CN216259688U - Oxygen purification device for bulk gas supply - Google Patents

Oxygen purification device for bulk gas supply Download PDF

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Publication number
CN216259688U
CN216259688U CN202122423339.0U CN202122423339U CN216259688U CN 216259688 U CN216259688 U CN 216259688U CN 202122423339 U CN202122423339 U CN 202122423339U CN 216259688 U CN216259688 U CN 216259688U
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China
Prior art keywords
wall
adsorption tank
filter screen
fixedly connected
purification device
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CN202122423339.0U
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Chinese (zh)
Inventor
白久
赵颖毅
林晨
陈龙
王虎林
蔡明哲
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Hongxin Gas Shanghai Co ltd
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Hongxin Gas Shanghai Co ltd
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Abstract

The utility model discloses an oxygen purification device for supplying bulk gas, which comprises a base, an adsorption tank and a treatment tank, wherein a fixed plate is arranged at the top of the base, supporting columns are fixedly connected at four corners of the bottom of the fixed plate, supporting plates are fixedly connected among the supporting columns, and a heat insulation layer is arranged on the inner wall of the adsorption tank. The feed gas is filtered by the sieve plate and the filter plate and then uniformly contacts the guide plates, the guide plates which are alternately arranged can prolong the contact time of the feed gas and the adsorbent, meanwhile, the electric heating pipe can heat the inside of the adsorption tank, the heat insulation layer effectively isolates heat, the heating is uniform, the reaction is more sufficient, the gas purity is improved, then, the secondary filtration is carried out by the activated carbon filter screen and the first filter screen in the treatment tank, and the first filter screen has a uniform microporous structure, so that the air purification is realized.

