CN216073937U - Dust-proof high-temperature annealing furnace for metal materials - Google Patents
Dust-proof high-temperature annealing furnace for metal materials Download PDFInfo
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- CN216073937U CN216073937U CN202122253502.3U CN202122253502U CN216073937U CN 216073937 U CN216073937 U CN 216073937U CN 202122253502 U CN202122253502 U CN 202122253502U CN 216073937 U CN216073937 U CN 216073937U
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- furnace
- temperature annealing
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- 238000000137 annealing Methods 0.000 title claims abstract description 41
- 239000007769 metal material Substances 0.000 title claims abstract description 22
- 230000007246 mechanism Effects 0.000 claims abstract description 35
- 230000000670 limiting effect Effects 0.000 claims abstract description 16
- 239000000428 dust Substances 0.000 claims description 17
- 239000004065 semiconductor Substances 0.000 description 3
- 238000006073 displacement reaction Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
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Abstract
The utility model discloses a dust-proof high-temperature annealing furnace for metal materials, which comprises a base and a furnace body, wherein the furnace body is arranged at the center of the top of the base and is horizontally arranged, one side of the furnace body is open and is hinged with a furnace door, a working plate is arranged inside the furnace body in a sliding and horizontal mode, two ends of the inner bottom of the furnace body are respectively provided with a convenient moving mechanism for conveniently moving the working plate, one end of the bottom of the working plate is fixedly connected with a fixed block, one side of the fixed block is fixedly connected with a connecting rod and is horizontally arranged, one side of the furnace door is provided with a connecting mechanism for connecting the connecting rod, a C-shaped brush plate matched with the furnace body is arranged right above the base, the furnace body is positioned between two vertical edges of the C-shaped brush plate, the bottoms of the two vertical edges of the C-shaped brush plate are respectively and fixedly connected with a sliding block, and two ends of the top of the base are respectively provided with a limiting mechanism for limiting the sliding block. The utility model can lead the furnace door and the working plate to be linked, thereby improving the use efficiency of the high-temperature annealing furnace.
Description
Technical Field
The utility model relates to the technical field of high-temperature annealing furnaces, in particular to a dust-proof high-temperature annealing furnace for metal materials.
Background
An annealing furnace is a process used in semiconductor device manufacturing that includes heating a plurality of semiconductor wafers to affect their electrical properties, and may be integrated into other furnace processing steps, such as oxidation, or may be self-processing. The annealing furnace is completed by an apparatus specifically designed for heating semiconductor wafers.
The existing high-temperature annealing furnace does not have a dustproof function, so that a large amount of dust is adhered to the high-temperature annealing furnace body, and the use performance of the high-temperature annealing furnace is seriously influenced, therefore, the high-temperature annealing furnace for the metal material capable of preventing dust is urgently needed to be designed.
SUMMERY OF THE UTILITY MODEL
The utility model aims to solve the defects in the prior art, and provides a high-temperature annealing furnace for a dust-proof metal material.
In order to achieve the purpose, the utility model adopts the following technical scheme:
a high-temperature annealing furnace for dust-proof metal materials comprises a base and a furnace body, wherein the furnace body is arranged at the center of the top of the base and is horizontally arranged, one side of the furnace body is open and hinged with a furnace door, a working plate slides in the furnace body and is horizontally arranged, and both ends of the bottom in the furnace body are provided with convenient moving mechanisms for conveniently moving the working plate, one end of the bottom of the working plate is fixedly connected with a fixed block, one side of the fixed block is fixedly connected with a connecting rod and is horizontally arranged, one side of the furnace door is provided with a connecting mechanism for connecting the connecting rod, a C-shaped brush board matched with the furnace body is arranged right above the base, the furnace body is positioned between two vertical edges of the C-shaped brush board, and two perpendicular equal fixedly connected with sliders in limit bottom of the two of C type brush boards, base top both ends all are equipped with the stop gear who is used for spacing slider, and the inside first moving mechanism who is used for removing C type brush board that is equipped with of base.
As a further scheme of the utility model, the convenient moving mechanism comprises a slide rail, the slide rail is fixedly connected to one end of the bottom in the furnace body and is horizontally arranged, pulleys are rotated in the slide rail and are uniformly distributed in the slide rail, and the bottom of the working plate is placed at the top of the pulleys.
