CN216377846U - Separating device for color photoresist stripping waste liquid - Google Patents
Separating device for color photoresist stripping waste liquid Download PDFInfo
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- CN216377846U CN216377846U CN202123145451.9U CN202123145451U CN216377846U CN 216377846 U CN216377846 U CN 216377846U CN 202123145451 U CN202123145451 U CN 202123145451U CN 216377846 U CN216377846 U CN 216377846U
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Abstract
A separating device for stripping waste liquid of a color photoresist agent belongs to the technical field of hazardous waste reduction and resource recycling of stripping waste liquid in the electronic industry. The device is provided with a stripping waste liquid storage tank, a distillation/reduced pressure evaporator, a condenser, an organic solvent storage tank, a reaction tank, a centrifugal separator, a denitrification carbon source storage tank, a water tank and a control system; stripping waste liquid enters the tank through an inlet pipeline of a stripping waste liquid storage tank and is stored, an outlet of the stripping waste liquid storage tank is connected with a distillation/reduced pressure evaporator, the top of the distillation/reduced pressure evaporator is connected with a condenser, and the condenser is connected with an organic solvent storage tank; the bottom of the distillation/decompression evaporator is connected with the reaction tank, and the evaporation residual liquid of the distillation/decompression evaporator is discharged to the reaction tank through a pipeline; the bottom of the reaction tank is connected with a centrifugal separator, and the centrifugal separator is connected with a denitrification carbon source storage tank; the top of the reaction tank is connected with a water tank. The device can realize the recycling value of the organic solvent, reduce the environmental organic load of the stripping solution and reduce the amount of dangerous waste.
Description
Technical Field
The utility model belongs to the technical field of hazardous waste reduction and resource recycling of stripping waste liquid in the electronic industry, and particularly relates to a separating device for stripping waste liquid of a color photoresist agent.
Background
The integrated circuit industry is one of the foundation and core of modern information production, and its material is the most subdivided link in the industry chain, throughout the whole process of chip manufacturing and packaging. High purity (electronic grade) chemicals such as acids, alcohols, ketones, esters, ethers and other organic substances are used in large quantities throughout the industry chain. High-purity chemicals account for a small amount of cost of the whole industrial chain, but are factors with large environmental risks and environmental influences and are main sources of three wastes in the industrial chain.
Photoresists and photoresists resist strippers contain various chemicals and are widely used in the manufacture of integrated circuits, circuit boards (PCBs), and panels. The photoresist and the stripper have different compositions due to different processes, but the solvent and the resin are the main components. The color photoresist consists of pigment, pigment dispersing liquid, photosensitizer, resin, solvent, etc. and is used in photoetching process to coat photoresist on substrate, decompression drying of the coated photoresist, evaporating the solvent in the photoresist to form organic waste gas, exposure, development, etching, eliminating photoresist and other steps to transfer the integrated circuit pattern to the substrate. When the redundant photoresist on the substrate is stripped (stripped) by a wet method, a stripping solution is needed to be used for dissolving the unnecessary photoresist, so that stripping waste liquid is formed; the stripping waste liquid contains not only a solvent but also a resin, a pigment and the like in the photoresist, and also various components in the stripping liquid, and the components are complicated, and generally, the stripping waste liquid is incinerated as a hazardous waste.
In order to reduce resource consumption, save resources and reduce carbon emission, the stripping waste liquid is often recycled, gradient-utilized and comprehensively utilized. The method is characterized by cyclic utilization and reutilization in a plant, and comprehensive utilization of organic solvents recovered by rectification outside the plant or impurity removal by filtration and adsorption. Because the stripping waste liquid has relatively complex components and contains resin, dye, organic solvent and the like, the resin, the dye and the like influence mass transfer and heat transfer during distillation or rectification, the efficiency is influenced, the organic solvent has excellent water solubility, azeotropic substances are easily formed, and the rectification separation is difficult. If the electronic grade product can not be achieved in the rectification separation process, the product is difficult to recycle for production, and the recycling value is reduced.
The stripping waste liquid can be thoroughly treated as hazardous waste by direct spray burning, has higher calorific value and generally does not need to be added with fuel. But the treatment cost is higher, the resource waste is larger, and the development concept of carbon reduction is not met.
The comprehensive utilization direction of the stripping waste liquid and the main flow direction have the pretreatment of adding acid to inhibit the evaporation of amine, membrane separation impurities or active carbon/diatomite decolorization, flash evaporation or wiped film evaporator, thin film evaporator and the like to prevent the influence of resin and the like, and organic solvents with different boiling points are separated by multi-stage rectification.
