CN216082451U - Silicon chip detects automatic focusing device - Google Patents
Silicon chip detects automatic focusing device Download PDFInfo
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- CN216082451U CN216082451U CN202122360984.2U CN202122360984U CN216082451U CN 216082451 U CN216082451 U CN 216082451U CN 202122360984 U CN202122360984 U CN 202122360984U CN 216082451 U CN216082451 U CN 216082451U
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- rod
- moving assembly
- fixedly connected
- silicon wafer
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 42
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 42
- 239000010703 silicon Substances 0.000 title claims abstract description 42
- 238000001514 detection method Methods 0.000 claims abstract description 32
- 230000009286 beneficial effect Effects 0.000 abstract 1
- 230000000694 effects Effects 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
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Abstract
The utility model discloses a silicon wafer detection automatic focusing device, belonging to the technical field of silicon wafer detection, comprising a rectangular frame and further comprising: a viewing mechanism mounted on the rectangular frame; and a first moving assembly mounted on the rectangular frame; and a second moving assembly mounted on the first moving assembly; and a third moving assembly mounted on the second moving assembly; the observation mechanism comprises a convex lens, two ends of the convex lens are fixedly connected with a first driving shaft, and the observation mechanism has the beneficial effects that: through setting up observation mechanism, can realize the lift and the rotation of convex lens, be convenient for focus fast for detection speed has promoted detection efficiency greatly, through setting up first removal subassembly, second removal subassembly and third removal subassembly, has realized the all direction movement of silicon chip, is convenient for carry out the all-round detection to the silicon chip, has promoted detection efficiency greatly.
Description
Technical Field
The utility model relates to the technical field of silicon wafer detection, in particular to an automatic focusing device for silicon wafer detection.
Background
The silicon wafer is a carrier of the solar cell, and the quality of the silicon wafer directly determines the conversion efficiency of the solar cell, so that the silicon wafer needs to be detected.
The detection of the existing silicon wafer is realized by manually holding the convex lens, the convex lens is difficult to focus, and the convex lens is easily held by a hand for a long time, so that the convex lens is easy to shake, the detection effect is poor, and the detection speed is low.
SUMMERY OF THE UTILITY MODEL
The utility model is provided in view of the problems existing in the existing silicon chip detection automatic focusing device.
Therefore, the utility model aims to provide an automatic focusing device for silicon wafer detection, which is characterized in that an observation mechanism is arranged to focus and adjust the position of a convex lens, and a first moving assembly, a second moving assembly and a third moving assembly are arranged to adjust the position of a placing plate for placing a silicon wafer, so that the detection speed is accelerated, and the convex lens is not shaken due to the fact that the convex lens is not held by hands, thereby solving the problems that the convex lens is difficult to focus due to the manual holding of the convex lens in the existing silicon wafer detection, the convex lens is easy to shake due to the fact that the convex lens is easily shaken due to the long-time holding of the convex lens, the detection effect is poor, and the detection speed is slow.
To solve the above technical problem, according to an aspect of the present invention, the present invention provides the following technical solutions:
the utility model provides a silicon chip detects automatic focusing device, includes rectangular frame, still includes: a viewing mechanism mounted on the rectangular frame; and
a first moving assembly mounted on the rectangular frame; and
a second moving assembly mounted on the first moving assembly; and
a third moving assembly mounted on the second moving assembly;
the observation mechanism includes convex lens, the first drive shaft of convex lens both ends fixed connection, left end first drive shaft passes through the bearing and rotates and connect left L shape pole, left L shape pole inner wall sliding connection left side guide bar, left L shape pole inner wall threaded connection left lead screw, left side lead screw top outer wall cup joints left gear, right-hand member first drive shaft passes through the bearing and rotates and connect right L shape pole, right L shape pole inner wall sliding connection right side guide bar, right L shape pole inner wall threaded connection right lead screw, right lead screw top outer wall cup joints right gear, the driving gear is connected in the equal meshing of left side gear and right gear, the driving gear inner wall cup joints main pivot, left side lead screw and right lead screw outer wall all rotate through the bearing and connect rectangular frame, the equal fixed connection left guide bar in right side guide bar and left guide bar top.
