CN216395819U - Washing tower, water mist capturing device and waste gas treatment system - Google Patents
Washing tower, water mist capturing device and waste gas treatment system Download PDFInfo
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- CN216395819U CN216395819U CN202121062765.XU CN202121062765U CN216395819U CN 216395819 U CN216395819 U CN 216395819U CN 202121062765 U CN202121062765 U CN 202121062765U CN 216395819 U CN216395819 U CN 216395819U
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Abstract
The utility model relates to a washing tower, a water mist catching device and a waste gas treatment system, wherein the washing tower comprises a tower body, the tower body is provided with an internal cavity, an inlet and an outlet which are communicated with the internal cavity, the washing tower is characterized in that a water retaining part and a plurality of water filtering parts are also arranged in the internal cavity and used for blocking water mist, the water retaining part and the water filtering parts are respectively stacked below the outlet, and the water filtering parts are used for adsorbing water in gas; this scrubbing tower, compact structure, reasonable in design not only can effectively intercept steam in the gas, reduce exhaust humidity to effectively avoid sample detection equipment to appear the problem of false alarm judgement, can increase the air lock moreover, the extension is gaseous when the reaction is detained in inside cavity, thereby can adjust liquid medicine concentration, reduce the liquid medicine quantity, reaches reduce cost's purpose.
Description
Technical Field
The utility model relates to the technical field of semiconductor manufacturing, in particular to a washing tower, a water mist capturing device and a waste gas treatment system.
Background
The MOCVD epitaxial process of III-V compound semiconductor generates waste gas, and a water washing type waste gas washing tower (or called a filter tower) is needed in the waste gas treatment process so as to remove the residual AsH in the waste gas3/PH3A process gas.
In the in-process of handling waste gas, washing formula scrubbing tower can the exclusive use, also can use in series (for example, including one-level washing formula scrubbing tower and with the second grade washing formula scrubbing tower of one-level washing formula scrubbing tower series connection), in the actual motion in-process, washing formula scrubbing tower is to tail gas (waste gas) treatment completion back discharge to reach standard, need carry out the sampling test to the gas that discharges usually, because the vapor content is high in the gas, humidity is big, lead to the easy phenomenon that appears the drop of water condensation when gas sampling test, can lead to the check out test set to appear the false alarm judgement, treat to solve urgently.
SUMMERY OF THE UTILITY MODEL
The utility model aims to solve the problems that the gas discharged by the existing washing type washing tower has high water vapor content and high humidity, and the phenomenon of water drop condensation is easy to occur during gas sampling detection, which can cause the detection equipment to generate false alarm judgment, and provides the washing tower which comprises a tower body, wherein the tower body is provided with an internal cavity, an inlet and an outlet which are communicated with the internal cavity,
still be provided with the water blocking part and a plurality of water filtering part that are used for blockking the water smoke in the inside cavity, just water blocking part and water filtering part stack respectively in the below of export, water filtering part is arranged in adsorbing the water in the gas. The washing tower is used for providing a relatively closed space for the washing process of waste gas through the internal cavity of the tower body structure; the water blocking part is arranged between the lower parts of the outlets, so that water or water mist can be effectively blocked and intercepted, the water or the water mist is effectively prevented from being discharged along the outlets, and the water or the water mist in the gas can be intercepted, and the exhaust humidity can be reduced; and through set up the drainage part in the below of export, can further adsorb the water in the gas at the in-process of gas crossing drainage part, thereby can further interception steam in the gas, can effectively reduce exhaust humidity, thereby can reduce sample check out test set's false alarm judgement, in addition, owing to set up water blocking part and a plurality of drainage parts, can increase the air resistance, can prolong the length of time that gas is detained the reaction in inside cavity, thereby can adjust liquid medicine concentration, reduce the liquid medicine quantity, reach reduce cost's purpose.
Preferably, a spraying device is arranged in the inner cavity, and the water retaining part and the water filtering part are respectively stacked between the spraying device and the outlet. In this scheme, set up spray set through inside cavity to the water sprays waste gas or produces water smoke, reaches the effect of washing waste gas.
Preferably, the water filtering part is disposed between the water blocking part and the outlet. Make gas pass water retaining unit and drainage component in proper order, discharge via the export at last, more be favorable to intercepting the steam in the gas, more be favorable to reducing exhaust humidity.
