CN216186524U

CN216186524U - Automatic sticking and sealing device for adhesive tape of film box

Info

Publication number: CN216186524U
Application number: CN202122610959.5U
Authority: CN
Inventors: 李迎辉; 徐晨歌; 翟浩天
Original assignee: Xuzhou Xinjing Semiconductor Technology Co Ltd
Current assignee: Zhonghuan Leading Semiconductor Technology Co ltd; Zhonghuan Leading Xuzhou Semiconductor Materials Co ltd
Priority date: 2021-10-28
Filing date: 2021-10-28
Publication date: 2022-04-05
Anticipated expiration: 2031-10-28

Abstract

The utility model discloses an automatic sticking and sealing device for a chip box adhesive tape, which comprises a workbench; the upper surface of the rotary platform is provided with a sunken area matched with the bottom of the wafer box; the rotary adjusting component is used for sleeving the adhesive tape roll and can enable the central line of the adhesive tape to coincide with the central line of the gap between the upper cover and the lower cover of the film box, and the rotary adjusting component is arranged on one side of the rotary control platform; a control system for controlling the rotation or stop of the rotary platform; the power supply is connected with the control system through a power switch; the power supply, the power switch and the control system are all installed on the workbench, and the rotary platform and the rotary adjusting part are rotatably installed on the workbench. The utility model can reduce the abrasion of the wafer box, reduce the slight friction between the wafer box and the wafer, seal the gap between the upper cover and the lower cover of the wafer box without manually holding an adhesive tape and rotating the wafer box, realize the semi-automation of the sealing of the wafer box, effectively avoid the leakage of the adhesive, have good sealing effect and high working efficiency.

Description

Automatic sticking and sealing device for adhesive tape of film box

Technical Field

The utility model relates to a sealing device, in particular to an automatic sticking and sealing device for a film box adhesive tape, and belongs to the technical field of film box sealing.

Background

The silicon wafer box mainly plays a role in fixing and protecting when the silicon wafers are conveyed, and for a certain type of silicon wafer box, a certain gap is still reserved after the silicon wafer box is covered by an upper cover and a lower cover due to the fact that the silicon wafer box does not contain a rubber ring in structural design, the silicon wafer box is easily influenced by external environment, and the protection force on internal wafers is insufficient. Therefore, to solve this problem, a circle of tape is usually adhered to the gap between the upper and lower covers after the cassette is closed, so as to isolate the external air and protect the internal chip.

This action is accomplished on packing the desktop usually to the process that present sticky tape pasted, and the production personnel are handed the sticky tape, aim at spool box upper and lower cover gap department, and rotatory spool box of filling with the wafer to accomplish sticky tape and paste a week, reach the purpose of isolated air protection wafer, above-mentioned mode has following defect at that time:

1. because the action of sticking the adhesive tape is finished on the packaging table, and the film box is full of films, the gravity is high, the film box generates obvious friction with the table top when the table top rotates, and the appearance of the film box is abraded.

2. The wafer box and the internal wafer can generate slight friction in the vibration process, so that particles at the contact position of the wafer box and the wafer fall off to pollute the wafer.

3. When a manufacturer pastes the adhesive tape, the manufacturer needs to hold the adhesive tape with one hand and rotate the wafer box filled with the wafers with the other hand, which is inconvenient to operate.

4. The handheld adhesive tape pasting operation has the defects that the pasting height of the adhesive tape is inconsistent, the adhesive tape at the upper end and the lower end of the gap between the upper cover and the lower cover of the film box is easy to protrude, the gap between the upper cover and the lower cover of the film box cannot be completely sealed, and further the risks of adhesive leakage, particle adhesion, film box pollution and the like are caused.

Disclosure of Invention

Aiming at the problems in the prior art, the utility model provides the automatic sticking and sealing device for the adhesive tape of the wafer box, which can reduce the abrasion of the wafer box, reduce the slight friction between the wafer box and a wafer, realize the semi-automation of the sealing of the wafer box by sealing the gap between the upper cover and the lower cover of the wafer box without manually holding the adhesive tape and rotating the wafer box, effectively avoid the leakage of the adhesive tape, and has good sealing effect and high working efficiency.

