CN216313641U

CN216313641U - DC magnetron sputtering power supply

Info

Publication number: CN216313641U
Application number: CN202123055594.0U
Authority: CN
Inventors: 张功智; 李娟�
Original assignee: Shenzhen Shenzhongrui Technology Co ltd
Current assignee: Shenzhen Shenzhongrui Technology Co ltd
Priority date: 2021-12-07
Filing date: 2021-12-07
Publication date: 2022-04-15
Anticipated expiration: 2031-12-07

Abstract

The utility model belongs to the technical field of electromechanical equipment, and discloses a direct-current magnetron sputtering power supply which comprises a machine body, wherein a front panel is arranged on the surface wall of the machine body, and the two ends of the front panel surface wall are respectively provided with a fixed bottom sheet, a hollow pipe is arranged above the fixed bottom sheet, an inner groove is arranged inside the hollow pipe, and a handle is arranged above the hollow pipe, both ends of the handle are provided with limit rings, and the limit rings are positioned inside the inner groove, and the outer part of the handle is provided with a hollow pipe, the inner part of the hollow pipe is provided with an inner groove, and a limit ring at the end part of the handle is positioned in the inner groove to form a telescopic structure, when the operator holds the handle to move the DC magnetron sputtering power supply, a part of the handle is moved out of the hollow tube, therefore, the effective holding range of the handle is enlarged, the practicability of the handle is increased, and the condition that the holding part of the handle cannot be used under the condition of being too large is avoided.

Description

DC magnetron sputtering power supply

Technical Field

The utility model belongs to the technical field of electromechanical equipment, and particularly relates to a direct-current magnetron sputtering power supply.

Background

The power supply has good load characteristics and high cost performance, and is suitable for metal and reaction film layer environments.

Direct current magnetron sputtering power is when installation and dismantlement, the staff need rely on the handle of direct current magnetron sputtering power table wall to remove direct current magnetron sputtering power, but be subject to the volume of direct current magnetron sputtering power, the handle is less usually, during the practical application, the staff is difficult to remove direct current magnetron sputtering power through the handle, and direct current magnetron sputtering power need fix with the help of the outstanding mounting groove in edge, but the front panel of mounting groove department is good at organism itself, its intensity is not enough, easy warp because receive the collision when the transportation.

SUMMERY OF THE UTILITY MODEL

The utility model aims to provide a direct-current magnetron sputtering power supply to solve the problems that an existing direct-current magnetron sputtering power supply is small in handle, poor in practicability and low in strength of a mounting groove and is prone to deformation after collision.

In order to achieve the purpose, the utility model provides the following technical scheme: the direct-current magnetron sputtering power supply comprises a machine body, wherein a front panel is arranged on the surface wall of the machine body, fixed films are arranged at two ends of the surface wall of the front panel, an empty pipe is arranged above the fixed films, an inner groove is formed in the empty pipe, a handle is arranged above the empty pipe, limiting rings are arranged at two ends of the handle, and the limiting rings are located in the inner groove.

Preferably, the display module is installed to the table wall of front panel, and the button is installed to the bottom of display module, the switch is installed to the front panel table wall position in one side of display module.

Preferably, the mounting groove has all been seted up to the both sides of front panel, and the inside of mounting groove is provided with support piece.

Preferably, the support piece includes backup pad, inner panel and planking, and the inner panel is the L type, the backup pad is located the inner wall of support piece, the planking is located one side that the backup pad was kept away from to the inner panel.

Preferably, a connecting block is arranged between the inner plate and the outer plate, and the connecting block is matched with the mounting groove.

Preferably, the outside of the connecting block is provided with a clamping groove, and the thickness of the clamping groove is the same as that of the front panel.

Compared with the prior art, the utility model has the following beneficial effects:

(1) when the handle is used, when a worker holds the handle to move the direct current magnetron sputtering power supply, the handle can move out a part from the inside of the hollow tube, so that the effective holding range of the handle is enlarged, the practicability of the handle is increased, and the condition that the handle is useless is avoided.

(2) The support piece is arranged at the mounting groove and comprises an inner plate, an outer plate and a support plate, the inner plate is connected with the outer plate through a connecting block, a clamping groove is formed between the inner plate and the outer plate, when the support piece is used, the clamping groove is aligned to the mounting groove, the support piece is clamped into the mounting groove, the inner part of the inner plate is contacted with a machine body, and a triangular support structure is formed between the support piece and the support plate, so that the stability of the mounting groove is improved, and the deformation of the mounting groove due to impact is avoided.

