CN216298619U

CN216298619U - Special positioning device for semiconductor equipment processing

Info

Publication number: CN216298619U
Application number: CN202122960120.4U
Authority: CN
Inventors: 孙鸿运
Original assignee: Kunshan Kodite Precision Industry Co ltd
Current assignee: Kunshan Kodite Precision Industry Co ltd
Priority date: 2021-11-30
Filing date: 2021-11-30
Publication date: 2022-04-15
Anticipated expiration: 2031-11-30

Abstract

The utility model discloses a special positioning device for processing semiconductor equipment, which comprises a workbench and four groups of concave plates, wherein through holes are formed in the concave plates, internal thread rings are arranged on the surfaces of the concave plates, the internal threads of the internal thread rings are connected with screws, the ends of the screws penetrate through the through holes and extend to the outer sides of the surfaces of the concave plates, cleaning assemblies are arranged on the concave plates, each cleaning assembly comprises a cleaning brush and a mounting block, an insertion block is arranged outside the cleaning brush, and a groove is formed in the insertion block; the cleaning assembly is designed, so that scraps attached to the screw rod can be conveniently cleaned in the use process, the abrasion degree of the screw rod caused by the scraps in the rotation process is reduced, the service life of the screw rod is prolonged, the positioning and fixing effects of the clamp on parts or accessories on semiconductor equipment are improved, and the parts or accessories on the semiconductor equipment can be conveniently machined.

Description

Special positioning device for semiconductor equipment processing

Technical Field

The utility model belongs to the technical field of semiconductor equipment, and particularly relates to a special positioning device for semiconductor equipment processing.

Background

When the semiconductor equipment is produced and processed, parts or accessories on some semiconductor equipment need to be processed, and a special clamp can be used for positioning and fixing the parts or accessories so as to facilitate processing operation.

When the existing positioning device is used, a part or an accessory is fixed on a clamp to be positioned, a certain amount of scraps can be generated in the operation process, and the scraps can be attached to a screw rod, so that the screw rod is abraded due to the scraps when the part or the accessory is clamped and disassembled in use, the positioning and fixing are not firm due to the fact that the part or the accessory is fixed for a long time, and the service life of the screw rod is shortened.

SUMMERY OF THE UTILITY MODEL

The utility model aims to provide a special positioning device for processing semiconductor equipment, which aims to solve the problems that when the existing positioning device is used, a part or an accessory is fixed on a clamp for positioning, some scraps are generated in the operation process and can be attached to a screw, so that the screw is abraded due to the scraps when the part or the accessory is clamped and disassembled in use, the positioning and fixing are not firm due to the fact that the time elapses, and the service life of the screw is shortened.

In order to achieve the purpose, the utility model provides the following technical scheme: the utility model provides a special positioner of semiconductor equipment processing, includes workstation and four group's concave plates, the through-hole has been seted up to the inside of concave plate, the surface of concave plate is provided with the internal thread ring, the inside threaded connection of internal thread ring has the screw rod, the tip of screw rod passes the through-hole extends to the surface outside of concave plate, be provided with clean subassembly on the concave plate, clean subassembly includes cleaning brush and installation piece, cleaning brush's outside is provided with the inserted block, the inside of inserted block is seted up flutedly, embedded groove and sliding tray have been seted up respectively to the inside of installation piece, the tip of inserted block penetrates the inside of embedded groove, the inside of sliding tray is provided with the removal strip, the one end of removal strip is passed the recess extends to the inner wall of embedded groove.

Preferably, the other end of the moving strip extends to the outer side of the surface of the mounting block, two groups of extending strips are arranged at the other end of the moving strip, and an L-shaped fixing plate is arranged at the other end of the mounting block.

Preferably, a bump is arranged on the lower surface of the extension bar, and a spring is arranged between the bump and the L-shaped fixing plate.

Preferably, the surface of workstation is provided with two sets of fixed strips, the surface of fixed strip is followed the length direction of fixed strip has evenly seted up the multiunit screw, the side of notch plate is provided with two sets of extension boards, be provided with the bolt on the extension board, just the work end of bolt penetrates the inside of screw.

Preferably, the front and the back of the workbench are provided with two groups of handles, and the corners around the workbench are provided with pillars.

