CN216282475U - Multi-layer high-vacuum oven for baking crystal oscillator - Google Patents

Multi-layer high-vacuum oven for baking crystal oscillator Download PDF

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CN216282475U
CN216282475U CN202122998292.0U CN202122998292U CN216282475U CN 216282475 U CN216282475 U CN 216282475U CN 202122998292 U CN202122998292 U CN 202122998292U CN 216282475 U CN216282475 U CN 216282475U
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baking
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孙杨杨
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Dongguan Huaxin Automation Technology Co ltd
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Abstract

本实用新型涉及一种用于晶振烘烤的多层高真空烤箱,其包括密闭箱体和设置在密闭箱体内的烘烤架,烘烤架包括若干个上下间隔叠置的料盘托板,相邻的料盘托板的两侧边缘设置间隔导热条;于烘烤架的两侧分别安装有加热机构,加热机构包括导热侧板、发热管、冷却水管。本实用新型简化了烘烤架与加热机构的结构设计,使其组装更为方便、成本更低,而且利用导热侧板、间隔导热条和料盘托板以及料盘的高效导热性能,能快速使热量均匀传递到烘烤架各处,确保内部各处温度的均匀性和稳定性,当达到设定温度时烘烤完产品后,利用冷却水管快速使导热侧板迅速降温冷却,进而带走料盘托板及料盘的热量;本实用新型设备成本大幅降低,性价比极高、更节能环保。

Figure 202122998292

The utility model relates to a multi-layer high-vacuum oven for crystal vibration baking, which comprises an airtight box body and a baking rack arranged in the airtight box body. Spaced heat-conducting strips are arranged on both sides of the adjacent tray support plates; heating mechanisms are respectively installed on both sides of the baking rack, and the heating mechanisms include heat-conducting side plates, heating pipes, and cooling water pipes. The utility model simplifies the structural design of the baking rack and the heating mechanism, so that the assembly is more convenient and the cost is lower. The heat is evenly transmitted to all parts of the baking rack to ensure the uniformity and stability of the internal temperature. When the set temperature is reached, after baking the product, the cooling water pipe is used to quickly cool down the heat conduction side plate, and then take it away The heat of the tray tray and the tray; the equipment cost of the utility model is greatly reduced, the cost performance is extremely high, and the utility model is more energy-saving and environmentally friendly.

Figure 202122998292

Description

一种用于晶振烘烤的多层高真空烤箱A multi-layer high vacuum oven for crystal baking

技术领域:Technical field:

本实用新型涉及烘干设备技术领域,特指一种用于晶振烘烤的多层高真空烤箱。The utility model relates to the technical field of drying equipment, in particular to a multi-layer high vacuum oven used for crystal vibration baking.

背景技术:Background technique:

贴片式石英谐振器等类似贴片式结构的产品在生产过程,需要使用真空烤箱进行烘干作业,以使封装更均匀全面。真空烤箱是一种采用二面加热的热辐射方式的烤箱,一般采用加热管进行发热,通过真空压力以及高温加热装置的配合下,对内部进行高温烘干脱水。传统的真空烤箱内部的加热管设置在真空烤箱箱体上,从箱体内部四周对放置在其中的产品进行加热烘干脱水,但是加热管仅设置在箱体内壁上,当箱体内部放置较多产品时,无法做到快速彻底烘干脱水,影响产品后续加工使用。也有如中国专利号CN201821727123.5所公开的《真空烤箱》,其为了提高烘干效率,采用间隔层叠的方式在每个托架之间均设置了加热管,显然这种结构方式虽然提高了烘干效率,但是结构过于复杂,组装不便而且成本很高,也不便于料盘的取放。In the production process of products with similar chip structure, such as chip quartz resonator, it is necessary to use a vacuum oven for drying operation to make the packaging more uniform and comprehensive. The vacuum oven is a kind of oven that adopts the heat radiation method of heating on both sides. Generally, a heating tube is used for heating, and the interior is dried and dehydrated at a high temperature with the cooperation of vacuum pressure and high temperature heating device. The heating tube inside the traditional vacuum oven is arranged on the vacuum oven box, and the products placed in it are heated, dried and dehydrated from the inside of the box, but the heating tube is only arranged on the inner wall of the box. When there are multiple products, it cannot be dried and dehydrated quickly and thoroughly, which affects the subsequent processing and use of the products. Also like the "Vacuum Oven" disclosed in Chinese Patent No. CN201821727123.5, in order to improve the drying efficiency, a heating tube is arranged between each bracket by means of spaced lamination. Obviously, this structure improves the drying efficiency. Drying efficiency, but the structure is too complicated, the assembly is inconvenient and the cost is high, and it is not easy to pick and place the tray.