SUMMERY OF THE UTILITY MODEL
The utility model aims to provide a separating device for a color photoresist stripping waste liquid, which aims at solving the problems of recycling and the like in the prior art, improves the recycling value of an organic solvent in a stripping liquid and reduces the environmental organic load of the stripping liquid by separating resin/pigment in the stripping liquid.
The device is provided with a stripping waste liquid storage tank, a distillation/reduced pressure evaporator, a condenser, an organic solvent storage tank, a reaction tank, a centrifugal separator, a denitrification carbon source storage tank, a water tank and a control system;
stripping waste liquid enters the tank from an inlet pipeline of a stripping waste liquid storage tank and is stored, an outlet of the stripping waste liquid storage tank is connected with a distillation/reduced pressure evaporator through a pipeline with a leakage-free pump, the top of the distillation/reduced pressure evaporator is connected with a condenser through a pipeline, and the condenser is connected with an organic solvent storage tank through a pipeline; the bottom of the distillation/decompression evaporator is connected with the reaction tank through a pipeline with an automatic valve, the evaporation residual liquid of the distillation/decompression evaporator is discharged to the reaction tank through the pipeline, and a stirrer is arranged in the reaction tank; the bottom of the reaction tank is connected with a centrifugal separator through a pipeline with an automatic valve, and the centrifugal separator is connected with a denitrification carbon source storage tank through a pipeline; the top of the reaction tank is connected with a water tank through a pipeline with an automatic valve and a non-leakage pump;
a liquid level sensor is arranged in the stripping waste liquid storage tank and used for feeding back a liquid level value in the tank to a control system in real time, an alarm signal is generated according to a set high-level limit value, and a non-leakage pump is started to stop the protection function according to a set low-level limit value.
The distillation/decompression evaporator is provided with a steam regulating valve (or a thermocouple controller) and a liquid level sensor, the liquid level sensor transmits the liquid level value in the tank to a control system, and the control system controls the evaporator to enable the evaporation residual liquid to reach 15% -50% of the initial volume; the steam regulating valve is used for controlling the steam flow and the volume of the residual liquid; and a temperature sensor is also arranged in the distillation/decompression evaporator and is used for controlling the steam regulating valve to regulate the steam input quantity.
The reaction tank is provided with a liquid level sensor, the water tank adopts a high-level water tank, the signal feedback of the liquid level sensor of the reaction tank is realized, and the control system utilizes an automatic control program and an electric valve to adjust the water outlet flow of the high-level water tank so as to control the reaction water adding proportion.
The high-level water tank is provided with a liquid level sensor and is used for automatically supplementing water through a control system.
The control system is respectively connected with and controls each liquid level sensor, each temperature sensor, each non-leakage pump and each automatic valve.
The condenser is provided with a cooling water inlet pipe, a cooling water outlet pipe and a condensation liquid pipe; and conveying the organic waste gas discharged by the distillation/decompression evaporator to a condenser for condensation through a pipeline, and collecting the condensate to an organic solvent storage tank through a condensate pipe.
The drying oven is connected with the condenser through a pipeline, an exhaust fan is arranged on the drying oven, and the condenser is provided with a cooling water inlet pipe, a cooling water outlet pipe and a cooling liquid pipe which are communicated with an organic solvent storage tank.
The working principle of the utility model is given below:
collecting the stripping waste liquid in a waste liquid collecting tank, pumping the stripping waste liquid in the collecting tank to a distillation/reduced pressure evaporator, evaporating the stripping waste liquid, condensing organic components and recovering a large amount of organic solvent, then separating out the evaporated residual liquid in a residual liquid reaction tank by controlling the solubility of resin/pigment in water to form a solid-liquid two-phase mixed liquid, separating the two-phase mixed liquid by a centrifuge, using the liquid phase as a liquid carbon source for sewage treatment, and treating the solid phase according to dangerous waste after being dried by an oven at high temperature. And introducing the waste gas of the oven into a condenser, and introducing the condensate into an organic solvent storage tank.
And collecting the stripping waste liquid in a stripping waste liquid storage tank, wherein the stripping waste liquid storage tank is provided with a liquid level sensor for feeding back the liquid level in real time.
