CN216213507U

CN216213507U - Dust collector of light emitting diode chip

Info

Publication number: CN216213507U
Application number: CN202122567836.8U
Authority: CN
Inventors: 徐东; 杨辉; 潘超; 倪瑞
Original assignee: Huaian Aucksun Optoelectronics Technology Co Ltd
Current assignee: Huaian Aucksun Optoelectronics Technology Co Ltd
Priority date: 2021-10-25
Filing date: 2021-10-25
Publication date: 2022-04-05
Anticipated expiration: 2031-10-25

Abstract

The utility model discloses a dust removal device for a light-emitting diode chip, which comprises a main body support, a motor, a conveyor belt, belt wheels, an air nozzle support, a wafer material box, an opposite injection sensor and a vacuumizing groove, wherein the air nozzle is positioned on the air nozzle support, the opposite injection sensor is placed at the front end and the rear end of the main body support, a wafer is placed in the material box, and the vacuumizing groove is arranged below the conveyor belt. When the material box is placed in the left and right opposite-jet sensor on the front side, the conveying belt rotates to enable the material box to convey forwards, the air nozzle starts to spray air, high-speed air flow passes through the material box, and dust, particles and the like on the front and back surfaces of each tablet in the material box are blown off and are pumped away by the vacuumizing groove below the conveying belt through the round hole in the conveying belt. The problem of the cleaning efficiency is low because the air gun is used manually and is clean is avoided, and the problem that the production efficiency is influenced because the chip is stuck with dust, particles and the like influence the operation of equipment and the like when the operation personnel operate the equipment to process the chip is avoided.

Description

Dust collector of light emitting diode chip

Technical Field

The utility model relates to the technical field of semiconductors, in particular to a dust removal device for a light-emitting diode chip.

Background

An LED (Light Emitting Diode) has the advantages of small size, long service life, low power consumption, and the like, and is currently widely used in automobile signal lamps, traffic signal lamps, display screens, and lighting devices.

When an LED is manufactured, an epitaxial wafer needs to be manufactured first, and then the epitaxial wafer is subjected to processes of coating, photoresist homogenizing, photoetching, developing, and the like to manufacture an LED chip. In the manufacturing process, certain pollution is inevitably formed on the LED chip, so that the LED chip needs to be subjected to dust removal and cleaning in the production process of the LED chip.

At present, the LED chip is generally cleaned in a manual mode, and the dust removal cleaning efficiency is low.

Disclosure of Invention

Aiming at the defects of the prior art, the utility model designs the dust removal device for the light-emitting diode chip, which can improve the cleaning efficiency of the light-emitting diode chip.

The technical scheme disclosed by the utility model is as follows: the utility model provides a dust collector of emitting diode chip, includes the main part support, installs the conveyer belt on the main part support, still includes the air cock support, the air cock support is located the top of conveyer belt, install a plurality of air cock to the conveyer belt jet-propelled on the air cock support, at least a set of correlation sensor is placed or fixed mounting is at the front end of main part support, has a plurality of evenly distributed's round hole on the conveyer belt, the evacuation groove is installed to the below of conveyer belt, the evacuation groove is fixed at the main part support, the exhaust pipe is connected in the evacuation groove.

On the basis of the above scheme, preferably, the air nozzle support has a plurality of, and sets up at the interval in the front and back direction.

On the basis of the scheme, preferably, the motor for driving the transmission of the conveying belt is positioned on the right side of the main body support, and two ends of the air nozzle support are fixed on the left side and the right side of the main body support.

On the basis of the above scheme, as preferred, install a plurality of air cocks on every air cock support, it is a plurality of the air cock evenly distributed on the length direction of air cock support.

On the basis of the scheme, preferably, the motor is connected with a belt wheel which drives the conveying belt to move in a transmission manner.

On the basis of the above scheme, as preferred, the motor shaft is connected with the drive wheel in a transmission manner, the drive wheel is connected with the driven wheel through the V belt, and the driven wheel and the belt wheel are fixed on the same shaft.