实用新型内容:Utility model content:

本实用新型的目的是克服现有技术的上述不足之处,提供一种用于晶振烘烤的多层高真空烤箱。The purpose of this utility model is to overcome the above-mentioned deficiencies of the prior art, and provide a multi-layer high vacuum oven for crystal oscillator baking.

本实用新型采用的技术方案是:一种用于晶振烘烤的多层高真空烤箱,其包括具有箱门的密闭箱体和设置在密闭箱体内的烘烤架,所述烘烤架包括若干个上下间隔叠置的料盘托板,相邻的料盘托板的两侧边缘设置间隔导热条,烘烤架还包括数条纵向贯穿所述料盘托板边缘和间隔导热条的串接立杆;于所述烘烤架的两侧分别安装有加热机构,所述加热机构包括与所述料盘托板和间隔导热条的侧面接触安装的导热侧板,且导热侧板的内侧表面设有若干组发热管通槽,每组发热管通槽分别穿设有发热管,于导热侧板的外侧表面设有水冷管凹槽,水冷管凹槽内铺设有冷却水管。The technical scheme adopted by the utility model is: a multi-layer high-vacuum oven for crystal vibration baking, which comprises a closed box body with a box door and a baking rack arranged in the closed box body, and the baking rack includes several The upper and lower trays are stacked at intervals, and the two edges of the adjacent trays are provided with spaced heat-conducting strips. The baking rack also includes several longitudinally extending through the edges of the trays and the spaced heat-conducting strips. A vertical rod; a heating mechanism is installed on both sides of the baking rack, the heating mechanism includes a thermally conductive side plate installed in contact with the sides of the material tray support and the spaced heat-conducting strip, and the inner surface of the thermally conductive side plate is installed There are several groups of heating pipe through grooves, each group of heating pipe through grooves are respectively provided with heating pipes, the outer surface of the heat conduction side plate is provided with water cooling pipe grooves, and cooling water pipes are laid in the water cooling pipe grooves.

于导热侧板的外侧表面还安装有侧盖板。A side cover plate is also installed on the outer surface of the heat-conducting side plate.

所述发热管呈“U”形,对应地,每个发热管两端设有接线端子。The heating tubes are in a "U" shape, and correspondingly, terminals are provided at both ends of each heating tube.

所述密闭箱体的顶部设有供发热管的导线穿出的导线密封接头和感温器密封接头。The top of the airtight box is provided with a wire sealing joint and a temperature sensor sealing joint for the wire of the heating pipe to pass through.

所述冷却水管呈连续迂回曲折状,且冷却水管的进水端和出水端均朝下设置并分别穿出密闭箱体的底板。The cooling water pipe is in a continuous torturous shape, and the water inlet end and the water outlet end of the cooling water pipe are both arranged downward and respectively penetrate the bottom plate of the airtight box.

所述密闭箱体的一侧壁设有真空泵接口并连接有真空泵。One side wall of the closed box body is provided with a vacuum pump interface and is connected with a vacuum pump.

所述烘烤架底部连接有下支撑脚和下隔板,烘烤架的顶部连接有上支撑脚和上隔板。The bottom of the baking rack is connected with a lower support foot and a lower partition, and the top of the baking rack is connected with an upper support foot and an upper partition.