Preferably, one end of the screw rod is provided with a rotating handle, the other end of the screw rod is provided with a pressing head, and the support is provided with a stabilizing frame.

Compared with the prior art, the utility model has the beneficial effects that:

(1) the cleaning assembly is designed, so that scraps attached to the screw rod can be conveniently cleaned in the use process, the abrasion degree of the screw rod caused by the scraps in the rotation process is reduced, the service life of the screw rod is prolonged, the positioning and fixing effects of the clamp on parts or accessories on semiconductor equipment are improved, and the parts or accessories on the semiconductor equipment can be conveniently machined.

(2) According to the utility model, by combining the designed fixing strip, the screw hole, the extension plate and the bolt, the distance between the two groups of concave plates can be conveniently adjusted according to different sizes of parts or accessories during use, so that the clamp can more conveniently position and fix the parts or accessories, the universality of the clamp is increased, and the clamp is convenient for operators to use.

Drawings

FIG. 1 is a schematic structural view of the present invention;

FIG. 2 is a schematic bottom view of the table and gib of the present invention;

FIG. 3 is a view of the attachment of the mounting block to the L-shaped fixing plate of the present invention;

FIG. 4 is a schematic view of a cleaning brush according to the present invention;

in the figure: 1. a work table; 2. a concave plate; 3. an extension plate; 4. a fixing strip; 5. a screw hole; 6. rotating a handle; 7. a pillar; 8. mounting blocks; 9. an internally threaded ring; 10. a screw; 11. a groove is embedded; 12. a moving bar; 13. a groove; 14. a bump; 15. an L-shaped fixing plate; 16. a spring; 17. an extension bar; 18. inserting a block; 19. a cleaning brush.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

Referring to fig. 1-4, the present invention provides a technical solution: a special positioning device for processing semiconductor equipment comprises a workbench 1 and four groups of concave plates 2, wherein a through hole is formed in each concave plate 2, an internal thread ring 9 is arranged on the surface of each concave plate 2, a screw rod 10 is connected to the internal thread of the internal thread ring 9 in a threaded manner, the end part of each screw rod 10 penetrates through the through hole and extends to the outer side of the surface of each concave plate 2, a cleaning assembly is arranged on each concave plate 2 and comprises a cleaning brush 19 and an installation block 8, an insertion block 18 is arranged outside each cleaning brush 19, a groove 13 is formed in each insertion block 18, an embedded groove 11 and a sliding groove are respectively formed in each installation block 8, the end part of each insertion block 18 penetrates into the corresponding embedded groove 11, a moving strip 12 is arranged inside each sliding groove, one end of each moving strip 12 penetrates through each groove 13 and extends to the inner wall of each embedded groove 11, the other end of each moving strip 12 extends to the outer side of the surface of each installation block 8, and two groups of extending strips 17 are arranged at the other ends of each moving strip 12, the other end of installation piece 8 is provided with L shape fixed plate 15, the lower surface of extending strip 17 is provided with lug 14, be provided with spring 16 between lug 14 and the L shape fixed plate 15, clean subassembly through the design, be convenient for can clear up some adnexed sweeps on the screw rod 10 in the use, reduce the screw rod 10 at the rotation in-process because the degree of wear that the sweeps produced, the life of screw rod 10 has been prolonged in the extension, the fixed effect in location of anchor clamps to semiconductor device upper part or accessory has been improved, the convenience is processed it.

In this embodiment, it is preferred, the surface of workstation 1 is provided with two sets of fixed strip 4, multiunit screw 5 has evenly been seted up on the surface of fixed strip 4 and along the length direction of fixed strip 4, the side of concave plate 2 is provided with two sets of extension boards 3, be provided with the bolt on the extension board 3, and the work end of bolt penetrates the inside of screw 5, fixed strip 4 through the design, screw 5, extension board 3 and bolt combine together, be convenient for can adjust the distance between two sets of concave plates 2 according to the not unidimensional size of part or accessory when using, it is fixed to make anchor clamps more convenient fix a position part or accessory, the commonality of anchor clamps has been increased, make things convenient for operating personnel to use.

In this embodiment, preferably, the front and the back of the workbench 1 are both provided with two sets of handles, and the corners around the workbench 1 are both provided with the pillars 7.

