CN216369389U

CN216369389U - Special cleaning equipment for wafer storage box processing

Info

Publication number: CN216369389U
Application number: CN202123122013.0U
Authority: CN
Inventors: 刘建蔚
Original assignee: Kunshan Xingyuhong Machinery Technology Co ltd
Current assignee: Kunshan Xingyuhong Machinery Technology Co ltd
Priority date: 2021-12-14
Filing date: 2021-12-14
Publication date: 2022-04-26
Anticipated expiration: 2031-12-14

Abstract

The utility model discloses special cleaning equipment for processing a wafer storage box, which comprises a main body, wherein a display screen is arranged on the surface of the main body, a fixed plate is fixed on the surface of the main body relative to the top of the display screen, a first sliding groove is formed in the surface of the fixed plate, a second sliding groove is formed in the top of the fixed plate, a first sliding block with an L-shaped structure in cross section is arranged on one side of the fixed plate, and a scraper is fixed at the bottom of the first sliding block; wipe through the scraper blade and the sponge of design, can clear up the dust and the foreign matter on display screen surface, avoid influencing staff's observation and operation, through the fixed plate of design, first sliding tray, first sliding block, gag lever post, second sliding block, second sliding tray, first connecting plate, kelly, make things convenient for the scraper blade to slide, also convenient dismantles the scraper blade simultaneously and gets off and wash, can use repeatedly.

Description

Special cleaning equipment for wafer storage box processing

Technical Field

The utility model belongs to the technical field of cleaning equipment, and particularly relates to special cleaning equipment for processing a wafer storage box.

Background

The wafer storage box mainly plays a role in placing and conveying wafers in semiconductor production, and in order to simplify transportation and reduce the risk of contamination as much as possible, a wafer storage box is used by a chip manufacturer to carry and store wafers, and a cleaning device is used to clean the surface of the wafer storage box during the processing process.

When the existing cleaning equipment special for processing the wafer storage box is used, more dust is easily attached to the surface of a display screen on the cleaning equipment, the cleaning is inconvenient, the observation and the operation of workers are influenced, the connection of a pipeline and a water outlet is more troublesome, the connection step is not simple enough, the connection efficiency is lower, and therefore the problem needs to be solved by designing a structure.

SUMMERY OF THE UTILITY MODEL

The utility model aims to provide a special cleaning device for processing a wafer storage box, which is used for solving the problems in the background technology.

In order to achieve the purpose, the utility model provides the following technical scheme: a cleaning device special for processing a wafer storage box comprises a main body, wherein a display screen is arranged on the surface of the main body, a fixing plate is fixed on the surface of the main body relative to the top of the display screen, a first sliding groove is formed in the surface of the fixing plate, a second sliding groove is formed in the top of the fixing plate, a first sliding block with an L-shaped structure in cross section is arranged on one side of the fixing plate, a scraping plate is fixed at the bottom of the first sliding block, a sponge wiper is fixed on the inner side of the scraping plate and is tightly attached to the surface of the main body, a second sliding block is fixed on the inner side of the first sliding block and is embedded into the first sliding groove, a first connecting plate is fixed on the inner side of the first sliding block relative to the top of the second sliding block, a first through hole penetrates through the surface of one side of the first connecting plate, and a clamping rod with an L-shaped structure in cross section penetrates through the inner side of the first through hole, the bottom end of the clamping rod is embedded into the second sliding groove, and a pull ring is fixed to the top of the clamping rod.

Preferably, a second through hole penetrates through the surface of one side of the clamping rod, a limiting rod with a T-shaped cross section penetrates through the second through hole, the bottom end of the limiting rod is fixedly connected with the fixing plate, a first spring is connected between the clamping rod and the fixing plate, and the first spring is sleeved on the surface of the limiting rod.

Preferably, the surface of the second sliding block is provided with a plurality of balls, and the balls are in rolling connection with the inner wall surface of the first sliding groove.

Preferably, one side of main part is provided with the delivery port, the one end of delivery port is provided with the pipeline, the one end of delivery port is fixed with the connecting pipe, the connecting pipe embedding is to the inboard of pipeline, the surface symmetry of pipeline is fixed with two arcs, the arc wall has been seted up on the surface of arc, the surface symmetry of delivery port is fixed with two fixed blocks, the third sliding tray has been seted up on the top of fixed block, the inside embedding of third sliding tray has the plastic mass, the top of plastic mass is fixed with the second connecting plate, the top of second connecting plate is fixed with draws the piece, the bottom of second connecting plate is fixed with the metal block, the bottom mounting of metal block has the arc fixture block, the arc fixture block embedding is to the inside that corresponds the arc wall.