所述密闭箱体安装在一立式背板上,密闭箱体的后部和立式背板具有相通的后开口,于该后开口处设有升降密封门,升降密封门包括密封门板、与密封门板外表面连接的门压板、与门压板连接并驱动它的压板气缸和压板导向杆、用于安装压板气缸的气缸承载板、用于安装气缸承载板的立式轨道板、以及驱动气缸承载板沿立式轨道板升降运动的升降气缸,所述立式轨道板、升降气缸均安装在立式背板上。The airtight box body is installed on a vertical backplane, the rear part of the airtight box body and the vertical backplane have a rear opening that communicates with each other, and a lift sealing door is arranged at the rear opening. A door pressure plate connected to the outer surface of the sealing door plate, a pressure plate cylinder and a pressure plate guide rod connected to the door pressure plate and driving it, a cylinder bearing plate for installing the pressure plate cylinder, a vertical rail plate for installing the cylinder bearing plate, and a driving cylinder bearing A lift cylinder that moves the plate up and down along the vertical track plate, and the vertical track plate and the lift cylinder are installed on the vertical back plate.

本实用新型极大地简化了烘烤架与加热机构的结构设计,使其组装更为方便、成本更低,而且利用导热侧板、间隔导热条和料盘托板以及料盘的高效导热性能,能快速使热量均匀传递到烘烤架各处,确保内部各处温度的均匀性和稳定性。当达到设定温度时烘烤产品完成,利用冷却水管快速使导热侧板迅速降温冷却,进而带走料盘托板及料盘的热量;因此本实用新型的烘烤及冷却效率完全可以达到使用要求,同时设备成本大幅降低,性价比极高、更节能环保。The utility model greatly simplifies the structural design of the baking rack and the heating mechanism, makes the assembly more convenient and lowers the cost, and utilizes the high-efficiency thermal conductivity of the heat-conducting side plates, the spaced heat-conducting strips, the material tray support plate and the material tray, It can quickly and uniformly transfer heat to all parts of the baking rack, ensuring uniformity and stability of temperature throughout the interior. When the set temperature is reached, the baking product is completed, and the heat-conducting side plate is rapidly cooled and cooled by the cooling water pipe, and then the heat of the tray tray and the tray is taken away; therefore, the baking and cooling efficiency of the utility model can be fully used. At the same time, the cost of equipment is greatly reduced, the cost performance is extremely high, and it is more energy-saving and environmentally friendly.

附图说明:Description of drawings:

图1、图2是本实用新型中烘烤架及加热机构的结构示意图;Fig. 1, Fig. 2 are the structural representations of roasting rack and heating mechanism in the present utility model;

图3、图4是本实用新型真空烤箱的整体结构示意图。3 and 4 are schematic diagrams of the overall structure of the vacuum oven of the present invention.

具体实施方式:Detailed ways:

如图1-图4所示,本实用新型所述的是一种用于晶振烘烤的多层高真空烤箱,其包括具有箱门11的密闭箱体1和设置在密闭箱体1内的烘烤架2,所述烘烤架2包括若干个上下间隔叠置的料盘托板21,相邻的料盘托板21的两侧边缘设置间隔导热条22,烘烤架2还包括数条纵向贯穿所述料盘托板21边缘和间隔导热条22的串接立杆23;于所述烘烤架2的两侧分别安装有加热机构3,所述加热机构3包括与所述料盘托板21和间隔导热条22的侧面接触安装的导热侧板31,且导热侧板31的内侧表面设有若干组发热管通槽,每组发热管通槽分别穿设有发热管32,于导热侧板31的外侧表面设有水冷管凹槽,水冷管凹槽内铺设有冷却水管33。As shown in FIG. 1-FIG. 4, the utility model is a multi-layer high vacuum oven for crystal oscillator baking, which includes a closed box body 1 with a box door 11 and a closed box body 1 arranged in the closed box body 1. Baking rack 2, the baking rack 2 includes a plurality of tray support plates 21 stacked up and down at intervals, and spaced heat conduction strips 22 are arranged on both sides of the adjacent tray support plates 21, and the baking rack 2 also includes a number of The strip runs through the edge of the tray support plate 21 and the series connection vertical rods 23 of the heat-conducting strips 22 in the longitudinal direction; heating mechanisms 3 are respectively installed on both sides of the baking rack 2, and the heating mechanism 3 includes and the material The side surfaces of the disk tray 21 and the spaced heat-conducting strips 22 are in contact with the heat-conducting side plate 31 installed, and the inner surface of the heat-conducting side plate 31 is provided with several groups of heating pipe through grooves, and each group of heating pipe through grooves is respectively provided with a heating pipe 32, A water-cooling pipe groove is provided on the outer surface of the heat-conducting side plate 31 , and a cooling water pipe 33 is laid in the water-cooling pipe groove.