As a further scheme of the utility model, the connecting mechanism comprises a chute, the chute is provided with one side of the furnace door and is horizontally arranged, a hinged plate slides in the chute, and the top end of the hinged plate is hinged with the top end of the connecting rod.
As a further scheme of the utility model, the first moving mechanism comprises a strip-shaped plate and a screw rod, the strip-shaped plate slides in the base and is horizontally arranged, C-shaped rods are fixed on one sides of two vertical edges of the C-shaped brush plate, and lower transverse edges of the two C-shaped rods penetrate through one side of the base and are respectively fixed at two ends of one side of the strip-shaped plate.
As a further scheme of the utility model, the screw rod rotates at the center of the inner part of the base and is horizontally arranged, the screw rod penetrates through the strip-shaped plate and is connected to the inner part of the strip-shaped plate through threads, a driving motor is horizontally arranged at one side of the inner part of the base, and an output shaft of the driving motor is arranged at the center of the top end of the screw rod.
As a further scheme of the utility model, the limiting mechanism comprises a slide way, the slide way is fixedly connected to one end of the top of the base and is horizontally arranged, and the slide block slides in the slide way.
As a further scheme of the utility model, the limiting mechanism comprises a C-shaped column, two vertical edges of the C-shaped column are respectively and fixedly connected to two ends of one end of the top of the base, and a transverse edge of the C-shaped column penetrates through the sliding block and slides in the sliding block.
The utility model has the beneficial effects that:
1. when the high-temperature annealing furnace needs to be used, firstly, the furnace door is opened, the sliding groove is driven to move by the movement of the furnace door, the hinged plate is driven to move by the movement of the sliding groove, the connecting rod is driven to move by the movement of the hinged plate, the fixing block is driven to move by the movement of the connecting rod, and the working plate is driven to move by the movement of the fixing block, so that the working plate can move towards the outside of the furnace body while the furnace door is opened, the phenomenon that the working efficiency is reduced due to the fact that the working plate moves out of the furnace body when the furnace door is opened firstly is avoided, then, a metal material is placed on the working plate, the working plate moves towards the inside of the furnace body while the furnace door is closed, the furnace door and the working plate can be further linked, and further the use efficiency of the high-temperature annealing furnace is improved.
2. According to the high-temperature annealing furnace, when the high-temperature annealing furnace needs to be cleaned, the screw rod is driven to rotate through the driving motor, the bar-shaped plate can be driven to move through the rotation of the screw rod, the two C-shaped rods can be driven to move through the movement of the bar-shaped plate, the C-shaped brush plate can be driven to move through the movement of the two C-shaped rods, the slider can be driven to move through the movement of the C-shaped brush plate, the stability of the C-shaped brush plate during movement is guaranteed through the limiting effect of the slide rail on the slider, the dust in the surface of the furnace body can be cleaned through the movement of the C-shaped brush plate, the situation that a large amount of dust adheres to the furnace body is avoided, and the service performance of the high-temperature annealing furnace is further improved.
3. According to the high-temperature annealing furnace cleaning device, when the high-temperature annealing furnace needs to be cleaned, the screw rod is driven to rotate through the driving motor, the bar-shaped plate can be driven to move through the rotation of the screw rod, the two C-shaped rods can be driven to move through the movement of the bar-shaped plate, the C-shaped brush plates can be driven to move through the movement of the two C-shaped rods, the sliding blocks can be driven to move through the movement of the C-shaped brush plates, the stability of the C-shaped brush plates during movement is guaranteed through the limiting effect of the C-shaped columns on the sliding blocks, the dust in the surface of the furnace body can be cleaned through the movement of the C-shaped brush plates, the situation that a large amount of dust adheres to the furnace body is avoided, and the service performance of the high-temperature annealing furnace is further improved.
Drawings
FIG. 1 is a schematic view showing a structure of a high temperature annealing furnace for a dustproof metallic material according to embodiment 1 of the present invention;
FIG. 2 is a schematic view showing the internal structure of a high temperature annealing furnace for a dustproof metallic material according to embodiment 1 of the present invention;
FIG. 3 is a sectional view of a base of a high temperature annealing furnace for a dustproof metallic material according to embodiment 1 of the present invention;
FIG. 4 is a schematic view showing the structure of a high-temperature annealing furnace for a dustproof metallic material according to embodiment 2 of the present invention.
