CN216354102U

CN216354102U - Vacuum fixed bearing platform special for processing multilayer wafer storage box

Info

Publication number: CN216354102U
Application number: CN202123121867.7U
Authority: CN
Inventors: 刘建蔚
Original assignee: Kunshan Xingyuhong Machinery Technology Co ltd
Current assignee: Kunshan Xingyuhong Machinery Technology Co ltd
Priority date: 2021-12-14
Filing date: 2021-12-14
Publication date: 2022-04-19
Anticipated expiration: 2031-12-14

Abstract

The utility model discloses a special fixed bearing table for processing a vacuum multilayer wafer storage box, which comprises a bearing table body, a storage box body and fixing mechanisms, wherein the storage box body is placed at the top of the bearing table body, the two fixing mechanisms are arranged on the surface of the bearing table body and are respectively positioned at two sides of the storage box body, each fixing mechanism comprises a fixing plate, a rotating rod, a vertical plate, an adjusting assembly and a T-shaped screw rod, the fixing plate is fixed on the front surface of the bearing table body through a screw, the rotating rod is vertically arranged on the fixing plate, and the upper end of the vertical plate is arranged at the upper end of the rotating rod through the adjusting assembly; the fixing mechanisms are arranged, so that the storage box body placed and processed is not influenced, the storage box body placed at the top of the bearing table body can be clamped and fixed, the condition that the processing precision of the storage box body is influenced due to deviation caused by stress processing is avoided, and the clamping distance between the two fixing mechanisms can be adjusted according to the shape and the size of the storage box body.

Description

Vacuum fixed bearing platform special for processing multilayer wafer storage box

Technical Field

The utility model belongs to the technical field of processing of wafer storage boxes, and particularly relates to a special fixed bearing table for processing a multi-layer wafer storage box for vacuum.

Background

The wafer refers to a silicon wafer used for manufacturing a silicon semiconductor integrated circuit, and is called a wafer because the shape is circular; various circuit device structures can be fabricated on a silicon wafer to form an IC product with specific electrical functions. The vacuum multi-layer storage box is one of the tools for storing the wafers. The fixed bearing platform is one of the devices for placing and processing the vacuum multi-layer storage box.

The problem that the existing storage boxes are placed on a bearing table to be machined, the storage boxes are prone to toppling due to deviation of shapes or external force positions, subsequent force application machining is not facilitated, machining time of the storage boxes is prolonged, and machining precision is reduced is solved.

SUMMERY OF THE UTILITY MODEL

The utility model aims to provide a fixed bearing platform special for processing a vacuum multilayer wafer storage box, which aims to solve the problems that when some storage boxes provided in the background technology are placed on the bearing platform for processing, the storage boxes are likely to deviate and topple due to shapes or external force positions, the subsequent force application processing is not facilitated, the processing time of the storage boxes is prolonged, and the processing precision is reduced.

In order to achieve the purpose, the utility model provides the following technical scheme: the utility model provides a vacuum is with special fixed plummer of box processing is stored to multilayer wafer, includes the plummer body, storage box body and fixed establishment, storage box body places at the plummer body top, two fixed establishment installs and just is located storage box body both sides respectively at the plummer body surface, fixed establishment includes fixed plate, dwang, riser, adjusting part and T type screw rod, the fixed plate leads to the fix with screw at plummer body front surface, the dwang is vertical to be installed on the fixed plate, the riser upper end is passed through adjusting part and is installed in the dwang upper end, riser lower extreme surface vertical just closes soon and installs T type screw rod.

Preferably, the adjusting component comprises a clamping plate, a fixing shaft and a limiting bolt, the U-shaped clamping plate is fixed at the end part of the rotating rod, the fixing shaft is fixed inside the clamping plate, and the end part of the vertical plate is rotatably sleeved on the fixing shaft.

Preferably, the side surface of the clamping plate is provided with a plurality of through holes, and the limiting bolt penetrates through the through holes to be in threaded connection with the vertical plate.

Preferably, the vertical plate comprises an outer side plate, an inner side plate, a limiting ring and a fixing column, the end part of the outer side plate is rotatably installed in the adjusting assembly, the inner side plate is located on the outer side of the outer side plate, and the outer side plate and the inner side plate are movably connected through the limiting ring and the fixing column.

Preferably, the fixing column is fixed on the surface of the end part of the outer side plate, the end part of the fixing column penetrates through a rectangular hole formed in the surface of the inner side plate and is exposed to the outside, and the limiting ring is sleeved on the end part of the fixing column in a rotating fit mode and is in contact limiting with the surface of the inner side plate.

Preferably, the dwang includes fixed outer tube, activity interior pole and stop screw, fixed outer tube is vertical to be fixed on the fixed plate surface, activity interior pole activity is located fixed outer tube.

Preferably, the limiting screw is vertically and screwed on the fixed outer tube, and the inner end of the limiting screw is in surface contact with the movable inner rod for limiting.