本实用新型利用在烘烤架2两侧设置各设置一组加热机构3,在导热侧板31上附着多组发热管32,在抽真空状态下,使导热侧板31与间隔导热条22和料盘托板21的直接接触导热,进而对料盘托板21上的料盘加热,使晶振快速均匀地达到设定温度,使封装胶体均匀融化,自然流平,烘干过程中产生的水气通过真空泵抽走;当烘烤达到设定温度时,停止发热管32工作,同时利用冷却水管33快速使导热侧板31降温,进而带走间隔导热条22、料盘托板21以及料盘的热量,使料盘快速降温,使封装胶体迅速冷却固化,实现封装后即可取出料盘。The utility model utilizes that a group of heating mechanisms 3 are arranged on both sides of the baking rack 2, and a plurality of groups of heating pipes 32 are attached to the heat-conducting side plates 31. The direct contact of the tray support 21 conducts heat, and then heats the tray on the tray support 21, so that the crystal oscillator reaches the set temperature quickly and evenly, so that the packaging colloid is evenly melted and leveled naturally, and the water generated during the drying process The air is pumped away by a vacuum pump; when the baking reaches the set temperature, the heating pipe 32 is stopped, and the cooling water pipe 33 is used to quickly cool the heat-conducting side plate 31, thereby taking away the spacer heat-conducting strip 22, the tray support 21 and the tray. The heat can quickly cool down the material tray, so that the packaging colloid quickly cools and solidifies, and the material tray can be taken out after the packaging is realized.

于导热侧板31的外侧表面还安装有侧盖板34,侧盖板34可以防止热量朝密封箱体1两侧散失,减少热量损失,节能。A side cover plate 34 is also installed on the outer surface of the heat-conducting side plate 31 . The side cover plate 34 can prevent heat from dissipating to both sides of the sealed box 1 , thereby reducing heat loss and saving energy.

所述发热管32呈“U”形,发热管32的平直段穿设在导热侧板31的发热管通槽中,弯曲段外露,每个发热管32两端设有接线端子。本实施例中每侧各设置5个“U”形发热管;The heating pipe 32 is in a "U" shape. The straight section of the heating pipe 32 is inserted into the heating pipe through groove of the heat-conducting side plate 31 , and the curved section is exposed. The two ends of each heating pipe 32 are provided with terminals. In this embodiment, each side is provided with 5 "U"-shaped heating pipes;

所述密闭箱体1的顶部设有供发热管32的导线穿出的导线密封接头36和感温器密封接头35。通过感温器密封接头35在密闭箱体1内部不同位置设置多个感测内部各处温度,当感温器温度偏差过大时,表示某处发热管有故障,从而提示操作人员进行维护,避免在设备故障情况下进行烘烤封装而导致不良品。The top of the airtight box 1 is provided with a wire sealing joint 36 and a temperature sensor sealing joint 35 for the wire of the heating tube 32 to pass through. Through the temperature sensor sealing joint 35, a plurality of temperature sensors are set at different positions inside the airtight box 1 to sense the temperature of various parts of the interior. When the temperature deviation of the temperature sensor is too large, it means that there is a fault in the heating pipe somewhere, so as to prompt the operator to perform maintenance. Avoid baking and packaging in case of equipment failure, resulting in defective products.