In this embodiment, preferably, one end of the screw rod 10 is provided with the knob 6, the other end of the screw rod 10 is provided with the pressing head, and the support post 7 is provided with the stabilizing frame.

The working principle and the using process of the utility model are as follows:

when the cleaning brush is used, the other end of the moving strip 12 is held to move in the direction far away from the mounting block 8 to drive the extending strip 17 to move, the extending strip 17 drives the bump 14 to move, the spring 16 starts to be compressed under the influence of the bump 14 at the moment, the moving strip 12 stops moving after moving to a proper position, then the cleaning brush 19 is placed at the outer position of the screw 10, the end part of the inserting block 18 on the cleaning brush 19 penetrates into the embedded groove 11, the groove 13 is aligned with one end of the moving strip 12 at the moment, the moving strip 12 is released, the spring 16 is reset at the moment, the bump 14 is pushed to move in the direction close to the mounting block 8 to drive the extending strip 17 to move, the extending strip 17 drives the moving strip 12 to move, one end of the moving strip 12 passes through the groove 13, the cleaning brush 19 can be mounted, and after an operator rotates the screw 10 during operation, waste on the screw 10 can be cleaned by the cleaning brush 19, when the cleaning brush 19 needs to be detached, the other end of the movable strip 12 is held again to move in the direction away from the mounting block 8, then one end of the movable strip 12 is separated from the groove 13, then the cleaning brush 19 moves outwards to drive the end of the insertion block 18 to be separated from the groove 13, and then the cleaning brush 19 can be detached;

when the position of the concave plate 2 needs to be adjusted, the bolt is unscrewed, then the working end of the bolt is separated from the screw hole 5, then the concave plate 2 is moved upwards or downwards to a proper position according to the requirement, the working end of the bolt is aligned with the screw hole 5, and the position of the concave plate 2 can be adjusted by screwing the bolt at the moment, so that the distance between the concave plates 2 is adjusted.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the utility model, the scope of which is defined in the appended claims and their equivalents.

Claims

1. The utility model provides a special positioner of semiconductor equipment processing, includes workstation (1) and four groups giblet board (2), its characterized in that: a through hole is arranged inside the concave plate (2), an internal thread ring (9) is arranged on the surface of the concave plate (2), a screw rod (10) is connected with the internal thread of the internal thread ring (9), the end part of the screw rod (10) passes through the through hole and extends to the outer side of the surface of the concave plate (2), a cleaning component is arranged on the concave plate (2), the cleaning component comprises a cleaning brush (19) and a mounting block (8), an inserting block (18) is arranged outside the cleaning brush (19), a groove (13) is formed in the inserting block (18), the mounting block (8) is internally provided with an embedded groove (11) and a sliding groove respectively, the end part of the inserting block (18) penetrates into the embedding groove (11), a moving strip (12) is arranged inside the sliding groove, one end of the moving strip (12) passes through the groove (13) and extends to the inner wall of the embedded groove (11).

2. The special positioning device for processing the semiconductor equipment as claimed in claim 1, wherein: the other end of removal strip (12) extends to the surface outside of installation piece (8), the other end of removal strip (12) is provided with two sets of extension strips (17), the other end of installation piece (8) is provided with L shape fixed plate (15).

3. The special positioning device for processing the semiconductor equipment as claimed in claim 2, wherein: the lower surface of the extension strip (17) is provided with a bump (14), and a spring (16) is arranged between the bump (14) and the L-shaped fixing plate (15).

4. The special positioning device for processing the semiconductor equipment as claimed in claim 1, wherein: the surface of workstation (1) is provided with two sets of fixed strip (4), the surface of fixed strip (4) is followed multiunit screw (5) have evenly been seted up to the length direction of fixed strip (4), the side of concave plate (2) is provided with two sets of extension boards (3), be provided with the bolt on extension board (3), just the work end of bolt penetrates the inside of screw (5).

5. The special positioning device for processing the semiconductor equipment as claimed in claim 4, wherein: the front and the back of the workbench (1) are provided with two groups of handles, and the corners around the workbench (1) are provided with pillars (7).

6. The special positioning device for processing the semiconductor equipment as claimed in claim 5, wherein: one end of the screw rod (10) is provided with a knob (6), the other end of the screw rod (10) is provided with a pressing head, and the support column (7) is provided with a stabilizing frame.