CN216348673U - Vacuum device for testing Q value of hemispherical harmonic oscillator - Google Patents
Vacuum device for testing Q value of hemispherical harmonic oscillator Download PDFInfo
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- CN216348673U CN216348673U CN202122819594.7U CN202122819594U CN216348673U CN 216348673 U CN216348673 U CN 216348673U CN 202122819594 U CN202122819594 U CN 202122819594U CN 216348673 U CN216348673 U CN 216348673U
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Abstract
A vacuum device for testing the Q value of a hemispherical harmonic oscillator is characterized in that a molecular pump and a mechanical pump are arranged at the lower part of a workbench, a vacuum cover is arranged at the upper part of the workbench, and a servo transmission mechanism is further arranged in the vacuum cover; the cavity of the vacuum cover is connected with the air inlet of the molecular pump through a corrugated pipe, the air outlet of the molecular pump is connected with the air inlet of the mechanical pump through a corrugated pipe, and the air outlet of the mechanical pump is connected with the outside atmosphere through a corrugated pipe; when the vacuum cover is vacuumized each time, the mechanical pump is started to pre-pump the molecular pump, and then the molecular pump is started to realize the vacuum cover vacuumizing. The utility model optimizes the volume of the vacuum cavity by calculating the load of the vacuum chamber, can ensure that the vacuum pump finishes the pumping and discharging of the vacuum chamber in the effective shortest time to reach the vacuum condition required by work, improves the work efficiency, reduces the work time of the vacuum pump, and prolongs the service life of the whole system.
Description
Technical Field
The utility model belongs to the technical field of vacuum devices for testing the Q value of a hemispherical harmonic oscillator, and relates to a vacuum device for testing the Q value of a hemispherical harmonic oscillator.
Background
The hemispherical resonator gyroscope is a gyroscope which is widely applied on the current aviation sky and has the greatest development prospect in the present generation, the material of the hemispherical resonator gyroscope is a thin-wall ultra-precise spherical cup-shaped part made of fused quartz glass, and the hemispherical resonator gyroscope is a core sensitive part of a Hemispherical Resonator Gyroscope (HRG), the hemispherical resonator gyroscope has the problem of enabling a hemispherical resonator spherical shell lip edge to form a four-wave amplitude vibration type by continuous vibration of the resonator at a resonance frequency, and the Q value of the hemispherical resonator is required to be more than 1000 ten thousand.
The formula of the Q value of the hemispherical harmonic oscillator is Q ═ pi f tau; q-hemisphere harmonic oscillator quality factor in the formula; f, the resonance frequency of the hemispherical harmonic oscillator; τ — resonance decay time.
In order to obtain the maximum Q value, the resonance of the hemispherical harmonic oscillator needs to be performed in a vacuum environment, and a Doppler laser vibrometer is used for testing. However, the existing domestic measurement methods are few, belong to the blank technical area, and the common vacuum transmission adopts a secondary sealing ring shaft system to directly enter a vacuum system, so that the sealing property is poor, and the vacuumizing time is long.
SUMMERY OF THE UTILITY MODEL
The utility model aims to provide a vacuum device for testing the Q value of a hemispherical harmonic oscillator, and solves the problems that in the prior art, vacuum transmission adopts a secondary sealing ring shaft system to directly enter a vacuum system, the sealing performance is poor, and the vacuumizing time is long
The utility model aims to provide a vacuum system device for testing the Q value of a hemispherical harmonic oscillator.
The technical scheme adopted by the utility model for solving the technical problems is as follows:
a vacuum device for testing the Q value of a hemispherical harmonic oscillator comprises a workbench 107 in a frame structure, wherein a molecular pump 105 and a mechanical pump 106 are arranged at the lower part of the workbench 107, a vacuum cover 101 is arranged at the upper part of the workbench 107, and a servo transmission mechanism is further arranged in the vacuum cover 101;
wherein:
the cavity of the vacuum cover 101 is connected with the air inlet of the molecular pump 105 through a corrugated pipe, the air outlet of the molecular pump 105 is connected with the air inlet of the mechanical pump 106 through a corrugated pipe, and the air outlet of the mechanical pump 106 is connected with the outside atmosphere through a corrugated pipe; when the vacuum cover 101 is vacuumized each time, the mechanical pump 106 is started to pre-pump the molecular pump 105, and then the molecular pump 105 is started to realize the vacuum pumping of the vacuum cover 101.