所述冷却水管33呈连续迂回曲折状,且冷却水管33的进水端和出水端均朝下设置并分别穿出密闭箱体1的底板,方便外接冷水源和回收热水。The cooling water pipe 33 is in a continuous tortuous shape, and the water inlet and outlet ends of the cooling water pipe 33 are arranged downward and respectively penetrate the bottom plate of the airtight box 1 to facilitate external cold water sources and hot water recovery.

所述密闭箱体1的一侧壁设有真空泵接口100并连接有真空泵4,通过真空泵4进行持续抽真空,在真空状态下实现加热烘烤。One side wall of the airtight box 1 is provided with a vacuum pump interface 100 and is connected with a vacuum pump 4 , which is continuously evacuated by the vacuum pump 4 to achieve heating and baking in a vacuum state.

所述烘烤架2底部连接有四个下支撑脚24和一个下隔板25,烘烤架2的顶部连接有四个上支撑脚26和一个上隔板27,通过下支撑脚24和下隔板25、上支撑脚26和上隔板27使烘烤架2与密闭箱体1底部和顶部保持一定距离并隔离开,避免烘烤架2热量过多地传递到密闭箱体1上,从而减少热损失,起到节能降耗效果。The bottom of the baking rack 2 is connected with four lower support feet 24 and a lower partition 25, and the top of the baking rack 2 is connected with four upper support feet 26 and an upper partition 27. The partition plate 25, the upper support feet 26 and the upper partition plate 27 keep the baking rack 2 at a certain distance from the bottom and the top of the airtight box 1 and isolate it, so as to avoid excessive heat transfer of the baking rack 2 to the airtight box 1. Thereby reducing heat loss and saving energy and reducing consumption.

所述密闭箱体1安装在一立式背板5上,密闭箱体1的后部和立式背板5具有相通的后开口500,于该后开口500处设有升降密封门6,升降密封门6包括密封门板61、与密封门板61外表面连接的门压板62、与门压板62连接并驱动它的压板气缸63和压板导向杆64、用于安装压板气缸63的气缸承载板65、用于安装气缸承载板65的立式轨道板66、以及驱动气缸承载板65沿立式轨道板66升降运动的升降气缸67,升降气缸67通过一连接板68驱动气缸承载板65;所述立式轨道板66、升降气缸67均安装在立式背板5上。本实施例中,压板气缸63有两个,压板导向杆64和对应的导向轴承有4组;通过升降气缸67带动气缸承载板65沿立式轨道板66的纵向轨道升降,进而带动压板气缸63以及门压板62、密封门板61升降,密封门板61与后开口500的密封通过压板气缸63和门压板62驱动,密封时,密封门板61降下来,压板气缸63驱动门压板62和密封门板61向后开口500压紧达到密封,要打开时,压板气缸63驱动门压板62带动密封门板61离开后开口500,再通过升降气缸67驱动气缸承载65板使密封门板61整体升起即可。The airtight box 1 is installed on a vertical backplane 5, and the rear part of the airtight box 1 and the vertical backplane 5 have a rear opening 500 that communicates with each other. The sealing door 6 includes a sealing door plate 61, a door pressing plate 62 connected with the outer surface of the sealing door plate 61, a pressing plate cylinder 63 connected with the door pressing plate 62 and driving it, a pressing plate guide rod 64, a cylinder bearing plate 65 for installing the pressing plate cylinder 63, The vertical rail plate 66 for installing the cylinder bearing plate 65 and the lifting cylinder 67 for driving the cylinder bearing plate 65 to move up and down along the vertical rail plate 66, the lifting cylinder 67 drives the cylinder bearing plate 65 through a connecting plate 68; The vertical track plate 66 and the lifting cylinder 67 are both installed on the vertical back plate 5 . In this embodiment, there are two pressure plate cylinders 63 , and four sets of pressure plate guide rods 64 and corresponding guide bearings; the lifting cylinder 67 drives the cylinder carrying plate 65 to lift up and down along the longitudinal track of the vertical rail plate 66 , thereby driving the pressure plate cylinder 63 And the door pressing plate 62 and the sealing door plate 61 are raised and lowered, and the sealing between the sealing door plate 61 and the rear opening 500 is driven by the pressing plate cylinder 63 and the door pressing plate 62. When sealing, the sealing door plate 61 is lowered, and the pressing plate cylinder 63 drives the door pressing plate 62 and the sealing door plate 61 to move toward each other. The rear opening 500 is pressed to seal, and when it is to be opened, the pressure plate cylinder 63 drives the door pressure plate 62 to drive the sealing door plate 61 to leave the rear opening 500, and then the lifting cylinder 67 drives the cylinder bearing plate 65 to lift the sealing door plate 61 as a whole.