The utility model relates to an automatic sticking and sealing device for a film box adhesive tape, which comprises

A work table;

the upper surface of the rotary platform is provided with a sunken area matched with the bottom of the wafer box;

the rotary adjusting component is used for sleeving the adhesive tape roll and can enable the central line of the adhesive tape to coincide with the central line of the gap between the upper cover and the lower cover of the film box, and the rotary adjusting component is arranged on one side of the rotary control platform;

a control system for controlling the rotation or stop of the rotary platform;

the power supply is connected with the control system through a power switch;

the power supply, the power switch and the control system are all installed on the workbench, and the rotary platform and the rotary adjusting part are rotatably installed on the workbench.

As a preferable mode of the utility model, the bottom and the periphery of the concave area are covered with the buffer pads, so that the appearance abrasion of the wafer box is avoided, the slight vibration generated between the wafer box and the wafer is reduced, and the wafer box is effectively protected.

As an improvement of the utility model, the utility model also comprises a fixing component for fixing the wafer box, wherein the fixing component comprises a first electric telescopic rod arranged on one side of the rotary platform, the upper part of the first electric telescopic rod is connected with a transverse rod, the free end of the transverse rod is connected with a vertical rod, the bottom of the vertical rod is provided with a pressing component for fixing the wafer box, the bottom of the pressing component is provided with a first pressure sensor, and the pressing component is positioned on the upper part of the rotary platform; a second pressure sensor is arranged in the sunken area of the rotary platform; the first electric telescopic rod, the first pressure sensor and the second pressure sensor are connected with a control system;

when the center of the second pressure sensor is disposed coaxially with the center of the recessed region, the area of the second pressure sensor is greater than or equal to 1/2 of the recessed region; when the center of the second pressure sensor deviates from the center of the depressed area, at least three second pressure sensors are arranged and uniformly distributed at the bottom of the depressed area around the center of the depressed area.

As a further improvement of the utility model, the bottom of the compressing component of the utility model is covered with a buffer pad, which shows the hard contact of the compressing component and the wafer box, and avoids the abrasion of the appearance of the wafer box.

As a further improvement, the automatic telescopic cutting device also comprises an automatic telescopic cutting component, wherein the automatic telescopic cutting component comprises a second electric telescopic rod arranged between the rotating platform and the rotating adjusting component, and a V-shaped cutting component arranged at the top of the second electric telescopic rod and used for cutting the adhesive tape, the opening of the V-shaped cutting component is positioned right below the adhesive tape, and the second electric telescopic rod is connected with the control system. After the film box is sealed, the controller controls the second electric telescopic rod to extend upwards, the V-shaped cutting component moves upwards along with the second electric telescopic rod, and the adhesive tape is cut off. When the second telescopic rod is completely extended out, the controller controls the second telescopic rod to reset, and the automation degree of the utility model is further improved.

As a preferred mode of the utility model, the rotation adjusting part comprises a rotating shaft, the rotating shaft is provided with external threads, and the bottom of the rotating shaft is arranged on the workbench through a bearing; the adhesive tape roll limiting device is characterized by further comprising a limiting part, wherein a through hole and an adhesive tape roll bearing part are arranged in the middle of the limiting part, an internal thread matched with the external thread is arranged in the through hole, and the limiting part is connected to the rotating shaft through the internal thread and the external thread in a matched mode. The position of the adhesive tape roll can be adjusted on the rotating shaft at will to meet the requirements of the film boxes with different heights, and the application range is wider.

As a preferable mode of the utility model, the control system comprises a controller and a motor connected with the controller, the bottom of the rotating platform is arranged on an output shaft of the motor, a supporting frame for supporting the rotating platform is arranged between the bottom of the rotating platform and the workbench, and the top of the supporting frame is provided with a roller wheel which is consistent with the rotating direction of the rotating platform. The support frame supports the balance of the wafer box, the wafer box is prevented from being inclined, and the roller wheels are arranged between the support frame and the bottom of the rotary platform, so that the friction force of rotation of the rotary platform is reduced, and the rotation is smoother.