As a preferred scheme of the silicon wafer detection automatic focusing device, the utility model comprises: the left end first drive shaft outer wall fixed connection rotation regulation pole, the rotation regulation pole outer wall cup joints first cover soon, the second is adjusted to main pivot outer wall and is revolved the cover.
As a preferred scheme of the silicon wafer detection automatic focusing device, the utility model comprises: the bottom ends of the left screw rod and the right screw rod are rotatably connected with a supporting block through bearings, one end of the supporting block is fixedly connected with the rectangular frame, and the bottom ends of the right guide rod and the left guide rod are fixedly connected with the supporting block.
As a preferred scheme of the silicon wafer detection automatic focusing device, the utility model comprises: the first moving assembly comprises a support frame, the top end of the support frame is rotatably connected with a first threaded rod through a bearing, two ends of the support frame are fixedly connected with sliding rods, the outer wall of the first threaded rod is in threaded connection with a moving block, the outer wall of the sliding rod is in sliding connection with a sliding block, the top ends of the moving block and the sliding block are fixedly connected with a first moving plate, and the outer wall of the first threaded rod is sleeved with a fifth rotating sleeve.
As a preferred scheme of the silicon wafer detection automatic focusing device, the utility model comprises: the second removes the subassembly and includes first backup pad, first backup pad inner wall passes through the bearing and rotates the second threaded rod of connection, second threaded rod outer wall threaded connection bottom block, bottom block inner wall sliding connection gag lever post, bottom block top fixed connection second movable plate, second threaded rod one end outer wall cup joints the third and revolves the cover.
As a preferred scheme of the silicon wafer detection automatic focusing device, the utility model comprises: the third moving assembly comprises a second supporting plate, the second supporting plate is provided with two groups, the inner wall of the second supporting plate at the left end is rotatably connected with a short shaft through a bearing, one end of the short shaft is fixedly connected with a placing plate, the outer wall of the placing plate is fixedly connected with a second driving shaft, and the outer wall of the second driving shaft is rotatably connected with the right end of the second supporting plate through a bearing.
As a preferred scheme of the silicon wafer detection automatic focusing device, the utility model comprises: the outer wall of the second driving shaft is sleeved with a fourth rotary sleeve, and the placing plate is provided with a placing groove.
As a preferred scheme of the silicon wafer detection automatic focusing device, the utility model comprises: the bottom end of the first supporting plate is fixedly arranged on the first moving plate, and the bottom end of the second supporting plate is fixedly arranged on the second moving plate.
Compared with the prior art:
1. by arranging the observation mechanism, the lifting and the rotation of the convex lens can be realized, the rapid focusing is convenient, the detection speed is accelerated, and the detection efficiency is greatly improved;
2. through setting up first removal subassembly, second removal subassembly and third removal subassembly, realized the all direction movement of silicon chip, be convenient for carry out all-round detection to the silicon chip, promoted detection efficiency greatly.
Drawings
FIG. 1 is a schematic structural view provided by the present invention;
FIG. 2 is a partial schematic view of FIG. 1 provided in accordance with the present invention;
FIG. 3 is an enlarged view taken at A in FIG. 2 according to the present invention;
fig. 4 is a top view of a second moving assembly provided by the present invention.