综上所述,本实用新型极大地简化了烘烤架与加热机构的结构设计,使其组装更为方便、成本更低,而且利用导热侧板、间隔导热条和料盘托板以及料盘的高效导热性能,能快速使热量均匀传递到烘烤架各处,确保内部各处温度的均匀性和稳定性。当达到设定温度时烘烤完成,利用冷却水管快速使导热侧板迅速降温冷却,进而带走料盘托板及料盘的热量;因此本实用新型的烘烤及冷却效率完全可以达到使用要求,同时设备成本大幅降低,性价比极高、更节能环保。To sum up, the utility model greatly simplifies the structural design of the baking rack and the heating mechanism, making it more convenient to assemble and lower in cost, and utilizes heat-conducting side plates, spaced heat-conducting strips, material tray support plates, and material trays. The high-efficiency thermal conductivity can quickly and uniformly transfer the heat to all parts of the baking rack, ensuring the uniformity and stability of the internal temperature. When the set temperature is reached, the baking is completed, and the heat-conducting side plate is rapidly cooled and cooled by the cooling water pipe, thereby taking away the heat of the tray tray and the tray; therefore, the baking and cooling efficiency of the utility model can fully meet the requirements of use , At the same time, the cost of equipment is greatly reduced, the cost performance is extremely high, and it is more energy-saving and environmentally friendly.

可以理解的是,以上实施方式仅仅是为了说明本实用新型的原理而采用的示例性实施方式,然而本实用新型并不局限于此。对于本领域内的普通技术人员而言,在不脱离本实用新型的精神和实质的情况下,可以做出各种变型和改进,这些变型和改进也视为本实用新型的保护范围。It can be understood that the above embodiments are only exemplary embodiments adopted to illustrate the principle of the present invention, but the present invention is not limited thereto. For those of ordinary skill in the art, various modifications and improvements can be made without departing from the spirit and essence of the present invention, and these modifications and improvements are also regarded as the protection scope of the present invention.

Claims (8)