As a preferred mode of the utility model, the control system comprises a controller, a motor connected with the controller, a first gear connected with an output shaft of the motor, a second gear arranged on the outer periphery of the rotary platform, and a slide rail arranged at the bottom of the rotary platform; the sliding groove is arranged on the workbench and matched with the sliding rail, and the second gear is meshed with the first gear.

As a preferable mode of the utility model, the control system comprises a controller, a motor connected with the controller, a first gear connected with an output shaft of the motor, a second gear arranged on the outer periphery of the rotary platform, a first annular groove formed in the bottom of the rotary platform, and a second annular groove formed in the workbench and corresponding to the first annular groove, wherein the second annular groove is connected with the first annular groove through a ball, and the second gear is meshed with the first gear.

Compared with the prior art, the utility model has the following advantages:

1) according to the utility model, the wafer box is placed in the concave area matched with the rotary platform and the wafer box, the wafer box rotates along with the rotation of the rotary platform, and due to the action of the buffer cushion in the concave area, the appearance of the wafer box in the process of adhering the adhesive tape is not abraded, and meanwhile, the vibration of the wafer box and the wafer is reduced, so that the risk of falling of particles caused by vibration is avoided, and the wafer is not polluted.

2) According to the utility model, the wafer box is placed in the depressed area of the rotating platform, the adhesive tape is coiled on the rotating support, and the rotating platform is rotated to enable the adhesive tape to be adhered to the gap between the upper cover and the lower cover of the wafer box, so that the wafer box is sealed, a worker does not need to hold the adhesive tape and rotate the wafer box, and semi-automation of sealing the wafer box is realized. In addition, the center line of the adhesive tape and the center line of the gap of the upper cover and the lower cover of the wafer box are on the same horizontal line, so that the phenomenon that the adhesive tape is exposed outside and the wafer box is polluted due to the deviation of the adhesive tape is avoided.

Drawings

FIG. 1 is a schematic structural diagram of an embodiment of the present invention;

FIG. 2 is a schematic structural diagram of an embodiment of the present invention;

FIG. 3 is a schematic structural diagram of an embodiment of the present invention;

FIG. 4 is a schematic structural diagram of an embodiment of the present invention;

fig. 5 is a schematic structural diagram of an embodiment of the present invention.

In the figure: 1-workbench, 2-large cylinder, 3-adhesive tape roll, 4-small cylinder, 5-adhesive tape, 6-sheet box, 7-gap, 8-buffer pad, 9-rotary platform, 91-concave area, 10-controller, 11-power switch, 12-power supply, 13-rotary shaft, 131-external thread, 14-spacing part, 15-first gear, 16-motor, 17-second gear, 18-sliding rail, 19-sliding groove, 20-first annular groove, 21-second annular groove, 22-ball, 23-support frame, 24-rotating wheel, 25-first electric telescopic rod, 251-transverse rod, 252-vertical rod, 253-pressing part, 26-second electric telescopic rod, 261-protective sleeve, 262-V type cutting component.

Detailed Description

The utility model is further illustrated by the following figures and examples.

As shown in FIGS. 1 and 2, an automatic taping and sealing device of a cartridge adhesive tape according to the present invention comprises

A work table 1;

the upper surface of the rotary platform 9 is provided with a concave area 91 matched with the bottom of the film box 6;

the rotary adjusting component is used for sleeving the adhesive tape roll 3 and can enable the central line of the adhesive tape 5 to be superposed with the central line of a gap 7 between an upper cover and a lower cover of the film box 6, and the rotary adjusting component is arranged on one side of the rotary platform 9;

a control system for controlling the rotation or stop of the rotary platform 9;

the power supply 12 is connected with the control system through the power switch 11;

the power supply 12, the power switch 11 and the control system are arranged on the workbench 1, and the rotary platform 9 and the rotary adjusting component are rotatably arranged on the workbench 1.

Before the use, staff can set the rotatory rotational speed of rotary platform 9 through control system according to actual demand, because this method of setting rotary platform 9 rotational speed is prior art, consequently, no longer gives details.

