CN216323689U - Be used for etching machine gas distributor belt cleaning device - Google Patents

Be used for etching machine gas distributor belt cleaning device Download PDF

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Publication number
CN216323689U
CN216323689U CN202122771551.6U CN202122771551U CN216323689U CN 216323689 U CN216323689 U CN 216323689U CN 202122771551 U CN202122771551 U CN 202122771551U CN 216323689 U CN216323689 U CN 216323689U
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CN
China
Prior art keywords
cleaning
gas distributor
bin
etching machine
frame
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Active
Application number
CN202122771551.6U
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Chinese (zh)
Inventor
施靖
游利
管明月
夏荣荣
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Jiangsu Xianfeng Precision Technology Co ltd
Original Assignee
Jingjiang Xianfeng Semiconductor Technology Co ltd
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Priority to CN202122771551.6U priority Critical patent/CN216323689U/en
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Publication of CN216323689U publication Critical patent/CN216323689U/en
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Abstract

The utility model discloses a cleaning device for a gas distributor of an etching machine, which comprises a frame (1), a cleaning bin (2) arranged on the frame (1), a bin cover (3), a liquid storage tank (6) arranged below the cleaning bin (2), a water pump (7) and a pressure regulating valve (4) arranged on the bin cover (3), wherein the pressure regulating valve (4) is connected with an outlet of the water pump (7) through a pipeline, an inlet of the water pump (7) is connected with the liquid storage tank (6) through a pipeline, the bin cover (3) is connected with the cleaning bin (2) through a fixing device (8), a clamping tool (5) for installing the gas distributor is arranged in the cleaning bin (2), and the liquid storage tank (6) is arranged below the cleaning bin (2). The utility model has simple and practical structure, good cleaning effect and high cleaning efficiency.

