CN216259437U - A filter equipment for producing electronic grade sulphuric acid - Google Patents
A filter equipment for producing electronic grade sulphuric acid Download PDFInfo
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- CN216259437U CN216259437U CN202120742827.5U CN202120742827U CN216259437U CN 216259437 U CN216259437 U CN 216259437U CN 202120742827 U CN202120742827 U CN 202120742827U CN 216259437 U CN216259437 U CN 216259437U
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Abstract
The utility model relates to the technical field of production of electronic-grade chemical products, in particular to a filtering device for producing electronic-grade sulfuric acid. The filtering device comprises a shell and a top cover fixedly connected with the shell, wherein the top cover and the shell can be fixedly connected through a flange, a bottom plate is arranged at the bottom in the shell, an acid inlet hole and a plurality of acid outlet holes are formed in the bottom plate, a filter element is installed on the acid outlet holes, the filter element is arranged in the shell in parallel, and an acid inlet and an acid outlet are formed in the bottom of the shell. The acid filter has the advantages that only one acid inlet is used for feeding acid, the acid fed into the shell is filtered by the filter elements arranged in parallel to filter particles of 50 micrometers to 15 nanometers, and the filtered acid liquid is collected to one liquid outlet for liquid outlet. And because the sulfuric acid is filtered by a plurality of filter elements arranged in parallel, the filter efficiency is high, and the service life of the filter elements is prolonged.
Description
Technical Field
The utility model relates to the technical field of production of electronic-grade chemical products, in particular to a filtering device for producing electronic-grade sulfuric acid.
Background
Electronic grade sulfuric acid, also known as high-purity sulfuric acid and ultra-pure sulfuric acid, belongs to ultra-clean high-purity reagents, and is one of essential key basic chemical reagents in the development process of microelectronic technology. Electronic grade sulfuric acid is widely used in the assembly and processing of semiconductors and very large scale integrated circuits, is mainly used for cleaning and etching silicon wafers, and can effectively remove impurity particles, inorganic residues and carbon deposits on the wafers.
In the process of preparing electronic-grade sulfuric acid, the prepared high-purity sulfuric acid is usually subjected to stripping and filtering to remove particulate impurities in the high-purity sulfuric acid solution. In the prior art, a mode of serially connecting single-stage filters is generally adopted to filter high-purity sulfuric acid, for example, in the patent of the utility model with the publication number of CN 110155955 a, the sulfuric acid filtering mode is a three-stage circulating ultrafiltration step, and specifically comprises the following steps: and (3) carrying out primary filtration circulation, intermediate filtration circulation and terminal filtration on the sulfuric acid solution subjected to the stripping treatment in filters with different filter membrane pore sizes in three stages, wherein particles in the primary filtration circulation enter the intermediate filtration circulation after reaching less than 100 nanometers, the particles in the intermediate filtration circulation enter the terminal filtration after reaching less than 50 nanometers, and the finished product electronic grade sulfuric acid is obtained after the particles in the terminal filtration are less than 10 nanometers. The electronic-grade sulfuric acid with qualified particulate indexes is obtained by adopting the series connection mode of the single-stage filters, so that the service life of a filter element in the filter is short due to the large diameter range of filter particles, the large number of absolute particulate matters in unit volume and the blockage of the filter element; in addition, since the high-purity sulfuric acid itself has a certain viscosity, the smaller the diameter of the particulate matter filtered by the filter, the smaller the flow rate, resulting in a decrease in production efficiency.
Disclosure of Invention
The utility model aims to solve the problems of low service life and low filtering efficiency of an electronic-grade sulfuric acid filtering system in the prior art, and provides a filtering device for producing electronic-grade sulfuric acid, which is high in filtering efficiency and prolongs the service life of a filter element.