In the figure: 1. a base; 2. a furnace body; 3. a working plate; 4. a furnace door; 5. a chute; 6. a hinge plate; 7. a connecting rod; 8. a slideway; 9. a C-shaped brush plate; 10. a C-shaped rod; 11. a fixed block; 12. a slide rail; 13. a pulley; 14. a slider; 15. a strip plate; 16. a screw rod; 17. a drive motor; 18. a C-shaped column.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments.
Example 1
Referring to fig. 1-3, a high temperature annealing furnace for dust-proof metal materials, comprising a base 1 and a furnace body 2, wherein the furnace body 2 is installed at the center of the top of the base 1 and horizontally arranged, one side of the furnace body 2 is open and hinged with a furnace door 4, a working plate 3 is arranged inside the furnace body 2 in a sliding manner and horizontally arranged, two ends of the bottom inside the furnace body 2 are respectively provided with a convenient moving mechanism for conveniently moving the working plate 3, one end of the bottom of the working plate 3 is fixedly connected with a fixed block 11, one side of the fixed block 11 is fixedly connected with a connecting rod 7 and horizontally arranged, one side of the furnace door 4 is provided with a connecting mechanism for connecting the connecting rod 7, a C-shaped brush plate 9 matched with the furnace body 2 is arranged right above the base 1, the furnace body 2 is positioned between two vertical edges of the C-shaped brush plate 9, the bottoms of two vertical edges of the C-shaped brush plate 9 are respectively and fixedly connected with a slide block 14, two ends of the top of the base 1 are respectively provided with a limiting mechanism for limiting the slide block 14, and a first moving mechanism for moving the C-shaped brush plate 9 is provided inside the base 1.
This embodiment, make things convenient for moving mechanism to include slide rail 12, and slide rail 12 fixed connection bottom one end and level setting in furnace body 2, slide rail 12 is inside to be rotated there is pulley 13 and have a plurality of evenly distributed inside slide rail 12, and places in pulley 13 top in the 3 bottoms of working plate.
In this embodiment, the connecting mechanism comprises a sliding chute 5, the sliding chute 5 is provided with one side of the furnace door 4 and is horizontally arranged, a hinged plate 6 slides in the sliding chute 5, and the top end of the hinged plate 6 is hinged to the top end of the connecting rod 7.
In this embodiment, first moving mechanism includes strip shaped plate 15 and lead screw 16, and strip shaped plate 15 slides in the inside and level setting of base 1, and two perpendicular limit one sides of C type brush board 9 all are fixed with C type pole 10, and two C type poles 10 lower horizontal limit all pass base 1 one side and are fixed in strip shaped plate 15 one side both ends respectively.
In this embodiment, the lead screw 16 rotates in the inside center department of base 1 and level setting, and the lead screw 16 passes strip shaped plate 15 and through threaded connection inside strip shaped plate 15, and the inside one side horizontal installation of base 1 has driving motor 17, and driving motor 17's output shaft is installed in 16 top centers of lead screw department.
In this embodiment, the limiting mechanism includes a slide way 8, the slide way 8 is fixedly connected to one end of the top of the base 1 and horizontally disposed, and the sliding block 14 slides inside the slide way 8.
The working principle of the embodiment is as follows: when the high-temperature annealing furnace is needed to be used in practical use, firstly, the furnace door 4 is opened, the furnace door 4 moves to drive the chute 5 to move, the chute 5 moves to drive the hinged plate 6 to move, the hinged plate 6 moves to drive the connecting rod 7 to move, the connecting rod 7 moves to drive the fixed block 11 to move, and the fixed block 11 moves to drive the working plate 3 to move, so that the working plate 3 can move towards the outside of the furnace body 2 while the furnace door 4 is opened, the phenomenon that the working plate 3 moves out of the furnace body 2 to reduce the working efficiency when the furnace door 4 is opened firstly is avoided, then, a metal material is placed on the working plate 3, the working plate 3 moves towards the inside of the furnace body 2 while the furnace door 4 is closed, further, the furnace door 4 and the working plate 3 can be linked, the using efficiency of the high-temperature annealing furnace is improved, when the high-temperature annealing furnace needs to be cleaned, the lead screw 16 is driven to rotate by the driving motor 17, 16 rotations of lead screw can drive the strip shaped plate 15 and remove, the strip shaped plate 15 removes and can drive two C type poles 10 and remove, two C type poles 10 remove and can drive C type brush board 9 and remove, C type brush board 9 removes and can drive slider 14 and remove, and through the limiting displacement of slide 8 to slider 14, stability when having guaranteed C type brush board 9 and removing, and C type brush board 9 removes and can clear up the dust in the 2 surfaces of furnace body, avoided the condition that furnace body 2 is stained with a large amount of dust to take place, and then improved this high temperature annealing stove's performance.