In order to solve the efficient installation and the change problem of water blocking part and drainage part, further, still include the screen panel, water blocking part and drainage part stack respectively in the screen panel to retrain as an organic whole through the screen panel. The screen panel can retrain water blocking part and drainage component as an organic whole promptly to whole installation and change, not only very convenience, the screen panel still has certain filtration and the effect of interception steam moreover, can further reduce exhaust humidity.
In order to enhance the water absorption effect, preferably, the mesh cover is made of cotton materials. So as to have good water absorption and water retention effects.
For the convenience of restricting the water retaining part and the water filtering part, preferably, the mesh enclosure is of a bag-shaped structure, a circle of rope is arranged at the bag opening, and the rope is used for tightening the bag opening. The water retaining part and the water filtering part can be arranged in the mesh enclosure, and the bag opening is tightened by using the rope at the bag opening, so that the mesh enclosure is very convenient.
To solve the problem of water blocking, it is preferable that the water blocking member has a plate-shaped structure and is configured with a plurality of meshes for ventilation. Through setting up the mesh for the manger plate can constitute mesh platelike structure, and the density of mesh can be according to actual demand and decide, both can effectively intercept water and water smoke, plays the effect of manger plate, makes gaseous passing the manger plate through the mesh that again can be smooth.
Preferably, the water retaining part is made of PP materials. Is more favorable for intercepting and catching the water mist.
Preferably, the water filtering part is of a cake-shaped structure, and/or the water filtering part is made of cotton materials respectively. The water filtering part with the cake-shaped structure is convenient to mount in the internal cavity and can transversely intercept air, so that the air only can transversely penetrate through the water filtering part, and the water filtering part made of cotton has a good water filtering effect, is more favorable for adsorbing water in the air and reduces the humidity of the air; in addition, a certain amount of AsH may be present in the gas3And/or pH3The water filter element also has a certain AsH when air passes through the water filter element made of cotton material3And/or pH3The waste gas reaction and treatment capacity, therefore, the water filtering component made of cotton can further improve the waste gas treatment capacity and reduce the liquid medicine loss.
Preferably, the water filtering part is made of biochemical cotton, foam cotton, activated carbon cotton or filter cotton. Wherein the filter cotton is synthetic fiber filter cotton, non-woven fabric filter cotton, glass fiber filter cotton or active carbon filter cotton.
In order to facilitate the installation of the water blocking part and the water filtering part, the inner cavity is further provided with a support frame for supporting the water blocking part.
An exhaust gas treatment system comprising the scrubber.
A water mist catching device comprises a shell, wherein the shell is provided with an inner cavity, an inlet and an outlet which are communicated with the inner cavity, a water retaining part and a plurality of water filtering parts are arranged in the inner cavity and used for blocking water mist, the water filtering parts are used for absorbing water in gas,
the inlet is configured with a connection for connecting a scrubber tower or a pipe. That is, in this scheme, water smoke trapping apparatus is an solitary equipment, when using, install in the exit of scrubbing tower can for just can discharge after passing this water smoke trapping apparatus from the scrubbing tower combustion gas, so that utilize inside water retaining part and water filtering part to reach the effect of manger plate, absorbing water, not only can effectively intercept steam, water smoke in the gas, reduce exhaust humidity, avoid sample detection equipment the problem that the false alarm judgement appears.
Preferably, the water retaining part is made of PP materials, is of a plate-shaped structure and is provided with a plurality of meshes for ventilation;
and/or the water filtering part is of a cake-shaped structure and is made of cotton materials.
Preferably, the connecting part is a flange.
An exhaust gas treatment system comprises a scrubber tower and a water mist capture device, and an inlet of the water mist capture device is communicated with an outlet of the scrubber tower. The water mist catching device can be matched with the existing washing tower for use, and the purposes of intercepting water vapor and water mist in gas and reducing exhaust humidity are achieved.
Compared with the prior art, the washing tower, the water mist capturing device and the waste gas treatment system provided by the utility model have the advantages that the structure is compact, the design is reasonable, the water vapor in the gas can be effectively intercepted, the exhaust humidity is reduced, the problem of false alarm judgment of sampling detection equipment is effectively avoided, the air resistance can be increased, the time for the gas to be detained and reacted in the internal cavity is prolonged, the concentration of the liquid medicine can be adjusted, the amount of the liquid medicine is reduced, and the purpose of reducing the cost is achieved.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings needed to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present invention and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained according to the drawings without inventive efforts.
