CN216201422U

CN216201422U - Dynamic sealing structure of magnetic control target

Info

Publication number: CN216201422U
Application number: CN202121935054.9U
Authority: CN
Inventors: 张健宁; 胡双丽; 田耕涛; 黄志云
Original assignee: Zhongshan Kaixuan Vacuum Science and Technology Co Ltd
Current assignee: Zhongshan Kaixuan Vacuum Science and Technology Co Ltd
Priority date: 2021-08-17
Filing date: 2021-08-17
Publication date: 2022-04-05
Anticipated expiration: 2031-08-17

Abstract

The utility model discloses a dynamic seal structure of a magnetic control target, which has the technical scheme that the dynamic seal structure comprises a water jacket, wherein the outer wall of the water jacket is respectively provided with a water inlet and a water outlet, a water pipe and a water pipe head butted with the water pipe are respectively arranged in the water jacket, the side wall of the water pipe head is provided with a water inlet communicated with the water inlet, the water inlet is communicated with the inner cavity of the water pipe head, the inner cavity of the water pipe head is communicated with the inner cavity of the water pipe, the water pipe is arranged in the inner cavity of a target seat, a gap is arranged between the target seat and the water pipe and is communicated with the water outlet, and a framework oil seal for preventing water from leaking outwards is arranged between the target seat and the water jacket. The framework oil seal structure can reduce abrasion and corrosion in the rotation process, reduce the times of disassembly, assembly and replacement of the sealing ring, reduce the times of maintenance and save the cost.

Description

Dynamic sealing structure of magnetic control target

[ technical field ] A method for producing a semiconductor device

The utility model relates to a dynamic sealing structure of a magnetic control target.

[ background of the utility model ]

Magnetron sputtering is the collision process of incident particles with a target. Incident particles undergo a complex scattering process in the target, collide with target atoms, imparting some momentum to the target atoms, which in turn collide with other target atoms, forming a cascade process in which some target atoms near the surface acquire sufficient momentum to move outward, exiting the target and be sputtered. The magnetron target is a core component of magnetron sputtering, and can be generally divided into a rectangular plane magnetron target, a cylindrical magnetron target and a circular plane magnetron target according to the shape and the sputtering mode. The rotary cylindrical magnetic control target is a form of a cylindrical target, and the magnetic field distribution is more uniform through the rotation of the target material, so that the utilization rate of the target material is improved.

Since the target material needs to be water-cooled, sealing against water is particularly important here. The common sealing mode is a dynamic sealing mode adopting an O-shaped sealing ring, the abrasion of the sealing mode is aggravated due to the rotation of a cathode, and meanwhile, due to the corrosion action of water, the sealing mode is easy to damage, so that the sealing failure is caused, and the water leakage phenomenon is caused.

[ Utility model ] content

The utility model aims to solve the problems that the dynamic seal water sealing of a rotary cylindrical magnetic control target is unreliable, a seal ring is easy to corrode and leak, and the frequency of replacing the seal ring is frequent, and provides a dynamic seal structure of the magnetic control target.

The utility model is realized by the following technical scheme:

a dynamic seal structure of a magnetic control target is characterized in that: including water jacket 1, be equipped with water inlet 2 and delivery port 3 respectively at water jacket 1's outer wall be equipped with water pipe 10 in the water jacket 1 respectively, with water pipe head 4 of water pipe 10 butt joint, be equipped with at water pipe head 4's lateral wall with the inlet opening 15 of water inlet 2 intercommunication, inlet opening 15 and water pipe head 4's inner chamber intercommunication, water pipe head 4's inner chamber communicate with water pipe 10's inner chamber again, the inner chamber of target holder 5 is arranged in to water pipe 10, has clearance 11 between target holder 5 and water pipe 10, clearance 11 with delivery port 3 intercommunication is equipped with the skeleton oil blanket 6 that prevents the outside seepage of water between target holder 5 and water jacket 1.

The dynamic seal structure of the magnetic control target is characterized in that: the framework oil seals 6 are two, namely a first framework oil seal and a second framework oil seal, an inner cavity of the water jacket 1 is provided with a first inner step portion 101, the first framework oil seal is abutted to the first inner step portion 101, the first framework oil seal and the second framework oil seal are separated through a spacer ring 7, and a retainer ring 7 abutting against the second framework oil seal to position the two framework oil seals 6 is arranged on the inner wall of the water jacket 1.

The dynamic seal structure of the magnetic control target is characterized in that: the framework oil seal 6 comprises an inner ring 601 and an outer ring 602, a groove 603 is formed between the inner ring 601 and the outer ring 602, the inner ring 601 abuts against the outer wall of the water pipe head 4, and the outer ring 602 abuts against the inner wall of the water jacket 1.

The dynamic seal structure of the magnetic control target is characterized in that: the water pipe head 4 is fixed in the inner cavity of the water jacket 1 through a bolt 12, the end of the water pipe head 4, which is arranged in the inner cavity of the water jacket 1, is provided with an outer step portion 401 and an inner extension portion 402, the inner extension portion 402 is inserted into the water pipe 10, and the outer step portion 401 is abutted against the end portion of the water pipe 10.