In order to achieve the purpose, the technical scheme of the utility model is as follows:
the utility model provides a filter equipment for producing electronic grade sulphuric acid, includes the casing and with casing fixed connection's top cap, top cap and casing can pass through flange fixed connection, the bottom is provided with the bottom plate in the casing, be provided with one on the bottom plate and advance sour hole and a plurality of play sour hole, go out and install the filter core on the sour hole, the filter core sets up in the casing side by side, and the bottom of casing sets up into sour mouthful and goes out sour mouthful.
As a further preferred solution, the housing comprises an outer shell and an inner liner.
As a further optimized solution, the outer shell is a stainless steel outer shell, specifically 304 stainless steel, and the inner liner is an inner liner made of PFA material.
As a further preferred solution, the filter element is arranged between the base plate and the top cover, the top cover pressing the filter element.
As a further optimized scheme, the filter element is a folding filter paper type filter element.
As a further preferred solution, a gap is left between the bottom plate and the bottom of the housing.
As a further optimized scheme, acid inlet pipelines are arranged in the acid inlet and the acid inlet, and an acid outlet pipeline is arranged in the acid outlet.
Through the technical scheme, the utility model has the beneficial effects that:
the filter device for producing electronic-grade sulfuric acid only has one acid inlet for feeding acid, the acid fed into the shell is filtered by a plurality of filter elements arranged in parallel to filter particles of 50 micrometers to 15 nanometers, and the filtered acid liquid is collected to one liquid outlet for discharging liquid. And because the sulfuric acid is filtered by a plurality of filter elements arranged in parallel, the filter efficiency is high, and the service life of the filter elements is prolonged.
Because the filter core sets up on the play sour hole of bottom plate, is compressed tightly by the top cap, when the filter core needs to be changed, open the top cap, the renew cartridge can, it is comparatively convenient to change.
The content of particulate matters in the electronic-grade sulfuric acid obtained by filtering according to the utility model reaches the C12 standard of the international SIME standard.
Drawings
FIG. 1 is a schematic diagram I of a filter device for producing electronic-grade sulfuric acid according to the present invention;
FIG. 2 is a schematic diagram of a second embodiment of a filtration apparatus for producing electronic-grade sulfuric acid according to the present invention;
FIG. 3 is a schematic diagram of the construction of a base plate for use in a filtration apparatus for the production of electronic grade sulfuric acid in accordance with the present invention;
FIG. 4 is a schematic diagram of a filter element of a filter unit for producing electronic grade sulfuric acid according to the present invention;
FIG. 5 is a flow diagram of sulfuric acid when a filter apparatus for producing electronic-grade sulfuric acid according to the present invention is in use.
The reference numbers in the drawings are as follows: the acid filter comprises a shell 1, a shell 11, a lining 12, an acid inlet 13, an acid outlet 14, a top cover 2, a bottom plate 3, an acid inlet hole 31, an acid outlet hole 32, an acid inlet pipeline 4, an acid outlet pipeline 5 and a filter element 6.
Detailed Description
The utility model is further described with reference to the following figures and detailed description:
as shown in fig. 1 to 2, the filtering apparatus for producing electronic-grade sulfuric acid of the present embodiment includes a housing 1 and a top cover 2 fixedly connected to the housing 1, the top cover 2 and the housing 1 may be tightly connected by a flange, the housing 1 is cylindrical, and the housing 1 includes an outer shell 11 and an inner liner 12. The outer shell 11 is a stainless steel shell, specifically 304 stainless steel, and the inner liner 12 is made of PFA material.
The bottom in the shell 1 is provided with a bottom plate 3, and a gap is reserved between the bottom plate 3 and the bottom of the shell 1. The bottom plate 3 is provided with an acid inlet hole 31 and a plurality of acid outlet holes 32, the number of the acid outlet holes 32 is 12, 12 filter elements 6 are installed on the 12 acid outlet holes 32, the filter elements 6 are arranged in the casing 1 in parallel, specifically, the filter elements 6 are arranged between the bottom plate 1 and the top cover 2, the top cover 2 presses the filter elements 6, and the top cover 2 is a circular plate made of PFA material and mainly plays a role in pressing the filter elements 6. As shown in fig. 3, 10 acid outlet holes 32 are circumferentially arranged on the bottom plate 3, and the other 2 acid outlet holes 32 and 1 acid inlet hole 31 are arranged near the center of the bottom plate 3. This setting makes the acidizing fluid can get into filter core 6 comparatively evenly and filter.