The mechanical pump 106 uses the principle of gas expansion, compression and discharge to pump gas out of the vacuum hood 101, periodically changes the volume of the suction cavity in the pump, makes the gas in the vacuum hood 101 continuously expand into the suction cavity through the gas inlet of the mechanical pump, and then discharges the gas out of the pump through the gas outlet by compression, thereby achieving the purpose of low-pressure pre-vacuum pumping.
The molecular pump 105 is a vacuum pump that uses a rotor rotating at a high speed to transmit momentum to gas molecules, and compresses the gas molecules to be driven to an exhaust port and then pumps the gas molecules away from the exhaust port.
The transmission between the vacuum environment of the vacuum cover 101 and the outside is realized through a servo transmission mechanism, and the servo transmission mechanism comprises a high-magnetic-density magnetic transmission coupler 301, a 606CET oilless ceramic bearing 302, a T5M series absolute value encoder motor 303 and a main shaft 304; the spindle 304 penetrates through the workbench 107, the high-magnetic-density magnetic transmission coupling 301 is embedded in the workbench 107, the spindle 304 penetrates through and extends out of the high-magnetic-density magnetic transmission coupling 301, and the high-magnetic-density magnetic transmission coupling 301 plays a role in torque transmission; the outer side of the main shaft 304 is provided with 606CET oilless ceramic bearing 302; the lower part of the main shaft 304 is provided with a T5M series absolute value encoder motor 303; spindle 304 rotates to transmit torque by means of a T5M series absolute encoder motor 303.
The utility model also has the following additional technical features:
the technical scheme of the utility model is further specifically optimized as follows: the outer side of the vacuum cover 101 is provided with an electric cylinder 403, the electric cylinder 403 is an automatic lifting mechanism, the bottom of the electric cylinder 403 is installed on the workbench 107, the top end of a lifting rod of the electric cylinder 403 is connected with the vacuum cover 101 in a hinged mode, and the electric cylinder 403 moves up and down to drive the vacuum cover 101 to move up and down, so that the automatic lifting function of the vacuum cover 101 is realized.
The technical scheme of the utility model is further specifically optimized as follows: a convex pressing platform 203 is arranged at the bottom of the vacuum cover 101, and a circle of sealing ring 201 is arranged at the bottom of the pressing platform 203; four pressing pliers 202 are arranged on the workbench 107 corresponding to the bottom of the vacuum cover 101, the four pressing pliers 202 are distributed on the periphery of the pressing platform 203, the pressing platform 203 is locked downwards, and meanwhile, the sealing ring 201 is pressed to keep the sealing state of the vacuum cover 101.
The technical scheme of the utility model is further specifically optimized as follows: the vacuum cover 101 is made of high-quality 304 stainless steel materials, a laser incidence window 103 is arranged at the top of the vacuum cover 101, and a vacuum observation window 102 is arranged on the side face of the vacuum cover 101.
The technical scheme of the utility model is further specifically optimized as follows: the T5M series absolute encoder motor 303 includes a 1:100 speed reducer; a zero position switch and an angle sensor are arranged on a rotating shaft of the 1:100 speed reducer and used for detecting angles and positions. The zero position switch ensures that the motor can return to an absolute zero position every time, and ensures that the absolute positions of rotation every time are consistent; the angle sensor measures the rotating angle of the motor by detecting the rotating angle of the motor, and the precision of the rotating angle of the motor is ensured.
The technical scheme of the utility model is further specifically optimized as follows: the upper portion of main shaft 304 is installed the frock, and the frock is lived the part centre gripping.
The technical scheme of the utility model is further specifically optimized as follows: a doppler laser vibrometer pan-tilt 104 is also mounted on one side of the table 107 for laser alignment.
Compared with the prior art, the utility model has the advantages that:
the method has the advantages that: the utility model facilitates manual operation, simultaneously ensures the service life of the vacuum system and better guarantees the test. The utility model provides a self-suction negative pressure self-maintaining self-adaptive principle, and the airtightness of a vacuum cover is ensured. And the high-magnetic-density magnetic transmission coupler 301 is adopted, so that the transmission tightness is ensured. Install electronic jar 403 automatic lifting mechanism additional, convenient operation also ensures the leakproofness of vacuum hood simultaneously.
The method has the advantages that: the utility model optimizes the volume of the vacuum cavity by calculating the load of the vacuum chamber, can ensure that the vacuum pump finishes the pumping and discharging of the vacuum chamber in the effective shortest time to reach the vacuum condition required by work, improves the work efficiency, reduces the work time of the vacuum pump, and prolongs the service life of the whole system.