During the use, put into the sunken regional 91 of rotary platform 9 with spool box 6, overlap 3 covers of sticky tape coils on the rotation regulation part, draw sticky tape 5 and paste to 6 one corners of spool box, press switch 11, control system is electrified, control rotary platform 9 is rotatory, rotary platform 9 drives spool box 6 rotatory, because rotation regulation part can be along with the rotation of sticky tape coils 3 and the free rotation, so sticky tape 5 constantly draws out and pastes winding and cover gap department 7 about spool box 6 from the sticky tape coils 3, seals spool box 6. After the adhesive tape 5 is wound around the sealing positions of the upper cover and the lower cover of the film box 6 for a circle, the staff presses the power switch 11 again, the control system is powered off, and the sealing of the film box 6 is finished.

This use is novel because 5 central lines of sticky tape and 6 upper and lower lid gap departments 7 central lines coincidence of spool box, consequently, sticky tape 5 twines on 6 same high positions of spool box (namely 6 upper and lower lid gap departments 7 of spool box) all the time, has avoided the exerted condition of viscose, has prevented spool box 6 from being polluted effectively, and is sealed effectual.

6 sealed with can accomplishing the spool box 6 along with the rotation of rotary platform 9 among the above-mentioned scheme, avoided artifical handheld sticky tape to roll up 3 and rotatory spool box 6, to spool box 6 lower cover gap department 7 seal, it is simple more convenient to operate, realized the sealed semi-automatization of spool box 6, the work efficiency has been improved effectively, 6 wearing and tearing of spool box are reduced to the while, the vibrations of spool box 6 and inside wafer have been reduced, thereby the risk that particle falls to the ground has been reduced.

In some embodiments, the inside of the recessed area 91 is covered with a buffer pad 8 in order to further avoid the wear of the appearance of the cassette 6 and reduce or even avoid the slight friction between the cassette 6 and the wafer caused by vibration.

As shown in fig. 2, in some embodiments, to better secure the cartridge 6 to the rotary platform 9, further enabling full automation of the cartridge 6 sealing process, the present invention further includes a securing means for securing the cartridge 6, the means comprising:

the first electric telescopic rod 25 is installed on one side of the rotary platform 9, the upper part of the first electric telescopic rod 25 is connected with a transverse rod 251, the free end of the transverse rod 251 is connected with a vertical rod 252, the transverse rod 251 is perpendicular to the vertical rod 252, the bottom of the vertical rod 252 is provided with a pressing component 253 for fixing the film box 6, the bottom of the pressing component 253 is provided with a first pressure sensor (not shown in the figure), the bottom of the concave area 91 of the rotary platform 9 is provided with a second pressure sensor (not shown in the figure), and the pressing component 253 is positioned on the upper part of the rotary platform 9; the first electric telescopic rod 25, the first pressure sensor and the second pressure sensor are connected with a control system.

1/2 where the center of the second pressure sensor is located coaxially with the center of the recessed region 91, the area of the upper surface of the second pressure sensor is greater than or equal to the area of the bottom of the recessed region 91; when the center of the second pressure sensor deviates from the center of the recessed area 91, at least three second pressure sensors are arranged, surrounding the center of the recessed area 91 and uniformly distributed at the bottom of the recessed area 91. This is provided to prevent the cassette 6 from being tilted.

Preferably, the centers of the first pressure sensor, the cassette 6 and the second pressure sensor are coaxially arranged, and the pressure sensed by the pressure sensors is more accurate. It should be noted that: in order to ensure the stability of the cassette 6, the area of the upper surface of the second pressure sensor at the bottom of the concave area 91 should not be less than 1/2 of the area of the bottom of the concave area 91, so that the cassette 6 can be kept stable without tilting when being placed on the second pressure sensor. Or a second pressure sensor may be embedded in the bottom of the recessed area 91 such that the second pressure sensor is flush with the bottom of the recessed area 91.

