CN216308598U

CN216308598U - Energy-saving and environment-friendly diffusion furnace with waste heat recycling function

Info

Publication number: CN216308598U
Application number: CN202121959948.1U
Authority: CN
Inventors: 高祥
Original assignee: Individual
Current assignee: Xichuan Jiusheng Photovoltaic Materials Co ltd
Priority date: 2021-08-20
Filing date: 2021-08-20
Publication date: 2022-04-15
Anticipated expiration: 2031-08-20

Abstract

The utility model discloses an energy-saving and environment-friendly diffusion furnace with a waste heat recycling function, which comprises a base, wherein a diffusion furnace body is fixedly arranged on the left side of the top of the base, a radiating pipe is communicated with the left side of the top of the diffusion furnace body, a filter box is fixedly arranged on the right side of the top of the base, a fan is fixedly arranged on the right side of the top of the filter box, the output end of the fan penetrates into an inner cavity of the filter box, the input end of the fan is fixedly connected with a recycling pipe, and one end of the recycling pipe, far away from the fan, is communicated with the top of the radiating pipe. According to the utility model, hot air emitted from the inner cavity of the diffusion furnace body is sucked into the inner cavity of the filter box through the recovery pipe and the radiating pipe by the input end of the fan, the screw rod is driven to rotate by the output end of the servo motor, the screw rod drives the threaded sleeve to move up and down, the threaded sleeve drives the filter screen to move up and down through the connecting rod, the hot air is filtered, and the filtered hot air is discharged through the discharge pipe and is convenient for people to use.

Description

Energy-saving and environment-friendly diffusion furnace with waste heat recycling function

Technical Field

The utility model relates to the technical field of diffusion furnaces, in particular to an energy-saving and environment-friendly diffusion furnace with a waste heat recycling function.

Background

The diffusion furnace is one of important process equipment of a front process of a semiconductor production line, is used for diffusion, oxidation, annealing, alloying, sintering and other processes in industries such as large-scale integrated circuits, discrete devices, power electronics, photoelectric devices, optical fibers and the like, and has two types of vertical diffusion furnaces and horizontal diffusion furnaces, but the existing diffusion furnace does not have the function of waste heat recycling, has poor filtering effect and wastes resources, so that the diffusion furnace is not convenient for people to use.

SUMMERY OF THE UTILITY MODEL

Aiming at the defects of the prior art, the utility model provides an energy-saving and environment-friendly diffusion furnace with a waste heat recycling function, which has the advantage of waste heat recycling and solves the problems that the existing diffusion furnace does not have the function of waste heat recycling, has poor filtering effect and wastes resources, and is inconvenient for people to use.

In order to achieve the purpose, the utility model provides the following technical scheme: an energy-saving and environment-friendly diffusion furnace with a waste heat recycling function comprises a base, wherein a diffusion furnace body is fixedly arranged on the left side of the top of the base, a radiating pipe is communicated with the left side of the top of the diffusion furnace body, a filter box is fixedly arranged on the right side of the top of the base, a fan is fixedly arranged on the right side of the top of the filter box, the output end of the fan penetrates into the inner cavity of the filter box, the input end of the fan is fixedly connected with a recovery pipe, one end, away from the fan, of the recovery pipe is communicated with the top of the radiating pipe, a servo motor is fixedly arranged on the left side of the top of the filter box, the output end of the servo motor is fixedly connected with a screw rod, the bottom of the screw rod is movably connected to the bottom of the inner cavity of the filter box through a bearing, a threaded sleeve is connected to the outer surface of the screw rod, a partition plate is fixedly arranged on the right side, of the inner cavity of the filter box, the internal surface of baffle has been seted up the reservation groove, the right side fixed mounting of swivel nut has the connecting rod, and the right side of connecting rod runs through the inner chamber of reservation groove and extends to the right side of baffle, the right side fixed mounting of connecting rod has the filter screen, the delivery pipe has been seted up to the bottom on rose box right side, the surface of delivery pipe is provided with the solenoid valve.

Preferably, a second sliding groove is formed in the left side of the inner cavity of the filter box, a second sliding rod is fixedly mounted on the left side of the threaded sleeve, and the left side of the second sliding rod is slidably connected into the inner cavity of the second sliding groove.

Preferably, a first sliding groove is formed in the right side of the inner cavity of the filter box, a first sliding rod is fixedly mounted on the right side of the filter screen, and the right side of the first sliding rod is slidably connected into the inner cavity of the first sliding groove.

Preferably, the front side of the filter box is movably provided with a box door through a hinge, and the front side of the box door is fixedly provided with a handle.

Preferably, all fixed mounting has the supporting leg all around of base bottom, the bottom of supporting leg is provided with the slipmat, and the slipmat is rubber.

Preferably, a fixing rod is fixedly installed on the right side of the top of the diffusion furnace body, and the top of the fixing rod is fixedly installed at the bottom of the recovery pipe.

