CN216411188U - Device for continuously detecting MO source concentration through multiple channels - Google Patents
Device for continuously detecting MO source concentration through multiple channels Download PDFInfo
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- CN216411188U CN216411188U CN202122178318.7U CN202122178318U CN216411188U CN 216411188 U CN216411188 U CN 216411188U CN 202122178318 U CN202122178318 U CN 202122178318U CN 216411188 U CN216411188 U CN 216411188U
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- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims abstract description 48
- 238000012360 testing method Methods 0.000 claims abstract description 40
- 229910052757 nitrogen Inorganic materials 0.000 claims abstract description 24
- 238000010521 absorption reaction Methods 0.000 claims abstract description 20
- 239000007789 gas Substances 0.000 claims description 13
- 238000001514 detection method Methods 0.000 claims description 9
- 238000000034 method Methods 0.000 claims description 4
- 229910000831 Steel Inorganic materials 0.000 description 7
- 239000010959 steel Substances 0.000 description 7
- 238000003860 storage Methods 0.000 description 4
- 239000007788 liquid Substances 0.000 description 3
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 description 3
- 239000012159 carrier gas Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000002243 precursor Substances 0.000 description 2
- 238000000746 purification Methods 0.000 description 2
- 229920006395 saturated elastomer Polymers 0.000 description 2
- 238000005303 weighing Methods 0.000 description 2
- 230000032683 aging Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 238000000407 epitaxy Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 150000002894 organic compounds Chemical class 0.000 description 1
- 150000002902 organometallic compounds Chemical class 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
Images
Abstract
The utility model aims to provide a device for continuously detecting MO source concentration by multiple channels, which comprises at least four source bottles, wherein all the source bottles are connected with a nitrogen buffer tank through inlet pipelines; all the source bottles are connected with a test pipeline through a test valve, the tail end of the test pipeline is connected with a concentration tester, and the concentration tester is connected with a tail end pipeline; all the source bottles are connected with a bypass pipeline through a discharge valve, and the bypass pipeline is connected with a buffer tank; the tail end pipeline is connected with a first absorption tank and a second absorption tank, and the buffer tank is also connected with the tail end pipeline; all the source bottles are connected with the nitrogen buffer tank through a second inlet pipeline, and the second inlet pipeline is connected with a first flowmeter and a pressure controller which are connected in parallel. The aim of continuous test is achieved by adding a bypass pipeline and a test pipeline which are separated.
Description
Technical Field
The utility model relates to the field of MO sources, in particular to a device for continuously detecting the concentration of an MO source through multiple channels.
Background
The MO source (metallic source) is in a wide variety, more than 70 MO sources have been used in research and production, the concept of MO source is beyond the range of metal organic compounds, and the MO source should be: since metals or elemental organic compounds used as basic materials in MOCVD epitaxy are collectively called MO sources, MO sources are commonly referred to as "precursors of MOCVD (Precursor)" in foreign literature.
The prior art patent CN103924214A discloses a continuous supply system for a vapor delivery MO source, MO source gas is filled into an MO source steel cylinder by arranging an MO source storage tank, both devices are provided with liquid level probes, the MO source storage tank is heated, the MO source steel cylinder is constant in temperature, the temperature of the MO source storage tank is only higher than that of a low-temperature bubbler, and accurate temperature control is not needed; when the liquid level of the MO source steel cylinder is high, the MO source is directly output from the MO source steel cylinder; when the MO source steel cylinder is at a low liquid level, the MO source storage tank is adopted to convey the MO source to the MO source steel cylinder, and the MO source is output from the MO source steel cylinder and can be continuously used. However, when the MO source is applied to a client MOCVD machine for use at present, accurate and stable output of concentration is a basic requirement, so that the stable output condition of the concentration of the source is required to be detected in the process of optimizing the process and quality in the production of the MO source, and the MO source has a service period even as long as several months, and has aging, solid source dead weight compression, hardening and other conditions in the middle, which causes unstable output concentration and can not meet the customer requirements. It is therefore desirable to provide a device for multi-channel continuous detection of MO source concentration.
SUMMERY OF THE UTILITY MODEL
In order to solve the above problems, the present invention provides a continuous multi-channel MO source concentration detection device, which achieves the purpose of continuous testing by adding a bypass pipeline and a test pipeline separately, and solves the problems in the background art.