Example 2
Referring to fig. 4, a high temperature annealing furnace for dust-proof metal materials, comprising a base 1 and a furnace body 2, wherein the furnace body 2 is installed at the center of the top of the base 1 and horizontally arranged, one side of the furnace body 2 is open and hinged with a furnace door 4, a working plate 3 is arranged inside the furnace body 2 in a sliding manner and horizontally arranged, two ends of the bottom inside the furnace body 2 are respectively provided with a convenient moving mechanism for conveniently moving the working plate 3, one end of the bottom of the working plate 3 is fixedly connected with a fixed block 11, one side of the fixed block 11 is fixedly connected with a connecting rod 7 and horizontally arranged, one side of the furnace door 4 is provided with a connecting mechanism for connecting the connecting rod 7, a C-shaped brush plate 9 matched with the furnace body 2 is arranged right above the base 1, the furnace body 2 is positioned between two vertical edges of the C-shaped brush plate 9, the bottoms of the two vertical edges of the C-shaped brush plate 9 are respectively and fixedly connected with a slide block 14, two ends of the top of the base 1 are respectively provided with a limiting mechanism for limiting the slide block 14, and a first moving mechanism for moving the C-shaped brush plate 9 is provided inside the base 1.
This embodiment, make things convenient for moving mechanism to include slide rail 12, and slide rail 12 fixed connection bottom one end and level setting in furnace body 2, slide rail 12 is inside to be rotated there is pulley 13 and have a plurality of evenly distributed inside slide rail 12, and places in pulley 13 top in the 3 bottoms of working plate.
In this embodiment, the connecting mechanism comprises a sliding chute 5, the sliding chute 5 is provided with one side of the furnace door 4 and is horizontally arranged, a hinged plate 6 slides in the sliding chute 5, and the top end of the hinged plate 6 is hinged to the top end of the connecting rod 7.
In this embodiment, first moving mechanism includes strip shaped plate 15 and lead screw 16, and strip shaped plate 15 slides in the inside and level setting of base 1, and two perpendicular limit one sides of C type brush board 9 all are fixed with C type pole 10, and two C type poles 10 lower horizontal limit all pass base 1 one side and are fixed in strip shaped plate 15 one side both ends respectively.
In this embodiment, the lead screw 16 rotates in the inside center department of base 1 and level setting, and the lead screw 16 passes strip shaped plate 15 and through threaded connection inside strip shaped plate 15, and the inside one side horizontal installation of base 1 has driving motor 17, and driving motor 17's output shaft is installed in 16 top centers of lead screw department.
In this embodiment, the limiting mechanism includes a C-shaped pillar 18, two vertical edges of the C-shaped pillar 18 are respectively and fixedly connected to two ends of one end of the top of the base 1, and a transverse edge of the C-shaped pillar 18 passes through the sliding block 14 and slides inside the sliding block 14.
The working principle of the embodiment is as follows: in the time of the in-service use, when needs clear up high temperature annealing stove, it rotates to drive lead screw 16 through driving motor 17, lead screw 16 rotates and can drive strip shaped plate 15 and remove, strip shaped plate 15 removes and can drive two C type poles 10 and remove, two C type poles 10 remove and can drive C type brush board 9 and remove, C type brush board 9 removes and can drive slider 14 and remove, and to slider 14 limiting displacement through C type post 18, stability when having guaranteed C type brush board 9 and removing, and C type brush board 9 removes and can clear up the dust in the 2 surfaces of furnace body, avoided the condition that furnace body 2 is stained with a large amount of dust to take place, and then improved this high temperature annealing stove's performance.
Having shown and described the basic principles and essential features of the utility model and its advantages, it will be evident to those skilled in the art that the utility model is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential characteristics thereof, and it is therefore intended that the embodiments be considered as illustrative and not restrictive in all respects, the scope of the utility model being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein, any reference signs in the claims being therefore intended to be embraced therein.
Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.
Claims (7)
1. The high-temperature annealing furnace capable of preventing dust for the metal materials comprises a base (1) and a furnace body (2), and is characterized in that the furnace body (2) is installed at the center of the top of the base (1) and horizontally arranged, one side of the furnace body (2) is open and hinged with a furnace door (4), a working plate (3) is arranged inside the furnace body (2) in a sliding mode and horizontally arranged, convenient moving mechanisms for conveniently moving the working plate (3) are arranged at two ends of the bottom in the furnace body (2), one end of the bottom of the working plate (3) is fixedly connected with a fixed block (11), one side of the fixed block (11) is fixedly connected with a connecting rod (7) and horizontally arranged, one side of the furnace door (4) is provided with a connecting mechanism for connecting the connecting rod (7), a C-type brush plate (9) matched with the furnace body (2) is arranged right above the base (1), and the furnace body (2) is positioned between two vertical edges of the C-type brush plate (9), and two perpendicular equal fixedly connected with sliders (14) in limit bottom of C type brush board (9), base (1) top both ends all are equipped with the stop gear who is used for stop slider (14), and base (1) inside is equipped with the first moving mechanism who is used for removing C type brush board (9).
2. The high-temperature annealing furnace capable of preventing dust for the metal materials according to claim 1, wherein the convenient moving mechanism comprises a slide rail (12), the slide rail (12) is fixedly connected to one end of the bottom in the furnace body (2) and is horizontally arranged, a plurality of pulleys (13) are arranged in the slide rail (12) in a rotating manner and are uniformly distributed in the slide rail (12), and the bottom of the working plate (3) is placed on the top of the pulleys (13).
3. The high-temperature annealing furnace capable of preventing dust for the metal materials according to claim 2, characterized in that the connecting mechanism comprises a chute (5), the chute (5) is horizontally arranged with one side of the furnace door (4) opened, a hinged plate (6) slides in the chute (5), and the top end of the hinged plate (6) is hinged with the top end of the connecting rod (7).
4. The high temperature annealing furnace capable of preventing dust for metal materials according to claim 3, wherein the first moving mechanism comprises a strip-shaped plate (15) and a screw rod (16), the strip-shaped plate (15) slides inside the base (1) and is horizontally arranged, the C-shaped rods (10) are fixed on one side of two vertical edges of the C-shaped brush plate (9), and the lower transverse edges of the two C-shaped rods (10) penetrate through one side of the base (1) and are respectively fixed at two ends of one side of the strip-shaped plate (15).
5. The high temperature annealing furnace capable of preventing dust for metal materials according to claim 4, wherein the screw rod (16) is rotated at the center inside the base (1) and horizontally arranged, the screw rod (16) penetrates through the strip-shaped plate (15) and is connected inside the strip-shaped plate (15) through a thread, a driving motor (17) is horizontally installed at one side inside the base (1), and an output shaft of the driving motor (17) is installed at the center of the top end of the screw rod (16).
6. The high temperature annealing furnace capable of preventing dust for metal materials according to claim 5, wherein the limiting mechanism comprises a slide way (8), the slide way (8) is fixedly connected to one end of the top of the base (1) and horizontally arranged, and the slide block (14) slides inside the slide way (8).
7. The high temperature annealing furnace capable of preventing dust for the metal material according to claim 5, wherein the limiting mechanism comprises a C-shaped column (18), two vertical edges of the C-shaped column (18) are respectively and fixedly connected to two ends of one end of the top of the base (1), and a transverse edge of the C-shaped column (18) passes through the sliding block (14) and slides inside the sliding block (14).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122253502.3U CN216073937U (en) | 2021-09-17 | 2021-09-17 | Dust-proof high-temperature annealing furnace for metal materials |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122253502.3U CN216073937U (en) | 2021-09-17 | 2021-09-17 | Dust-proof high-temperature annealing furnace for metal materials |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN216073937U true CN216073937U (en) | 2022-03-18 |
Family
ID=80677373
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202122253502.3U Expired - Fee Related CN216073937U (en) | 2021-09-17 | 2021-09-17 | Dust-proof high-temperature annealing furnace for metal materials |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN216073937U (en) |
-
2021
- 2021-09-17 CN CN202122253502.3U patent/CN216073937U/en not_active Expired - Fee Related
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| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20220318 |