In the figure: the observation mechanism 1, the right L-shaped rod 10, the first driving shaft 101, the convex lens 102, the rotation adjusting rod 103, the first rotary sleeve 1031, the main rotating shaft 11, the second rotary sleeve 111, the driving gear 12, the left gear 13, the right gear 14, the left lead screw 15, the right lead screw 16, the right guide rod 17, the left guide rod 18, the left L-shaped rod 19, the first moving assembly 2, the support frame 21, the first moving plate 22, the sliding block 221, the moving block 222, the sliding rod 23, the first threaded rod 24, the fifth rotary sleeve 241, the second moving assembly 3, the second threaded rod 31, the third rotary sleeve 311, the second moving plate 32, the bottom block 321, the limit rod 33, the first support plate 34, the third moving assembly 4, the second support plate 41, the placement plate 42, the placement groove 421, the second driving shaft 43, the fourth rotary sleeve 431, the short shaft 44, the rectangular frame 5, and the support block 6.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, embodiments of the present invention will be described in detail with reference to the accompanying drawings.
The present invention provides an automatic focusing device for silicon wafer detection, please refer to fig. 1-4, which includes a rectangular frame 5, and further includes: a viewing mechanism 1 mounted on the rectangular frame 5; and
a first moving assembly 2 mounted on the rectangular frame 5; and
a second moving assembly 3 mounted on the first moving assembly 2; and
a third moving assembly 4 mounted on the second moving assembly 3;
the observation mechanism 1 comprises a convex lens 102, two ends of the convex lens 102 are fixedly connected with a first driving shaft 101, the first driving shaft 101 at the left end is connected with a left L-shaped rod 19 through a bearing in a rotating manner, the inner wall of the left L-shaped rod 19 is connected with a left guide rod 18 in a sliding manner, the inner wall of the left L-shaped rod 19 is connected with a left screw rod 15 in a threaded manner, the outer wall of the top end of the left screw rod 15 is sleeved with a left gear 13, the right end of the first driving shaft 101 is connected with a right L-shaped rod 10 through a bearing in a rotating manner, the inner wall of the right L-shaped rod 10 is connected with a right guide rod 17 in a sliding manner, the inner wall of the right L-shaped rod 10 is connected with a right screw rod 16 in a threaded manner, the outer wall of the top end of the right screw rod 16 is sleeved with a right gear 14, the left gear 13 and the right gear 14 are both meshed with a driving gear 12, the inner wall of the driving gear 12 is sleeved with a main rotating shaft 11, and the outer walls of the left screw rod 15 and the right screw rod 16 are both connected with the rectangular frame 5 through bearings in a rotating manner, the top ends of the right guide rod 17 and the left guide rod 18 are fixedly connected with the left guide rod 18;
further, the outer wall of the first driving shaft 101 at the left end is fixedly connected with a rotary adjusting rod 103, the outer wall of the rotary adjusting rod 103 is sleeved with a first rotating sleeve 1031, and the outer wall of the main rotating shaft 11 is used for adjusting a second rotating sleeve 111.
Further, the bottom ends of the left screw rod 15 and the right screw rod 16 are rotatably connected with the supporting block 6 through bearings, one end of the supporting block 6 is fixedly connected with the rectangular frame 5, and the bottom ends of the right guide rod 17 and the left guide rod 18 are fixedly connected with the supporting block 6.
Further, the first moving assembly 2 includes a support frame 21, the top end of the support frame 21 is rotatably connected to a first threaded rod 24 through a bearing, two ends of the support frame 21 are fixedly connected to a sliding rod 23, the outer wall of the first threaded rod 24 is in threaded connection with a moving block 222, the outer wall of the sliding rod 23 is in sliding connection with a sliding block 221, the top ends of the moving block 222 and the sliding block 221 are both fixedly connected to the first moving plate 22, and the outer wall of the first threaded rod 24 is sleeved with a fifth turnbuckle 241.
Further, the second removes subassembly 3 and includes first backup pad 34, first backup pad 34 inner wall passes through the bearing and rotates and connect second threaded rod 31, second threaded rod 31 outer wall threaded connection bottom block 321, bottom block 321 inner wall sliding connection gag lever post 33, bottom block 321 top fixed connection second movable plate 32, the third cover 311 is revolved in second threaded rod 31 one end outer wall cup joint.