When the above embodiment is implemented, after the sheet cassette 6 is put into the recess area 91, the second pressure sensor senses the pressure, and transmits the pressure signal to the control system, and after the control system receives the pressure signal, the control system controls the first electric telescopic rod 25 to retract downwards, drives the pressing part 253 to move downwards, when the pressing part 253 is contacted with the top of the wafer box 6, the first pressure sensor at the bottom of the pressure sensor transmits a real-time sensed pressure signal to the control system, when the pressure signal received by the control system is consistent with an internal set pressure value, control first electric telescopic handle 25 and stop to contract and contract, this moment, film box 6 is fixed to be compressed tightly between rotary platform 9 and compress tightly part 253, has prevented effectively because of rotary platform 9 is rotatory and lead to the drawback that film box 6 rocked, has further ensured that every week of sticky tape 5 all twines in film box 6 from top to bottom and covers gap department 7, has avoided the exposed phenomenon of viscose. The pressure value set inside the controller is the maximum pressure value which does not damage the cassette 6.

After the rotating platform 9 rotates to a set time (the set time is at least the time when the adhesive tape 5 winds around the gap 7 between the upper cover and the lower cover of the sheet box 6 for one circle), the control system controls the rotating platform 9 to stop rotating, at this time, the rotating platform 9 is at an initial position, then the control system controls the first electric telescopic rod 25 to reset, namely, to extend upwards, the pressing part 253 moves upwards, and after the first electric telescopic rod 25 resets, a worker takes out the sealed sheet box 6 and puts the sealed sheet box 6 to a specified position. The above steps are repeated again to seal the next cassette 6.

In some embodiments, to further avoid the wear of the appearance of the cassette 6, the bottom of the pressing member 253 is covered with the buffer pad 8, which prevents the pressing member 253 from being in hard contact with the top of the cassette 6, thereby effectively protecting the appearance of the cassette 6.

In other embodiments, as shown in fig. 3, when the magazine 6 is a circular box, in order to further automate the device, the present invention further comprises an automatic telescopic cutting member 25, which comprises a second electric telescopic rod 26 installed between the rotary platform 9 and the rotary adjusting member, a V-shaped cutting member 262 installed on the top of the second electric telescopic rod 26 for cutting the adhesive tape 5, and the opening of the V-shaped cutting member 262 is located right below the adhesive tape 5, and the second electric telescopic rod 26 is connected to the control system. After the film box 6 is sealed, the control system controls the second electric telescopic rod 26 to extend upwards, the V-shaped cutting component 262 moves upwards along with the second electric telescopic rod, and the adhesive tape 5 is cut off. When the second telescopic rod 26 is fully extended, the control system controls the second telescopic rod 26 to reset, i.e. retract to the initial state.

Further, in order to prevent the V-shaped cut-off component 262 from being exposed to the air when not in use and prevent the operator from accidentally touching the V-shaped cut-off component 262 to cause injury during operation, the utility model is characterized in that a protective sleeve 261 is sleeved outside the second electric telescopic rod 26, the bottom of the protective sleeve 261 is fixed on the fixed section of the second electric telescopic rod 26, and the height of the protective sleeve 261 is higher than the height of the second telescopic rod 26 with the telescopic section completely retracted. After the adhesive tape is cut off and the second electric telescopic rod 26 is completely extended out, the adhesive tape is restored and retracted into the protective sleeve 261, and the V-shaped cutting component 262 is effectively prevented from injuring workers. The V-shaped cutting member 262 may be implemented by using small scissors which are opened or by directly using a V-shaped blade.

As shown in fig. 1 to 4, as a preferred mode, the rotation adjusting part of the present invention includes a large cylinder 2 and a small cylinder 4 installed on the large cylinder 2, wherein the diameter of the large cylinder 2 is larger than the outer diameter of the adhesive tape roll 3, the diameter of the small cylinder 4 is matched with the inner diameter of the adhesive tape roll 3, and the bottom of the large cylinder 2 is rotatably installed on the workbench 1; when the adhesive tape roll 3 is sleeved on the small cylinder 4 and is arranged on the upper part of the large cylinder 2, the central line of the adhesive tape roll is superposed with the central line of the gap 7 between the upper cover and the lower cover of the sheet box 6 arranged in the concave area 91. Because the central line of the adhesive tape roll 3 is superposed with the central line of the gap 7 between the upper cover and the lower cover of the sheet box 6 arranged in the depressed area 91 when the adhesive tape roll is sleeved outside the small cylinder 4 and arranged on the upper part of the large cylinder 2, the adhesive tape 5 can not be exposed when the adhesive tape is adhered to the gap 7 between the upper cover and the lower cover of the sheet box 6, and the sealing effect of the sheet box 6 is ensured. The large cylinder 2 can be mounted on the working platform 1 by means of the matching of the sliding groove 19 and the sliding rail 18 (not shown in the figure), so as to realize free rotation.

