to the reaction chamber and keeps away from the plasma excitation region, reduces the corruption of reaction gas to whole reaction chamber.
As a preferred scheme, the water cooling ring 7 positioned at the top outside the reaction cylinder 2 is provided with an air cooling pipe 6, and the air cooling pipe 6 is provided with two pipes which are respectively used for air inlet and air outlet and used for air cooling the top of the reaction cavity of the reaction cylinder 2.
In the scheme, the gas inlet pipe 9 is arranged at the lower part of the plasma, and the gas with corrosiveness on the reaction cavity is far away from a plasma excitation area by adopting a downward gas inlet mode, so that the corrosion of the reaction gas on the whole reaction cavity is reduced. The water cooling ring 7 is arranged at the joint of the compression waveguide 1 and the reaction cylinder 2, and the water cooling ring 7 is used for cooling the upper surface and the lower surface of the compression waveguide 1. Connecting seat 5 is installed to the bottom flange face bottom side of reaction cylinder 2, and the through-hole that is linked together with the inner chamber of reaction cylinder 2 has been seted up to the axial lead department of connecting seat 5, and water-cooling chamber 8 has been seted up to the inside of connecting seat 5, and water-cooling chamber 8 encircles in the through-hole outside in the middle of connecting seat 5, cools down the through-hole inner wall, prevents that sealing rubber ring high temperature from appearing the carbonization. The influence of plasma flame on the temperature of the reaction cavity wall is reduced through the water-cooling ring 7 and the water-cooling cavity 8, and the corrosion of reaction gas to the whole reaction cavity is reduced.
Example 2, please refer to fig. 5 to 8, which is different from example 1 in that the reaction cylinder 2 is a cylinder without a flange, and a through hole in the middle of the reaction cylinder 2 is a reaction chamber. An air inlet pipeline 10 communicated with the inner cavity of the reaction cylinder 2 is arranged on the inner diameter of the central through hole of the connecting seat 5, the opening of the air inlet pipeline 10 is upwards communicated with the inner cavity of the reaction cylinder 2, and compressed air is introduced into an air inlet pipe 9 to cool the through hole at the axial lead of the connecting seat 5, which is communicated with the inner cavity of the reaction cylinder 2.
The air inlet pipeline 10 can be coaxially arranged through two layers of thin-wall cylinders with different diameters, the air inlet pipeline 10 is naturally formed between the outer wall of the cylinder at the inner layer and the inner wall of the cylinder at the outer layer, and the bottom of the air inlet pipeline 10 is communicated with the air inlet pipe 9. The lower ends of the two layers of thin-walled cylinders are sealed, and the upper ends of the two layers of thin-walled cylinders extend to the lower end surface of the compression waveguide 1. The process gas enters from the gas inlet pipe 9 of the lower gas inlet structure, the gas enters the reaction cavity upwards along the gas inlet pipeline 10, the plasma flame reacts at the centers of the reaction cylinder 2 and the connecting seat 5, so that the generated corrosive gas can be blocked by the thin-wall cylinder at the innermost layer, the gas is prevented from being in direct contact with the reaction cavity, and the corrosion of the reactive gas to the whole reaction cavity is reduced.
As a preferred scheme, the outer side of the top of the connecting seat 5 is provided with an air outlet 11 communicated with the inner cavity of the reaction cylinder 2, and the air outlet is used for discharging heat in the reaction cavity in the reaction cylinder 2 and reducing the temperature of the reaction cavity.
The above-mentioned embodiments further explain in detail the objects, technical solutions and advantages of the present invention, and it should be understood that the above-mentioned embodiments are only the embodiments of the present invention, and are not intended to limit the scope of the present invention, any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention should be included within the scope of the present invention.
Claims (8)
1. A structure of air admission under plasma, characterized by: including compression waveguide (1) and reaction cylinder (2), compression waveguide (1) suit is in the outside of reaction cylinder (2), water-cooling ring (7) are installed respectively to the top and the bottom that compression waveguide (1) are connected with reaction cylinder (2), connecting seat (5) are installed to the bottom of reaction cylinder (2), the intercommunication is installed to one side of connecting seat (5) intake pipe (9) of the reaction chamber in reaction cylinder (2), the axial lead department of connecting seat (5) sets up the through-hole that is linked together with the inner chamber of reaction cylinder (2).
2. A plasma lower inlet structure, according to claim 1, wherein: and a sealing plate (3) is arranged on the outer side of the bottom of the reaction cylinder (2).
3. A plasma lower inlet structure according to claim 2, wherein: and sealing grooves are respectively formed in the top of the sealing plate (3) and the top of the connecting seat (5), and rubber rings (4) which are in contact with the flange face at the bottom of the reaction cylinder (2) are arranged in the sealing grooves.
4. A plasma lower inlet structure, according to claim 1, wherein: an air cooling pipe (6) is arranged on a water cooling ring (7) on the top of the outer side of the reaction cylinder (2), and the two air cooling pipes (6) are respectively used for air inlet and air outlet.
5. A plasma lower inlet structure, according to claim 1, wherein: an air inlet pipeline (10) communicated with the inner cavity of the reaction cylinder (2) is arranged on the inner diameter of the central through hole of the connecting seat (5), and the opening of the air inlet pipeline (10) is upwards communicated with the inner cavity of the reaction cylinder (2).
6. A plasma lower inlet structure, according to claim 5, wherein: and the outer side of the top of the connecting seat (5) is provided with an air outlet (11) communicated with the inner cavity of the reaction cylinder (2).
7. A plasma lower inlet structure, according to claim 5, wherein: and a water cooling cavity (8) is formed in the connecting seat (5).
8. A plasma lower inlet structure, according to claim 5, wherein: the air inlet pipeline (10) is formed by coaxially and fixedly arranging two layers of cylinders with different diameters, and the bottom of the air inlet pipeline (10) is communicated with the air inlet pipe (9).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122954556.2U CN216437543U (en) | 2021-11-29 | 2021-11-29 | Air inlet structure under plasma |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122954556.2U CN216437543U (en) | 2021-11-29 | 2021-11-29 | Air inlet structure under plasma |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN216437543U true CN216437543U (en) | 2022-05-03 |
Family
ID=81341018
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202122954556.2U Active CN216437543U (en) | 2021-11-29 | 2021-11-29 | Air inlet structure under plasma |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN216437543U (en) |
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2021
- 2021-11-29 CN CN202122954556.2U patent/CN216437543U/en active Active
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