CN216162703U

CN216162703U - Radio frequency device of quick matching

Info

Publication number: CN216162703U
Application number: CN202122245198.8U
Authority: CN
Inventors: 张勇军; 卢成; 王伟
Original assignee: Chengdu Guotai Vacuum Equipment Co ltd
Current assignee: Chengdu Guotai Vacuum Equipment Co ltd
Priority date: 2021-09-16
Filing date: 2021-09-16
Publication date: 2022-04-01
Anticipated expiration: 2031-09-16

Abstract

The utility model discloses a radio frequency device capable of being matched quickly, which is connected to a radio frequency coil of a ceramic cup and comprises a relay, a capacitor circuit and a radio frequency connector, wherein the radio frequency connector is connected with the capacitor circuit, the capacitor circuit is connected with the radio frequency coil, the capacitor circuit and the radio frequency coil jointly form an L-shaped radio frequency resonance circuit, and the relay controls the connection and disconnection between the capacitor circuit and the radio frequency coil.

Description

Radio frequency device of quick matching

Technical Field

The utility model relates to the technical field of radio frequency assisted deposition and ion etching, in particular to a radio frequency device capable of being matched quickly.

Background

The conventional high-power Radio Frequency (RF) ion source needs a radio frequency electron emitter for assisting in coating and ion etching, the emitter needs a radio frequency matcher, and the traditional radio frequency matcher adopts a vacuum adjustable capacitor automatic matching mode to match load impedance to about 50 ohms so as to generate resonance ionized gas to generate plasma. The disadvantages are high cost, large volume, complex structure and inconvenient installation.

SUMMERY OF THE UTILITY MODEL

The utility model aims to design a radio frequency device capable of being matched quickly, and compared with a traditional automatic matcher, the radio frequency device is small in size, strong in installation, low in cost and high in reliability.

The utility model is realized by the following technical scheme: a radio frequency device capable of being matched quickly is connected to a radio frequency coil of a ceramic cup and comprises a relay, a capacitor circuit and a radio frequency connector, wherein the radio frequency connector is connected with the capacitor circuit, the capacitor circuit is connected with the radio frequency coil, the capacitor circuit and the radio frequency coil jointly form an L-shaped radio frequency resonance circuit, and the relay controls the connection and disconnection between the capacitor circuit and the radio frequency coil.

In order to further realize the utility model, the following arrangement mode is adopted: the capacitor circuit comprises a capacitor C1, a capacitor C2, a capacitor C3 and an RF joint, wherein the RF joint is respectively connected with a first end of the capacitor C1, a first end of the capacitor C2 and a first end of the capacitor C3, a second end of the capacitor C1 is connected with a first end of the RF coil, a second end of the capacitor C2 is connected with the first end of the RF coil through a controlled loop of a relay, and a second end of the capacitor C3 is connected with the second end of the RF coil and grounded.

In order to further realize the utility model, the following arrangement mode is adopted: the RF radio frequency connector is an RF IN radio frequency N-type connector.

In order to further realize the utility model, the following arrangement mode is adopted: the RF connector is connected with a 13.56MHz radio frequency signal.

Compared with the prior art, the utility model has the following advantages and beneficial effects:

compared with the traditional automatic matcher, the device has the advantages of small volume, strong installation, low cost and high reliability.

Compared with the traditional matcher mode, the utility model has the advantages of high efficiency, low power loss and faster matching.

Drawings

FIG. 1 is a schematic view of the structure of the present invention.

Detailed Description

The present invention will be described in further detail with reference to examples, but the embodiments of the present invention are not limited thereto.

In order to make the objects, technical solutions and advantages of the embodiments of the present invention more apparent, the technical solutions of the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings of the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all embodiments of the present invention. All other embodiments, which can be obtained by a person skilled in the art without any inventive step based on the embodiments of the present invention, are within the scope of the present invention. Thus, the following detailed description of the embodiments of the present invention, presented in the figures, is not intended to limit the scope of the utility model, as claimed, but is merely representative of selected embodiments of the utility model.

In the description of the present invention, it is to be understood that the terms etc. indicate orientations or positional relationships based on those shown in the drawings only for the convenience of describing the present invention and simplifying the description, but do not indicate or imply that the referred devices or elements must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention.

Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless specifically defined otherwise.

In the present invention, unless otherwise specifically stated or limited, the terms "mounting," "connecting," "disposing," "fixing," and the like are to be understood in a broad sense, and may be, for example, a fixed connection, a detachable connection, or an integral connection, and are not limited to any conventional mechanical connection means such as screwing, interference fitting, riveting, screw-assisted connection, and the like. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.

In the present invention, unless otherwise expressly stated or limited, "above" or "below" a first feature means that the first and second features are in direct contact, or that the first and second features are not in direct contact but are in contact with each other via another feature therebetween. Also, the first feature being "on," "above" and "over" the second feature includes the first feature being directly on and obliquely above the second feature, or merely indicating that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature includes the first feature being directly under and obliquely below the second feature, or simply meaning that the first feature is at a lesser elevation than the second feature.

It is worth noting that: in the present application, when it is necessary to apply the known technology or the conventional technology in the field, the applicant may have the case that the known technology or/and the conventional technology is not specifically described in the text, but the technical means is not specifically disclosed in the text, and the present application is considered to be not in compliance with the twenty-sixth clause of the patent law.