Further, the third moving assembly 4 includes a second supporting plate 41, the second supporting plate 41 is provided with two sets, the inner wall of the second supporting plate 41 at the left end is rotatably connected with a short shaft 44 through a bearing, one end of the short shaft 44 is fixedly connected with a placing plate 42, the outer wall of the placing plate 42 is fixedly connected with a second driving shaft 43, and the outer wall of the second driving shaft 43 is rotatably connected with the second supporting plate 41 at the right end through a bearing.
Furthermore, a fourth rotating sleeve 431 is sleeved on the outer wall of the second driving shaft 43, and a placing groove 421 is formed on the placing plate 42.
Further, the bottom end of the first supporting plate 34 is fixedly mounted on the first moving plate 22, and the bottom end of the second supporting plate 41 is fixedly mounted on the second moving plate 32.
When the silicon wafer detection device is used specifically, a silicon wafer to be detected is placed in the placing groove 421 of the placing plate 42, the driving gear 12 is driven to rotate by rotating the second rotary sleeve 111, the driving gear 12 drives the left gear 13 and the right gear 14 to rotate, the left gear 13 and the right gear 14 respectively drive the left screw rod 15 and the right screw rod 16 to rotate, so that the heights of the left L-shaped rod 19 and the right L-shaped rod 10 are adjusted, the height of the convex lens 102 is adjusted, and meanwhile, the convex lens 102 is driven to rotate by rotating the first rotary sleeve 1031, so that the focusing of the convex lens 102 is completed; the fifth rotating sleeve 241 is rotated to drive the first threaded rod 24 to rotate, so that the first moving plate 22 is driven to move back and forth, and finally, the silicon wafer on the placing plate 42 is driven to move back and forth; the third rotary sleeve 311 is rotated to drive the second threaded rod 31 to rotate, so that the second moving plate 32 is driven to move left and right, and finally, the silicon wafer on the placing plate 42 is driven to move left and right; the placing plate 42 is driven to rotate by rotating the fourth rotary sleeve 431, so that the silicon wafer is driven to rotate; therefore, the silicon wafer can be moved in all directions, and all-directional detection of the silicon wafer is realized.
While the utility model has been described above with reference to an embodiment, various modifications may be made and equivalents may be substituted for elements thereof without departing from the scope of the utility model. In particular, the various features of the disclosed embodiments of the utility model may be used in any combination, provided that no structural conflict exists, and the combinations are not exhaustively described in this specification merely for the sake of brevity and resource conservation. Therefore, it is intended that the utility model not be limited to the particular embodiments disclosed, but that the utility model will include all embodiments falling within the scope of the appended claims.
Claims (8)
1. The silicon chip detection automatic focusing device comprises a rectangular frame (5), and is characterized by further comprising: an observation mechanism (1) mounted on the rectangular frame (5); and
a first moving assembly (2) mounted on the rectangular frame (5); and
a second moving assembly (3) mounted on the first moving assembly (2); and
a third moving assembly (4) mounted on the second moving assembly (3);
the observation mechanism (1) comprises a convex lens (102), two ends of the convex lens (102) are fixedly connected with a first driving shaft (101), the left end of the first driving shaft (101) is connected with a left L-shaped rod (19) through a bearing in a rotating manner, the inner wall of the left L-shaped rod (19) is connected with a left guide rod (18) in a sliding manner, the inner wall of the left L-shaped rod (19) is connected with a left lead screw (15) in a threaded manner, the outer wall of the top end of the left lead screw (15) is sleeved with a left gear (13), the right end of the first driving shaft (101) is connected with a right L-shaped rod (10) through a bearing in a rotating manner, the inner wall of the right L-shaped rod (10) is connected with a right guide rod (17) in a sliding manner, the inner wall of the right L-shaped rod (10) is connected with a right lead screw (16) in a threaded manner, the outer wall of the top end of the right lead screw (16) is sleeved with a right gear (14), the left gear (13) and the right gear (14) are both meshed with a driving gear (12), the inner wall of the driving gear (12) is sleeved with a main rotating shaft (11), the outer walls of the left screw rod (15) and the right screw rod (16) are connected through a bearing in a rotating mode through the rectangular frame (5), and the top ends of the right guide rod (17) and the left guide rod (18) are fixedly connected with the left guide rod (18).