Description

Be used for etching machine gas distributor belt cleaning device
Technical Field
The utility model relates to the field of industrial part cleaning equipment, in particular to a cleaning device for a gas distributor of an etching machine.
Background
The existing industrial part cleaning method generally needs to clean and oil seal industrial parts by using pure water, kerosene and alkaline solution through ultrasonic waves, is suitable for removing unsaponifiable oil, dust, impurities and the like on the surfaces of the parts, is difficult to remove the impurities, the dust and the like in small holes on the surface of an etching machine gas distributor, still needs to dredge the small holes one by one through manpower after cleaning, can cause the phenomenon that the small holes are blocked and omitted, and can also increase the labor intensity of operators.
Disclosure of Invention
The utility model aims to provide a cleaning device for a gas distributor of an etching machine, which solves the technical problems of low cleaning efficiency and unclean cleaning of the gas distributor.
In order to achieve the technical purpose and achieve the technical requirements, the utility model adopts the technical scheme that: the utility model provides a be used for etching machine gas distributor belt cleaning device, includes the frame, establishes cleaning bin, the cang gai on the frame, establishes liquid reserve tank, the water pump in cleaning bin below, establishes the air-vent valve on the cang gai, the air-vent valve passes through the pipeline and the exit linkage of water pump, the import of water pump passes through the pipeline and links to each other with the liquid reserve tank, the cang gai passes through fixing device and is connected with cleaning bin, be equipped with the clamping frock that is used for installing gas distributor in the cleaning bin, cleaning bin's below is equipped with the liquid reserve tank.
Preferably, the pressure regulating valve is provided at the center of the lid.
As a preferred technical scheme, the shape of the cleaning bin is matched with the shape of the gas distributor.
As a preferred technical scheme, a filter screen is arranged below the cleaning bin.
As a preferred technical scheme, four flat plates are arranged on the periphery of the frame, a bottom plate is arranged at the bottom end of the frame, and the four flat plates and the bottom plate form a liquid storage tank.
Preferably, the flat plate is a transparent plate.
As an optimized technical scheme, the fixing device comprises fixing clamps symmetrically arranged at the edge of the bin cover and clamping blocks symmetrically arranged on the outer surface of the cleaning bin, buckles are arranged on the fixing clamps, and the buckles and the clamping blocks are arranged correspondingly.
As an optimal technical scheme, handles are symmetrically arranged on the clamping tool.
As a preferable technical scheme, the bottom end of the frame is provided with universal wheels.
As a preferable technical scheme, the frame is made of aluminum profiles.
The utility model has the beneficial effects that: a cleaning device for a gas distributor of an etching machine is disclosed, compared with the traditional scheme:
1) the flushing pressure of the cleaning liquid is increased through the pressure regulating valve, so that small holes in the gas distributor can be better cleaned, the gas distributor is fixed by the clamping tool, the cleaning is more stable, time and labor are saved, and preferably, the pressure regulating valve is arranged in the center of the bin cover, so that the cleaning effect is more uniform;
2) preferably, the shape of the cleaning bin is matched with that of the gas distributor, and the gas distributor is more stable when being cleaned in the cleaning bin;
3) preferably, the transparent plate enables observation of the cleaning state of the gas distributor;
4) preferably, the circular groove assists in visually inspecting whether the eccentric part is eccentric;
5) preferably, the fixing device is simple to mount and good in fastening effect;
6) preferably, the handle is easy for an operator to install and dismantle the clamping tool;
7) preferably, the universal wheels enable the movement to be more flexible, and time and labor are saved.
Drawings
FIG. 1 is a block diagram of the present invention;
FIG. 2 is a block diagram of the clamping tool;
FIG. 3 is a block diagram of a cleaning tank;
fig. 4 is a structural view of the fixing device.
In fig. 1-4, 1, frame; 2. cleaning the bin; 201. an annular base plate; 3. a bin cover; 4. a pressure regulating valve; 5. clamping a tool; 501. an outer flange; 502. a through groove; 503. an inner flange; 6. a liquid storage tank; 7. a water pump; 8. a fixing device; 801. a fixing clip; 802. a hasp; 803. a clamping block; 9. a handle; 10. a gas distributor; 11. a universal wheel.
Detailed Description
The utility model is further described below with reference to the accompanying drawings.
The same or similar reference numerals in the drawings of the embodiments of the present invention correspond to the same or similar components; in the description of the present invention, it should be understood that if the terms "head", "tail", "top", "bottom", "left", "right", "front", "back", "inner", "outer", etc. are used for indicating the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, it is only for convenience of describing the present invention, but does not indicate or imply that the referred device or element must have a specific orientation, be constructed in a specific orientation, and be operated, and therefore, the terms describing the positional relationship in the drawings are only used for illustrative purposes and are not to be construed as limiting the present patent, and the specific meanings of the terms may be understood by those skilled in the art according to specific situations.
Referring to fig. 1-4, the utility model provides a cleaning device for a gas distributor of an etching machine, comprising a frame 1, a cleaning bin 2 arranged on the frame 1, a bin cover 3, a liquid storage tank 6 arranged below the cleaning bin 2, a water pump 7, and a pressure regulating valve 4 arranged on the bin cover 3, wherein the pressure regulating valve 4 is connected with an outlet of the water pump 7 through a pipeline, and an inlet of the water pump 7 is connected with the liquid storage tank 6 through a pipeline;