The dynamic seal structure of the magnetic control target is characterized in that: the outer wall of the water pipe head 4 is provided with an external convex part 403, the first inner step part 101 of the water jacket 1 is provided with a second inner step part 102, and a stop 13 is clamped between the external convex part 403 and the second inner step part 102.

The dynamic seal structure of the magnetic control target is characterized in that: the inner cavity diameter of the second inner step portion 102 is smaller than the inner cavity diameter of the first inner step portion 101.

The dynamic seal structure of the magnetic control target is characterized in that: and a plurality of sealing rings 14 are arranged between the outer wall of the water pipe head 4 and the inner wall of the end part of the water jacket 1.

The dynamic seal structure of the magnetic control target is characterized in that: a water inlet pipe 18 is arranged at the water inlet 2, and a water outlet pipe 19 is arranged at the water outlet 3.

The dynamic seal structure of the magnetic control target is characterized in that: the retainer ring 7 is a circlip for a hole.

Compared with the prior art, the utility model has the following advantages:

1. the framework oil seal structure can reduce abrasion and corrosion in the rotation process, reduce the times of disassembly, assembly and replacement of the sealing ring, reduce the times of maintenance and save the cost.

2. The utility model uses the sealing mode of the double-framework oil seal, has better sealing effect, reduces the possibility of water leakage, has double-layer protection of the double-framework oil seal and more reliable sealing. .

[ description of the drawings ]

FIG. 1 is a perspective view of a magnetron target apparatus;

FIG. 2 is a top view of a magnetron target apparatus;

FIG. 3 is a cross-sectional view of a magnetron target apparatus;

FIG. 4 is an enlarged view of a portion of FIG. 2 at B, with the arrows indicating the direction of water flow;

FIG. 5 is a perspective view of a water tube head;

fig. 6 is a perspective view of the framework oil seal.

In the figure: 1 is a water jacket; 101 is a first inner step part; 102 is a second inner step portion; 2 is a water inlet; 3 is a water outlet; 4 is a water pipe head; 401 is an outer step portion; 402 is an inner extension; 403 is an external convex part; 5 is a target holder; 6 is a framework oil seal; 601 is an inner ring; 602 is an outer ring; 603 is a groove; 7 is a spacer ring; 8 is a retainer ring; 9 is a driving gear; 10 is a water pipe; 11 is a gap; 12 is a bolt; 13 is a stop block; 14 is a sealing ring; 15 is a water inlet; 16 is a driven gear; 17 is a motor; 18 is a water inlet pipe; and 19 is a water outlet pipe.

[ detailed description ] embodiments

The technical features of the present invention will be described in further detail with reference to the accompanying drawings so that those skilled in the art can understand the technical features.

A dynamic seal structure of a magnetic control target is shown in figures 1 to 6 and comprises a water jacket 1, wherein a water inlet 2 and a water outlet 3 are respectively arranged on the outer wall of the water jacket 1, a water pipe 10 and a water pipe head 4 butted with the water pipe 10 are respectively arranged in the water jacket 1, a water inlet 15 communicated with the water inlet 2 is arranged on the side wall of the water pipe head 4, the water inlet 15 is communicated with the inner cavity of the water pipe head 4, the inner cavity of the water pipe head 4 is communicated with the inner cavity of the water pipe 10, the water pipe 10 is arranged in the inner cavity of a target seat 5, a gap 11 is formed between the target seat 5 and the water pipe 10, the gap 11 is communicated with the water outlet 3, and a framework oil seal 6 for preventing water from leaking outwards is arranged between the target seat 5 and the water jacket 1.

The water jacket 1 functions to transfer the temperature of the combustion chamber and the inner wall of the cylinder block of the engine to the coolant (the space between the cylinder block and the inner and outer shells of the cylinder head, through which the coolant circulates), and the target holder 5 is driven to rotate by the motor 17, the driving gear 9 and the driven gear 16, so that the outer water seal needs to be dynamic.

As shown in fig. 4, water flows into the inner cavity of the water pipe head 4 and the inner cavity of the water pipe 10 from the water inlet 2 through the water inlet hole 15 in sequence, flows into the gap 11 between the target holder 5 and the water pipe 10 from a hole at the other end of the water pipe 10, and flows into the water outlet 3, so that water cooling of the target holder 5 in rotation is realized, and the framework oil seal 6 can effectively prevent the water in the gap 11 from seeping out through the inner wall of the water jacket 1.

Preferably, skeleton oil blanket 6 is equipped with two, is first skeleton oil blanket and second skeleton respectively, 1 inner chamber of water jacket is equipped with first interior step portion 101, and first skeleton oil blanket supports to install on first interior step portion 101, and first skeleton oil blanket and second skeleton oil blanket separate through spacer ring 7 the inner wall of water jacket 1 is equipped with and supports the retaining ring 7 of second skeleton oil blanket in order to fix a position two skeleton oil blankets 6.

Further, the retainer ring 7 is preferably a circlip for hole to prevent dropping.