Drawings

FIG. 1 is a schematic structural view of the present invention;

FIG. 2 is a top view of the present invention;

FIG. 3 is a cross-sectional view of the handle and hollow tube of the present invention;

FIG. 4 is a side view of the support member of the present invention;

FIG. 5 is a top view of the support member of the present invention;

in the figure: 1. mounting grooves; 2. a handle; 3. a body; 4. a display module; 5. a switch; 6. fixing the bottom plate; 7. a front panel; 8. a button; 9. a support plate; 10. empty pipe; 11. a support member; 12. a limiting ring; 13. connecting blocks; 14. an inner tank; 15. a card slot; 16. an outer plate; 17. an inner panel.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

Referring to fig. 1-5, the present invention provides the following technical solutions: direct current magnetron sputtering power, including organism 3, its characterized in that: the surface wall of organism 3 is provided with front panel 7, and front panel 7 all installs fixed film 6 at the both ends of the surface wall, reciprocal anchorage between film 6 and the hollow tube 10, and the top of fixed film 6 is provided with hollow tube 10, inside groove 14 has been seted up to the inside of hollow tube 10, and the top of hollow tube 10 is provided with handle 2, the both ends of handle 2 all are provided with spacing ring 12, and spacing ring 12 is located the inside of inside groove 14, handle 2 can't break away from hollow tube 10 under spacing ring 12 ground effect, and can move to a certain extent in hollow tube 10, its extensible structure can increase handle 2 ground and grip the district, make the staff can fully carry the direct current magnetron sputtering power with the help of handle 2.

Furthermore, a display module 4 is installed on the surface wall of the front panel 7, a button 8 is installed at the bottom of the display module 4, the button 8 is used for modifying parameters of the direct current magnetron sputtering power supply, parameter information of the direct current magnetron sputtering power supply is displayed through the display module 4, and a switch 5 is installed on one side, located on the display module 4, of the surface wall of the front panel 7.

Furthermore, mounting grooves 1 are formed in two sides of the front panel 7, when the direct-current magnetron sputtering power supply is mounted, a bolt penetrates through the mounting grooves 1 and the mounting position of the equipment to be screwed, so that the direct-current magnetron sputtering power supply is fixed, and a supporting piece 11 is arranged inside the mounting grooves 1.

Specifically, support piece 11 includes backup pad 9, inner panel 17 and planking 16, and inner panel 17 is the L type, and the lateral wall contact of one side of inner panel 17 and organism 3 cooperates backup pad 9 to form triangular support structure, increases the structural stability of mounting groove 1 department, and backup pad 9 is located support piece 11's inner wall, and planking 16 is located one side that backup pad 9 was kept away from to inner panel 17.

It is worth to say that, install connecting block 13 between inner panel 17 and the planking 16, connecting block 13 carries out fixed connection between inner panel 17 and the planking 16, directly blocks connecting block 13 department in mounting groove 1 during the use, and connecting block 13 and mounting groove 1 phase-match.

Further, draw-in groove 15 has been seted up to the outside of connecting block 13, and during installation support piece 11, draw-in groove 15 card is gone into front panel 7 and is fixed support piece, avoids it to drop, and the thickness of draw-in groove 15 is the same with front panel 7's thickness.

The working principle and the using process of the utility model are as follows: when the utility model is used, a worker holds the handle 2 and pulls the handle out, the position of the handle 2 is limited by the limiting ring 12 at the end part of the handle 2, due to the telescopic structure formed by the limiting ring 12, the hollow pipe 10 and the internal groove 14 inside the hollow pipe, the handle 2 can be partially expanded outwards, so that the holding clearance of the handle 2 is increased, the practicability of the handle 2 is improved, when transporting the DC magnetron sputtering power supply, a support member 11 is installed inside the installation groove 1, the support member 11 is clamped from both sides of the installation groove 1 by an outer plate 16 and an inner plate 17, the installation groove 1 is filled by a connecting block 13, after the support member 11 is installed, the lateral wall contact of mounting groove 1 and organism 3 increases the structural strength of mounting groove 1 department with the help of the triangle bearing structure that backup pad 9 formed, has avoided mounting groove 1 department to receive the striking and take place deformation in the transportation.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the utility model, the scope of which is defined in the appended claims and their equivalents.

Claims

1. Direct current magnetron sputtering power, including organism (3), its characterized in that: the novel multifunctional electric cooker is characterized in that a front panel (7) is arranged on the surface wall of the cooker body (3), fixed bottom plates (6) are mounted at two ends of the surface wall of the front panel (7), an empty pipe (10) is arranged above the fixed bottom plates (6), an inner groove (14) is formed in the empty pipe (10), a handle (2) is arranged above the empty pipe (10), limiting rings (12) are arranged at two ends of the handle (2), and the limiting rings (12) are located in the inner groove (14).

2. The direct current magnetron sputtering power supply of claim 1, wherein: display module (4) are installed to the table wall of front panel (7), and button (8) are installed to the bottom of display module (4), switch (5) are installed to one side that front panel (7) table wall is located display module (4).

3. The dc magnetron sputtering power supply of claim 2, wherein: mounting grooves (1) are formed in the two sides of the front panel (7), and supporting pieces (11) are arranged inside the mounting grooves (1).

4. The direct current magnetron sputtering power supply of claim 3, wherein: support piece (11) are including backup pad (9), inner panel (17) and planking (16), and inner panel (17) are the L type, backup pad (9) are located the inner wall of support piece (11), planking (16) are located one side that backup pad (9) were kept away from to inner panel (17).

5. The direct current magnetron sputtering power supply of claim 4, wherein: and a connecting block (13) is arranged between the inner plate (17) and the outer plate (16), and the connecting block (13) is matched with the mounting groove (1).

6. The direct current magnetron sputtering power supply of claim 5, wherein: the outer portion of the connecting block (13) is provided with a clamping groove (15), and the thickness of the clamping groove (15) is the same as that of the front panel (7).