CN216278344U - Circulating cooling system of vacuum pump set - Google Patents

Circulating cooling system of vacuum pump set Download PDF

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Publication number
CN216278344U
CN216278344U CN202122068655.0U CN202122068655U CN216278344U CN 216278344 U CN216278344 U CN 216278344U CN 202122068655 U CN202122068655 U CN 202122068655U CN 216278344 U CN216278344 U CN 216278344U
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China
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pipeline
vacuum pump
cooling system
cooling water
cooling
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CN202122068655.0U
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Inventor
毛凯
王朋
朱剑钊
李少伟
曹俊梅
贾允祥
王帅
张海鑫
胡明明
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Karamay Joint Institute Of Advanced Science And Technology
Casic Feihang Technology Research Institute of Casia Haiying Mechanical and Electronic Research Institute
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Karamay Joint Institute Of Advanced Science And Technology
Casic Feihang Technology Research Institute of Casia Haiying Mechanical and Electronic Research Institute
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Abstract

The utility model provides a circulating cooling system of a vacuum pump set, which comprises the vacuum pump set, a cooling tower, a switch module, a temperature monitoring unit, a first pipeline, a second pipeline, a third pipeline, a fourth pipeline, a fifth pipeline and a sixth pipeline, wherein the temperature monitoring unit is arranged on the sixth pipeline and is used for acquiring the temperature of cooling water in the circulating cooling system in real time and feeding the temperature back to a control unit; the control unit is used for controlling the first pipeline to be opened and closed through the switch module according to the temperature of the cooling water, and is also used for controlling the cooling tower to be in different working states according to the temperature of the cooling water; and the cooling tower is arranged on the fifth pipeline and is used for cooling and heating cooling water in the closed circulation cooling system under the condition that the first pipeline is closed. The utility model realizes the intermittent operation of the cooling tower, can overcome the adverse effect on the vacuum pump caused by overhigh or overlow water temperature of cooling water, and can be suitable for extremely cold environment.