Additional aspects and advantages of the utility model will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the utility model.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.
FIG. 1 is a schematic view of the overall sealing structure of the vacuum chamber of the present invention;
FIG. 2 is a schematic diagram of a self-suction negative pressure self-sustaining adaptive structure of the vacuum hood of the present invention;
FIG. 3 is a schematic view of the servo transmission mechanism and an oil-free ceramic bearing structure of the present invention;
FIG. 4 is a schematic view of the vacuum hood lifting device of the present invention;
FIG. 5 is a schematic diagram of a laser alignment structure according to the present invention.
The same reference numbers will be used throughout the drawings to refer to the same or like elements or structures, wherein: 101. a vacuum hood; 102. A vacuum observation window; 103. a laser entrance window; 104. a holder; 105. a molecular pump; 106. a mechanical pump; 107. a work table; 201. a seal ring; 202. pressing pliers; 203. pressing the table; 301. a high magnetic density magnetic transmission coupling; 302. 606CET oilless ceramic bearings; 303. an absolute value encoder motor; 304. a main shaft; 401. incident light; 402. reflecting the light; 403. an electric cylinder.
Detailed Description
Exemplary embodiments of the present disclosure will be described in more detail below with reference to the accompanying drawings, in order that the present disclosure may be more fully understood and fully conveyed to those skilled in the art. While the exemplary embodiments of the present disclosure are shown in the drawings, it should be understood that the utility model is not limited to the embodiments set forth herein.
A vacuum device for testing the Q value of a hemispherical harmonic oscillator comprises a workbench 107 in a frame structure, wherein a molecular pump 105 and a mechanical pump 106 are arranged at the lower part of the workbench 107, a vacuum cover 101 is arranged at the upper part of the workbench 107, and a servo transmission mechanism is further arranged in the vacuum cover 101; a doppler laser vibrometer pan-tilt 104 is also mounted on one side of the table 107 for laser alignment.
The vacuum cover 101 is made of high-quality 304 stainless steel materials, so that the weight and the stability of the vacuum cover are increased, and self-suction negative pressure self-maintaining self-adaptation of the vacuum chamber is ensured. In order to meet the requirements that the vacuum degree of the vacuum chamber is not more than 1E-4Pa and the vacuum-pumping time is not more than 40min, a minimum volume design method is adopted, and the design size is
The space is small, and the quality is big, guarantees the speed of evacuation. The top of the vacuum enclosure 101 is provided with a laser light entrance window 103, and the side of the vacuum enclosure 101 is provided with a vacuum observation window 102.
A convex pressing platform 203 is arranged at the bottom of the vacuum cover 101, and a circle of sealing ring 201 is arranged at the bottom of the pressing platform 203; four pressing pliers 202 are arranged on the workbench 107 corresponding to the bottom of the vacuum cover 101, the four pressing pliers 202 are distributed on the periphery of the pressing platform 203, the pressing platform 203 is locked downwards, and meanwhile, the sealing ring 201 is pressed to keep the sealing state of the vacuum cover 101. Because the negative pressure of work in the vacuum cover reaches 1E-4Pa, the vacuum degree is extremely high, the work is frequent, the vacuum pump needs to be opened by releasing pressure when a workpiece is assembled and disassembled, and when the vacuum is pumped again, the vacuum chamber is generally locked by the pressure clamp 202 when the pressure is higher than 10Pa, so that the outside air can not enter the cover, and the tightness and the vacuum pumping are guaranteed. If the sealing performance is not good, the vacuum pumping is not easy. The method greatly consumes time to ensure the cleanliness of the surfaces of the vacuum cover and the bottom large plate and the integrity of the rubber sealing ring 201, compresses the vacuum chamber through the self gravity of the cover, and has self-adaptive adsorption and greatly improved vacuumizing efficiency.