1.一种用于晶振烘烤的多层高真空烤箱,其包括具有箱门的密闭箱体和设置在密闭箱体内的烘烤架,其特征在于:所述烘烤架包括若干个上下间隔叠置的料盘托板,相邻的料盘托板的两侧边缘设置间隔导热条,烘烤架还包括数条纵向贯穿所述料盘托板边缘和间隔导热条的串接立杆;于所述烘烤架的两侧分别安装有加热机构,所述加热机构包括与所述料盘托板和间隔导热条的侧面接触安装的导热侧板,且导热侧板的内侧表面设有若干组发热管通槽,每组发热管通槽分别穿设有发热管,于导热侧板的外侧表面设有水冷管凹槽,水冷管凹槽内铺设有冷却水管。1. a multi-layer high-vacuum oven for crystal vibration baking, it comprises a closed box with a box door and a baking rack arranged in the closed box, it is characterized in that: the baking rack comprises several upper and lower intervals For the stacked tray support plates, spaced heat-conducting strips are arranged on both edges of the adjacent tray support plates; A heating mechanism is installed on both sides of the baking rack, the heating mechanism includes a heat-conducting side plate installed in contact with the sides of the material tray support and the spaced heat-conducting strip, and the inner surface of the heat-conducting side plate is provided with several A group of heating pipe through grooves, each group of heating pipe through grooves are respectively provided with heating pipes, water cooling pipe grooves are arranged on the outer surface of the heat conduction side plate, and cooling water pipes are laid in the water cooling pipe grooves. 2.根据权利要求1所述的用于晶振烘烤的多层高真空烤箱,其特征在于:于导热侧板的外侧表面还安装有侧盖板。2 . The multi-layer high-vacuum oven for crystal oscillator baking according to claim 1 , wherein a side cover plate is also installed on the outer surface of the heat-conducting side plate. 3 . 3.根据权利要求1所述的用于晶振烘烤的多层高真空烤箱,其特征在于:所述发热管呈“U”形,每个发热管两端设有接线端子。3 . The multi-layer high-vacuum oven for crystal oscillator baking according to claim 1 , wherein the heating pipe is in a “U” shape, and each heating pipe is provided with terminals at both ends. 4 . 4.根据权利要求1或3所述的用于晶振烘烤的多层高真空烤箱,其特征在于:所述密闭箱体的顶部设有供发热管的导线穿出的导线密封接头和感温器密封接头。4. The multi-layer high-vacuum oven for crystal oscillator baking according to claim 1 or 3, characterized in that: the top of the airtight box is provided with a wire sealing joint for the wire of the heating pipe to pass through and a temperature sensing device seal connector. 5.根据权利要求1所述的用于晶振烘烤的多层高真空烤箱,其特征在于:所述冷却水管呈连续迂回曲折状,且冷却水管的进水端和出水端均朝下设置并分别穿出密闭箱体的底板。5. The multi-layer high-vacuum oven for crystal oscillator baking according to claim 1, characterized in that: the cooling water pipe is in a continuous tortuous shape, and the water inlet end and the water outlet end of the cooling water pipe are both set downward and Pass through the bottom plate of the airtight box respectively. 6.根据权利要求1所述的用于晶振烘烤的多层高真空烤箱,其特征在于:所述密闭箱体的一侧壁设有真空泵接口并连接有真空泵。6 . The multi-layer high vacuum oven for crystal oscillator baking according to claim 1 , wherein a vacuum pump interface is provided on one side wall of the airtight box and connected with a vacuum pump. 7 . 7.根据权利要求1所述的用于晶振烘烤的多层高真空烤箱,其特征在于:所述烘烤架底部连接有下支撑脚和下隔板,烘烤架的顶部连接有上支撑脚和上隔板。7. The multi-layer high-vacuum oven for crystal oscillator baking according to claim 1, wherein the bottom of the baking rack is connected with a lower support foot and a lower partition, and the top of the baking rack is connected with an upper support Feet and upper bulkhead. 8.根据权利要求1所述的用于晶振烘烤的多层高真空烤箱,其特征在于:所述密闭箱体安装在一立式背板上,密闭箱体的后部和立式背板具有相通的后开口,于该后开口处设有升降密封门,升降密封门包括密封门板、与密封门板外表面连接的门压板、与门压板连接并驱动它的压板气缸和压板导向杆、用于安装压板气缸的气缸承载板、用于安装气缸承载板的立式轨道板、以及驱动气缸承载板沿立式轨道板升降运动的升降气缸,所述立式轨道板、升降气缸均安装在立式背板上。8. The multi-layer high-vacuum oven for crystal oscillator baking according to claim 1, wherein the airtight box is mounted on a vertical backplane, and the rear of the airtight box and the vertical backplane It has the same rear opening, and a lifting sealing door is arranged at the rear opening. The lifting sealing door includes a sealing door panel, a door pressing plate connected with the outer surface of the sealing door panel, a pressing plate cylinder connected with the door pressing plate and driving it and a pressing plate guide rod, a The cylinder carrying plate for installing the platen cylinder, the vertical rail plate for installing the cylinder carrying plate, and the lifting cylinder for driving the cylinder carrying plate to move up and down along the vertical rail plate, the vertical rail plate and the lifting cylinder are all installed on the vertical rail plate. on the back panel.
CN202122998292.0U 2021-11-30 2021-11-30 Multi-layer high-vacuum oven for baking crystal oscillator Active CN216282475U (en)

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