The filter element 6 is a folding filter paper type filter element, and specifically, the filter material of the filter element 6 is folding filter paper, as shown in fig. 4.
The bottom of the shell 1 is provided with an acid inlet 13 and an acid outlet 14, and the acid inlet 13 can be correspondingly provided with an acid inlet hole 31. Acid inlet pipelines 4 are arranged in the acid inlet hole 31 and the acid inlet 13, and an acid outlet pipeline 5 is arranged in the acid outlet 14.
As shown in fig. 5 (the arrow in the figure indicates the traveling direction of sulfuric acid), when sulfuric acid is filtered, sulfuric acid enters the housing 1 of the filtering device through the acid inlet pipeline 4, the sulfuric acid in the housing 1 is simultaneously filtered by 12 filter elements 6, particles of 50 micrometers to 15 nanometers in the sulfuric acid are filtered by the filter elements 6, the filtered electronic-grade sulfuric acid enters the filter elements 6, then enters the lower part of the bottom plate 3 through 12 acid outlet holes 32, enters the acid outlet pipeline 5 through the acid outlet 14 on the housing 1, and is stored in the acid storage tank.
The above-described embodiments are merely preferred embodiments of the present invention, and not intended to limit the scope of the utility model, so that equivalent changes or modifications in the structure, features and principles described in the present invention should be included in the claims of the present invention.
Claims (7)
1. The utility model provides a filter equipment for producing electronic grade sulphuric acid, includes casing (1) and top cap (2) with casing (1) fixed connection, its characterized in that, the bottom is provided with bottom plate (3) in casing (1), be provided with one on bottom plate (3) and advance acid hole (31) and a plurality of and go out acid hole (32), install filter core (6) on going out acid hole (32), filter core (6) set up side by side in casing (1), and the bottom of casing (1) sets up into acid mouth (13) and goes out acid mouth (14).
2. A filter device for the production of electronic grade sulfuric acid according to claim 1, characterized in that the housing (1) comprises an outer shell (11) and an inner liner (12).
3. A filter device for the production of electronic grade sulfuric acid according to claim 2, characterized in that the outer shell (11) is a stainless steel outer shell and the inner liner (12) is an inner liner made of PFA material.
4. A filter device for the production of electronic grade sulfuric acid according to claim 1, wherein the filter element (6) is arranged between the bottom plate (3) and the top cover (2), the top cover (2) pressing the filter element (6).
5. A filter device for the production of electronic grade sulfuric acid according to claim 1, wherein the filter element (6) is a pleated filter paper filter element.
6. A filter device for the production of electronic grade sulfuric acid according to claim 1, characterized in that a gap is left between the bottom plate (3) and the bottom of the housing (1).
7. A filter device for producing electronic grade sulfuric acid according to claim 1, wherein an acid inlet pipe (4) is provided in the acid inlet hole (31) and the acid inlet (13), and an acid outlet pipe (5) is provided in the acid outlet (14).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120742827.5U CN216259437U (en) | 2021-04-13 | 2021-04-13 | A filter equipment for producing electronic grade sulphuric acid |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120742827.5U CN216259437U (en) | 2021-04-13 | 2021-04-13 | A filter equipment for producing electronic grade sulphuric acid |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN216259437U true CN216259437U (en) | 2022-04-12 |
Family
ID=81001682
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202120742827.5U Active CN216259437U (en) | 2021-04-13 | 2021-04-13 | A filter equipment for producing electronic grade sulphuric acid |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN216259437U (en) |
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2021
- 2021-04-13 CN CN202120742827.5U patent/CN216259437U/en active Active
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