As shown in fig. 5, in some embodiments, the rotation adjusting component of the present invention may also include a rotating shaft 13, wherein the rotating shaft 13 is provided with an external thread 131, and the bottom of the rotating shaft 13 is mounted on the working platform 1 through a bearing; the adhesive tape winding device further comprises a limiting part 14 which is provided with a through hole in the middle and used for bearing the adhesive tape roll 3, an internal thread matched with the external thread 131 is arranged in the through hole, the limiting part 14 is connected to the rotating shaft 13 through the matching of the internal thread and the external thread 131, the limiting part 14 can be a cylinder with the diameter not smaller than the inner diameter of the adhesive tape roll 3, and of course, the limiting part 14 can also be in other shapes capable of bearing the adhesive tape roll 3; the scheme is preferably provided with 2 limiting parts 14; when the adhesive tape winding device is used, the adhesive tape roll 3 is sleeved outside the rotating shaft 13 and is arranged on the first limiting part 14, at the moment, the height of the limiting part 14 is adjusted according to the height of the gap 7 between the upper cover and the lower cover of the film box 6 arranged on the rotating platform 9, so that the center line of the adhesive tape 5 is superposed with the center line of the gap 7 between the upper cover and the lower cover of the film box 6, then the second limiting part 14 is screwed into the rotating shaft 13, so that the adhesive tape roll 3 is fixed between the first limiting part 14 and the second limiting part 14, and the adhesive tape roll 3 is effectively prevented from moving in the vertical direction of the rotating shaft 13 in the rotating process.

As shown in fig. 5, in some embodiments, the control system of the present invention includes a controller 10, and a motor 16 connected to the controller 10, wherein the bottom of the rotary platform 9 is mounted on an output shaft of the motor 16, a support frame 23 for supporting the rotary platform 9 is mounted between the bottom of the rotary platform 9 and the working platform 1, and a rotating wheel 24 is mounted on the top of the support frame 23 and is aligned with the rotation direction of the rotary platform 9. In this embodiment, the controller 10 controls the motor 16 to work, the motor 16 rotates to drive the rotating platform 9 to rotate, and the rotating wheel 24 is installed between the bottom of the rotating platform 9 and the supporting frame 23, so that the rotating platform 9 drives the rotating wheel 24 to rotate, and therefore, the friction force generated when the rotating platform 9 rotates is reduced, and the rotation is smoother.

As shown in fig. 2 and 3, in other embodiments, the control system of the present invention includes a controller 10 and a motor 16 connected to the controller 10, a first gear 15 connected to an output shaft of the motor 16, a second gear 17 disposed around the outside of the rotary platform 9, a slide rail 18 mounted at the bottom of the rotary platform 9, and a slide groove 19 mounted on the work table 1 and engaged with the slide rail 18, wherein the second gear 17 is engaged with the first gear 15. In this embodiment, the controller 10 controls the motor 16 to operate, the motor 16 drives the first gear 15 to rotate, the first gear 15 drives the second gear 17 to rotate, the second gear 17 drives the rotating platform 9 to rotate in the sliding slot 19, and the sliding rail 18 and the sliding slot 19 cooperate to effectively reduce the friction force during the rotation of the rotating platform 9 and improve the smoothness of the rotation of the rotating platform 9.