The utility model aims to provide a device for continuously detecting MO source concentration by multiple channels, which comprises at least four source bottles, wherein all the source bottles are connected with a nitrogen buffer tank through inlet pipelines;
all the source bottles are connected with a test pipeline through a test valve, the tail end of the test pipeline is connected with a concentration tester, and the concentration tester is connected with a tail end pipeline;
all the source bottles are connected with a bypass pipeline through a discharge valve, and the bypass pipeline is connected with a buffer tank;
the tail end pipeline is connected with a first absorption tank and a second absorption tank, and the buffer tank is also connected with the tail end pipeline;
all the source bottles are connected with the nitrogen buffer tank through a second inlet pipeline, and the second inlet pipeline is connected with a first flowmeter and a pressure controller which are connected in parallel.
The further improvement lies in that: and the gas inlet end of the nitrogen buffer tank is connected with a gas purifier.
The further improvement lies in that: an electronic scale is arranged at the bottom of the first absorption tank.
The further improvement lies in that: and the tail ends of the first flowmeter and the pressure controller are connected with the test pipeline through a differential pressure meter.
The further improvement lies in that: the tail ends of the first flowmeter and the pressure controller are connected with a first vacuum pump through a first valve and a second nitrogen buffer tank through a second valve; the tail end of the tail end pipeline is connected with a second vacuum pump.
The further improvement lies in that: each source bottle is connected with a second flow meter, and the second flow meter is connected with a tail end pipeline and a bypass pipeline which are connected in parallel.
The further improvement lies in that: a third valve is arranged at one end of the source bottle, which is connected with the inlet pipeline; and a valve IV is arranged at one end of the source bottle, which is connected with the inlet pipeline II.
The further improvement lies in that: the buffer tank is connected with a vacuum pressure gauge.
The utility model has the beneficial effects that: the nitrogen buffer tank is used as system carrier gas, the gas purifier is connected to the nitrogen buffer tank for purification before the nitrogen buffer tank enters the system, and nitrogen can enter the source bottle through the first inlet pipeline or can be regulated in pressure at the rear end through the second inlet pipeline through the pressure controller; the source bottle is connected with the buffer tank through a bypass pipeline, nitrogen is directly communicated into the buffer tank, and tail gas is absorbed by the absorption tank and is discharged through the vacuum pump II; the source bottle is connected with a concentration tester through a test pipeline to test the concentration of the MO source, and the tested MO source enters a buffer tank or an absorption tank; the MO source of one source bottle can be controlled to carry out concentration test by opening and closing the test valve and the discharge valve, and the MO sources of the other source bottles are introduced into the buffer tank through the bypass pipeline, so that the concentration test of one source bottle can be continuously carried out; an electronic scale is arranged at the bottom of the first absorption tank for weighing in real time to remind that the first absorption tank is saturated and needs to be replaced in time; arranging a first vacuum pump for air intake and a second vacuum pump for tail gas exhaust; closing the valve III, opening the valve IV to enable the inlet pipeline II to work, opening the valve III, closing the valve IV to enable the inlet pipeline I to work; the buffer tank is connected with a vacuum pressure gauge for detecting pressure.
Drawings
FIG. 1 is a schematic of the present invention.
Fig. 2 is an enlarged schematic view of fig. 1 at one of the source bottles.
Wherein: 1-source bottle, 2-inlet pipeline I, 3-nitrogen buffer tank, 4-test valve, 5-test pipeline, 6-concentration tester, 7-discharge valve, 8-bypass pipeline, 9-buffer tank, 10-first absorption tank, 11-second absorption tank, 12-inlet pipeline II, 13-flowmeter I, 14-pressure controller, 15-gas purifier, 16-electronic scale, 17-differential pressure gauge, 18-valve I, 19-valve II, 20-vacuum pump I, 21-vacuum pump II, 22-flowmeter II, 23-valve III, 24-valve IV, 25-vacuum pressure gauge, 26-discharge valve, 27-PLC panel.
Detailed Description
In order to further understand the present invention, the following detailed description will be made with reference to the following examples, which are only used for explaining the present invention and are not to be construed as limiting the scope of the present invention.
