CN216160285U

CN216160285U - Polycrystalline silicon matrix metal digestion heating device

Info

Publication number: CN216160285U
Application number: CN202122234728.9U
Authority: CN
Inventors: 岳峥; 薛心禄; 杨晓青; 王志强; 李升业
Original assignee: New Energy Branch Qinghai Upstream Of Yellow River Hydropower Development Co ltd; Qinghai Xince Technology Co ltd; Huanghe Hydropower Development Co Ltd
Current assignee: New Energy Branch Qinghai Upstream Of Yellow River Hydropower Development Co ltd; Qinghai Xince Technology Co ltd; Huanghe Hydropower Development Co Ltd
Priority date: 2021-09-15
Filing date: 2021-09-15
Publication date: 2022-04-01
Anticipated expiration: 2031-09-15

Abstract

The utility model discloses a polycrystalline silicon matrix metal digestion heating device which comprises a heating plate, a console, a transmission mechanism and a fume hood, wherein the heating plate is rotatably arranged on the console, and the transmission mechanism is connected with a rotating shaft; the upper surface of the heating plate is provided with a plurality of sample placing areas, and all the sample placing areas are arranged on the same circumference of the heating plate, which is coaxial with the rotating shaft, at intervals along the circumferential direction; the heating plate is arranged in the fume hood, and the top of the fume hood is provided with a reagent adding hole of which the orthographic projection falls on the circumference of the sample placing area. According to the utility model, the rotary heating plate is fixed in the fume hood, each sample can rotate along with the heating plate in the rotating process of the heating plate, and when a reagent is added, the reagent is added only by operating the reagent adding hole fixed on the fume hood, so that a relatively stable and consistent environment can be created for the digestion process of each sample, the pollution to the sample in the digestion process is reduced, and the stability of the polycrystalline silicon matrix metal detection is ensured.

Description

Polycrystalline silicon matrix metal digestion heating device

Technical Field

The utility model relates to the technical field of polycrystalline silicon detection, in particular to a polycrystalline silicon substrate metal digestion and heating device.

Background

The polycrystalline silicon substrate metal detection belongs to trace detection, the detection result reaches the ppt (part per trillion) level, and effective pollution control in the detection process is an effective method for obtaining accurate data.

In the prior art, the heating device used in the polycrystalline silicon sample digestion process is an electric heating plate, the electric heating plate is fixed on a test bed through a fixing device, and the placing positions of the samples on the electric heating plate are always fixed. In the reagent adding process, pollutants are easy to fall into the digestion sample through the upper part of the reagent cup on the human body, so that the fixed heating device is not beneficial to adding the reagent, the environment of each sample in the digestion process is different, and the detection results of blank samples and parallel samples have certain difference.

SUMMERY OF THE UTILITY MODEL

In view of the defects in the prior art, the utility model provides the polycrystalline silicon matrix metal digestion heating device, which can create a relatively stable and consistent environment for the digestion process of each sample, reduce the pollution to the sample in the digestion process and ensure the stability of the detection of the polycrystalline silicon matrix metal.

In order to achieve the purpose, the utility model adopts the following technical scheme:

a polycrystalline silicon matrix metal digestion heating device comprises a heating plate, a console, a transmission mechanism and a fume hood with an accommodating space arranged inside, wherein the heating plate is rotatably arranged on the console through a rotating shaft at the bottom of the heating plate, and the transmission mechanism is connected with the rotating shaft to drive the heating plate to rotate around the axis of the heating plate; the upper surface of the heating plate is provided with a plurality of sample placing areas, and all the sample placing areas are circumferentially arranged on the same circumference of the heating plate at intervals, wherein the circumference is coaxial with the rotating shaft; the heating plate is arranged in the fume hood, and the top of the fume hood is provided with a reagent adding hole of which the orthographic projection falls on the circumference of the sample placing area.

As one of the implementation manners, the transmission mechanism includes a driving motor, a driving gear connected to the driving motor, and a driven gear fixed on the rotating shaft and engaged with the driving gear, and the driving motor is fixed on the console and is used for driving the driving gear to rotate so as to drive the heating plate to rotate.

In one embodiment, the console is housed within the fume hood.

As one embodiment, the polycrystalline silicon matrix metal digestion heating device further comprises a wire control device arranged outside the fume hood, a wire through hole is formed in the side wall of the fume hood, and a signal wire of the transmission mechanism penetrates through the wire through hole and then is connected with the wire control device.

In one embodiment, the reagent adding hole is provided in plurality and is arranged at intervals on the top of the fume hood.

In one embodiment, the console includes a top plate and a cylindrical sidewall extending from the top plate away from the heating plate, and a bottom of the cylindrical sidewall is fixed to a bottom plate of the fume hood and cooperates with the top plate to enclose the transmission mechanism therein.

As one embodiment, the fume hood has air inlet holes and air outlet holes respectively formed on left and right side walls thereof.

In one embodiment, the heating plate further includes an alignment mark disposed on an upper surface thereof, and a sensor is fixed to an inner surface of the top of the fume hood, and when the sensor is aligned with the alignment mark, the reagent addition hole is aligned with one of the sample placement regions.