The distillation/decompression evaporator heats and evaporates the pumped stripping waste liquid, the liquid level sensor transmits the liquid level value in the tank, the control system controls the evaporator to make the evaporation residual liquid reach 15-50% of the initial volume, and the distillation/decompression evaporator is provided with a steam regulating valve (or a thermocouple controller) and a liquid level sensor and is used for controlling the steam flow and the residual liquid volume.
And cooling the organic mixed gas generated in the evaporation process of the distillation/decompression evaporator by using a condenser, and collecting the condensate in an organic solvent storage tank.
And (3) distilling residual liquid by a distillation/decompression evaporator, discharging the residual liquid into a reaction tank by virtue of gravity or a leakage-free pump, adding water into the reaction tank while stirring, and reacting to separate out resin/pigment components to form a mixed liquid. The reaction tank is provided with a liquid level sensor, and the water outlet flow of the high-level water tank is controlled through an automatic control program and an electric valve so as to control the reaction water adding proportion.
And a high-level water tank is configured, and the control system adjusts the water outlet flow of the high-level water tank through signal feedback of a liquid level sensor of the reaction tank. The high-level water tank is provided with a liquid level sensor and automatically supplies water through a control system.
After the resin/material is separated out from the reaction tank, the mixed solution is pumped to a centrifugal separator for dehydration by virtue of gravity or a non-leakage pump, filtrate is collected into a denitrification carbon source storage tank, and filter residue is dried at high temperature and then treated according to dangerous waste.
And (3) drying filter residues in an oven at high temperature (not higher than 400 ℃), cooling the drying waste gas by a condenser, and collecting the condensate in an organic solvent storage tank.
Compared with the prior art, the utility model has the following outstanding advantages:
by adopting the device, most of the organic solvent in the stripping liquid can be separated as an intermediate product for producing high-purity organic solvent through the working procedures of distillation/reduced pressure evaporation, condensation, centrifugal separation and the like, a small part of water-containing organic matters are used as a denitrification carbon source, and a very small amount of resin/pigment is used as hazardous waste, so that the reduction of the hazardous waste is realized. The device can optimize the recovery process of the organic solvent in the stripping waste liquid, and can be used for producing raw materials of organic solvents with higher purity by taking most of the organic solvent in the stripping liquid as an intermediate product through simple distillation/reduced pressure evaporation separation, thereby avoiding the influence of resin/pigment on the rectification process for manufacturing the organic solvent and improving the separation efficiency of the rectification process; and (3) reacting the distillation/reduced pressure evaporation residual liquid with water, reducing the solubility of the resin/pigment in the residual liquid to precipitate and separate, and obtaining a water-containing organic solution with a certain value as a denitrification carbon source, wherein the quantity of the resin/pigment after drying is extremely small, and the resin/pigment is treated as hazardous waste.
Drawings
Fig. 1 is a schematic structural composition diagram of an embodiment of the present invention.
Detailed Description
The following examples will further illustrate the present invention with reference to the accompanying drawings.
Referring to fig. 1, an apparatus for separating a color photoresist stripping waste liquid according to an embodiment of the present invention includes: a stripping waste liquid storage tank S01, a stripping waste liquid evaporator S02, a steam condenser S03 communicated with a stripping waste liquid evaporator S02 pipeline, an organic solvent storage tank S04 for receiving steam condensate, a reaction tank S05 with stirring communicated with the stripping waste liquid evaporator S02, a centrifugal separator S06 for solid-liquid separation, a denitrification carbon source storage tank S07 for collecting centrifugal filtrate, a high-level water tank S08 for providing reaction water, a resin/pigment drying oven S09, a high-temperature waste gas condensing device S10, and pumping equipment, connecting pipelines, automatic valves, instruments and control systems matched with the device.