Preferably, the bottom end surface of the plastic block is provided with a spring groove, and a second spring is connected between the inner wall of the spring groove and the inner wall of the third sliding groove.

Preferably, two limiting grooves are symmetrically formed in the inner walls of the two sides of the third sliding groove, two retaining piles are symmetrically fixed to the two sides of the plastic block, and the retaining piles are embedded into the corresponding limiting grooves.

Preferably, a sealing gasket is fixed on the surface of the connecting pipe, and the sealing gasket is tightly attached to the inner side surface of the pipeline.

Compared with the prior art, the utility model has the beneficial effects that:

1. wipe through the scraper blade and the sponge of design, can clear up the dust and the foreign matter on display screen surface, avoid influencing staff's observation and operation, through the fixed plate of design, first sliding tray, first sliding block, gag lever post, second sliding block, second sliding tray, first connecting plate, kelly, make things convenient for the scraper blade to slide, also convenient dismantles the scraper blade simultaneously and gets off and wash, can use repeatedly.

2. Through the arc, arc fixture block, second connecting plate, fixed block, third sliding tray, the plastic pellet of design, conveniently be connected delivery port and pipeline, easy operation, the time of cost is few, has improved the efficiency of connecting, and sealed the pad through the design can improve the leakproofness of junction.

Drawings

FIG. 1 is a schematic structural view of the present invention;

FIG. 2 is an enlarged view of area A of FIG. 1 in accordance with the present invention;

FIG. 3 is a right side cross-sectional view of area A of FIG. 1 in accordance with the present invention;

FIG. 4 is an enlarged view of area B of FIG. 1 in accordance with the present invention;

FIG. 5 is a front cross-sectional view of area B of FIG. 1 in accordance with the present invention;

FIG. 6 is a left side cross-sectional view of the utility model taken in section B of FIG. 1;

in the figure: 1. a main body; 2. a fixing plate; 3. a first sliding groove; 4. a first slider; 5. a squeegee; 6. a water outlet; 7. a limiting rod; 8. a second slider; 9. a second sliding groove; 10. a first connecting plate; 11. a clamping rod; 12. an arc-shaped plate; 13. an arc-shaped slot; 14. an arc-shaped fixture block; 15. a second connecting plate; 16. a fixed block; 17. a third sliding groove; 18. a plastic block; 19. a connecting pipe; 20. and a gasket.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

Examples

Referring to fig. 1 to 6, the present invention provides a technical solution: a cleaning device special for processing a wafer storage box comprises a main body 1, wherein a display screen is arranged on the surface of the main body 1, a fixing plate 2 is fixed on the surface of the main body 1 relative to the top of the display screen, a first sliding groove 3 is formed in the surface of the fixing plate 2, the first sliding groove 3 facilitates the sliding of a second sliding block 8, a second sliding groove 9 is formed in the top of the fixing plate 2, the second sliding groove 9 facilitates the sliding of a clamping rod 11, a first sliding block 4 with an L-shaped cross section is arranged on one side of the fixing plate 2, the first sliding block 4 can drive a scraper 5 to slide in the same direction, a scraper 5 is fixed at the bottom of the first sliding block 4, the scraper 5 is used as a carrier of a sponge wiper, a sponge wiper is fixed on the inner side of the scraper 5, the sponge wiper can clean dust and foreign matters on the surface of the display screen, the observation and operation of workers are prevented from being influenced, and the sponge wiper is tightly attached to the surface of the main body 1, a second sliding block 8 is fixed on the inner side of the first sliding block 4, the second sliding block 8 is embedded into the first sliding groove 3, a first connecting plate 10 is fixed on the inner side of the first sliding block 4 opposite to the top of the second sliding block 8, a first through hole is formed in one side surface of the first connecting plate 10 in a penetrating manner, a clamping rod 11 with an L-shaped cross section is arranged in the first through hole in a penetrating manner, the bottom end of the clamping rod 11 is embedded into the second sliding groove 9, a pull ring is fixed on the top of the clamping rod 11 and can drive the clamping rod 11 to move in the same direction, a second through hole is formed in one side surface of the clamping rod 11 in a penetrating manner, a limiting rod 7 with a T-shaped cross section is arranged in the second through hole in a penetrating manner, the limiting rod 7 can limit the upward sliding distance of the clamping rod 11, the bottom end of the limiting rod 7 is fixedly connected with the fixed plate 2, and a first spring is connected between the clamping rod 11 and the fixed plate 2, first spring housing is established on the surface of gag lever post 7, and the surface of second sliding block 8 is provided with a plurality of balls, and the ball can reduce the frictional force when second sliding block 8 slides, and the ball is connected with the inner wall surface roll of first sliding tray 3.