According to the utility model, the rotary heating plate is fixed in the fume hood, samples at a plurality of positions on the heating plate can rotate along with the heating plate in the rotating process of the heating plate, and when a reagent is added, the reagent is added only by operating the reagent adding hole fixed on the fume hood, so that a relatively stable and consistent environment can be created for the digestion process of each sample, the pollution to the sample in the digestion process is reduced, and the stability of the detection of the polycrystalline silicon matrix metal is ensured.

Drawings

FIG. 1 is a partial cross-sectional view of a polycrystalline silicon base metal digestion heating apparatus in accordance with an embodiment of the utility model;

FIG. 2 is a schematic partial structure diagram of a polycrystalline silicon matrix metal digestion heating device according to an embodiment of the utility model;

fig. 3 is a schematic view of the internal structure of a polycrystalline silicon matrix metal digestion heating device according to an embodiment of the utility model.

Detailed Description

In the present invention, the terms "disposed", "provided" and "connected" are to be understood in a broad sense. For example, it may be a fixed connection, a removable connection, or a unitary construction; can be a mechanical connection, or an electrical connection; may be directly connected, or indirectly connected through intervening media, or may be in internal communication between two devices, elements or components. The specific meanings of the above terms in the present invention can be understood by those of ordinary skill in the art according to specific situations.

The terms "central," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "axial," "radial," "circumferential," and the like, are used in an orientation or positional relationship indicated in the drawings for convenience in describing the application and for simplicity of description, and are not intended to indicate or imply that the referenced device or element must have a particular orientation, be constructed and operated in a particular orientation, and are therefore not to be considered limiting of the application.

Further, in the description of the present application, "a plurality" means at least two, e.g., two, three, etc., unless specifically limited otherwise.

Moreover, some of the above terms may be used to indicate other meanings besides the orientation or positional relationship, for example, the term "on" may also be used to indicate some kind of attachment or connection relationship in some cases. The specific meanings of these terms in the present invention can be understood by those skilled in the art as appropriate.

In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the utility model and are not intended to limit the utility model.

Referring to fig. 1 and 2, an embodiment of the utility model provides a polysilicon matrix metal digestion heating device, which comprises a heating plate 10, a console 20, a transmission mechanism 30 and a fume hood 40 with an accommodating space arranged inside, wherein the heating plate 10 is disc-shaped and is provided with a rotating shaft 11 connected with the bottom of the heating plate, the rotating shaft 11 is concentric with the heating plate 10, and the heating plate 10 is rotatably arranged on the console 20 through the rotating shaft 11 at the bottom of the heating plate. The transmission mechanism 30 is connected with the rotating shaft 11 to drive the heating plate 10 to rotate around the axis of the heating plate, the upper surface of the heating plate 10 is provided with a plurality of sample placing areas 101, and all the sample placing areas 101 are circumferentially arranged on the same circumference of the heating plate 10, which is coaxial with the rotating shaft 11. The heating plate 10 is provided in the hood 40, and the top of the hood 40 is opened with a reagent addition hole 400 whose orthographic projection falls on the circumference where the sample placement region 101 is located.

Have a plurality of at the circumference spaced sample through the surface with heating plate 10 and place regional 101, make and place and arrange on same circumference clearing up cup 1 that regional 101 was placed to each sample, reagent through seting up at the top of fume hood 40 adds hole 400 to the circumference of below again, make reagent add the in-process, people's health position need not to stretch into in the fume hood 40, reagent that only needs to pass through fume hood 40 adds hole 400 and instils into reagent, can make the reagent accurate fall into corresponding cup 1 of clearing up in, moreover, fume hood 40 has also isolated external pollutant, can not cause to fall into the phenomenon that the pollutant cleared up in the sample and take place. By controlling the heating plate 10 to rotate at a constant speed, the sample is ensured to be in the same and stable environment in the whole sample digestion process, and the reagent can be ensured to be added at the most suitable fixed point without complex operation. Through placing regional 101 numbers to each sample on circular heating plate 10, can also effectively solve the problem that the sample caused the sample to obscure in the sample digestion process.

As shown in fig. 2 and 3, in the present embodiment, the transmission mechanism 30 includes a driving motor 31, a driving gear 32 connected to the driving motor 31, and a driven gear 33 fixed on the rotating shaft 11 and engaged with the driving gear 32, and the driving motor 31 is fixed on the console 20 and is used for driving the driving gear 32 to rotate so as to drive the heating plate 10 to rotate.

Preferably, the console 20 is also accommodated in the fume hood 40, the digestion and heating device for polysilicon matrix metal may further include a wire control device 50 disposed outside the fume hood 40, a wire through hole is opened on a side wall of the fume hood 40, and a signal wire of the transmission mechanism 30 is connected to the wire control device 50 after passing through the wire through hole. Because the independent wire control device is arranged, the heating plate can be controlled to rotate outside the fume hood through the wire control device, so that the digestion cup 1 to be treated rotates or stops at a required position, the operation difficulty can be effectively reduced, and the operation action is reduced.