the bin cover 3 is connected with the cleaning bin 2 through a fixing device 8, a clamping tool 5 for installing a gas distributor is arranged in the cleaning bin 2, specifically, an annular bottom plate 201 is arranged at the bottom of the cleaning bin 2, an outer flange 501 is arranged on the clamping tool 5, the outer flange 501 is matched with the annular bottom plate 201 to limit the clamping tool 5, a circular through groove 502 for accommodating the gas distributor 10 is arranged on the clamping tool 5, an inner flange 503 is arranged in the through groove 502, the inner flange 503 limits the gas distributor 10, further, the clamping tool 5 is tightly connected with the annular bottom plate 201, the gas distributor 10 is tightly connected with the inner flange 503, and the gas distributor 10 is fixed by the clamping tool 5;
a liquid storage tank 6 is arranged below the cleaning bin 2, cleaning liquid is stored in the liquid storage tank 6, a water pump 7 sucks the cleaning liquid, the cleaning liquid enters a pressure regulating valve 4 through a pipeline, and the pressure regulating valve 4 increases the pressure of the cleaning liquid, so that the cleaning liquid has high pressure and large flushing force, dirt in small holes in the gas distributor is easier to clean, and further, the pressure regulating valve 4 is arranged in the center of the bin cover 3, so that the cleaning liquid is diffused from the middle to two sides, and the cleaning effect is more uniform;
the cleaning chamber 2 is communicated with the liquid storage tank 6, the cleaning liquid after cleaning by the gas distributor 10 flows back to the liquid storage tank 6, further, a filtering device is arranged between the water pump 7 and the liquid storage tank 6 to prevent foreign matters from blocking the water pump 7, it is noted that the filtering device is a well-known technology in the field and is not shown in the drawing, a pipeline for connecting the water pump is not shown in the drawing, and the water pump can be directly installed on a working surface through a mounting seat and is not described in detail.
As shown in fig. 1-4, the shape of the cleaning chamber 2 matches the shape of the gas distributor 10 to ensure that the gas distributor 10 remains stable during flushing after placement.
As shown in fig. 1-4, a filter screen is arranged below the cleaning bin 2, and the cleaning liquid is filtered and then flows back to the liquid storage tank 6, so that the water pump 7 is prevented from being blocked by foreign matters.
As shown in fig. 1-4, four flat plates are arranged around the frame 1, a bottom plate is arranged at the bottom end of the frame 1, the four flat plates and the bottom plate form a liquid storage tank 6, the structure is simple and practical, and further, the flat plates are transparent plates which are easy to observe the cleaning condition of the gas distributor and observe whether the cleaning liquid is enough and the turbidity of the cleaning liquid at any time.
As shown in fig. 1-4, the fixing device 8 includes fixing clips 801 symmetrically disposed on the edge of the bin cover 3 and fastening blocks 803 symmetrically disposed on the outer surface of the cleaning bin 2, the fastening blocks 803 are fastened to the cleaning bin, a buckle 802 is disposed on the fixing clips 801, the buckle 802 and the fastening blocks 803 are correspondingly disposed, the buckle 802 is fastened to the fastening blocks 803, and the fixing clips 801 press the bin cover 3, so that the cleaning bin 2 can be covered by the bin cover 3.
As shown in fig. 1-4, the clamping tool 5 is symmetrically provided with handles 9, which is convenient for an operator to install and detach the clamping tool 5.
As shown in fig. 1-4, the bottom end of the frame 1 is provided with universal wheels 11, and the cleaning bin 2 is movable and convenient to operate.
As shown in fig. 1-4, the frame 1 is made of aluminum section, so that the weight is light and the supporting effect is good.
Examples
A cleaning device for an etching machine gas distributor comprises a frame 1, a cleaning bin 2 and a bin cover 3 which are arranged on the frame 1, a liquid storage tank 6 and a water pump 7 which are arranged below the cleaning bin 2, and a pressure regulating valve 4 which is arranged on the bin cover 3, wherein the pressure regulating valve 4 is connected with an outlet of the water pump 7 through a pipeline, an inlet of the water pump 7 is connected with the liquid storage tank 6 through a pipeline, the bin cover 3 is connected with the cleaning bin 2 through a fixing device 8, a clamping tool 5 for installing the gas distributor 10 is arranged in the cleaning bin 2, the liquid storage tank 6 is arranged below the cleaning bin 2, the pressure regulating valve 4 is arranged at the center of the bin cover 3, the shape of the cleaning bin 2 is matched with the shape of the gas distributor 10, a filter screen is arranged below the cleaning bin 2, four transparent plates are arranged around the frame 1, a bottom plate is arranged at the bottom end of the frame 1, and the four transparent plates and the bottom plate form the liquid storage tank 6, the dull and stereotyped transparent plate, fixing device 8 includes that the symmetry is established at the fixation clamp 801 at storehouse cover 3 edge, the fixture block 803 at the surface of washing storehouse 2 is established to the symmetry, be equipped with hasp 802 on the fixation clamp 801, hasp 802 corresponds the setting with fixture block 803, the symmetry is equipped with handle 9 on the clamping frock 5, the bottom of frame 1 is equipped with universal wheel 11, frame 1 is for adopting the aluminium alloy to make.
The foregoing examples are given solely for the purpose of illustrating the utility model and are not to be construed as limiting the embodiments, and other variations and modifications in form thereof will be suggested to those skilled in the art upon reading the foregoing description, and it is not necessary or necessary to exhaustively enumerate all embodiments and all such obvious variations and modifications are deemed to be within the scope of the utility model.