Description

Circulating cooling system of vacuum pump set
Technical Field
The utility model belongs to the technical field of vacuum pumps, and particularly relates to a circulating cooling system of a vacuum pump set.
Background
At present, the major economic science and technology strong countries in the world have developed related technical research and industrialized development. Representative of the test is Hyperloop One company in the United states, which started the vacuum line train development study in 2015 and obtained a test speed of 387 km/h. The vacuum pump set is used as core equipment for establishing a vacuum environment in the vacuum pipeline, and the working performance of the vacuum pump set directly determines the stability of the establishment of the vacuum environment in the pipeline; in the process of establishing a vacuum environment, if compressed air of a pump set runs and friction and resistance heat between rotors and the like are not dissipated in time, the temperature of the pump set is continuously raised, the pump set is directly damaged in serious cases, the expected target of a project is hindered, and meanwhile, serious economic loss is caused; in order to maintain the vacuum degree in the pipeline within the required range for a long time, the vacuum pump set is required to have excellent vacuum establishing performance, and the cooling performance of the cooling system directly determines the actual performance of the vacuum pump set for establishing vacuum.
The existing circulating cooling system of the vacuum pump at least has the following problems to be solved, and the cooling tower in the first existing circulating cooling system of the vacuum pump and the existing circulating cooling system of the vacuum pump adopts a continuous working mode, so that the loss is large, the cost is high, and the energy waste is caused. Secondly, the circulating cooling system of the existing vacuum pump cannot monitor the water temperature, and once the cooling water of the circulating system is too high or too low, the vacuum pump is adversely affected. And thirdly, a circulating cooling system of the vacuum pump suitable for the extremely cold environment is not found. Fourth, the circulative cooling system of current vacuum pump can't monitor water flow, in case circulation system cooling water appears revealing the circumstances such as, will bring very adverse effect for the vacuum pump. Fifthly, the cooling water of the circulating cooling system of the existing vacuum pump is easy to be mixed with impurities such as oil stains and dust in the using process, and once the impurities such as the oil stains and the dust are mixed in the cooling water, the inner wall of the pump set can be corroded.
SUMMERY OF THE UTILITY MODEL
The present invention is directed to solving at least one of the problems of the prior art.
Therefore, the utility model provides a circulating cooling system of a vacuum pump set.
The technical solution of the utility model is as follows: a circulating cooling system of a vacuum pump set is provided, the circulating cooling system comprises the vacuum pump set, a first power unit, a water storage container, a cooling tower, a switch module, a temperature monitoring unit, a first pipeline, a second pipeline, a third pipeline, a fourth pipeline, a fifth pipeline and a sixth pipeline, wherein,
the vacuum pump set comprises a control unit, and cooling water is arranged in the water storage container;
the first power unit is communicated with the water storage container through a first pipeline, the first power unit is also communicated with the vacuum pump set through a second pipeline, and the power unit is used for providing power for circulation of cooling water;
the vacuum pump set is respectively communicated with the water storage container through a first pipeline and a second pipeline, and a third pipeline, a fourth pipeline and a sixth pipeline which are sequentially communicated form a first pipeline; the third pipeline, the fifth pipeline and the sixth pipeline which are communicated in sequence form a second pipeline; the fourth pipeline and the fifth pipeline are arranged in parallel;
the temperature monitoring unit is arranged on the sixth pipeline and used for collecting the temperature of cooling water in the circulating cooling system in real time and feeding the temperature back to the control unit;
the control unit is used for controlling the first pipeline to be opened and closed through the switch module according to the temperature of the cooling water, and is also used for controlling the cooling tower to be in different working states according to the temperature of the cooling water;
the cooling tower is arranged on the fifth pipeline and used for cooling and heating cooling water in the closed circulation cooling system under the condition that the first pipeline is closed.
Further, the circulating cooling system further comprises a flow sensor, the flow sensor is arranged on a sixth pipeline and used for collecting the flow value of cooling water in the circulating cooling system in real time and feeding the flow value back to the control unit, and the control unit is further used for controlling whether the vacuum pump set is stopped or not according to the flow value of the cooling water fed back by the flow sensor.
Furthermore, the circulating cooling system further comprises a pressure transmitter, the pressure transmitter is arranged on the sixth pipeline and used for acquiring the pressure value of cooling water in the circulating cooling system in real time and feeding the pressure value back to the control unit, and the control unit is further used for controlling whether the vacuum pump set is shut down or not according to the pressure value of the cooling water fed back by the pressure transmitter.
Further, the first power unit includes a circulation pump, and/or the switch module includes an electric ball valve, and/or the flow sensor includes a turbine flow meter.
Further, the circulating cooling system further comprises a filter, the filter is arranged on the third pipeline, and the filter is used for filtering impurities of the cooling water in the circulating cooling system.
Further, the first pipeline, the second pipeline, the third pipeline, the fourth pipeline, the fifth pipeline and the sixth pipeline are all heat preservation pipelines.
Further, the cooling tower comprises an electric heating rod which is used for heating cooling water in the circulating cooling system.