Compared with the prior art, the utility model has the beneficial effects that:

(1) the fixing mechanisms are arranged, so that the storage box body placed and processed is not influenced, the storage box body placed at the top of the bearing table body can be clamped and fixed, the condition that the processing precision of the storage box body is influenced due to deviation caused by stress processing is avoided, and the clamping distance between the two fixing mechanisms can be adjusted according to the shape and the size of the storage box body.

(2) The length of the vertical plate can be conveniently adjusted by utilizing the adjustability of the length of the vertical plate according to needs, so that the position of the T-shaped screw rod is changed, the storage box body can be conveniently and subsequently clamped in a contact manner, and the installation and use range of the whole fixing mechanism is enlarged.

Drawings

FIG. 1 is a schematic structural view of the present invention;

FIG. 2 is a schematic structural view of the fixing mechanism of the present invention;

FIG. 3 is a schematic view of the adjusting assembly of the present invention;

FIG. 4 is a schematic structural view of a vertical plate according to the present invention;

FIG. 5 is a schematic view of the rotating lever of the present invention;

in the figure: 1. a carrying table body; 2. a storage box body; 3. a fixing mechanism; 31. a fixing plate; 32. rotating the rod; 321. fixing the outer tube; 322. a movable inner rod; 323. a limit screw; 33. a vertical plate; 331. an outer panel; 332. an inner side plate; 333. a limiting ring; 334. fixing a column; 34. an adjustment assembly; 341. clamping a plate; 342. a fixed shaft; 343. a limit bolt; 35. t-shaped screw.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

Referring to fig. 1-5, the present invention provides a technical solution: a fixed bearing platform special for processing a vacuum multilayer wafer storage box comprises a bearing platform body 1, a storage box body 2 and fixing mechanisms 3, wherein the storage box body 2 is placed at the top of the bearing platform body 1, the two fixing mechanisms 3 are arranged on the surface of the bearing platform body 1 and are respectively positioned at two sides of the storage box body 2, each fixing mechanism 3 comprises a fixing plate 31, a rotating rod 32, a vertical plate 33, an adjusting component 34 and a T-shaped screw rod 35, the fixing plate 31 is fixed on the front surface of the bearing platform body 1 through screws and can be detached subsequently, the rotating rod 32 is vertically arranged on the fixing plate 31, the upper end of the vertical plate 33 is arranged at the upper end of the rotating rod 32 through the adjusting component 34, the vertical plate 33 can rotate up and down and rotate in the horizontal direction, the T-shaped screw rod 35 is vertically and rotatably installed on the surface of the lower end of the vertical plate 33, the end part of the T-shaped screw rod 35 is in contact with and clamped with the surface of the storage box body 2, and the fixing mechanisms 3 are arranged, so that the placement and the processing of the storage box body 2 are not influenced, the storage box body 2 placed at the top of the bearing table body 1 can be clamped and fixed, the situation that the processing precision is influenced due to the fact that the storage box body 2 deviates in stress processing is avoided, and the clamping distance between the two fixing mechanisms 3 can be adjusted according to the shape and the size of the storage box body 2.

In this embodiment, preferably, adjusting part 34 includes cardboard 341, fixed axle 342 and spacing bolt 343, the cardboard 341 of U type is fixed at dwang 32 tip, cardboard 341 internal fixation has fixed axle 342, riser 33 tip rotates the cover and establishes on fixed axle 342, riser 33 can rotate adjusting position round fixed axle 342, a plurality of perforation have been seted up to cardboard 341 side, spacing bolt 343 passes perforation and riser 33 threaded connection, utilize spacing bolt 343 can fix the angular position of riser 33, through being provided with adjusting part 34, can be according to the work angle of 2 size adjustment risers 33 of storage box body, be convenient for follow-up T type screw 35 tip and the 2 surface contact chucking of storage box body.

In this embodiment, preferably, the vertical plate 33 includes an outer plate 331, an inner plate 332, a limiting ring 333 and a fixing post 334, the end of the outer plate 331 is rotatably installed in the adjusting assembly 34, the inner plate 332 is located outside the outer plate 331, the length between the two is adjustable, the two are movably connected through a limiting ring 333 and a fixing column 334, the fixing column 334 is fixed on the surface of the end part of the outer side plate 331, the end of the fixed column 334 passes through the rectangular hole formed on the surface of the inner side plate 332 and is exposed outside, the limiting ring 333 is sleeved at the end of the fixed column 334 in a screwing way and contacts with the surface of the inner side plate 332 for limiting, the distance between the inner side plate 332 and the outer side plate 331 is adjusted by utilizing the contact friction resistance, the length adjustability of the vertical plate 33 is convenient to adjust according to the requirement, therefore, the position of the T-shaped screw 35 is changed, the storage box body 2 is convenient to contact and clamp subsequently, and the installation and use range of the whole fixing mechanism 3 is enlarged.