Claims (10)

1. The utility model provides a be used for etching machine gas distributor belt cleaning device, its characterized in that includes frame (1), establishes cleaning bin (2), cang gai (3) on frame (1), establishes liquid reserve tank (6), water pump (7) in cleaning bin (2) below, establishes air-vent valve (4) on cang gai (3), air-vent valve (4) are through the exit linkage of pipeline with water pump (7), the import of water pump (7) is passed through the pipeline and is linked to each other with liquid reserve tank (6), cang gai (3) are connected with cleaning bin (2) through fixing device (8), be equipped with clamping frock (5) that are used for installing gas distributor (10) in cleaning bin (2), the below of cleaning bin (2) is equipped with liquid reserve tank (6).
2. A cleaning apparatus for a gas distributor of an etching machine according to claim 1, wherein the pressure regulating valve (4) is provided at the center of the lid (3).
3. A cleaning device for gas distributor of etching machine according to claim 1, characterized in that the cleaning chamber (2) has an outer shape matching the shape of the gas distributor (10).
4. A cleaning device for a gas distributor of an etching machine according to claim 1, characterized in that a filter screen is arranged below the cleaning bin (2).
5. The cleaning device for the gas distributor of the etching machine is characterized in that four flat plates are arranged on the periphery of the frame (1), a bottom plate is arranged at the bottom end of the frame (1), and the four flat plates and the bottom plate form a liquid storage tank (6).
6. A cleaning apparatus for a gas distributor of an etching machine as claimed in claim 5, wherein the plate is a transparent plate.
7. The cleaning device for the gas distributor of the etching machine is characterized in that the fixing device (8) comprises fixing clips (801) symmetrically arranged at the edge of the bin cover (3) and clamping blocks (803) symmetrically arranged on the outer surface of the cleaning bin (2), buckles (802) are arranged on the fixing clips (801), and the buckles (802) and the clamping blocks (803) are correspondingly arranged.
8. The cleaning device for the gas distributor of the etching machine is characterized in that handles (9) are symmetrically arranged on the clamping tool (5).
9. A cleaning device for a gas distributor of an etching machine according to claim 1, characterized in that the bottom end of the frame (1) is provided with universal wheels (11).
10. A cleaning device for a gas distributor of an etching machine according to claim 1, characterized in that the frame (1) is made of aluminum profile.
CN202122771551.6U 2021-11-12 2021-11-12 Be used for etching machine gas distributor belt cleaning device Active CN216323689U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202122771551.6U CN216323689U (en) 2021-11-12 2021-11-12 Be used for etching machine gas distributor belt cleaning device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202122771551.6U CN216323689U (en) 2021-11-12 2021-11-12 Be used for etching machine gas distributor belt cleaning device

Publications (1)

Publication Number Publication Date
CN216323689U true CN216323689U (en) 2022-04-19

Family

ID=81148951

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202122771551.6U Active CN216323689U (en) 2021-11-12 2021-11-12 Be used for etching machine gas distributor belt cleaning device

Country Status (1)

Country Link
CN (1) CN216323689U (en)

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Address after: 214500 No. 195, Xingang Avenue, Jingjiang Economic Development Zone, Taizhou City, Jiangsu Province

Patentee after: Jiangsu Xianfeng Precision Technology Co.,Ltd.

Address before: 214500 No. 195, Xingang Avenue, Jingjiang Economic Development Zone, Taizhou City, Jiangsu Province

Patentee before: JINGJIANG XIANFENG SEMICONDUCTOR TECHNOLOGY CO.,LTD.