The sealing performance can be greatly enhanced by arranging the two framework oil seals 6, and the framework oil seals 6 are annular and are separated and fixed between the water jacket 1 and the target holder 5 through the check ring 7 and the spacer ring 7.

Further, the framework oil seal 6 comprises an inner ring 601 and an outer ring 602, a groove 603 is formed between the inner ring 601 and the outer ring 602, the inner ring 601 abuts against the outer wall of the water pipe head 4, and the outer ring 602 abuts against the inner wall of the water jacket 1.

According to the dynamic sealing structure of the magnetron target, the water pipe head 4 is fixed in the inner cavity of the water jacket 1 through the bolt 12, the end of the water pipe head 4, which is arranged in the inner cavity of the water jacket 1, is provided with the outer step part 401 and the inner extension part 402, the inner extension part 402 is inserted into the water pipe 10, the outer step part 401 abuts against the end part of the water pipe 10, and thus the inner cavity of the water pipe head 4 is communicated with the inner cavity of the water pipe 10.

The outer wall of the water pipe head 4 is provided with an outer convex part 403, the first inner step part 101 of the water jacket 1 is provided with a second inner step part 102, the inner cavity diameter of the second inner step part 102 is smaller than that of the first inner step part 101, and a stop 13 is clamped between the outer convex part 403 and the second inner step part 102. The male protrusion 403 presses the stopper 13 to make the stopper 13 abut against the second inner step portion 102, and the water pipe head 4 is completely fixed by the stopper 13 and the bolt 12.

A plurality of sealing rings 14 are arranged between the outer wall of the water pipe head 4 and the inner wall of the end part of the water jacket 1, a water inlet pipe 18 is arranged at the water inlet 2, and a water outlet pipe 19 is arranged at the water outlet 3.

The embodiment of the present invention is described only for the preferred embodiment of the present invention, and not for the limitation of the concept and scope of the present invention, and the technical solution of the present invention is subject to various modifications and improvements by those skilled in the art without departing from the design concept of the present invention.

Claims

1. A dynamic seal structure of a magnetic control target is characterized in that: including water jacket (1), be equipped with water inlet (2) and delivery port (3) respectively at the outer wall of water jacket (1) be equipped with water pipe (10) in water jacket (1) respectively, with water pipe head (4) of water pipe (10) butt joint, be equipped with at the lateral wall of water pipe head (4) with inlet opening (15) of water inlet (2) intercommunication, inlet opening (15) and the inner chamber intercommunication of water pipe head (4), the inner chamber of water pipe head (4) communicates with the inner chamber of water pipe (10) again, the inner chamber of target holder (5) is arranged in to water pipe (10), has clearance (11) between target holder (5) and water pipe (10), clearance (11) with delivery port (3) intercommunication is equipped with skeleton oil blanket (6) of preventing the outside seepage of water between target holder (5) and water jacket (1).

2. The dynamic seal structure of the magnetron target of claim 1, characterized in that: skeleton oil blanket (6) are equipped with two, are first skeleton oil blanket and second skeleton oil blanket respectively, water jacket (1) inner chamber is equipped with first interior step portion (101), and first skeleton oil blanket supports to lean on installing on first interior step portion (101), and first skeleton oil blanket and second skeleton oil blanket separate through spacer ring (7) water jacket (1) inner wall is equipped with and supports retaining ring (7) of second skeleton oil blanket in order to fix a position two skeleton oil blankets (6).

3. The dynamic seal structure of the magnetron target of claim 2, characterized in that: the framework oil seal (6) comprises an inner ring (601) and an outer ring (602), a groove (603) is formed between the inner ring (601) and the outer ring (602), the inner ring (601) abuts against the outer wall of the water pipe head (4), and the outer ring (602) abuts against the inner wall of the water jacket (1).

4. The dynamic seal structure of the magnetron target of claim 3, characterized in that: the water pipe head (4) is fixed through bolt (12) water jacket (1) inner chamber, the end that water jacket (1) inner chamber was arranged in to water pipe head (4) has outer step portion (401) and interior extension portion (402), interior extension portion (402) insert in water pipe (10), outer step portion (401) support and lean on the tip of water pipe (10).

5. The dynamic seal structure of the magnetron target of claim 4, wherein: the outer wall of the water pipe head (4) is provided with an outer convex part (403), the first inner step part (101) of the water jacket (1) is provided with a second inner step part (102), and a stop block (13) is clamped between the outer convex part (403) and the second inner step part (102).

6. The dynamic seal structure of the magnetron target of claim 5, characterized in that: the inner cavity diameter of the second inner step portion (102) is smaller than the inner cavity diameter of the first inner step portion (101).

7. The dynamic seal structure of the magnetron target of claim 5, characterized in that: a plurality of sealing rings (14) are arranged between the outer wall of the water pipe head (4) and the inner wall of the end part of the water jacket (1).

8. The dynamic seal structure of the magnetron target of claim 5, characterized in that: a water inlet pipe (18) is arranged at the water inlet (2), and a water outlet pipe (19) is arranged at the water outlet (3).

9. The dynamic seal structure of the magnetron target of claim 5, characterized in that: the retainer ring (7) is an elastic retainer ring for a hole.