CN216378366U

CN216378366U - Anode water cooling mechanism for connecting planar cathode

Info

Publication number: CN216378366U
Application number: CN202123156211.9U
Authority: CN
Inventors: 张奇龙; 李伟
Original assignee: Hangzhou Langwei Technology Co ltd
Current assignee: Hangzhou Langwei Technology Co ltd
Priority date: 2021-12-15
Filing date: 2021-12-15
Publication date: 2022-04-26
Anticipated expiration: 2031-12-15

Abstract

The utility model discloses an anode water cooling mechanism for connecting a planar cathode, and relates to the technical field of magnetron sputtering. The cooling device comprises a cold water tank, wherein a plurality of refrigerating sheets are fixedly connected inside the cold water tank, a conveying assembly is arranged on the cold water tank, a cooling plate is arranged at the water conveying end of the conveying assembly, a filtering assembly is fixedly connected inside the cold water tank, a plurality of circulation grooves are formed in the outer side of the cooling plate, the conveying assembly comprises a small water pump fixedly connected to the top of the cold water tank, when the anode needs to be cooled, the internal component of the conveying assembly pumps cold water inside the cold water tank into the cooling plate under the operation of the conveying assembly, the anode is cooled through the cooling plate, and water inside the cooling plate enters the cold water tank through the internal component of the conveying assembly along with the increase of the conveying amount of the cold water, so that cold water circulation is realized, and the cooling efficiency of the anode is improved.

Description

Anode water cooling mechanism for connecting planar cathode

Technical Field

The utility model relates to the technical field of magnetron sputtering, in particular to an anode water cooling mechanism for connecting a planar cathode.

Background

The round magnetron cathode is a core component of magnetron sputtering, argon is introduced in the round magnetron cathode in a vacuum state, negative bias is applied to a cathode target, so that ionized argon becomes argon ions, the argon ions bombard the target, a target material is sputtered out and deposited on a substrate, when the round magnetron cathode starts to work, a baffle is arranged on the surface of the target, the target is sputtered for a period of time, an oxide layer on the surface of the target is removed, in the long-time sputtering process, the temperature rise of an anode generates quantitative heat radiation, in the long-time sputtering process, the temperature rise of the anode generates a certain amount of heat radiation, the influence is generated on the ambient temperature environment of the target, and the sputtering process is indirectly influenced.

1. The existing anode water cooling mechanism has lower anode cooling efficiency, so that the anode is heated up too fast and is inconvenient for the development of magnetron sputtering work.

2. When the inside water of this mechanism is long-time when cooling to the positive pole, because the temperature conduction makes the temperature of water rise, make the aquatic inevitable produce tiny dirt then, and if these dirt were not handled in time, then influence the water-cooling effect, then reduced the cooling efficiency to the positive pole.

SUMMERY OF THE UTILITY MODEL

The utility model aims to: the utility model provides an anode water cooling mechanism for connecting a planar cathode, which aims to solve the problems that the temperature reduction efficiency is low, the anode is heated too fast, the magnetron sputtering work is inconvenient to develop, small scales are inevitably generated in water when the anode is cooled for a long time, the water cooling effect is influenced if the scales are not treated in time, and the temperature reduction efficiency of the anode is reduced.

The utility model specifically adopts the following technical scheme for realizing the purpose:

the utility model provides an anode water cooling mechanism for connecting plane negative pole, includes the cold water storage cistern, a plurality of refrigeration pieces of inside fixedly connected with of cold water storage cistern, and install conveyor components on the cold water storage cistern, the cooling plate is installed to conveyor components's water delivery end, the inside fixedly connected with filtering component of cold water storage cistern.

Furthermore, a plurality of circulation grooves are formed in the outer side of the cooling plate.

Further, the conveying assembly comprises a small water pump fixedly connected to the top of the cold water tank, a first water delivery pipe fixedly connected to the water outlet end of the small water pump, a U-shaped pipe fixedly connected to the one end of the first water delivery pipe, a second water delivery pipe fixedly connected to the one end of the U-shaped pipe, and a plurality of water outlet holes formed in the U-shaped pipe, one end of the second water delivery pipe is communicated with the cold water tank, a pollution discharge head fixedly connected to one side of the cooling plate, a pollution discharge pipe fixedly connected to the one end of the pollution discharge head, and one end of the pollution discharge pipe is communicated with the cold water tank.

Further, the U-shaped pipe is located inside the cooling plate.

Further, the filtering component comprises a connecting seat fixedly connected to one side inside the cold water tank, mounting grooves are formed in two sides of the inner side of the connecting seat, bearings are connected to two sides of the top of the connecting seat respectively, limiting rods are fixedly connected to the rotating handles, and a filtering screen plate is mounted on the connecting seat.

Further, the outside fixedly connected with adapter sleeve of filter plate, the equal fixedly connected with plugboard in both ends of adapter sleeve, the plugboard is located the inside of mounting groove.