Description

Oxygen purification device for bulk gas supply
Technical Field
The utility model relates to the technical field of oxygen purification, in particular to an oxygen purification device for supplying bulk gas.
Background
With social development and more economic progress, the industry is gradually converted from rough machining to precise manufacturing, the demand for high-purity gas is increased, the high-purity oxygen is widely applied in the industries of electronics, crystalline silicon and the like, the high-purity oxygen is used for chemical vapor deposition of silicon dioxide, is used as an oxidation source and a reactant for generating high-purity water, is oxidized by a dry method, is mixed with carbon tetrafluoride and is used for plasma etching, and an oxygen purification device is required for oxygen purification.
The existing gas purification device can not remove most impurities at one time, so a plurality of purifiers are required to work simultaneously, different adsorbents are required to be filled in each purifier, the required time is long, the heating is not uniform, the heat insulation performance is poor, and the purification process of the gas is complicated.
Therefore, it is necessary to develop an oxygen purification device for bulk gas supply to solve the above problems.
SUMMERY OF THE UTILITY MODEL
The utility model aims to provide an oxygen purification device for supplying bulk gas, wherein raw gas is filtered by a sieve plate and a filter plate and then uniformly contacts a guide plate, an electric heating pipe can heat the inside of an adsorption tank, a heat insulation layer effectively isolates heat, and then secondary filtration is carried out by an activated carbon filter screen and a first filter screen in a treatment tank, wherein the first filter screen has a uniform microporous structure, so that the purification of air is realized, and the defects in the technology are overcome.
In order to achieve the above purpose, the utility model provides the following technical scheme: a bulk gas supply oxygen purification device comprises a base, an adsorption tank and a treatment tank, wherein a fixed plate is arranged at the top of the base, support columns are fixedly connected to four corners of the bottom of the fixed plate, and support plates are fixedly connected among a plurality of support columns;
the adsorption tank is characterized in that a heat insulation layer is arranged on the inner wall of the adsorption tank, sieve plates are fixedly connected to two sides of the inner wall of the adsorption tank, a filter plate is arranged on one side of the outer wall of each sieve plate, a heat insulation layer is arranged between the two sieve plates, a plurality of guide plates are fixedly connected to the outer wall of the heat insulation layer, an adsorbent is arranged on the outer wall of the heat insulation layer, an activated carbon adsorption plate is arranged at the top of each guide plate, and an electric heating tube is arranged on the inner wall of the heat insulation layer;
the utility model discloses a drying device, including treatment tank, baffle, drainage tube, baffle bottom, active carbon filter screen bottom is equipped with first filter screen, the treatment tank inner wall is equipped with the vacuum layer, the equal fixedly connected with baffle in treatment tank inner wall both sides, two be equipped with the drainage tube between the baffle, the drainage tube outer wall is equipped with the drier, one the baffle bottom is equipped with the active carbon filter screen, active carbon filter screen bottom is equipped with first filter screen.
Preferably, the support column is fixedly connected with the base, and the adsorption tank and the treatment tank penetrate through the fixing plate and the support plate.
Preferably, the adsorption tank inner wall top is equipped with the intake pipe, it is equipped with the blast pipe to handle a jar inner wall top, adsorption tank and treatment tank top one side all are equipped with the barometer.
Preferably, the adsorption tank and the bottom of the treatment tank are fixedly connected with an air duct, and a pneumatic valve is arranged on the inner wall of the air duct.
Preferably, the adsorbent is located the guide plate outer wall, heat preservation layer bottom is equipped with temperature sensor.
Preferably, the top of the other partition board is provided with a second filter screen, and the top of the second filter screen is provided with a screen.
In the technical scheme, the utility model provides the following technical effects and advantages:
after filtering the feed gas through sieve and filter, evenly contact the guide plate, alternate arrangement's guide plate can prolong the contact time of feed gas and adsorbent, the electrothermal tube can heat the adsorption tank inside simultaneously, the heat insulation layer is effectively isolated heat, prevent scalding operating personnel, it is even to heat, make the reaction more abundant, improve gaseous purity, then carry out secondary filter through the active carbon filter screen and the first filter screen of treatment tank inside, first filter screen has even microporous structure, thereby realize the purification to the air, moreover, the steam generator is simple in structure, therefore, the clothes hanger is strong in practicability, multiple filter effect has, purified gas that can be better.
Drawings
In order to more clearly illustrate the embodiments of the present application or technical solutions in the prior art, the drawings needed to be used in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments described in the present invention, and other drawings can be obtained by those skilled in the art according to the drawings.
FIG. 1 is a cross-sectional view of the overall construction of the present invention;
FIG. 2 is a front view of the present invention;