Compared with the prior art, the utility model provides an energy-saving and environment-friendly diffusion furnace with a waste heat recycling function, which has the following beneficial effects:

1. according to the utility model, hot air emitted from the inner cavity of the diffusion furnace body is sucked into the inner cavity of the filter box through the recovery tube and the radiating tube by the input end of the fan, the screw rod is driven to rotate by the output end of the servo motor, the screw rod drives the threaded sleeve to move up and down, the threaded sleeve drives the filter screen to move up and down through the connecting rod, the hot air is filtered, and the filtered hot air is discharged through the discharging tube and is convenient for people to use.

2. The anti-skid box has the advantages that the anti-skid effect can be achieved by arranging the anti-skid pads, the stability of the filter screen during up-and-down movement can be improved by arranging the first sliding rods and the first sliding grooves, the filter screen can be conveniently cleaned by people by arranging the box door, and the recovery pipes can be prevented from falling off by arranging the fixing rods.

Drawings

FIG. 1 is a schematic structural view of the present invention;

FIG. 2 is a schematic cross-sectional view of the present invention;

FIG. 3 is an enlarged schematic view of the structure at A of the present invention.

In the figure: 1. a base; 2. a diffusion furnace body; 3. a radiating pipe; 4. a recovery pipe; 5. fixing the rod; 6. a servo motor; 7. a fan; 8. a filter box; 9. a box door; 10. a discharge pipe; 11. an electromagnetic valve; 12. supporting legs; 13. a non-slip mat; 14. a screw; 15. a partition plate; 16. a connecting rod; 17. a first chute; 18. a first slide bar; 19. filtering with a screen; 20. reserving a groove; 21. a second slide bar; 22. a second chute; 23. a threaded sleeve.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

In the description of the present invention, it should be noted that the terms "upper", "lower", "inner", "outer", "front", "rear", "both ends", "one end", "the other end", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of describing the present invention and simplifying the description, but do not indicate or imply that the referred device or element must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first" and "second" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted", "provided", "connected", and the like are to be construed broadly, such as "connected", which may be fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.

The base 1, the diffusion furnace body 2, the radiating pipe 3, the recovery pipe 4, the fixing rod 5, the servo motor 6, the fan 7, the filter box 8, the box door 9, the discharging pipe 10, the electromagnetic valve 11, the supporting leg 12, the non-slip mat 13, the screw 14, the partition board 15, the connecting rod 16, the first sliding groove 17, the first sliding rod 18, the filter screen 19, the preformed groove 20, the second sliding rod 21, the second sliding groove 22 and the screw sleeve 23 are all universal standard parts or parts known by technicians in the field, and the structure and the principle of the utility model can be known by technicians in the field or conventional experimental methods.

Referring to fig. 1-3, an energy-saving and environment-friendly diffusion furnace with waste heat recycling function comprises a base 1, wherein support legs 12 are fixedly installed around the bottom of the base 1, non-slip mats 13 are arranged at the bottoms of the support legs 12, the non-slip mats 13 are arranged to achieve a non-slip effect, the non-slip mats 13 are made of rubber, a diffusion furnace body 2 is fixedly installed on the left side of the top of the base 1, a heat dissipation pipe 3 is communicated with the left side of the top of the diffusion furnace body 2, a filter box 8 is fixedly installed on the right side of the top of the base 1, a fan 7 is fixedly installed on the right side of the top of the filter box 8, the output end of the fan 7 penetrates into the inner cavity of the filter box 8, a recycling pipe 4 is fixedly connected to the input end of the fan 7, one end of the recycling pipe 4, which is far away from the fan 7, is communicated with the top of the heat dissipation pipe 3, and a fixing rod 5 is fixedly installed on the right side of the top of the diffusion furnace body 2, the top of the fixing rod 5 is fixedly arranged at the bottom of the recovery tube 4, the recovery tube 4 can be prevented from falling off by arranging the fixing rod 5, the servo motor 6 is fixedly arranged on the left side of the top of the filter box 8, the output end of the servo motor 6 is fixedly connected with the screw 14, the bottom of the screw 14 is movably connected with the bottom of the inner cavity of the filter box 8 through a bearing, the outer surface of the screw 14 is in threaded connection with the screw sleeve 23, the left side of the inner cavity of the filter box 8 is provided with the second chute 22, the left side of the screw sleeve 23 is fixedly provided with the second slide rod 21, the left side of the second slide rod 21 is slidably connected into the inner cavity of the second chute 22, the inner cavity of the filter box 8 is fixedly provided with the partition plate 15 positioned on the right side of the screw 14, the inner surface of the partition plate 15 is provided with the reserved groove 20, the right side of the screw sleeve 23 is fixedly provided with the connecting rod 16, and the right side of the connecting rod 16 penetrates through the inner cavity of the reserved groove 20 and extends to the right side of the partition plate 15, connecting rod 16's right side fixed mounting has filter screen 19, first spout 17 has been seted up on the right side of 8 inner chambers of rose box, filter screen 19's right side fixed mounting has first slide bar 18, and the right side sliding connection of first slide bar 18 is in the inner chamber of first spout 17, through setting up first slide bar 18 and first spout 17, stability when filter screen 19 reciprocated can be improved, there is chamber door 9 in the front side of rose box 8 through hinge movable mounting, and the front side fixed mounting of chamber door 9 has the handle, through setting up chamber door 9, can make things convenient for people to clear up filter screen 19, delivery pipe 10 has been seted up to the bottom on rose box 8 right side, the surface of delivery pipe 10 is provided with solenoid valve 11.