By applying the technical scheme, the intermittent operation of the cooling tower is realized by matching the switch module, the temperature monitoring unit, the control unit and a plurality of pipeline designs, so that the service life of the equipment is prolonged, and energy is saved; simultaneously because design temperature monitoring unit monitors the cooling water temperature, the control unit can be in different operating condition according to cooling water temperature control switch module and cooling tower with the temperature monitoring unit is mutually supported, and then can overcome the cooling water temperature and too high or hang down the adverse effect that brings the vacuum pump excessively. In addition, the cooling tower is designed to have a heating function, so that the circulating cooling system disclosed by the utility model can be suitable for an extremely cold environment.
Drawings
FIG. 1 is a schematic structural diagram illustrating a circulating cooling system of a vacuum pump set provided according to an embodiment of the utility model;
the figures include the following reference numerals:
10. a vacuum pump set; 20. a water storage container; 30. a first power unit; 40. a switch module; 50. a temperature monitoring unit; 60. a cooling tower; 70. a flow sensor; 80. a pressure transmitter; 90. a filter; 101. a first check valve; 102. a second one-way valve; (ii) a 100a, a first conduit; 100b, a second conduit; 100c, a third pipeline; 100d, a fourth pipeline; 100e, a fifth pipeline; 100f, a sixth pipeline.
Detailed Description
The following provides a detailed description of specific embodiments of the present invention. In the following description, for purposes of explanation and not limitation, specific details are set forth in order to provide a thorough understanding of the present invention. However, it will be apparent to one skilled in the art that the present invention may be practiced in other embodiments that depart from these specific details.
It should be noted that, in order to avoid obscuring the present invention with unnecessary details, only the device structures and/or processing steps that are closely related to the scheme according to the present invention are shown in the drawings, and other details that are not so relevant to the present invention are omitted.
As shown in fig. 1, in one embodiment of the present invention, there is provided a circulation cooling system of a vacuum pump group 10, the circulation cooling system including the vacuum pump group 10, a first power unit 30, a water storage container 20, a cooling tower 60, a switching module 40, a temperature monitoring unit 50, and first, second, third, fourth, fifth and sixth pipes 100a, 100b, 100c, 100d, 100f, wherein the vacuum pump group 10 includes a control unit, and the water storage container 20 has cooling water therein; the first power unit 30 is communicated with the water storage container 20 through a first pipeline 100a, the first power unit 30 is also communicated with the vacuum pump group 10 through a second pipeline 100b, and the power unit is used for providing power for the circulation of cooling water; the vacuum pump group 10 is respectively communicated with the water storage container 20 through a first pipeline and a second pipeline, and a third pipeline 100c, a fourth pipeline 100d and a sixth pipeline 100f which are sequentially communicated form a first pipeline; the third pipeline 100c, the fifth pipeline and the sixth pipeline 100f which are communicated in sequence form a second pipeline; the fourth pipe 100d is disposed in parallel with the fifth pipe; the temperature monitoring unit 50 is arranged on the sixth pipeline 100f, and the temperature monitoring unit 50 is used for acquiring the temperature of the cooling water in the circulating cooling system in real time and feeding the temperature back to the control unit; the control unit is used for controlling the first pipeline to be opened and closed through the switch module 40 according to the temperature of the cooling water, and the control unit is also used for controlling the cooling tower 60 to be in different working states according to the temperature of the cooling water; the cooling tower 60 is disposed on the fifth pipeline, and the cooling tower 60 is used for cooling and heating the cooling water in the closed circulation cooling system under the condition that the first pipeline is closed.
That is, the function of the vacuum pump package 10 is to establish the desired vacuum environment. The water storage container 20 is used for storing cooling water, and may be a cold water tank, for example. The switching module 40 is used to switch the branch, for example, the first pipeline.
Therefore, the embodiment realizes the intermittent operation of the cooling tower 60 by the design and matching of the switch module 40, the temperature monitoring unit 50, the control unit and a plurality of pipelines, thereby prolonging the service life of the equipment and saving energy sources; meanwhile, due to the fact that the temperature monitoring unit 50 is designed to monitor the temperature of the cooling water, the control unit and the temperature monitoring unit 50 are matched with each other to control the switch module 40 and the cooling tower 60 to be in different working states according to the temperature of the cooling water, and further the adverse effect on the vacuum pump caused by overhigh or overlow temperature of the cooling water can be overcome. In addition, the cooling tower 60 is designed to have a heating function, so that the circulation cooling system of the embodiment of the utility model can be suitable for an extremely cold environment.
In the above embodiment, in order to realize the on-off control of the branch, the switch module 40 includes an electric ball valve; in order to provide power for the circulation of cooling water in the closed circulation cooling system of the entire vacuum pump group 10, the first power unit 30 may be a circulation pump.
In the above embodiment, in order to realize the heating of the cooling water by the vacuum pump, the cooling tower 60 includes an electric heating rod for heating the cooling water in the circulating cooling system.
That is, the cooling tower 60 is usually designed with a fan motor for cooling the cooling water, and the cooling tower 60 further includes an electric heating rod which can be disposed at the bottom of the water storage tank in the cooling tower 60, and when the cooling water needs to be heated, the control unit controls the electric heating rod to start automatic power-on heating.