In this embodiment, preferably, the rotating rod 32 includes a fixed outer tube 321, a movable inner rod 322 and a limit screw 323, the fixed outer tube 321 is vertically fixed on the surface of the fixed plate 31, the movable inner rod 322 is movably located in the fixed outer tube 321, the height between the fixed outer tube and the movable outer tube is adjustable, the limit screw 323 is vertically and rotatably installed on the fixed outer tube 321, the inner end of the limit screw 323 is in surface contact with the movable inner rod 322 for limitation, the position of the movable inner rod 322 can be fixed and limited by the limit screw 323, the rotating rod 32 is utilized, the height of the rotating rod 32 can be adjusted, the angle of the vertical plate 33 in the horizontal direction can be adjusted, and the subsequent T-shaped screw 35 can be conveniently clamped on the position of the storage box body 2.

The working principle and the using process of the utility model are as follows: when the utility model is used, the storage box body 2 is placed at the top of the bearing table body 1, the two fixing mechanisms 3 are fixed on the front surface of the bearing table body 1 through screws, the limit screw 323 is unscrewed, the height of the movable inner rod 322 is adjusted, the angle of the movable inner rod is adjusted through rotation, the position of the vertical plate 33 is changed, when the position is proper, the limit screw 323 is rotated to enable the inner end of the limit screw to be in contact with the surface of the movable inner rod 322 for limiting, the vertical plate 33 rotates around the fixed shaft 342, when the height of the T-shaped screw 35 is proper, the position of the vertical plate 33 is fixed through the limit screw 343, the end part of the T-shaped screw 35 is held to be in contact with the surface of the storage box body 2, the two opposite T-shaped screws 35 clamp and fix the storage box body 2, the subsequent processing of the storage box body 2 is convenient, through the arrangement of the fixing mechanisms 3, the storage box body 2 placed at the top of the bearing table body 1 can be clamped and fixed, the condition that the machining precision is influenced by the fact that the storage box body 2 deviates due to stress machining is avoided, and the clamping distance between the two fixing mechanisms 3 can be adjusted according to the shape and the size of the storage box body 2.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the utility model, the scope of which is defined in the appended claims and their equivalents.

Claims

1. The utility model provides a vacuum is with special fixed plummer of multilayer wafer storage box processing, includes the plummer body (1), storage box body (2) and fixed establishment (3), storage box body (2) are placed at plummer body (1) top, its characterized in that: two fixed establishment (3) are installed on bearing table body (1) surface and are located storage box body (2) both sides respectively, fixed establishment (3) are including fixed plate (31), dwang (32), riser (33), adjusting part (34) and T type screw rod (35), fixed plate (31) lead to the fix with screw at bearing table body (1) front surface, dwang (32) are vertical to be installed on fixed plate (31), install in dwang (32) upper end through adjusting part (34) riser (33) upper end, T type screw rod (35) are just closed soon to install to riser (33) lower extreme surface vertical.

2. The special fixed bearing platform for processing the vacuum multilayer wafer storage box according to claim 1, wherein: the adjusting assembly (34) comprises a clamping plate (341), a fixing shaft (342) and a limiting bolt (343), the U-shaped clamping plate (341) is fixed at the end of the rotating rod (32), the fixing shaft (342) is fixed inside the clamping plate (341), and the end of the vertical plate (33) is rotatably sleeved on the fixing shaft (342).

3. The special fixed bearing platform for processing the vacuum multi-layer wafer storage box according to claim 2, wherein: the side surface of the clamping plate (341) is provided with a plurality of through holes, and the limiting bolt (343) penetrates through the through holes to be in threaded connection with the vertical plate (33).

4. The special fixed bearing platform for processing the vacuum multilayer wafer storage box according to claim 1, wherein: the vertical plate (33) comprises an outer side plate (331), an inner side plate (332), a limiting ring (333) and a fixing column (334), wherein the end part of the outer side plate (331) is rotatably installed in the adjusting component (34), the inner side plate (332) is positioned on the outer side of the outer side plate (331), and the outer side plate (331) and the inner side plate are movably connected through the limiting ring (333) and the fixing column (334).

5. The special fixed bearing platform for processing the vacuum multi-layer wafer storage box according to claim 4, wherein: the fixing column (334) is fixed on the surface of the end part of the outer side plate (331), the end part of the fixing column (334) penetrates through a rectangular hole formed in the surface of the inner side plate (332) and is exposed to the outside, and the limiting ring (333) is sleeved on the end part of the fixing column (334) in a screwing mode and is in contact limiting with the surface of the inner side plate (332).

6. The special fixed bearing platform for processing the vacuum multilayer wafer storage box according to claim 1, wherein: dwang (32) are including fixed outer tube (321), activity interior pole (322) and stop screw (323), fixed outer tube (321) are vertical to be fixed on fixed plate (31) surface, activity interior pole (322) activity is located fixed outer tube (321).

7. The special fixed bearing platform for processing the vacuum multi-layer wafer storage box according to claim 6, wherein: the limiting screw (323) is vertically and screwed on the fixed outer tube (321), and the inner end of the limiting screw (323) is in surface contact limiting with the movable inner rod (322).