In some embodiments, the reagent addition holes 400 may be provided in plurality, and the reagent addition holes 400 are provided at intervals at the top of the fume hood 40.

The console 20 may include a top plate 21 and a cylindrical sidewall 22 extending from the top plate 21 away from the heating plate 10, and the bottom of the cylindrical sidewall 22 is fixed to the bottom plate of the fume hood 40 and cooperates with the top plate 21 to enclose the transmission mechanism 30 therein. The driving motor 31 may be disposed beside the rotating shaft 11 and fixed on the inner surface of the top plate 21, the rotating shaft of the driving motor 31 is parallel to the rotating shaft 11, and the rotating shaft 11 is rotatably connected with the top plate 21 through a bearing.

In addition, the left and right side walls of the fume hood 40 of the present embodiment are respectively provided with an air inlet 41 and an air outlet 42, so as to exchange heat in the fume hood 40 and avoid the influence of the inside formed water vapor on the detection.

In order to accurately control the rotation of the heating plate 10, the heating plate 10 may further include an alignment mark 100 disposed on an upper surface thereof, a sensor is fixed to an inner surface of a top of the fume hood 40, and when the sensor is aligned with the alignment mark 100, the reagent feeding hole 400 is aligned with one of the sample placing regions 101, so that the reagent can be fed after the heating plate 10 stops, which is simple and convenient and improves the detection efficiency.

According to the utility model, the rotary heating plate is fixed in the fume hood, in the rotating process of the heating plate, samples at a plurality of positions on the heating plate can rotate along with the heating plate, the heating plate can rotate at a constant speed and heat the samples through control, so that the uniformity of the environment of each sample in the digestion process is greatly improved, when the reagent is added, the reagent is added only through the operation of adding the reagent into a hole fixed on the fume hood, a relatively stable and consistent environment can be created for the digestion process of each sample, the pollution to the samples in the digestion process is reduced, the stability of the metal detection of the polycrystalline silicon substrate is ensured, the fundamental problems of difficult operation and easy pollution in the trace impurity detection process are improved, the blank impurities are obviously reduced through blank sample digestion verification, and the repeatability and the reproducibility of the detection result are greatly improved.

The foregoing is directed to embodiments of the present application and it is noted that numerous modifications and adaptations may be made by those skilled in the art without departing from the principles of the present application and are intended to be within the scope of the present application.

Claims

1. The polycrystalline silicon matrix metal digestion heating device is characterized by comprising a heating plate (10), a console (20), a transmission mechanism (30) and a fume hood (40) with an accommodating space arranged inside, wherein the heating plate (10) is rotatably arranged on the console (20) through a rotating shaft (11) at the bottom of the heating plate, and the transmission mechanism (30) is connected with the rotating shaft (11) to drive the heating plate (10) to rotate around the axis of the heating plate; the upper surface of the heating plate (10) is provided with a plurality of sample placing areas (101), and all the sample placing areas (101) are circumferentially arranged on the same circumference of the heating plate (10) which is coaxial with the rotating shaft (11) at intervals; heating plate (10) are located in fume hood (40), just the top of fume hood (40) is seted up orthographic projection and is fallen on sample placement area (101) place reagent on the circumference adds hole (400).

2. The polycrystalline silicon matrix metal digestion heating device according to claim 1, characterized in that the transmission mechanism (30) comprises a driving motor (31), a driving gear (32) connected with the driving motor (31) and a driven gear (33) fixed on the rotating shaft (11) and meshed with the driving gear (32), the driving motor (31) is fixed on the console (20) and used for driving the driving gear (32) to rotate so as to drive the heating plate (10) to rotate.

3. The polycrystalline silicon base metal digestion heating apparatus according to claim 2, characterized in that the console (20) is housed within the fume hood (40).

4. The polysilicon matrix metal digestion heating device according to claim 3, further comprising a wire control device (50) arranged outside the fume hood (40), wherein a wire through hole is formed in the side wall of the fume hood (40), and a signal wire of the transmission mechanism (30) is connected with the wire control device (50) after passing through the wire through hole.

5. The polycrystalline silicon base metal digestion heating apparatus according to claim 1, characterized in that the reagent adding hole (400) is plural and is arranged at intervals on the top of the fume hood (40).

6. The polycrystalline silicon base metal digestion heating apparatus according to claim 1, characterized in that the console (20) includes a top plate (21) and a cylindrical side wall (22) extending from the top plate (21) away from the heating plate (10), the bottom of the cylindrical side wall (22) being fixed to the bottom plate of the fume hood (40) and cooperating with the top plate (21) to enclose the transmission mechanism (30) therein.

7. The polysilicon base metal digestion heating device according to claim 1, wherein the fume hood (40) is provided with air inlet holes (41) and air outlet holes (42) on the left and right side walls thereof, respectively.

8. The polycrystalline silicon base metal digestion heating device according to any one of claims 1 to 7, characterized in that the heating plate (10) further comprises a contraposition mark (100) arranged on the upper surface thereof, a sensor is fixed on the inner surface of the top of the fume hood (40), and when the sensor is aligned with the contraposition mark (100), the reagent adding hole (400) is opposite to one of the sample placing areas (101).