The stripping waste liquid is stored in a stripping waste liquid storage tank S01 through a pipe 1, and a first liquid level sensor 2 is positioned in the stripping waste liquid storage tank S01;
the stripping waste liquid storage S01 tank is communicated with a distillation/decompression evaporator S02 through a first pipeline 4, and a first leakage-free pump 3 is positioned on the first pipeline 4;
the first temperature sensor 6 and the second liquid level sensor 5 are arranged on the distillation/decompression evaporator S02, and the distillation/decompression evaporator S02 is not limited to heating by steam, but is not limited to a heat transfer mode of using a jacket, a coil pipe and stirring;
the second pipe 7 connects the distillation/decompression evaporator S02 with the first condenser S03, the first condenser S03 is provided with a cooling water inlet pipe 8, a cooling water outlet pipe 9 and a condensation liquid pipe 10;
the condensed liquid pipe 10 is connected with the condenser S03 and the organic solvent storage tank S04;
the third level sensor 11 is located in the organic solvent storage tank S04;
a third pipe 12 communicating the distillation/depressurization evaporator S02 with the reaction tank S05, and a first automatic valve 13 provided on the third pipe 12;
the fourth liquid level sensor 14 is positioned on the reaction tank S05, and the reaction tank S05 adopts mechanical stirring for mixing;
the fourth pipeline 16 is communicated with the reaction tank S05 and the water tank S08, the second non-leakage pump 15 and the second automatic valve 17 are respectively arranged on the fourth pipeline 16, and the fifth liquid level sensor 18 is arranged on the water tank S08;
the fifth pipeline 19 is communicated with the reaction tank S05 and the centrifugal separator S06, and the third automatic valve 20 is positioned on the pipeline of the fifth pipeline 19;
the sixth pipeline 21 is communicated with the centrifugal separator S06 and the denitrification carbon source storage tank S07, and the sixth liquid level sensor 22 is positioned in the denitrification carbon source storage tank S07;
the seventh pipeline 23 is communicated with a slag discharging port of the centrifugal separator S06 and a feeding port of the oven S09, and the filter residue conveying device 24 is positioned on the seventh pipeline;
the eighth pipeline 25 is communicated with the oven S09 and a second condenser S10, the exhaust fan 26 is positioned on the oven S09, the second condenser S10 is provided with a cooling water inlet pipe 28, a cooling water outlet pipe 29, and a condensate 27 pipe is communicated with an S04 organic solvent storage tank;
the utility model also comprises a control system which is respectively connected with the first liquid level sensor 2, the second liquid level sensor 5, the third liquid level sensor 11, the fourth liquid level sensor 14, the fifth liquid level sensor 18, the sixth liquid level sensor 22, the temperature sensor 6, the first non-leakage pump 3, the second non-leakage pump 15, the first automatic valve 13, the second automatic valve 17 and the third automatic valve 20.
The stripping waste liquid is stored in a stripping waste liquid storage tank S01 through a pipe 1, a liquid level sensor 2 transmits a liquid level signal in the tank to a control system, an alarm signal is generated according to a set high limit value, and a first non-leakage pump 3 is started to stop the machine for protection by the low limit value.
Manually starting the first non-leakage pump 3, pumping the stripping waste liquid into the S02 distillation/decompression evaporator through the first pipeline 4, transmitting a liquid level value to the control system by the second liquid level sensor 5 on the S02 distillation/decompression evaporator, stopping the first non-leakage pump 3 by the control system when the liquid level is equal to a high liquid level H, and starting the evaporator heating device, wherein the temperature sensor displays a heating working state. In the evaporation process, the organic waste gas is condensed by the second pipeline 7 to the first condenser S03, and the condensate is collected by the 10 pipes to the organic solvent storage tank S04.
The liquid level value is transmitted by the second liquid level sensor of the evaporator S02, the control system compares the set value V1, along with the evaporation of the organic solvent in the stripping waste liquid, when the liquid level value is equal to V1 (15% -50% of the initial value), the control system stops a heating device (such as a steam valve or a thermocouple) of the distillation/decompression evaporator S02 and automatically opens the first automatic valve 13, and the evaporation residual liquid is discharged to the reaction tank S05 through the third pipeline 12.
The fourth liquid level sensor 14 in the reaction tank S05 transmits a liquid level value V2 to the control system, the control system calculates a control value H (150% V2-300% V2) according to the liquid level V2, and the control system opens the second non-leakage pump 15 and the second automatic valve 17 on the fourth pipeline 16 because V2< H, so that water in the water tank S08 is added into the reaction tank S05 through the fourth pipeline 16, and the stirring device of the reaction tank S05 is started. When the level value transmitted by the fourth liquid level sensor 14 is equal to H, the control system closes the second non-leakage pump 15 and the second automatic valve 17 on the fourth pipeline 16, and the reaction tank S05 stirring device, and the reaction is finished.
The control system opens the third automatic valve 20 on the pipeline of the fifth pipeline 19 to discharge the mixed liquid in the reaction tank S05 into the centrifugal separator S06 through the fifth pipeline 19, and then the centrifugal separator is started, and the filtrate is collected in the denitrification carbon source storage tank S07 through the sixth pipeline 21. Filter residues enter from a residue discharge port of the centrifugal separator S06 through a conveying device 24 (not limited to mechanical conveying, but also manual conveying) on the seventh pipeline 23 from a feed port of the oven S09 for drying and dehydration (the drying temperature is less than 400 ℃). In the drying process, the high-temperature organic waste gas is conveyed to the second condenser S10 by the oven exhaust fan 26 through the eighth pipeline 25, and the condensate is collected to the organic solvent storage tank S04 through the pipe 27.