Fig. 1 is an exploded view of a scrubber in an exhaust gas treatment system according to embodiment 1 of the present invention.
Fig. 2 is a partial sectional view of a scrubber provided in example 1 of the present invention.
Fig. 3 is a schematic structural view of the mesh enclosure restraining the water blocking unit and the water filtering unit according to embodiment 2 of the present invention.
Fig. 4 is a bottom view of fig. 3.
Fig. 5 is a view a-a of fig. 4.
Fig. 6 is a schematic three-dimensional structure diagram of the mesh enclosure provided in fig. 3.
Fig. 7 is a partially enlarged schematic view I of fig. 6.
Fig. 8 is a partial sectional view of another scrub column provided in example 2 of the present invention.
Fig. 9 is a partial sectional view of a water mist trap apparatus provided in embodiment 3 of the present invention.
Fig. 10 is a schematic view showing a configuration in which a water mist capturing device is provided after the final-stage scrubber in the exhaust gas treatment system according to embodiment 4 of the present invention.
Description of the drawings
A water mist catching device 400, a housing 401, an inlet 402, and a connecting part 403.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. The components of embodiments of the present invention generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations. Thus, the following detailed description of the embodiments of the present invention, presented in the figures, is not intended to limit the scope of the utility model, as claimed, but is merely representative of selected embodiments of the utility model. All other embodiments, which can be derived by a person skilled in the art from the embodiments of the present invention without making any creative effort, shall fall within the protection scope of the present invention.
Example 1
Referring to fig. 1 and 2, the present embodiment provides a waste gas treatment system, which includes a scrubber (or called a water scrubber) mainly used for MOCVD epitaxial process waste gas treatment of iii-v compound semiconductor, so as to remove AsH remaining in waste gas by using the scrubber3(arsine)/PH3(phosphane) process gases.
In this embodiment, the scrubber may be a water scrubbing type waste gas scrubber commonly used in the prior art, for example, the scrubber generally includes a tower body 100, the tower body 100 is configured with an internal cavity 103 and an inlet 104 and an outlet 105 communicated with the internal cavity 103, the inlet 104 and the outlet 105 are respectively located at the lower part and the upper part of the tower body 100, as shown in fig. 1 and 2, a spray device 202 is further disposed in the internal cavity 103, the waste gas generally enters the internal cavity 103 from the inlet 104 at the lower part, passes through water or water mist sprayed from the spray device 202, and exits the internal cavity 103 from the outlet 105 at the upper part; the spray assembly 202 may be a spray head as is commonly used in the art.
For assembly, the tower 100 comprises a cylinder 101 and a head 102 detachably connected to the upper end of the cylinder 101, as shown in fig. 1 and 2, the inlet 104 is formed at the lower end or the side wall of the cylinder 101, and the outlet 105 is formed at the head 102, for example, the head 102 is connected to the cylinder 101 by a flange 106, as shown in fig. 1 and 2.
In a more sophisticated embodiment, a PP filter ring 201 (i.e. a filter ring made of PP material) is disposed in the internal cavity 103 of the tower body 100, so as to capture arsine and phosphine in the exhaust gas generated from the MOCVD epitaxy process of the iii-v compound semiconductor, and the PP filter ring 201 is disposed below the spraying device 202, as shown in fig. 2.
In the waste gas treatment system, the number of the washing towers can be determined according to actual requirements, for example, the waste gas treatment system can only comprise one washing tower, and waste gas treated by the washing tower directly reaches the standard and is discharged; and in order to achieve better treatment effect, the number of the washing towers is usually two or more, when the waste gas treatment system comprises at least two washing towers, the washing towers are respectively connected in series through pipelines, so that the gas discharged from the previous washing tower can enter the next washing tower, and the effect of treating stage by stage is achieved.