In addition, in order to better realize the heating or cooling of the cooling water, the electric ball valve and the cooling tower 60 are interlocked, that is, the control unit controls the electric ball valve to be opened and simultaneously controls the cooling tower 60 to stop working, and the control unit controls the electric ball valve to be closed and simultaneously controls the cooling tower 60 to start working (cooling or heating the cooling water).
In addition, the working time of the electric heating rod is set by the control circuit according to the capacity of the cooling water, and the heating power of the electric heating rod is configured to be set for a set time (for example, 60 minutes) so as to increase the water temperature to about 20 ℃.
In the above embodiment, in order to avoid the situation that the cooling water of the circulation system leaks and the like has a very adverse effect on the vacuum pump, the circulation cooling system further includes a flow sensor 70, the flow sensor 70 is disposed on the sixth pipeline 100f, the flow sensor 70 is configured to collect the flow value of the cooling water in the circulation cooling system in real time and feed the flow value back to the control unit, and the control unit is further configured to control whether the vacuum pump group 10 is shut down according to the flow value of the cooling water fed back by the flow sensor 70.
For example, the flow sensor 70 may be a turbine flow meter, that is, the turbine flow meter monitors the flow rate of the cooling water in the closed-cycle cooling system in real time, so as to avoid the vacuum pump unit 10 from being burned out due to the open loop of the cooling system caused by the occurrence of an emergency.
In the above embodiment, in order to monitor the cooling water pressure in the circulating cooling system, the circulating cooling system further includes a pressure transmitter 80, the pressure transmitter 80 is disposed on the sixth pipeline 100f, the pressure transmitter 80 is configured to acquire the pressure value of the cooling water in the circulating cooling system in real time and feed the pressure value back to the control unit, and the control unit is further configured to control whether the vacuum pump group 10 is shut down according to the pressure value of the cooling water fed back by the pressure transmitter 80.
That is, by designing the system to include the pressure transmitter 80, the water pressure of the circulating water in the system is ensured to meet the cooling requirement of the vacuum pump unit 10, and the vacuum pump unit 10 is prevented from being burnt out due to the open loop of the closed circulating cooling system.
In the above embodiment, in order to effectively remove impurities from the cooling water in the closed circulation cooling system and ensure the quality of the cooling water, the circulation cooling system further includes the filter 90, the filter 90 is disposed on the third pipeline 100c, and the filter 90 is used for filtering the impurities from the cooling water in the circulation cooling system.
That is, through setting up filter 90, can avoid the easy impurity problems such as greasy dirt, dust of sneaking into of cooling water of the circulative cooling system of current vacuum pump in the use, and then avoid causing the corruption to the inner wall of pump package.
In the above embodiment, in order to be better suitable for the extremely cold environment, the first pipeline 100a, the second pipeline 100b, the third pipeline 100c, the fourth pipeline 100d, the fifth pipeline and the sixth pipeline 100f are all thermal insulation pipelines.
In the above embodiment, the circulation cooling system may further include a first check valve 101 and a second check valve 102, the first check valve 101 being disposed on the third pipe 100c, and the second check valve 102 being disposed on the second pipe 100b, whereby the flow direction of the cooling water is controlled by the check valves.
According to another embodiment, there is provided a method of cycle cooling of a vacuum pump package 10, the method comprising:
s10, setting the initial working state of the switch module 40 to be an open state, wherein the corresponding first pipeline is in an open state;
s20, acquiring the temperature of cooling water in the circulating cooling system in real time through the temperature monitoring unit 50 and feeding the temperature back to the control unit;
and S30, the control unit controls the temperature of the cooling water and a set temperature threshold value, controls the first pipeline to be opened or closed according to the comparison result, and controls the cooling tower 60 to be in different working states according to the comparison result so as to realize cooling or heating of the cooling water in the closed circulation cooling system.
In the embodiment, the switch module 40, the temperature monitoring unit 50, the control unit and a plurality of pipelines are designed and matched, so that the intermittent operation of the cooling tower 60 can be realized, the service life of the equipment is prolonged, and the energy is saved; meanwhile, due to the fact that the temperature monitoring unit 50 is designed to monitor the temperature of the cooling water, the control unit and the temperature monitoring unit 50 are matched with each other to control the switch module 40 and the cooling tower 60 to be in different working states according to the temperature of the cooling water, and further the adverse effect on the vacuum pump caused by overhigh or overlow temperature of the cooling water can be overcome. In addition, the cooling tower 60 is designed to have a heating function, so that the circulating cooling method in the embodiment of the utility model can be suitable for an extremely cold environment.
In the above embodiment, step S30 specifically includes:
when the temperature of the cooling water exceeds a first set temperature threshold value, the control unit controls the first pipeline to be closed through the switch module 40, and simultaneously controls the cooling tower 60 to cool the cooling water in the circulating cooling system;
when the water temperature of the cooling water is reduced to be less than a first set temperature threshold value under the action of the cooling tower 60, the control unit controls the cooling tower 60 to stop working; meanwhile, the control unit controls the first pipeline to be opened through the switch module 40;
when the temperature of the cooling water is lower than a second set threshold, the control unit controls the first pipeline to be closed through the switch module 40, and simultaneously controls the cooling tower 60 to heat the cooling water in the circulating cooling system;