In this embodiment, preferably, one side of the main body 1 is provided with a water outlet 6, one end of the water outlet 6 is provided with a pipeline, one end of the water outlet 6 is fixed with a connecting pipe 19, the connecting pipe 19 is embedded into the inner side of the pipeline, two arc-shaped plates 12 are symmetrically fixed on the surface of the pipeline, arc-shaped grooves 13 are formed on the surfaces of the arc-shaped plates 12, the arc-shaped grooves 13 can accommodate arc-shaped clamping blocks 14, two fixing blocks 16 are symmetrically fixed on the surface of the water outlet 6, a third sliding groove 17 is formed in the top end of each fixing block 16, the third sliding groove 17 facilitates sliding of a plastic block 18, the plastic block 18 is embedded inside the third sliding groove 17, a second connecting plate 15 is fixed on the top end of each plastic block 18, a pulling block is fixed on the top end of the second connecting plate 15, the pulling block can drive the second connecting plate 15 to move in the same direction, a metal block is fixed on the bottom of the second connecting plate 15, the arc-shaped clamping blocks 14 are fixed on the bottom end of the metal block, the arc-shaped clamping block 14 is embedded into the corresponding arc-shaped groove 13, a spring groove is formed in the bottom end surface of the plastic block 18, a second spring is connected between the inner wall of the spring groove and the inner wall of the third sliding groove 17, two limiting grooves are symmetrically formed in the inner walls of the two sides of the third sliding groove 17, two retaining piles are symmetrically fixed to the two sides of the plastic block 18, the sliding distance of the plastic block 18 can be limited by the retaining piles and the limiting grooves, the retaining piles are embedded into the corresponding limiting grooves, a sealing gasket 20 is fixed to the surface of the connecting pipe 19, the sealing gasket 20 can improve the sealing performance of the connecting position, and the sealing gasket 20 is tightly attached to the inner side surface of the pipeline; this structure is convenient to be connected delivery port 6 and pipeline, easy operation, and the time of cost is few, has improved the efficiency of connecting.

The working principle and the using process of the utility model are as follows: when the utility model is used, firstly, the pipeline is connected with the water outlet 6, the pulling block is pulled upwards to drive the second connecting plate 15 and the arc-shaped clamping block 14 to move in the same direction, the second connecting plate 15 also drives the plastic block 18 to move in the same direction in the third sliding groove 17 when moving, the plastic block 18 stretches the second spring to extend the second spring under stress until the blocking piles at the two sides of the plastic block 18 are abutted against the inner wall of the other side of the limiting groove, the plastic block 18 can not slide again, then the connecting pipe 19 at one end of the water outlet 6 is embedded into the inner side of the pipeline, the sealing gasket 20 on the surface of the connecting pipe 19 is clung to the surface of the inner wall of the pipeline, the pulling block is loosened, after the second spring loses the pulling force, the plastic block 18 is pulled reversely to drive the arc-shaped clamping block 14 to be embedded into the arc-shaped groove 13 through the second connecting plate 15, the water outlet 6 is connected with the pipeline, the structure is convenient for connecting the water outlet 6 with a pipeline, the operation is simple, the time spent is short, and the connecting efficiency is improved; if more dust is adhered to the surface of the display screen, the first sliding block 4 can be shifted to drive the scraper 5 to slide in the same direction, the sponge wiper on the inner side of the scraper 5 is tightly attached to the surface of the display screen to slide, the first sliding block 4 can slide while driving the first connecting plate 10 and the second sliding block 8 to slide in the same direction, the first connecting plate 10 drives the clamping rod 11 to slide in the same direction in the second sliding groove 9, if the scraper 5 and the sponge wiper need to be detached for cleaning, the pull ring can be pulled upwards to drive the clamping rod 11 to slide out of the second sliding groove 9, the clamping rod 11 stretches the first spring to enable the first spring to be stressed and extended, then the first sliding block 4 is pulled to one side to drive the second sliding block 8 to slide out of the first sliding groove 3, the scraper 5 and the sponge wiper are detached, and the structure can clean the dust and foreign matters on the surface of the display screen, avoid influencing staff's observation and operation, make things convenient for scraper blade 5 to slide, also make things convenient for simultaneously to dismantle scraper blade 5 and wash, can use repeatedly.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the utility model, the scope of which is defined in the appended claims and their equivalents.