As shown in fig. 4, in other embodiments, the control system of the present invention includes a controller 10 and a motor 16 connected to the controller 10, a first gear 15 connected to an output shaft of the motor 16, a second gear 17 disposed around the outside of the rotary platform 9, a first annular groove 20 formed at the bottom of the rotary platform 9, and a second annular groove 21 formed on the worktable 1 and corresponding to the first annular groove 20; the first annular groove 20 and the second annular groove 21 are connected by a ball 22, and the second gear 17 is engaged with the first gear 15. In this embodiment, the control system controls the motor 16 to operate, the output shaft of the motor 16 drives the first gear 15 to rotate, the first gear 15 drives the second gear 17 to rotate, the second gear 17 drives the rotary platform 9 to rotate, thereby realizing the rotation of the rotary platform 9, because the first annular groove 20 at the bottom of the rotary platform 9 is connected with the second annular groove 21 on the workbench 1 through the ball 22, the ball 22 rolls in the annular groove when the rotary platform 9 rotates, the friction force when the rotary platform 9 rotates is effectively reduced, and the rotary platform 9 rotates more smoothly.

In some specific embodiments, the controller 10 of the utility model adopts an STM32 series single chip microcomputer, and has the advantages of small volume, high operation speed and high accuracy. The operator can set the speed and time of the motor 16, i.e. the transfer and time of the rotating platform 9, in the controller 10, which will not be described further since the method for setting the speed and time is prior art.

The additional particles produced by the cassette 6 sealed in the manner of the present invention were compared to the manual cassette 6 by the following pair check:

manually pasting the sealing sheet box 6:

1) selecting a clean wafer, and measuring the particle condition of the wafer surface by using SP2 (particle measuring machine) as a previous value;

2) loading the wafer into a wafer box 6, sealing the wafer box 6 by adopting the conventional manual adhesive tape 5 mode, taking out the wafer in the sealed wafer box 6, and putting the wafer into SP2 again to measure the condition of the wafer surface particle, wherein the condition is used as a later value;

3) subtracting the pre-value from the post-value serves as an additional particle increment for the wafer by manually applying tape 5.

The utility model is adopted to seal the box 6:

2) the wafer box 6 is sealed by adopting the method of the utility model, the wafer and the wafer box 6 do not generate obvious vibration in the whole sticking process, the wafer in the sealed wafer box 6 is taken out, and the wafer is put into the SP2 again to measure the condition of the wafer surface particle, which is taken as a back value;

The comparison shows that the manual pasting of the sealing film box 6 and the automatic pasting of the sealing film box 6 according to the present invention generate less additional particle increment.

Through the comparison, the mode of automatically sticking the sealing film box 6 effectively reduces the vibration of the wafer and the film box 6 in the sticking process of the adhesive tape 5, reduces the particle pollution of the wafer caused by the sticking vibration of the adhesive tape 5 and has good protection effect on the wafer.

In addition, it was found that:

1. the existing manual method is used for pasting the adhesive tape 5 to seal the film box 6, on the premise of achieving pasting without errors, the time required for actually measuring and finishing pasting the adhesive tape 5 on the film box 6 is about 20s, the time is relatively long, the working efficiency is low, and if the continuous working is carried out, the efficiency is reduced, and finally about 25s is about.

When the adhesive tape 5 is adhered by using the utility model, the length of the film box 6 is about 86cm, if the rotating platform 9 is set to rotate at the speed of 15cm/s, the time for completing the rotation of the whole circle is about: 86/15 is approximately equal to 6 seconds, the time required for completing the pasting of the tape 5 on the box 6 is about 6 seconds on the premise of achieving the correct pasting, the working time is reduced by about 14 seconds, and the working efficiency is improved by 70%.

2. The utility model fixes the sticking height of the adhesive tape 5, and avoids the leakage of the adhesive and the pollution to the film box 6.

The adhesive tape 5 is adhered to the gap 7 between the upper cover and the lower cover of the film box 6 by the existing manual method, the adhering height of 1 film box 6 of the adhesive tape 5 is inconsistent (1/15 is approximately equal to 6.7%) when about 15 films are adhered in actual measurement, and the condition that part of the adhesive tape 5 leaks exists, the leaked adhesive is easy to generate/adsorb particulate, the film box 6 is polluted, and the abnormal rate or the rising condition exists along with the prolonging of the working time.

When the adhesive tape 5 is pasted by using the utility model, the central line of the gap 7 between the upper cover and the lower cover of the film box 6 is always kept flush with the central line of the adhesive tape 5, so that the conditions of inconsistent pasting height and exposed adhesive are avoided, the sealing effect is good, and the film box 6 is not polluted.