when the water temperature of the cooling water is increased to a third set temperature threshold value under the action of the cooling tower 60, the control unit controls the cooling tower 60 to stop working; and the control unit controls the first pipeline to be opened through the switch module 40.
In the embodiment of the utility model, the first set temperature threshold is the upper limit value of the working temperature interval of the circulating cooling water, the second set temperature threshold is the lower limit value of the working temperature interval of the circulating cooling water, and the third set temperature threshold is 18-22 ℃.
For example, if the working temperature range of the circulating cooling water is 1-30 ℃, the first set temperature threshold is 30 ℃ and the second set temperature threshold is 1 ℃.
For example, the work flow of the circulating cooling system of the vacuum pump group 10 is as follows: before the vacuum pump set 10 is started, the electric ball valve is adjusted to be in an open state, then the cold water tank is filled with water, then the circulating pump is started, and finally the vacuum pump set 10 is started to carry out vacuum establishment work; when the temperature of the cooling water rises to above 30 ℃, the temperature monitoring unit 50 sends the acquired temperature value to the control unit of the vacuum pump group 10, then the control unit sends an instruction to the electric ball valve to switch the electric ball valve to the closed state, and as the control logic between the electric ball valve and the cooling tower 60 is set to be interlocked, the cooling tower 60 starts to operate at the moment until the temperature of the cooling water in the system is reduced to 30 ℃, the temperature monitoring unit 50 feeds back to the control unit, the control unit controls the cooling tower 60 to stop working and simultaneously switches the electric ball valve to the open state, and the working mode of the whole circulating cooling system circulates according to the working mode. In addition, when the temperature of the cooling water is lower than 1 ℃, the temperature monitoring unit 50 sends the collected temperature value to the control unit of the vacuum pump unit 10, and then the control unit sends an instruction to the electric ball valve, so that the electric ball valve is switched to a closed state, and meanwhile, the electric heating rod in the control unit cooling tower 60 starts to heat, so that the temperature of the cooling water in the circulating cooling system is raised, and the mechanical damage to each unit in the circulating system after the cooling water is frozen is prevented. Until the temperature of cooling water in the system rises to 20 ℃, the temperature monitoring unit 50 feeds back to the control unit, and the control unit controls the cooling tower 60 to stop working and simultaneously switches the electric ball valve to an opening state. In addition, when the flow rate of cooling water in the circulating cooling system is lower than the minimum value allowed by the vacuum pump set 10, the turbine flowmeter feeds back the acquired flow value to the control unit of the vacuum pump set 10 in real time, then the control unit sends a command to the vacuum pump set 10, and finally the vacuum pump set 10 is stopped slowly; when the water pressure value of the circulating cooling system is lower than the minimum value allowed by the vacuum pump group 10 or higher than the maximum value set by the vacuum pump group 10, the pressure transmitter 80 feeds back the pressure value collected in real time to the control unit of the vacuum pump group 10, and the control unit sends a command to the vacuum pump group 10 to stop the vacuum pump group 10 slowly.
The method according to the embodiment of the present invention corresponds to the system described in the above embodiment, and for a specific example, reference may be made to the description of the system in fig. 1, which is not described herein again.
Therefore, compared with the prior art, the embodiment of the utility model has at least the following beneficial effects:
1. the intermittent work of the cooling tower in the circulating cooling system is realized through mechanical and electronic elements such as a temperature monitoring unit, an electric ball valve and the like, and compared with the continuous work mode of the cooling tower in the traditional circulating cooling system, the method not only prolongs the service life of the cooling tower, but also saves energy;
2. the closed circulating water filtering device is added in the circulating cooling system, so that closed circulating water can be effectively purified, the water quality of the closed circulating water is guaranteed, and the damage to equipment and pipelines in the system due to the poor water quality is indirectly reduced;
3. circulating water flow and water pressure in the closed circulating cooling system are monitored in real time through the flow sensor and the pressure transmitter, the circulating water flow and the water pressure in the system are ensured to meet the cooling requirement of the vacuum pump set, and the vacuum pump set is prevented from being burnt out due to the open loop of the closed circulating cooling system;
4. the cooling tower of the vacuum pump set has a heating function, so that the closed circulation cooling system provided by the embodiment of the utility model can be normally used in extremely cold weather.
Features that are described and/or illustrated above with respect to one embodiment may be used in the same way or in a similar way in one or more other embodiments and/or in combination with or instead of the features of the other embodiments.
It should be emphasized that the term "comprises/comprising" when used herein, is taken to specify the presence of stated features, integers, steps or components but does not preclude the presence or addition of one or more other features, integers, steps, components or groups thereof.
The many features and advantages of these embodiments are apparent from the detailed specification, and thus, it is intended by the appended claims to cover all such features and advantages of these embodiments which fall within the true spirit and scope thereof. Further, since numerous modifications and changes will readily occur to those skilled in the art, it is not desired to limit the embodiments of the utility model to the exact construction and operation illustrated and described, and accordingly, all suitable modifications and equivalents may be resorted to, falling within the scope thereof.
The utility model has not been described in detail and is in part known to those of skill in the art.