When in use, the fan 7 and the servo motor 6 are simultaneously started by the external controller, the hot air emitted from the inner cavity of the diffusion furnace body 2 is absorbed into the inner cavity of the filter box 8 through the input end of the fan 7 via the recovery pipe 4 and the radiating pipe 3, the screw 14 is driven to rotate by the output end of the servo motor 6, the screw 14 drives the threaded sleeve 23 to move up and down, the threaded sleeve 23 drives the filter screen 19 to move up and down by the connecting rod 16, the hot air is filtered, the filtered hot air is discharged through the discharge pipe 10 and is convenient for people to use, through the matching of the above structures, the problem that the existing diffusion furnace does not have the function of waste heat recovery and utilization is solved, and the filter effect is not good, resource-wasting to the problem that people used not be convenient for (external controller is the PLC controller in this application, and simultaneously, two wiring ends of external controller are connected with power plug through the wire, and adopt the commercial power to supply power in this application).

While embodiments of the present invention have been shown and described, it will be apparent to those skilled in the art that various modifications and changes may be made in the present invention. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention should be included in the scope of the claims of the present invention.

Claims

1. The utility model provides an energy-concerving and environment-protective type diffusion furnace that possesses waste heat recovery and utilize function, includes base (1), its characterized in that: the novel diffusion furnace is characterized in that a diffusion furnace body (2) is fixedly mounted on the left side of the top of the base (1), a radiating pipe (3) is communicated with the left side of the top of the diffusion furnace body (2), a filter box (8) is fixedly mounted on the right side of the top of the base (1), a fan (7) is fixedly mounted on the right side of the top of the filter box (8), the output end of the fan (7) penetrates through the inner cavity of the filter box (8), a recovery pipe (4) is fixedly connected with the input end of the fan (7), one end, far away from the fan (7), of the recovery pipe (4) is communicated with the top of the radiating pipe (3), a servo motor (6) is fixedly mounted on the left side of the top of the filter box (8), a screw rod (14) is fixedly connected with the output end of the servo motor (6), the bottom of the screw rod (14) is movably connected to the bottom of the inner cavity of the filter box (8) through a bearing, and a screw sleeve (23) is connected to the outer surface of the screw rod (14) through threads, the inner chamber of rose box (8) and the right side fixed mounting who is located screw rod (14) have baffle (15), reserve tank (20) have been seted up to the internal surface of baffle (15), the right side fixed mounting of swivel nut (23) has connecting rod (16), and the right side of connecting rod (16) runs through the inner chamber of reserve tank (20) and extends to the right side of baffle (15), the right side fixed mounting of connecting rod (16) has filter screen (19), delivery pipe (10) have been seted up to the bottom on rose box (8) right side, the surface of delivery pipe (10) is provided with solenoid valve (11).

2. The energy-saving and environment-friendly diffusion furnace with the waste heat recycling function according to claim 1, is characterized in that: second spout (22) have been seted up to the left side of rose box (8) inner chamber, the left side fixed mounting of swivel nut (23) has second slide bar (21), and the left side sliding connection of second slide bar (21) is in the inner chamber of second spout (22).

3. The energy-saving and environment-friendly diffusion furnace with the waste heat recycling function according to claim 1, is characterized in that: first spout (17) have been seted up on the right side of rose box (8) inner chamber, the right side fixed mounting of filter screen (19) has first slide bar (18), and the right side sliding connection of first slide bar (18) is in the inner chamber of first spout (17).

4. The energy-saving and environment-friendly diffusion furnace with the waste heat recycling function according to claim 1, is characterized in that: the front side of the filter box (8) is movably provided with a box door (9) through a hinge, and the front side of the box door (9) is fixedly provided with a handle.

5. The energy-saving and environment-friendly diffusion furnace with the waste heat recycling function according to claim 1, is characterized in that: the novel multifunctional chair is characterized in that supporting legs (12) are fixedly mounted on the periphery of the bottom of the base (1), anti-slip pads (13) are arranged at the bottoms of the supporting legs (12), and the anti-slip pads (13) are made of rubber.

6. The energy-saving and environment-friendly diffusion furnace with the waste heat recycling function according to claim 1, is characterized in that: the right side of the top of the diffusion furnace body (2) is fixedly provided with a fixing rod (5), and the top of the fixing rod (5) is fixedly arranged at the bottom of the recovery pipe (4).