While the utility model has been described with reference to the foregoing embodiments, it will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the utility model. Therefore, the scope of the present invention should not be limited to the embodiments disclosed, but includes various alternatives and modifications without departing from the present invention, which are encompassed by the claims.
Claims (8)
1. A separating device for stripping waste liquid of a color photoresist agent is characterized by being provided with a stripping waste liquid storage tank, a distillation/reduced pressure evaporator, a condenser, an organic solvent storage tank, a reaction tank, a centrifugal separator, a denitrification carbon source storage tank, a water tank and a control system;
stripping waste liquid enters the tank from an inlet pipeline of a stripping waste liquid storage tank and is stored, an outlet of the stripping waste liquid storage tank is connected with a distillation/reduced pressure evaporator through a pipeline with a leakage-free pump, the top of the distillation/reduced pressure evaporator is connected with a condenser through a pipeline, and the condenser is connected with an organic solvent storage tank through a pipeline; the bottom of the distillation/decompression evaporator is connected with the reaction tank through a pipeline with an automatic valve, the evaporation residual liquid of the distillation/decompression evaporator is discharged to the reaction tank through the pipeline, and a stirrer is arranged in the reaction tank; the bottom of the reaction tank is connected with a centrifugal separator through a pipeline with an automatic valve, and the centrifugal separator is connected with a denitrification carbon source storage tank through a pipeline; the top of the reaction tank is connected with a water tank through a pipeline with an automatic valve and a non-leakage pump.
2. The apparatus as claimed in claim 1, wherein a liquid level sensor is disposed in the stripping waste liquid storage tank for feeding back a liquid level value in the tank to the control system in real time, and generating an alarm signal according to a set high limit value, and a low limit value starts a non-leakage pump shutdown protection function.
3. The apparatus as claimed in claim 1, wherein the distillation/pressure reduction evaporator is provided with a vapor control valve and a liquid level sensor, the liquid level sensor transmits a liquid level value in the tank to the control system, and the control system controls the evaporator to make the evaporation residue reach 15% to 50% of the initial volume; the steam regulating valve is used for controlling the steam flow and the volume of the residual liquid; and a temperature sensor is also arranged in the distillation/decompression evaporator and is used for controlling the steam regulating valve to regulate the steam input quantity.
4. The apparatus as claimed in claim 1, wherein the reaction tank is equipped with a liquid level sensor, the water tank is a high-level water tank, and the control system utilizes a self-control program and an electric valve to adjust the water flow rate of the high-level water tank by the signal feedback of the liquid level sensor in the reaction tank, so as to control the water adding ratio in the reaction.
5. The apparatus of claim 1 wherein the water tank contains a level sensor for automatically replenishing water through a control system.
6. The apparatus as claimed in claim 1, wherein said control system is connected to and controls each of said liquid level sensor, said temperature sensor, said non-leakage pump and said automatic valve.
7. The apparatus as claimed in claim 1, wherein the condenser is provided with a cooling water inlet pipe, a cooling water outlet pipe, and a condensed liquid pipe; and conveying the organic waste gas discharged by the distillation/decompression evaporator to a condenser for condensation through a pipeline, and collecting the condensate to an organic solvent storage tank through a condensate pipe.
8. The apparatus as claimed in claim 1, further comprising an oven and a condenser connected to each other via a pipe, wherein the oven is provided with an exhaust fan, and the condenser is provided with a cooling water inlet pipe, a cooling water outlet pipe, and a cooling liquid pipe connected to the organic solvent storage tank.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202123145451.9U CN216377846U (en) | 2021-12-14 | 2021-12-14 | Separating device for color photoresist stripping waste liquid |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202123145451.9U CN216377846U (en) | 2021-12-14 | 2021-12-14 | Separating device for color photoresist stripping waste liquid |
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| Publication Number | Publication Date |
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| CN216377846U true CN216377846U (en) | 2022-04-26 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202123145451.9U Active CN216377846U (en) | 2021-12-14 | 2021-12-14 | Separating device for color photoresist stripping waste liquid |
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| CN (1) | CN216377846U (en) |
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2021
- 2021-12-14 CN CN202123145451.9U patent/CN216377846U/en active Active
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