2. The silicon wafer detecting automatic focusing device according to claim 1, wherein the outer wall of the first driving shaft (101) at the left end is fixedly connected with a rotary adjusting rod (103), the outer wall of the rotary adjusting rod (103) is sleeved with a first rotating sleeve (1031), and the outer wall of the main rotating shaft (11) is used for adjusting a second rotating sleeve (111).
3. The silicon wafer detecting and automatic focusing device as claimed in claim 1, wherein the bottom ends of the left lead screw (15) and the right lead screw (16) are rotatably connected with the supporting block (6) through bearings, one end of the supporting block (6) is fixedly connected with the rectangular frame (5), and the bottom ends of the right guide rod (17) and the left guide rod (18) are fixedly connected with the supporting block (6).
4. The silicon wafer detecting and automatic focusing device according to claim 1, wherein the first moving assembly (2) comprises a supporting frame (21), the top end of the supporting frame (21) is rotatably connected with a first threaded rod (24) through a bearing, two ends of the supporting frame (21) are fixedly connected with a sliding rod (23), the outer wall of the first threaded rod (24) is in threaded connection with a moving block (222), the outer wall of the sliding rod (23) is in sliding connection with a sliding block (221), the top ends of the moving block (222) and the sliding block (221) are both fixedly connected with the first moving plate (22), and the outer wall of the first threaded rod (24) is sleeved with a fifth rotating sleeve (241).
5. The silicon wafer detecting automatic focusing device according to claim 1, wherein the second moving assembly (3) comprises a first supporting plate (34), the inner wall of the first supporting plate (34) is rotatably connected with a second threaded rod (31) through a bearing, the outer wall of the second threaded rod (31) is in threaded connection with a bottom block (321), the inner wall of the bottom block (321) is slidably connected with a limiting rod (33), the top end of the bottom block (321) is fixedly connected with the second moving plate (32), and the outer wall of one end of the second threaded rod (31) is sleeved with a third rotary sleeve (311).
6. The silicon wafer detecting and auto-focusing device according to claim 5, wherein the third moving assembly (4) comprises two sets of second supporting plates (41), the inner wall of the second supporting plate (41) at the left end is rotatably connected with a short shaft (44) through a bearing, one end of the short shaft (44) is fixedly connected with a placing plate (42), the outer wall of the placing plate (42) is fixedly connected with a second driving shaft (43), and the outer wall of the second driving shaft (43) is rotatably connected with the second supporting plate (41) at the right end through a bearing.
7. The silicon wafer detecting automatic focusing device according to claim 6, wherein a fourth rotating sleeve (431) is sleeved on the outer wall of the second driving shaft (43), and a placing groove (421) is formed on the placing plate (42).
8. The silicon wafer detecting and automatic focusing device as claimed in claim 6, wherein the bottom end of the first supporting plate (34) is fixedly mounted on the first moving plate (22), and the bottom end of the second supporting plate (41) is fixedly mounted on the second moving plate (32).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122360984.2U CN216082451U (en) | 2021-09-28 | 2021-09-28 | Silicon chip detects automatic focusing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122360984.2U CN216082451U (en) | 2021-09-28 | 2021-09-28 | Silicon chip detects automatic focusing device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN216082451U true CN216082451U (en) | 2022-03-18 |
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ID=80636375
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202122360984.2U Expired - Fee Related CN216082451U (en) | 2021-09-28 | 2021-09-28 | Silicon chip detects automatic focusing device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN216082451U (en) |
-
2021
- 2021-09-28 CN CN202122360984.2U patent/CN216082451U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20220318 |