In this embodiment, when the exhaust gas treatment system only includes one scrubber, a water-retaining part 301 and a plurality of water-filtering parts 302 for blocking water mist are further disposed in the inner cavity 103 of the scrubber, as shown in fig. 1 and 2, and the water-retaining part 301 and the water-filtering parts 302 are respectively stacked between the spraying device 202 and the outlet 105, and the water-filtering parts 302 are used for adsorbing water in the gas; similarly, when the exhaust gas treatment system only comprises at least two washing towers, a water retaining part 301 and a plurality of water filtering parts 302 for blocking water mist are further arranged in the inner cavity 103 of the last washing tower, the water retaining part 301 and the water filtering parts 302 are respectively stacked between the spraying device 202 and the outlet 105, and the water filtering parts 302 are used for adsorbing water in the gas;
specifically, as shown in fig. 1 and 2, the water blocking member 301 is disposed above the spray device 202, and the water filtering member 302 is disposed above the water blocking member 301, that is, the water filtering member 302 is disposed between the water blocking member 301 and the outlet 105, and in actual use, gas passes through the water blocking member 301 and the water filtering member 302 in sequence and is discharged through the outlet 105 of the washing tower; in this process, water blocking part 301 can effectively block and intercept water or water smoke, thereby effectively prevent water or water smoke from discharging along export 105, be favorable to intercepting the steam in the gas, reduce exhaust humidity, and water filtering part 302 can be at the in-process of gaseous crossing water filtering part 302, further adsorb water in the gas, thereby can further intercept steam in the gas, can effectively reduce exhaust humidity, thereby can reduce the false alarm judgement of sample detection equipment, in addition, owing to set up water blocking part 301 and a plurality of water filtering part 302, can increase the air lock, can prolong the length of time that gas is detained the reaction in inside cavity 103, thereby can adjust liquid medicine concentration, reduce the liquid medicine quantity, reach reduce cost's purpose.
The water blocking part 301 has various embodiments, for example, in this embodiment, the water blocking part 301 may preferably adopt a plate-shaped structure, as shown in fig. 1 and fig. 2, preferably adopt a circular plate-shaped structure so as to be adapted to the internal cavity 103, the water blocking part 301 is configured with a plurality of meshes 303 for ventilation, the density of the meshes 303 may be determined according to actual requirements, as shown in the figure, by arranging the meshes 303, the water blocking part 301 may form a mesh plate-shaped structure, which not only can effectively intercept water and water mist, and play a role of blocking water, but also can make gas smoothly pass through the water blocking part 301 through the meshes.
Preferably, in the present embodiment, the water blocking member 301 is preferably made of PP (polypropylene), which is more favorable for intercepting and capturing water mist.
For the adaptation inside cavity 103, in this embodiment, as shown in fig. 1 and fig. 2, water filtering component 302 adopts the cake structure, and each water filtering component 302 can adopt cotton material to make respectively, and water filtering component 302 who adopts the cake structure both be convenient for install in inside cavity 103, can transversely intercept air again for air can only cross water filtering component 302, and water filtering component 302 that adopts cotton material to make has good drainage effect, more is favorable to adsorbing the water in the air, reduces the humidity of air.
For example, the cotton material may be biochemical cotton, foam, activated carbon cotton, or filter cotton, i.e., the water filter element 302 may be made of water-absorbing material such as biochemical cotton, foam, activated carbon cotton, or filter cotton; wherein the filter cotton can be synthetic fiber filter cotton, non-woven fabric filter cotton, glass fiber filter cotton or active carbon filter cotton.
The number of the water filtering components 302 may be determined according to actual requirements, for example, as shown in fig. 1 and fig. 2, in the present embodiment, two water filtering components 302 are included, wherein the water filtering component 302 located below is made of bio-chemical cotton, and as shown in fig. 1 and fig. 2, the water filtering component 302 located above is made of foam, which is beneficial to enhancing the water absorption effect.
In a more complete solution, the inner cavity 103 is configured with a support bracket 107 for supporting the water blocking part 301, as shown in fig. 2, the support bracket 107 may be a support bracket 107 commonly used in the art, and the support bracket 107 is fixed to a side wall of the tower body 100, so that the water blocking part 301 may be placed on the support bracket 107 to function as a support for the water blocking part 301 and the water filtering part 302.