On the basis of the above scheme, preferably, the motor is connected with the fixing plate through a bolt, and the fixing plate is fixedly connected with the outer side of the main body bracket.

In addition to the above, preferably, the conveyor belt is a belt in which a cotton or linen lining cloth is rubber-bonded.

On the basis of the above scheme, preferably, the air nozzle is made of teflon.

In addition to the above, preferably, a dust cover made of a transparent material is attached to the main body frame.

Compared with the prior art, the utility model has the following beneficial effects:

through installing two sets of correlation sensors on main part support, putting into the conveyer belt department of guide rail front end as the operation personnel's magazine that will be equipped with the chip, correlation sensor senses there is the magazine this moment, and the motor rotates and drives the conveyer belt motion, and the air cock on the air cock support begins to spout nitrogen gas, and when the magazine on the conveyer belt passes through the air cock below, debris such as dust of the positive and negative both sides of chip in the gaseous clean magazine are blown off to high-speed gas flow, and the dust that blows off from the conveyer belt is taken away in the negative pressure vacuum of main part support below simultaneously. This dust collector avoids using the problem that the clean inefficiency that leads to of air gun cleanness by the manual work, produces because the chip glues the dust when avoiding the operation personnel operating equipment to process the chip simultaneously, and influence production efficiency's problems such as equipment operation are influenced to granule.

Drawings

Fig. 1 is a schematic structural diagram of a cleaning apparatus for an led chip according to an embodiment of the present invention;

fig. 2 is a schematic structural diagram of a motor-driven pulley provided in an embodiment of the present invention;

FIG. 3 is a schematic structural diagram of a conveyor belt according to an embodiment of the present invention;

fig. 4 is a schematic structural diagram of an air faucet and an air faucet support provided in an embodiment of the present invention.

Detailed Description

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following description will be made with reference to the accompanying drawings. It is obvious that the drawings in the following description are only some examples of the utility model, and that for a person skilled in the art, other drawings and embodiments can be derived from them without inventive effort.

As shown in fig. 1 to 4, the dust removing apparatus includes a main body support 10, a motor 20, a pulley 30, a conveyor belt 40, an air nozzle 50, an air nozzle support 51, a wafer cassette 60, a correlation sensor 70, and a vacuuming groove 80.

The left and right sides of the air nozzle support 51 are fixed on the left and right sides of the main body support 10, the motor 20 is located on the right side of the main body support 10, the air nozzle 50 is located in the middle of the air nozzle support 51, and the front and rear ends of the main body support 10 are respectively provided with a set of correlation sensors 70. The middle of the main body support 10 is provided with a conveyor belt 40 driven by a motor 20, and the conveyor belt is provided with a plurality of uniformly distributed round holes.

The vacuumizing groove 80 is positioned below the conveyor belt and fixed on the main body support, the bottom of the vacuumizing groove 80 is connected with an exhaust pipeline, and the other side of the exhaust pipeline is connected with plant negative-pressure exhaust air. The air pressure in the slot is continuously extracted through the factory end, so that the chip dust blown off from the conveyor belt 40 is extracted and discharged through the exhaust pipe.

When the wafer is placed in the magazine, and the magazine 60 is placed between the right and left front side correlation sensors 70, the conveyor belt 40 rotates to enable the magazine 60 to be conveyed forwards, the air nozzles 50 start to inject air, high-speed air flows pass through the magazine 60, and dust, particles and the like on the front and back sides of each wafer in the magazine 60 are blown off. Dust, particles and the like are pumped away by the vacuumizing groove below the conveyor belt through the round holes in the conveyor belt. When the rear end position of the main body support is reached, the opposite injection sensor senses the material box, and the conveying belt stops.