FIG. 3 is a top cross-sectional view of the canister of the present invention;
FIG. 4 is an enlarged view of the structure of FIG. 1 at A according to the present invention;
FIG. 5 is an enlarged view of the structure of FIG. 1 at B.
Description of reference numerals:
1. a base; 2. a fixing plate; 3. a support pillar; 4. a support plate; 5. an adsorption tank; 6. a treatment tank; 7. an air inlet pipe; 8. a barometer; 9. a heat insulating layer; 10. a sieve plate; 11. a filter plate; 12. a heat-insulating layer; 13. an electric heating tube; 14. an adsorbent; 15. a baffle; 16. an activated carbon adsorption plate; 17. an air duct; 18. a temperature sensor; 19. a vacuum layer; 20. a partition plate; 21. a drainage tube; 22. a desiccant; 23. an active carbon filter screen; 24. a first filter screen; 25. a second filter screen; 26. screening a screen; 27. an exhaust pipe; 28. a pneumatic valve.
Detailed Description
In order to make the technical solutions of the present invention better understood, those skilled in the art will now describe the present invention in further detail with reference to the accompanying drawings.
The utility model provides an oxygen purification device for bulk gas supply, which comprises a base 1, an adsorption tank 5 and a treatment tank 6, wherein the top of the base 1 is provided with a fixed plate 2, four corners at the bottom of the fixed plate 2 are fixedly connected with support columns 3, and support plates 4 are fixedly connected among the support columns 3;
the inner wall of the adsorption tank 5 is provided with a heat insulation layer 9, both sides of the inner wall of the adsorption tank 5 are fixedly connected with sieve plates 10, one side of the outer wall of each sieve plate 10 is provided with a filter plate 11, a heat insulation layer 12 is arranged between the two sieve plates 10, the outer wall of each heat insulation layer 12 is fixedly connected with a guide plate 15, the number of the guide plates 15 is multiple, the outer wall of each heat insulation layer 12 is provided with an adsorbent 14, the top of each guide plate 15 is provided with an activated carbon adsorption plate 16, and the inner wall of each heat insulation layer 12 is provided with an electric heating pipe 13;
the inner wall of the treatment tank 6 is provided with a vacuum layer 19, two baffle plates 20 are fixedly connected to two sides of the inner wall of the treatment tank 6, a drainage tube 21 is arranged between the baffle plates 20, the outer wall of the drainage tube 21 is provided with a drying agent 22, one is arranged at the bottom of the baffle plate 20, and a first filter screen 24 is arranged at the bottom of the active carbon filter screen 23.
Further, in the above technical solution, the supporting column 3 is fixedly connected with the base 1, and the adsorption tank 5 and the treatment tank 6 penetrate through the fixing plate 2 and the supporting plate 4.
Further, in the above technical scheme, an air inlet pipe 7 is arranged at the top end of the inner wall of the adsorption tank 5, an exhaust pipe 27 is arranged at the top end of the inner wall of the treatment tank 6, and barometers 8 are arranged on one sides of the top ends of the adsorption tank 5 and the treatment tank 6.
Further, in the above technical scheme, the bottom of the adsorption tank 5 and the bottom of the treatment tank 6 are fixedly connected with an air duct 17, and the inner wall of the air duct 17 is provided with a pneumatic valve 28.
Further, in the above technical solution, the adsorbent 14 is located on the outer wall of the air guide plate 15, and the bottom of the heat insulation layer 12 is provided with a temperature sensor 18.
Further, in the above technical solution, a second filter screen 25 is disposed on the top of another partition board 20, and a screen 26 is disposed on the top of the second filter screen 25.
This practical theory of operation:
referring to the attached drawings 1-5 of the specification, when the device is used, raw material gas enters an adsorption tank 5 from an air inlet pipe 7, then is filtered by a sieve plate 10 and a filter plate 11 and then uniformly contacts a guide plate 15, the guide plate 15 which is alternately arranged can prolong the contact time of the raw material gas and an adsorbent 14, simultaneously is matched with an active carbon adsorption plate 16 to purify the raw material gas, meanwhile, an electric heating pipe 13 can heat the interior of the adsorption tank 5, a heat insulation layer 9 effectively isolates heat to prevent scalding operators, the heating is uniform, the reaction is more sufficient, the gas purity is improved, then the purified raw material gas enters a treatment tank 6 from an air guide pipe 17 by a pneumatic valve 28 according to a set purification process, enters a drainage pipe 21 after secondary filtration is carried out through an active carbon filter screen 23 and a first filter screen 24, and the first filter screen 24 has a uniform micropore structure, and the hole diameter size is even, and the hole can adsorb the inside of vestibule to the molecule that is less than its diameter to the realization is to the purification of air, then carries out drying process and then discharges by regeneration blast pipe 27 at last to the air after purifying through drier 22, simple structure, the practicality is strong, has multiple filter effect, the purifying gas that can be better.
While certain exemplary embodiments of the present invention have been described above by way of illustration only, it will be apparent to those of ordinary skill in the art that the described embodiments may be modified in various different ways without departing from the spirit and scope of the utility model. Accordingly, the drawings and description are illustrative in nature and should not be construed as limiting the scope of the utility model.