The utility model has the following beneficial effects:

1. according to the utility model, when the anode needs to be cooled, the internal component of the conveying assembly pumps cold water in the cold water tank into the cooling plate under the operation of the conveying assembly, and the anode is cooled through the cooling plate, so that water in the cooling plate enters the cold water tank through the internal component of the conveying assembly along with the increase of the conveying amount of the cold water, thereby realizing cold water circulation and further improving the cooling efficiency of the anode.

2. According to the utility model, when the conveying assembly conveys a water source to the interior of the cooling plate, water in the cooling plate flows, and then scale in the cooling plate is driven to enter the cold water tank along with internal components of the conveying assembly and is filtered and collected by the filtering assembly, so that tiny scale in the cooling plate is cleaned, and the effect of cooling is prevented from being influenced.

Drawings

FIG. 1 is a schematic perspective view of the present invention;

FIG. 2 is a schematic view of the construction of the connector body and junction box of the present invention;

FIG. 3 is a schematic view of the structure of the mixing plate of the present invention;

figure 4 is a schematic view of the structure of the clamping assembly of the present invention.

Reference numerals: 1. a cold water tank; 2. a delivery assembly; 3. a cooling plate; 4. a filter assembly; 11. a refrigeration plate; 21. a small-sized water pump; 22. a first water delivery pipe; 23. a U-shaped pipe; 24. a water outlet hole; 25. a second water delivery pipe; 26. a blowdown head; 27. a blow-off pipe; 31. a circulation tank; 41. a connecting seat; 42. mounting grooves; 43. a handle is rotated; 44. a limiting rod; 45. a filter screen plate; 46. connecting sleeves; 47. a plugboard.

Detailed Description

In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention.

As shown in fig. 1-4, an anode water-cooling mechanism for connecting a planar cathode comprises a cold water tank 1, wherein a plurality of cooling fins 11 are fixedly connected to the inside of the cold water tank 1, a conveying assembly 2 is installed on the cold water tank 1, a cooling plate 3 is installed at a water conveying end of the conveying assembly 2, and a filter assembly 4 is fixedly connected to the inside of the cold water tank 1, in some embodiments, when the anode needs to be cooled, the internal component of the conveying assembly 2 can pump the cold water inside the cold water tank 1 into the cooling plate 3 under the operation of the conveying assembly 2, and the anode is cooled through the cooling plate 3, as the conveying amount of the cold water increases, the water inside the cooling plate 3 enters the cold water tank 1 through the internal component of the conveying assembly 2, thereby realizing cold water circulation, and further improving the cooling efficiency of the anode, when the conveying assembly 2 conveys a water source to the inside the cooling plate 3, so that the water inside the cooling plate 3 flows, and then the scale inside the cooling plate 3 is driven to enter the cold water tank 1 along with the internal components of the conveying assembly 2, and is filtered and collected by the filtering assembly 4, so as to clean the fine scale inside the cooling plate 3 and avoid affecting the cooling effect, more specifically, when the anode needs to be detected, the water can be poured into the cold water tank 1, and can be cooled by the refrigerating sheet 11, so as to obtain cold water, and under the operation of the conveying assembly 2, the internal components of the conveying assembly 2 pump the water inside the cold water tank 1 into the cooling plate 3, the anode is cooled by the cooling plate 3, along with the increase of the conveying amount of the cold water, the water inside the cooling plate 3 enters the cold water tank 1 through the internal components of the conveying assembly 2, so as to realize cold water circulation, and further improve the cooling efficiency of the anode, when 3 inside water of cooling plate circulate, can drive the inside dirt that produces of cooling plate 3, bring it into cold water tank 1 then in, filter through filter assembly 4 and collect it to this clears away the inside dirt of cooling plate 3, in order to improve cooling efficiency.

As shown in fig. 1, in some embodiments, a plurality of circulation grooves 31 are formed on the outer side of the cooling plate 3, and more specifically, when the cooling plate 3 collides with the anode to cool down, the hot air generated by the anode can circulate through the circulation grooves 31, so as to improve the heat dissipation efficiency.

As shown in fig. 2, in some embodiments, the conveying assembly 2 includes a small water pump 21 fixedly connected to the top of the cold water tank 1, wherein an outlet end of the small water pump 21 is fixedly connected to a first water pipe 22, an end of the first water pipe 22 is fixedly connected to a U-shaped pipe 23, an end of the U-shaped pipe 23 is fixedly connected to a second water pipe 25, the U-shaped pipe 23 is provided with a plurality of water outlet holes 24, an end of the second water pipe 25 is communicated with the cold water tank 1, a side of the cooling plate 3 is fixedly connected to a sewage discharging head 26, an end of the sewage discharging head 26 is fixedly connected to a sewage discharging pipe 27, and an end of the sewage discharging pipe 27 is communicated with the cold water tank 1, more specifically, when cold water in the cold water tank 1 is conveyed, the cold water in the cold water tank 1 can be pumped into the first water pipe 22 under the operation of the small water pump 21 and conveyed into the U-shaped pipe 23 through the first water pipe 22, and cold water is sprayed into the interior of the cooling plate 3 through the water outlet hole 24, so that the anode is cooled by the cooling plate 3.