Claims

1. The utility model provides a special cleaning equipment of box processing is stored to wafer, includes main part (1), its characterized in that: the surface of the main body (1) is provided with a display screen, the surface of the main body (1) is fixed with a fixed plate (2) relative to the top of the display screen, the surface of the fixed plate (2) is provided with a first sliding groove (3), the top of the fixed plate (2) is provided with a second sliding groove (9), one side of the fixed plate (2) is provided with a first sliding block (4) with an L-shaped structure in cross section, the bottom of the first sliding block (4) is fixed with a scraping plate (5), the inner side of the scraping plate (5) is fixed with a sponge eraser, the sponge eraser is tightly attached to the surface of the main body (1), the inner side of the first sliding block (4) is fixed with a second sliding block (8), the second sliding block (8) is embedded into the first sliding groove (3), the inner side of the first sliding block (4) is fixed with a first connecting plate (10) relative to the top of the second sliding block (8), a first through hole penetrates through the surface of one side of the first connecting plate (10), a clamping rod (11) with an L-shaped cross section penetrates through the first through hole, the bottom end of the clamping rod (11) is embedded into the second sliding groove (9), and a pull ring is fixed to the top of the clamping rod (11).

2. The special cleaning apparatus for wafer storage box processing as claimed in claim 1, wherein: the utility model discloses a stop lever, including the card pole (11), the inside of second through-hole has run through gag lever post (7) that the cross-section is "T" type structure, the bottom and fixed plate (2) fixed connection of gag lever post (7), be connected with first spring between card pole (11) and fixed plate (2), first spring housing is established on the surface of gag lever post (7).

3. The special cleaning apparatus for wafer storage box processing as claimed in claim 1, wherein: the surface of the second sliding block (8) is provided with a plurality of balls, and the balls are in rolling connection with the inner wall surface of the first sliding groove (3).

4. The special cleaning apparatus for wafer storage box processing as claimed in claim 1, wherein: a water outlet (6) is arranged on one side of the main body (1), a pipeline is arranged at one end of the water outlet (6), a connecting pipe (19) is fixed at one end of the water outlet (6), the connecting pipe (19) is embedded into the inner side of the pipeline, two arc-shaped plates (12) are symmetrically fixed on the surface of the pipeline, an arc-shaped groove (13) is formed in the surface of each arc-shaped plate (12), two fixing blocks (16) are symmetrically fixed on the surface of the water outlet (6), a third sliding groove (17) is formed in the top end of each fixing block (16), a plastic block (18) is embedded into each third sliding groove (17), a second connecting plate (15) is fixed at the top end of each plastic block (18), a pull block is fixed at the top end of each second connecting plate (15), a metal block is fixed at the bottom end of each second connecting plate (15), and an arc-shaped clamping block (14) is fixed at the bottom end of each metal block, the arc-shaped clamping blocks (14) are embedded into the corresponding arc-shaped grooves (13).

5. The special cleaning apparatus for wafer storage box processing as claimed in claim 4, wherein: the bottom end surface of the plastic block (18) is provided with a spring groove, and a second spring is connected between the inner wall of the spring groove and the inner wall of the third sliding groove (17).

6. The special cleaning apparatus for wafer storage box processing as claimed in claim 4, wherein: two limiting grooves are symmetrically formed in the inner walls of the two sides of the third sliding groove (17), two retaining piles are symmetrically fixed to the two sides of the plastic block (18), and the retaining piles are embedded into the corresponding limiting grooves.

7. The special cleaning apparatus for wafer storage box processing as claimed in claim 4, wherein: and a sealing gasket (20) is fixed on the surface of the connecting pipe (19), and the sealing gasket (20) is tightly attached to the inner side surface of the pipeline.