Claims

1. An automatic adhering and sealing device for a film box adhesive tape is characterized by comprising

A work table;

a control system for controlling the rotation or stop of the rotary platform;

the power supply is connected with the control system through a power switch;

2. The automatic taping and sealing device of claim 1, wherein the bottom and periphery of the recessed area are covered with a cushion pad.

3. The automatic sticking and sealing device of a wafer box adhesive tape according to claim 2, characterized by further comprising a fixing component for fixing the wafer box, wherein the fixing component comprises a first electric telescopic rod arranged on one side of the rotary platform, the upper part of the first electric telescopic rod is connected with a transverse rod, the free end of the transverse rod is connected with a vertical rod, the bottom of the vertical rod is provided with a pressing component for fixing the wafer box, the bottom of the pressing component is provided with a first pressure sensor, and the pressing component is positioned on the upper part of the rotary platform; a second pressure sensor is arranged in the sunken area of the rotary platform; the first electric telescopic rod, the first pressure sensor and the second pressure sensor are connected with a control system;

1/2 where the center of the second pressure sensor is co-axially located with the center of the recessed region, the second pressure sensor upper surface area is greater than or equal to the recessed region; when the center of the second pressure sensor deviates from the center of the depressed area, at least three second pressure sensors are arranged and uniformly distributed at the bottom of the depressed area around the center of the depressed area.

4. The automatic taping and sealing device of claim 3, wherein the pressing member is covered at its bottom with a cushion pad.

5. The automatic taping and sealing machine of claim 3, further comprising an automatic stretch cut-off member comprising

The second electric telescopic rod is installed between the rotary platform and the rotary adjusting part, the V-shaped cutting part is installed at the top of the second electric telescopic rod and used for cutting off the adhesive tape, the opening of the V-shaped cutting part is located under the adhesive tape, and the second electric telescopic rod is connected with the control system.

6. The automatic taping and sealing device of claim 1, wherein the rotation adjusting means comprises a large cylinder having a diameter larger than the outer diameter of the tape roll and a small cylinder mounted on the large cylinder and having a diameter matching the inner diameter of the tape roll, the bottom of the large cylinder being rotatably mounted on the table; when the adhesive tape roll is sleeved on the small cylinder and is arranged on the upper part of the large cylinder, the central line of the adhesive tape roll is superposed with the central line of the gap between the upper cover and the lower cover of the wafer box arranged in the depressed area.

7. The automatic sealing device for sticking of a chip box adhesive tape according to claim 1, wherein the rotation adjusting means comprises a rotary shaft provided with an external thread, the bottom of the rotary shaft being mounted on the table through a bearing; the adhesive tape roll limiting device is characterized by further comprising a limiting part, wherein a through hole and an adhesive tape roll bearing part are arranged in the middle of the limiting part, an internal thread matched with the external thread is arranged in the through hole, and the limiting part is connected to the rotating shaft through the internal thread and the external thread in a matched mode.

8. The automatic taping and sealing device of claim 2, wherein the control system comprises a controller and a motor connected to the controller, the bottom of the rotary platform is mounted on the output shaft of the motor, a support frame for supporting the rotary platform is mounted between the bottom of the rotary platform and the working table, and rollers are mounted on the top of the support frame in accordance with the rotation direction of the rotary platform.

9. The automatic taping and sealing apparatus of claim 3 or 6, wherein the control system comprises

A controller;

a motor connected to the controller;

a first gear connected to the output shaft of the motor;

the second gear is arranged on the outer circumference of the rotating platform and is meshed with the first gear;

a slide rail mounted at the bottom of the rotary platform;

and the sliding groove is arranged on the workbench and matched with the sliding rail.

10. The automatic taping and sealing apparatus of claim 3 or 7, wherein the control system comprises

A controller;

a motor connected to the controller;

a first gear connected to the output shaft of the motor;

the first annular groove is formed in the bottom of the rotary platform;

and the second annular groove is formed in the workbench and corresponds to the first annular groove, and the second annular groove is connected with the first annular groove through a ball.