As shown in fig. 2, in some embodiments, the U-shaped pipe 23 is located inside the cooling plate 3, and more specifically, when the U-shaped pipe 23 injects water into the cooling plate 3 through the water outlet hole 24, the water inside the cooling plate 3 is stirred, and then the water inside the cooling plate 3 drives the dirt to enter the dirt discharging head 26 and enter the cold water tank 1 through the dirt discharging pipe 27, and the dirt can be filtered and collected through the filtering assembly 4, so as to be removed.

As shown in fig. 4, in some embodiments, the filtering component 4 includes a connecting seat 41 fixedly connected to one side inside the cold water tank 1, while mounting grooves 42 are provided on two sides of the inner side of the connecting seat 41, and a rotating handle 43 is connected to two sides of the top of the connecting seat 41, and a limiting rod 44 is fixedly connected to the rotating handle 43, and a filtering screen plate 45 is installed on the connecting seat 41, more specifically, by placing the filtering screen plate 45 on the connecting seat 41, and rotating the rotating handle 43, so that the rotating handle 43 drives the limiting rod 44 to butt against and clamp the filtering screen plate 45, and then the filtering screen plate 45 is clamped and fixed to the connecting seat 41, so as to realize the installation of the filtering screen plate 45.

As shown in fig. 4, in some embodiments, the outside of the filter screen plate 45 is fixedly connected with a connection sleeve 46, and meanwhile, two ends of the connection sleeve 46 are fixedly connected with a connection plate 47, and the connection plate 47 is located inside the installation groove 42, where one side of the connection seat 41 is provided with through ports respectively communicated with the second water pipe 25 and the sewage pipe 27, more specifically, when the second water pipe 25 and the sewage pipe 27 convey the water inside the cooling plate 3 into the cold water tank 1, the water can enter the connection seat 41 along the through ports, and the water is filtered by the filter screen plate 45, and the dirt contained inside is filtered and collected, so as to be removed, and the connection plate 47 is embedded into the installation groove 42, so as to realize the installation and placement of the filter screen plate 45.

The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the utility model. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. The utility model provides an anode water-cooling mechanism for connecting plane negative pole, includes cold water storage cistern (1), its characterized in that, a plurality of refrigeration pieces (11) of inside fixedly connected with of cold water storage cistern (1), and install on cold water storage cistern (1) and carry subassembly (2), cooling plate (3) are installed to the water delivery end of carry subassembly (2), inside fixedly connected with filtering component (4) of cold water storage cistern (1).

2. The anode water-cooling mechanism for connecting a planar cathode as claimed in claim 1, wherein a plurality of circulation grooves (31) are opened on the outer side of the cooling plate (3).

3. The anode water-cooling mechanism for connecting a planar cathode as claimed in claim 1, the conveying component (2) comprises a small water pump (21) fixedly connected to the top of the cold water tank (1), the water outlet end of the small water pump (21) is fixedly connected with a first water delivery pipe (22), one end of the first water delivery pipe (22) is fixedly connected with a U-shaped pipe (23), one end of the U-shaped pipe (23) is fixedly connected with a second water delivery pipe (25), a plurality of water outlet holes (24) are formed in the U-shaped pipe (23), one end of the second water delivery pipe (25) is communicated with the cold water tank (1), one side fixedly connected with blowdown head (26) of cooling plate (3), the one end fixedly connected with blow off pipe (27) of blowdown head (26), the one end and the cold water storage cistern (1) intercommunication of blow off pipe (27).

4. An anode water-cooling mechanism for connecting a planar cathode according to claim 3, characterized in that the U-shaped pipe (23) is located inside the cooling plate (3).

5. The anode water-cooling mechanism for connecting the planar cathode is characterized in that the filtering component (4) comprises a connecting seat (41) fixedly connected to one side inside the cold water tank (1), mounting grooves (42) are formed in two sides of the inner side of the connecting seat (41), rotating handles (43) are connected to two sides of the top of the connecting seat (41) in a bearing mode, limiting rods (44) are fixedly connected to the rotating handles (43), and a filtering screen plate (45) is mounted on the connecting seat (41).

6. The anode water-cooling mechanism for connecting the planar cathode is characterized in that a connecting sleeve (46) is fixedly connected to the outer side of the filter screen plate (45), inserting plates (47) are fixedly connected to both ends of the connecting sleeve (46), and the inserting plates (47) are located inside the mounting groove (42).