Example 2
In order to solve the problem of facilitating the integral installation and replacement of the water blocking component 301 and the water filtering component 302, the main difference between the present embodiment 2 and the above embodiment 1 is that the exhaust gas treatment system further includes a mesh enclosure 304, as shown in fig. 3-7, the water blocking component 301 and the water filtering component 302 are respectively stacked in the mesh enclosure 304 and are constrained into a whole by the mesh enclosure 304; the mesh enclosure 304 can constrain the water blocking part 301 and the water filtering part 302 into a whole, so that the mesh enclosure can be integrally mounted and replaced, and is very convenient, and the mesh enclosure 304 also has certain effects of filtering and intercepting water vapor, so that the exhaust humidity can be further reduced.
In this embodiment, the mesh cap 304 is flexible and can be made of mesh cap 304 material commonly used in the art, but in a preferred embodiment, the mesh cap 304 can be made of cotton material, which can be the cotton material described in embodiment 1, so as to have good water absorption and water blocking effects.
In order to facilitate the restraint of the water blocking part 301 and the water filtering part 302, in a more perfect scheme, the mesh enclosure 304 may be of a bag-shaped structure, and a circle of rope 305 is arranged at a bag opening, as shown in fig. 6 and 7, the rope 305 is restrained at the bag opening for tightening the bag opening, as shown in fig. 6 and 7, when in actual use, the water blocking part 301 and the water filtering part 302 may be installed in the mesh enclosure 304, and the bag opening is tightened by using the rope 305 at the bag opening, which is very convenient; when installed in the scrubber, the pocket is oriented downward, as shown in FIG. 8, to facilitate gas passage.
Example 3
According to the concept of embodiment 1, the present embodiment provides a water mist catching device 400, which comprises a housing 401, wherein the housing 401 is configured with an internal cavity 103, an inlet 402 and an outlet 105 communicated with the internal cavity 103, a water blocking part 301 for blocking water mist and a plurality of water filtering parts 302 are arranged in the internal cavity 103, as shown in fig. 9, the water filtering parts 302 are used for absorbing water in air,
as shown in fig. 9, a connection 403 for connecting a washing tower or a pipeline is formed at the inlet 402, and the connection 403 may be a flange 106, for example. That is, in this embodiment, the water mist capturing device 400 is an independent device, and when the device is used, the device is installed at the outlet 105 of the washing tower, so that the gas discharged from the washing tower can be discharged after passing through the water mist capturing device 400, and the water blocking part 301 and the water filtering part 302 inside the device can be used for achieving the effects of blocking water and absorbing water, thereby not only effectively intercepting the water vapor in the gas and reducing the exhaust humidity, but also avoiding the false alarm judgment of the sampling detection device.
The shape of the housing 401 is not limited in this embodiment, but the internal cavity 103 may preferably adopt a columnar structure to install the water blocking part 301 and the water filtering part 302, and in this embodiment, the water blocking part 301 may be the same as the water blocking part 301 in embodiment 1 in structure and material, for example, in this embodiment, the water blocking part 301 may also be made of PP material, and the water blocking part 301 may be a plate-shaped structure and configured with a plurality of meshes for ventilation; similarly, the water filtering component 302 may be the same as the structure and the material of the water filtering component 302 in embodiment 1, for example, in this embodiment, the water filtering component 302 may also be a cake-shaped structure, and the water filtering component 302 is made of cotton material, because the washing tower usually uses liquid medicine such as phosphoric acid, sodium hydroxide, sodium hypochlorite, etc., the corrosivity is very strong, so when implementing specifically, the water filtering component 302 may also be made of cotton material that is resistant to acid and alkali corrosion preferentially.
It can be understood that, in order to facilitate the integral installation and replacement of the water blocking part 301 and the water filtering part 302, the water blocking part 301 and the water filtering part 302 are respectively stacked in the mesh enclosure 304 and are constrained into a whole by the mesh enclosure 304, and then are integrally installed in the internal cavity 103 of the housing 401, and the structure and the material of the mesh enclosure 304 may be the same as those of the mesh enclosure 304 in embodiment 2, and are not described herein again.