The outer side of the vacuum cover 101 is provided with an electric cylinder 403, the electric cylinder 403 is an automatic lifting mechanism, the bottom of the electric cylinder 403 is installed on the workbench 107, the top end of a lifting rod of the electric cylinder 403 is connected with the vacuum cover 101 in a hinged mode, and the electric cylinder 403 moves up and down to drive the vacuum cover 101 to move up and down, so that the automatic lifting function of the vacuum cover 101 is realized. The vacuum cover 101 is automatically lifted by the electric cylinder 403, so that the position inconsistency caused by artificial factors is guaranteed, the consistency of the incident angle position and the reflection angle position of different parts after clamping is realized, the repeatability of the laser incident 401 and reflection 402 angles is guaranteed, the accuracy and the testing efficiency of Q value testing are greatly improved, and the testing accuracy is guaranteed. The vacuum cover 101 has residual negative pressure after pressure relief at every time, and an operator is not easy to open the vacuum cover due to the negative pressure adsorption problem, and a lifting mechanism is adopted to facilitate manual operation. The error caused by manual operation is avoided, and the safety of the equipment is greatly improved.
The cavity of the vacuum cover 101 is connected with the air inlet of the molecular pump 105 through a corrugated pipe, the air outlet of the molecular pump 105 is connected with the air inlet of the mechanical pump 106 through a corrugated pipe, and the air outlet of the mechanical pump 106 is connected with the outside atmosphere through a corrugated pipe; when the vacuum cover 101 is vacuumized each time, the mechanical pump 106 is started to pre-pump the molecular pump 105, and then the molecular pump 105 is started to realize the vacuum pumping of the vacuum cover 101.
The mechanical pump 106 uses the principle of gas expansion, compression and discharge to pump gas out of the vacuum hood 101, periodically changes the volume of the suction cavity in the pump, makes the gas in the vacuum hood 101 continuously expand into the suction cavity through the gas inlet of the mechanical pump, and then discharges the gas out of the pump through the gas outlet by compression, thereby achieving the purpose of low-pressure pre-vacuum pumping.
The molecular pump 105 is a vacuum pump that uses a rotor rotating at a high speed to transmit momentum to gas molecules, and compresses the gas molecules to be driven to an exhaust port and then pumps the gas molecules away from the exhaust port.
The transmission between the vacuum environment of the vacuum cover 101 and the outside is realized through a servo transmission mechanism, and the servo transmission mechanism comprises a high-magnetic-density magnetic transmission coupler 301, a 606CET oilless ceramic bearing 302, a T5M series absolute value encoder motor 303 and a main shaft 304; the spindle 304 penetrates through the workbench 107, the high-magnetic-density magnetic transmission coupler 301 is embedded in the workbench 107, the high-magnetic-density magnetic transmission coupler 301 can solve the sealing problem caused by incomplete sealing of the sealing ring and the problem of later maintenance, the problems of shaft seal leakage and maintenance caused by the use of the shaft seal are avoided, and the overall sealing performance and large-torque transmission of the vacuum chamber are guaranteed. The main shaft 304 penetrates and extends out of the high-magnetic-density magnetic transmission coupler 301, and the high-magnetic-density magnetic transmission coupler 301 plays a role in transmitting torque; the 606CET oilless ceramic bearing 302 and the 606CET oilless ceramic bearing 302 are arranged on the outer side of the main shaft 304, and due to the unique oilless self-lubricating property of the ceramic material, the problem that a common bearing cannot realize lubrication in an ultrahigh vacuum environment can be solved; the upper portion of main shaft 304 is installed the frock, and the frock is lived the part centre gripping. The lower part of the main shaft 304 is provided with a T5M series absolute value encoder motor 303; spindle 304 rotates to transmit torque by means of a T5M series absolute encoder motor 303.
The T5M series absolute encoder motor 303 includes a 1:100 speed reducer; a zero position switch and an angle sensor are arranged on a rotating shaft of the 1:100 speed reducer and used for detecting angles and positions. The zero position switch ensures that the motor can return to an absolute zero position every time, and ensures that the absolute positions of rotation every time are consistent; the angle sensor measures the rotating angle of the motor by detecting the rotating angle of the motor, and the precision of the rotating angle of the motor is ensured. In order to ensure that the shafting runout of the rotating device for holding the hemispherical harmonic oscillator is not more than 0.01mm, the repeated positioning precision is not more than 0.01mm, the rotating device can rotate continuously and can also rotate to set 8 positions, the rotating angle needs to be displayed by numbers, and the precision is not more than 0.02 degrees. The angle information may be transmitted. An absolute value encoder servo motor 303 is adopted for direct drive and a high-precision outer ring rotating shaft system, and the bearings are controlled by an oilless ceramic bearing 301 and a PLC.
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention are clearly and completely described above with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are a part of the embodiments of the present invention, but not all of the embodiments. The components of embodiments of the present invention generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations.