Example 1:

as shown in fig. 1, a fast matching RF device is connected to a RF coil (load coil) of a ceramic cup, and includes a relay, a capacitor circuit, and an RF connector, where the RF connector is connected to the capacitor circuit, the capacitor circuit is connected to the RF coil, and the capacitor circuit and the RF coil together form an "L" type RF resonant circuit, and the relay controls the on/off between the capacitor circuit and the RF coil.

Example 2:

the present embodiment is further optimized based on the above embodiment, as shown in fig. 1, the same parts as those in the foregoing technical solution will not be described herein again, and in order to further implement the present invention better, the following setting manner is particularly adopted: the capacitor circuit comprises a capacitor C1, a capacitor C2, a capacitor C3 and an RF (radio frequency) joint, wherein the RF joint is respectively connected with the first end of the capacitor C1, the first end of the capacitor C2 and the first end of the capacitor C3, the second end of the capacitor C1 is connected with the first end of the RF coil, the second end of the capacitor C2 is connected with the first end of the RF coil through a controlled loop of a relay, the second end of the capacitor C3 is connected with the second end of the RF coil and is grounded, when a main control loop of the relay is in a power-off state, the controlled loop connected with the capacitor C2 is in a conducting state, and the preferred capacitor C1, the capacitor C2 and the capacitor C3 all adopt adjustable capacitors.

Example 3:

the present embodiment is further optimized based on any of the above embodiments, as shown in fig. 1, the same parts as those in the foregoing technical solution will not be described herein again, and in order to further implement the present invention better, the following setting manner is particularly adopted: the RF radio frequency connector is an RF IN radio frequency N-type connector.

Example 4:

the present embodiment is further optimized based on any of the above embodiments, as shown in fig. 1, the same parts as those in the foregoing technical solution will not be described herein again, and in order to further implement the present invention better, the following setting manner is particularly adopted: the radio frequency connector is connected with a 13.56MHz radio frequency signal.

Example 5:

the present embodiment is further optimized based on any of the above embodiments, as shown IN fig. 1, a fast matching RF apparatus includes a relay (relay coil RL1 and controlled loop NC), a capacitor circuit formed by a capacitor C1, a capacitor C2, and a capacitor C3, an RF connector using an RF IN RF N-type connector, the RF connector being connected to a first end of the capacitor C1, a first end of the capacitor C2, and a first end of the capacitor C3, respectively, a second end of the capacitor C1 being connected to the first end of the RF coil, a second end of the capacitor C2 being connected to the first end of the RF coil through the controlled loop NC of the relay, and a second end of the capacitor C3 being connected to the second end of the RF coil and grounded; the capacitor C1, the capacitor C2, the capacitor C3 and the radio frequency coil form an L-shaped radio frequency resonance circuit together.

The working principle is as follows: the RF IN radio frequency N-type connector is connected with a 13.56MHz radio frequency signal, and a capacitor C1, a capacitor C2, a capacitor C3 and a radio frequency Coil form an L-shaped radio frequency resonance circuit to generate resonance.

Ar is filled into the ceramic cup, the radio frequency Coil wraps the ceramic cup, the relay Coil RL1 is electrified, the controlled loop NC is disconnected, the capacitor C2 is disconnected, the capacitor C1, the capacitor C3 and the radio frequency Coil are adjusted to be in impedance matching to be close to 50 Ώ to generate resonance, Ar is ionized, plasma is formed in the cavity of the ceramic cup, the relay Coil RL1 is powered off, the capacitor C2 loop is closed, the negative electrode in the ceramic cup is electrified, the plasma state is greatly changed, electrons are ejected out of the ceramic cup, the impedance of a plasma area is changed, and the capacitor C2 is just adjusted to the best point capable of being matched, so that ionization can be continued.

The above description is only a preferred embodiment of the present invention, and is not intended to limit the present invention in any way, and all simple modifications and equivalent variations of the above embodiments according to the technical spirit of the present invention are within the scope of the present invention.

Claims

1. The utility model provides a radio frequency device of quick match, connects on the radio frequency coil of pottery cup which characterized in that: the radio frequency connector is connected with the capacitance circuit, the capacitance circuit is connected with the radio frequency coil, the capacitance circuit and the radio frequency coil jointly form an L-shaped radio frequency resonance circuit, and the relay controls the connection and disconnection between the capacitance circuit and the radio frequency coil.

2. A fast matching radio frequency device according to claim 1, wherein: the capacitor circuit comprises a capacitor C1, a capacitor C2, a capacitor C3 and an RF joint, wherein the RF joint is respectively connected with a first end of the capacitor C1, a first end of the capacitor C2 and a first end of the capacitor C3, a second end of the capacitor C1 is connected with a first end of the RF coil, a second end of the capacitor C2 is connected with the first end of the RF coil through a controlled loop of a relay, and a second end of the capacitor C3 is connected with the second end of the RF coil and grounded.

3. A fast matching radio frequency device according to claim 1 or 2, characterized in that: the RF radio frequency connector is an RF IN radio frequency N-type connector.

4. A fast matching radio frequency device according to claim 1 or 2, characterized in that: the RF connector is connected with a 13.56MHz radio frequency signal.

5. A fast matching radio frequency device according to claim 3, wherein: the RF connector is connected with a 13.56MHz radio frequency signal.