As shown in fig. 1 and 2, the present embodiment provides a continuous multi-channel apparatus for detecting MO source concentration, which includes four source bottles 1, wherein all the source bottles 1 are connected to a nitrogen buffer tank 3 through a first inlet pipe 2; all the source bottles 1 are connected with the nitrogen buffer tank 3 through a second inlet pipeline 12, and the second inlet pipeline 12 is connected with a first flowmeter 13 and a pressure controller 14 which are connected in parallel; the gas inlet end of the nitrogen buffer tank 3 is connected with a gas purifier 15; thus, the nitrogen buffer tank 3 is used as a system carrier gas, the gas purifier 15 is connected to the system for purification before entering the system, nitrogen can enter the source bottle through the first inlet pipeline 2, and the pressure at the rear end can be adjusted by the pressure controller 14 through the second inlet pipeline 12.
All the source bottles 1 are connected with a test pipeline 5 through a test valve 4, the tail end of the test pipeline 5 is connected with a concentration tester 6, and the concentration tester 6 is connected with a tail end pipeline 7; all the source bottles 1 are connected with a bypass pipeline 8 through a discharge valve 26, and the bypass pipeline 8 is connected with a buffer tank 9;
the tail end pipeline 7 is connected with a first absorption tank 10 and a second absorption tank 11, and the buffer tank 9 is also connected with the tail end pipeline 7; the tail end of the tail end pipeline 7 is connected with a second vacuum pump 21; the source bottle 1 is connected with the buffer tank 9 through a bypass pipeline 8, and an MO source is directly communicated into the buffer tank 9, and tail gas is absorbed by the absorption tank and is discharged through a second vacuum pump 21; the source bottle 1 is connected with a concentration tester 6 through a test pipeline 5 to test the concentration of the MO source, and the tested MO source enters a buffer tank 9 or an absorption tank; therefore, the concentration test can be carried out on one of the source bottles 1 by controlling one of the source bottles 1 to carry out the concentration test by opening and closing the test valve 4 and the discharge valve 26, and the concentration test can be continuously carried out on one of the source bottles 1 by leading the other source bottles 1 into the buffer tank 9 through the bypass pipeline 8, so that the concentration test can be continuously carried out on a plurality of source bottles.
The bottom of the first absorption tank 10 is provided with an electronic scale 16 for real-time weighing to remind that the first absorption tank is saturated and needs to be replaced in time. The ends of the first flowmeter 13 and the pressure controller 14 are connected to the test line 5 through a differential pressure gauge 17. So that the nitrogen gas of the nitrogen buffer tank 3 can directly enter the test line 5.
The tail ends of the first flowmeter 13 and the pressure controller 14 are connected with a first vacuum pump 20 through a first valve 18 and the nitrogen buffer tank 3 through a second valve 19; each source bottle 1 is connected with a second flow meter 22, and the second flow meter 22 is connected with the end pipeline 7 and the bypass pipeline 8 which are connected in parallel. Thus, air is supplied by the first vacuum pump 20, and the second flow meter 22 is arranged to monitor the outlet flow of each source bottle.
A third valve 23 is arranged at one end of the source bottle 1 connected with the first inlet pipeline 2; and a valve IV 24 is arranged at one end of the source bottle 1 connected with the inlet pipeline II 12. Thus, the third valve 23 is closed, the fourth valve 24 is opened, so that the second inlet pipeline 12 works, and the third valve 23 is opened, so that the fourth valve 24 is closed, so that the first inlet pipeline 2 works; the buffer tank 8 is connected with a vacuum pressure gauge 25 for detecting pressure.
This implementation is still through setting up PLC panel 27 and control all valves, flowmeter, pressure controller, vacuum pump, concentration tester.
In actual use: the MO source is positioned in the source bottle 1, enters the source bottle 1 through the nitrogen buffer tank 3 through the first inlet pipeline 2 or the second inlet pipeline 12, the second inlet pipeline 12 monitors the flow through the first flowmeter 13 in the air inlet process, and the pressure at the rear end is adjusted through the pressure controller 14; when the concentration of the MO source in one of the source bottles 1 needs to be tested, the test valve 4 of the source bottle 1 is opened, the discharge valve 7 of the source bottle 1 is closed, the MO source enters the test pipeline 5, then the concentration is tested through the concentration tester 6, the test valves 4 of the other three source bottles 1 are closed while the test is carried out, the discharge valves 7 of the other three source bottles 1 are opened, the MO source enters the buffer tank 9, and the test time can be maintained at 0.5H or 1H or 1.5H, so that the concentration stability of the MO source in a certain time period can be fully embodied by carrying out continuous single-bottle test for a long time.