Claims (6)

1. An oxygen purification device for bulk gas supply, comprising a base (1), an adsorption tank (5) and a treatment tank (6), characterized in that: the top of the base (1) is provided with a fixed plate (2), four corners of the bottom of the fixed plate (2) are fixedly connected with supporting columns (3), and supporting plates (4) are fixedly connected among the supporting columns (3);
the adsorption tank is characterized in that a heat insulation layer (9) is arranged on the inner wall of the adsorption tank (5), sieve plates (10) are fixedly connected to two sides of the inner wall of the adsorption tank (5), a filter plate (11) is arranged on one side of the outer wall of each sieve plate (10), a heat insulation layer (12) is arranged between every two sieve plates (10), a plurality of guide plates (15) are fixedly connected to the outer wall of each heat insulation layer (12), an adsorbent (14) is arranged on the outer wall of each heat insulation layer (12), an activated carbon adsorption plate (16) is arranged at the top of each guide plate (15), and electric heating tubes (13) are arranged on the inner wall of each heat insulation layer (12);
handle jar (6) inner wall and be equipped with vacuum layer (19), handle jar (6) inner wall both sides equal fixedly connected with baffle (20), two be equipped with drainage tube (21) between baffle (20), drainage tube (21) outer wall is equipped with drier (22), one baffle (20) bottom is equipped with activated carbon filter screen (23), activated carbon filter screen (23) bottom is equipped with first filter screen (24).
2. The bulk gas supply oxygen purification device of claim 1, wherein: support column (3) and base (1) fixed connection, adsorption tank (5) and treatment tank (6) run through fixed plate (2) and backup pad (4).
3. The bulk gas supply oxygen purification device of claim 1, wherein: the adsorption tank is characterized in that an air inlet pipe (7) is arranged at the top end of the inner wall of the adsorption tank (5), an exhaust pipe (27) is arranged at the top end of the inner wall of the treatment tank (6), and a barometer (8) is arranged on one side of the top ends of the adsorption tank (5) and the treatment tank (6).
4. The bulk gas supply oxygen purification device of claim 1, wherein: the adsorption tank (5) and the bottom of the treatment tank (6) are fixedly connected with an air duct (17), and the inner wall of the air duct (17) is provided with a pneumatic valve (28).
5. The bulk gas supply oxygen purification device of claim 1, wherein: the adsorbent (14) is located the guide plate (15) outer wall, heat preservation (12) bottom is equipped with temperature sensor (18).
6. The bulk gas supply oxygen purification device of claim 1, wherein: and a second filter screen (25) is arranged at the top of the other partition board (20), and a screen (26) is arranged at the top of the second filter screen (25).
CN202122423339.0U 2021-10-09 2021-10-09 Oxygen purification device for bulk gas supply Active CN216259688U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202122423339.0U CN216259688U (en) 2021-10-09 2021-10-09 Oxygen purification device for bulk gas supply

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202122423339.0U CN216259688U (en) 2021-10-09 2021-10-09 Oxygen purification device for bulk gas supply

Publications (1)

Publication Number Publication Date
CN216259688U true CN216259688U (en) 2022-04-12

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Application Number Title Priority Date Filing Date
CN202122423339.0U Active CN216259688U (en) 2021-10-09 2021-10-09 Oxygen purification device for bulk gas supply

Country Status (1)

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CN (1) CN216259688U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115524084A (en) * 2022-10-08 2022-12-27 江苏捷利达环保科技有限公司 Device and method for detecting leakage of steel cylinder for large amount of special gas

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115524084A (en) * 2022-10-08 2022-12-27 江苏捷利达环保科技有限公司 Device and method for detecting leakage of steel cylinder for large amount of special gas
CN115524084B (en) * 2022-10-08 2023-09-12 江苏捷利达环保科技有限公司 Device and method for detecting leakage of steel cylinders for bulk special gas

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Address after: Units 01 and 02, 5th Floor, No. 3, Lane 5005, Shenjiang Road, China (Shanghai) Pilot Free Trade Zone, Pudong New Area, Shanghai, 201210 (4th Floor, Property Registration Floor)

Patentee after: Hongxin gas (Shanghai) Co.,Ltd.

Address before: Room a-1339, building 1, No. 188, Changyi Road, Baoshan District, Shanghai 201900

Patentee before: Hongxin gas (Shanghai) Co.,Ltd.