Example 4
The present embodiment provides an exhaust gas treatment system, which comprises a scrubber tower (or called water scrubbing type exhaust gas scrubber tower) and the water mist capturing device 400 of embodiment 3, wherein
The washing tower can adopt a washing tower commonly used in the prior art, the washing tower is generally provided with a PP filtering ring 201 and a spraying device 202, and the number of the washing towers can be one, two or more;
when the exhaust gas treatment system only comprises one washing tower, the water mist capturing device 400 is arranged at the outlet 105 of the washing tower, and the inlet 402 of the water mist capturing device 400 is communicated with the outlet 105 of the washing tower, as shown in fig. 10, so that the standard gas discharged from the washing tower can enter the water mist capturing device 400, and the low-humidity gas is discharged through the outlet 105 of the water mist capturing device 400, which is more beneficial for detection by detection equipment.
When the exhaust gas treatment system comprises two or more washing towers, the washing towers are respectively connected in series through a pipeline, so that the gas discharged from the previous washing tower can enter the next washing tower, the water mist capturing device 400 is arranged at the outlet 105 of the last washing tower, and the inlet 402 of the water mist capturing device 400 is communicated with the outlet 105 of the washing tower, as shown in fig. 10, so that the gas reaching the standard discharged from the last washing tower can enter the water mist capturing device 400, and the gas with low humidity is discharged through the outlet 105 of the water mist capturing device 400, which is more beneficial for the detection of the detection equipment.
The above description is only for the specific embodiments of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art can easily conceive of the changes or substitutions within the technical scope of the present invention, and all the changes or substitutions should be covered within the scope of the present invention.
Claims (10)
1. The utility model provides a washing tower, includes the tower body, the tower body structure have inside cavity and with import and export that inside cavity is linked together, its characterized in that, still be provided with the water blocking part and a plurality of drainage spare that are used for blockking the water smoke in the inside cavity, just water blocking part and drainage spare stack respectively in the below of export, drainage spare is arranged in adsorbing the water in the gas.
2. The scrubber tower of claim 1, wherein a spray device is disposed in the internal cavity, and the water guard and the water filter are stacked between the spray device and the outlet, respectively.
3. The washing tower of claim 2, wherein the water filter is disposed between the water stop and the outlet;
and/or the inner cavity is configured with a support frame for supporting the water blocking part.
4. The washing tower of claim 1, wherein the water guard is a plate-shaped structure and is constructed with a plurality of meshes for ventilation;
and/or the water filtering part is of a cake-shaped structure and is made of cotton materials.
5. The washing tower of claim 4, wherein the water guard is made of PP material;
and/or the water filtering part is made of biochemical cotton, foam cotton, activated carbon cotton or filter cotton.
6. The washing tower as claimed in any one of claims 1 to 5, further comprising a mesh enclosure, wherein the water blocking member and the water filtering member are stacked in the mesh enclosure and are integrally bound by the mesh enclosure.
7. The wash tower of claim 6, wherein said screen is made of a cotton material;
and/or the mesh enclosure is of a bag-shaped structure, a circle of rope is arranged at the bag opening, and the rope is used for tightening the bag opening.
8. A water mist catching device is characterized by comprising a shell, wherein the shell is provided with an inner cavity, an inlet and an outlet which are communicated with the inner cavity, a water retaining part and a plurality of water filtering parts are arranged in the inner cavity and used for blocking water mist, the water filtering parts are used for absorbing water in gas,
the inlet is configured with a connection for connecting a scrubber tower or a pipe.
9. The water mist capturing device according to claim 8, wherein the water deflector is made of PP material, and the water deflector has a plate-like structure and is configured with a plurality of meshes for ventilation;
and/or the water filtering part is of a cake-shaped structure and is made of cotton materials;
and/or the connecting part is a flange.
10. An exhaust gas treatment system comprising the scrubber tower of any one of claims 1-7;
or, comprising a scrubber and a mist capture device according to any of claims 8-9, wherein the inlet of the mist capture device is in communication with the outlet of the scrubber.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121062765.XU CN216395819U (en) | 2021-05-18 | 2021-05-18 | Washing tower, water mist capturing device and waste gas treatment system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121062765.XU CN216395819U (en) | 2021-05-18 | 2021-05-18 | Washing tower, water mist capturing device and waste gas treatment system |
Publications (1)
| Publication Number | Publication Date |
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| CN216395819U true CN216395819U (en) | 2022-04-29 |
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| CN202121062765.XU Active CN216395819U (en) | 2021-05-18 | 2021-05-18 | Washing tower, water mist capturing device and waste gas treatment system |
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- 2021-05-18 CN CN202121062765.XU patent/CN216395819U/en active Active
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