Thus, the above detailed description of the embodiments of the utility model presented in the drawings is not intended to limit the scope of the utility model as claimed, but is merely representative of selected embodiments of the utility model. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Claims (7)
1. A vacuum device for testing the Q value of a hemispherical harmonic oscillator is characterized in that:
the device comprises a workbench (107) in a frame structure, wherein a molecular pump (105) and a mechanical pump (106) are arranged at the lower part of the workbench (107), a vacuum cover (101) is arranged at the upper part of the workbench (107), and a servo transmission mechanism is also arranged in the vacuum cover (101);
wherein:
the cavity of the vacuum cover (101) is connected with the air inlet of the molecular pump (105) through a corrugated pipe, the air outlet of the molecular pump (105) is connected with the air inlet of the mechanical pump (106) through a corrugated pipe, and the air outlet of the mechanical pump (106) is connected with the outside atmosphere through a corrugated pipe;
the transmission between the vacuum environment of the vacuum cover (101) and the outside is realized through a servo transmission mechanism, and the servo transmission mechanism comprises a high-magnetic-density magnetic transmission coupling (301), a 606CET oilless ceramic bearing (302), a T5M series absolute value encoder motor (303) and a main shaft (304); the spindle (304) penetrates through the workbench (107), the high-magnetic-density magnetic transmission coupling (301) is embedded in the workbench (107), the spindle (304) penetrates through and extends out of the high-magnetic-density magnetic transmission coupling (301), and the high-magnetic-density magnetic transmission coupling (301) plays a role in transmitting torque; a 606CET oilless ceramic bearing (302) is arranged on the outer side of the main shaft (304); a T5M series absolute value encoder motor (303) is arranged at the lower part of the main shaft (304); the spindle (304) rotates to transmit torque by means of a T5M series absolute encoder motor (303).
2. The vacuum device for testing the Q value of a hemispherical harmonic oscillator of claim 1, wherein: an electric cylinder (403) is arranged on the outer side of the vacuum cover (101), the electric cylinder (403) is an automatic lifting mechanism, the bottom of the electric cylinder (403) is installed on the workbench (107), and the top end of a lifting rod of the electric cylinder (403) is connected with the vacuum cover (101) in a hinged mode.
3. The vacuum device for testing the Q value of a hemispherical harmonic oscillator of claim 1, wherein: a convex pressing platform (203) is installed at the bottom of the vacuum cover (101), and a circle of sealing ring (201) is arranged at the bottom of the pressing platform (203); four pressing pliers (202) are installed on a workbench (107) corresponding to the bottom of the vacuum cover (101), the four pressing pliers (202) are distributed on the periphery of a pressing table (203), and the pressing table (203) is locked downwards and simultaneously presses a sealing ring (201) to keep the sealing state of the vacuum cover (101).
4. The vacuum device for testing the Q value of a hemispherical harmonic oscillator of claim 1, wherein: the top of the vacuum cover (101) is provided with a laser entrance window (103), and the side surface of the vacuum cover (101) is provided with a vacuum observation window (102).
5. The vacuum device for testing the Q value of a hemispherical harmonic oscillator of claim 1, wherein: the T5M series absolute value encoder motor (303) comprises a 1:100 speed reducer; a zero position switch and an angle sensor are arranged on a rotating shaft of the 1:100 speed reducer.
6. The vacuum device for testing the Q value of a hemispherical harmonic oscillator of claim 1, wherein: the upper portion of main shaft (304) is installed the frock, and the frock is lived the part centre gripping.
7. The vacuum device for testing the Q value of a hemispherical harmonic oscillator of claim 1, wherein: and a Doppler laser vibrometer holder (104) is also arranged on one side of the workbench (107).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122819594.7U CN216348673U (en) | 2021-11-17 | 2021-11-17 | Vacuum device for testing Q value of hemispherical harmonic oscillator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122819594.7U CN216348673U (en) | 2021-11-17 | 2021-11-17 | Vacuum device for testing Q value of hemispherical harmonic oscillator |
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| Publication Number | Publication Date |
|---|---|
| CN216348673U true CN216348673U (en) | 2022-04-19 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202122819594.7U Active CN216348673U (en) | 2021-11-17 | 2021-11-17 | Vacuum device for testing Q value of hemispherical harmonic oscillator |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN216348673U (en) |
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2021
- 2021-11-17 CN CN202122819594.7U patent/CN216348673U/en active Active
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