Claims (8)
1. A device for continuously detecting MO source concentration by multiple channels comprises at least four source bottles (1), wherein all the source bottles (1) are connected with a nitrogen buffer tank (3) through a first inlet pipeline (2);
the method is characterized in that: all the source bottles (1) are connected with a test pipeline (5) through a test valve (4), the tail end of the test pipeline (5) is connected with a concentration tester (6), and the concentration tester (6) is connected with a tail end pipeline (7);
all the source bottles (1) are connected with a bypass pipeline (8) through a discharge valve (26), and the bypass pipeline (8) is connected with a buffer tank (9);
the tail end pipeline (7) is connected with a first absorption tank (10) and a second absorption tank (11), and the buffer tank (9) is also connected with the tail end pipeline (7);
all the source bottles (1) are connected with the nitrogen buffer tank (3) through a second inlet pipeline (12), and the second inlet pipeline (12) is connected with a first flowmeter (13) and a pressure controller (14) which are connected in parallel.
2. The apparatus for continuous multi-channel detection of MO source concentration according to claim 1, wherein: and the gas inlet end of the nitrogen buffer tank (3) is connected with a gas purifier (15).
3. The apparatus for continuous multi-channel detection of MO source concentration according to claim 1, wherein: an electronic scale (16) is arranged at the bottom of the first absorption tank (10).
4. The apparatus for continuous multi-channel detection of MO source concentration according to claim 1, wherein: the tail ends of the first flowmeter (13) and the pressure controller (14) are connected with the test pipeline (5) through a differential pressure meter (17).
5. The apparatus for continuous multi-channel detection of MO source concentration according to claim 1, wherein: the tail ends of the flowmeter I (13) and the pressure controller (14) are connected with a vacuum pump I (20) through a valve I (18) and the nitrogen buffer tank (3) through a valve II (19); the tail end of the tail end pipeline (7) is connected with a second vacuum pump (21).
6. The apparatus for continuous multi-channel detection of MO source concentration according to claim 1, wherein: each source bottle (1) is connected with a second flowmeter (22), and the second flowmeter (22) is connected with a tail end pipeline (7) and a bypass pipeline (8) which are connected in parallel.
7. The apparatus for continuous multi-channel detection of MO source concentration according to claim 1, wherein: a third valve (23) is arranged at one end of the source bottle (1) connected with the first inlet pipeline (2); one end of the source bottle (1) connected with the second inlet pipeline (12) is provided with a fourth valve (24).
8. The apparatus for continuous multi-channel detection of MO source concentration according to claim 1, wherein: the buffer tank (9) is connected with a vacuum pressure gauge (25).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122178318.7U CN216411188U (en) | 2021-09-09 | 2021-09-09 | Device for continuously detecting MO source concentration through multiple channels |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122178318.7U CN216411188U (en) | 2021-09-09 | 2021-09-09 | Device for continuously detecting MO source concentration through multiple channels |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN216411188U true CN216411188U (en) | 2022-04-29 |
Family
ID=81293653
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202122178318.7U Active CN216411188U (en) | 2021-09-09 | 2021-09-09 | Device for continuously detecting MO source concentration through multiple channels |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN216411188U (en) |
-
2021
- 2021-09-09 CN CN202122178318.7U patent/CN216411188U/en active Active
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| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address |
Address after: No. 88 Baoshun Road, Economic and Technological Development Zone, Wuhu City, Anhui Province, 241000 Patentee after: Anhui Yagesheng Electronic New Materials Co.,Ltd. Address before: 241000 No.26 chizhushan Road, economic and Technological Development Zone, Wuhu City, Anhui Province Patentee before: ANHUI ARGOSUN NEW ELECRONIC MATERIALS Co.,Ltd. |
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| CP03 | Change of name, title or address |