Claims (7)

1. A circulating cooling system of a vacuum pump set is characterized by comprising the vacuum pump set, a first power unit, a water storage container, a cooling tower, a switch module, a temperature monitoring unit, a first pipeline, a second pipeline, a third pipeline, a fourth pipeline, a fifth pipeline and a sixth pipeline, wherein,
the vacuum pump set comprises a control unit, and cooling water is arranged in the water storage container;
the first power unit is communicated with the water storage container through a first pipeline, the first power unit is also communicated with the vacuum pump set through a second pipeline, and the power unit is used for providing power for circulation of cooling water;
the vacuum pump set is respectively communicated with the water storage container through a first pipeline and a second pipeline, and a third pipeline, a fourth pipeline and a sixth pipeline which are sequentially communicated form a first pipeline; the third pipeline, the fifth pipeline and the sixth pipeline which are communicated in sequence form a second pipeline; the fourth pipeline and the fifth pipeline are arranged in parallel;
the temperature monitoring unit is arranged on the sixth pipeline and used for collecting the temperature of cooling water in the circulating cooling system in real time and feeding the temperature back to the control unit;
the control unit is used for controlling the first pipeline to be opened and closed through the switch module according to the temperature of the cooling water, and is also used for controlling the cooling tower to be in different working states according to the temperature of the cooling water;
the cooling tower is arranged on the fifth pipeline and used for cooling and heating cooling water in the closed circulation cooling system under the condition that the first pipeline is closed.
2. The circulating cooling system of a vacuum pump set according to claim 1, further comprising a flow sensor disposed on the sixth pipeline, wherein the flow sensor is used for collecting the flow value of the cooling water in the circulating cooling system in real time and feeding the flow value back to the control unit, and the control unit is further used for controlling whether the vacuum pump set is shut down according to the flow value of the cooling water fed back by the flow sensor.
3. The circulating cooling system of a vacuum pump set according to claim 2, further comprising a pressure transmitter disposed on the sixth pipeline, wherein the pressure transmitter is configured to acquire the pressure value of the cooling water in the circulating cooling system in real time and feed the pressure value back to the control unit, and the control unit is further configured to control whether the vacuum pump set is shut down according to the pressure value of the cooling water fed back by the pressure transmitter.
4. A circulating cooling system of a vacuum pump group according to any of claims 2-3, characterized in that the first power unit comprises a circulating pump, and/or the switch module comprises an electric ball valve, and/or the flow sensor comprises a turbine flow meter.
5. A circulating cooling system of a vacuum pump group according to any of claims 1-3, characterized in that the circulating cooling system further comprises a filter arranged on the third pipe, the filter being used for filtering impurities of the cooling water in the circulating cooling system.
6. The circulating cooling system of a vacuum pump group, according to claim 1, wherein the first pipeline, the second pipeline, the third pipeline, the fourth pipeline, the fifth pipeline and the sixth pipeline are all thermal insulation pipelines.
7. The circulating cooling system of a vacuum pump group as claimed in claim 1, wherein the cooling tower comprises an electric heating rod for heating cooling water in the circulating cooling system.
CN202122068655.0U 2021-08-30 2021-08-30 Circulating cooling system of vacuum pump set Active CN216278344U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202122068655.0U CN216278344U (en) 2021-08-30 2021-08-30 Circulating cooling system of vacuum pump set

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202122068655.0U CN216278344U (en) 2021-08-30 2021-08-30 Circulating cooling system of vacuum pump set

Publications (1)

Publication Number Publication Date
CN216278344U true CN216278344U (en) 2022-04-12

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Application Number Title Priority Date Filing Date
CN202122068655.0U Active CN216278344U (en) 2021-08-30 2021-08-30 Circulating cooling system of vacuum pump set

Country Status (1)

Country Link
CN (1) CN216278344U (en)

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