Fig. 2 is a structure of the present invention, in which the motor 20 drives the conveyor belt 40 to run, the motor 20 is connected to the fixing plate 23 through a bolt, and the fixing plate 23 is fixedly connected to the main body frame 10. The output shaft of the motor 20 is in transmission connection with the driving wheel 21, the driving wheel 21 is connected with the driven wheel 22 through the V-belt 24, the driven wheel 22 and the belt wheel 30 are on the same shaft to form a whole, and the rotation of the motor 20 drives the movement of the belt wheel 30, so as to drive the rotation of the conveying belt 40.

Fig. 4 shows an air injection structure of an air nozzle 50 according to an embodiment of the present invention, the air nozzle 50 is located on an air nozzle support 51, the air nozzle 50 is made of teflon, and a plurality of air nozzles are uniformly distributed in a length direction of the air nozzle support.

This dust collector can also set up transparent material's dust cover 90 in main part support top, and at the in-process of wasing the LED chip, the staff can see through the condition that the baffle observed the dust removal and prevent that dust etc. from splashing and influence the operation environment.

A starting switch 71 and an emergency stop button 72 can be additionally arranged on the side face of the main body support, the starting switch 71 can be used for controlling the starting of the dust removing device, for example, the starting of the motor 20, the air nozzle 50, the sensor 70 and the like can be controlled, and the emergency stop button 72 can cut off a power supply in an emergency state, so that man-machine safety is protected.

It should be noted that the above embodiments can be freely combined as necessary. The foregoing is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, various modifications and decorations can be made without departing from the principle of the present invention, and these modifications and decorations should also be regarded as the protection scope of the present invention.

Claims

1. The utility model provides a dust collector of emitting diode chip, including main part support (10), install conveyer belt (40) on main part support (10), a serial communication port, still include air cock support (51), air cock support (51) are located the top of conveyer belt (40), install a plurality of air cock (50) to conveyer belt (40) gas-jet on air cock support (51), at least a set of correlation sensor (70) are placed or fixed mounting is at the front end of main part support (10), the round hole that has a plurality of evenly distributed on conveyer belt (40), evacuation groove (80) are installed to the below of conveyer belt (40), evacuation groove (80) are fixed in main part support (10), the exhaust pipe is connected in evacuation groove (80).

2. The dust removing device for the light emitting diode chip as claimed in claim 1, wherein the air nozzle support (51) comprises a plurality of air nozzle supports, and the air nozzle supports are arranged at intervals in the front-back direction.

3. The dust removing device for the light emitting diode chip as claimed in claim 2, wherein the motor (20) driving the conveyor belt (40) is located at the right side of the main body support (10), and the two ends of the air nozzle support (51) are fixed at the left and right sides of the main body support (10).

4. The dust removing device for the light emitting diode chip as claimed in claim 2, wherein each air nozzle support (51) is provided with a plurality of air nozzles (50), and the plurality of air nozzles (50) are uniformly distributed in the length direction of the air nozzle support (51).

5. The dust removing device for the light emitting diode chip as claimed in claim 1, wherein the motor (20) is drivingly connected to the belt wheel (30) for driving the conveyor belt (40) to move.

6. The dust removing device for the light emitting diode chip as claimed in claim 5, wherein the shaft of the motor (20) is in transmission connection with the driving wheel (21), the driving wheel (21) is connected with the driven wheel (22) through the V-belt (24), and the driven wheel (22) and the belt wheel (30) are fixed on the same shaft.

7. The dust removing device for the light emitting diode chip as claimed in claim 6, wherein the motor (20) is connected with a fixing plate (23) through a bolt, and the fixing plate (23) is fixedly connected with the outer side of the main body bracket (10).

8. The dust removing apparatus for led chips as claimed in claim 1, wherein the conveyor belt is a belt made of cotton or linen cloth glued with rubber.

9. The dust removing device for the light emitting diode chip as claimed in claim 1, wherein the air nozzle (50) is made of teflon.

10. The dust removing device for light emitting diode chip as claimed in claim 1, wherein the main body support (10) is mounted with a dust cover made of transparent material.